7Baggers

Universal Display Corporation
(NASDAQ:OLED) 

OLED stock logo

Universal Display Corporation engages in the research, development, and commercialization of organic light emitting diode (OLED) technologies and materials for use in display and solid-state lighting applications. As of February 18, 2021, it owned, exclusively licenses, or had sole rights to sublice...

Founded: 1994
Full Time Employees: 309
Sector: Technology
Industry: Semiconductor Equipment & Materials

Share this website to your friends
• Market Cap:
• Exchange:
• Shs Outstanding:
• Employees:
• Beta:
• Return on Equity (ROE) ttm:
• Return on Assets (ROA) ttm:
• EPS ttm:
• Book value per Share:
• Cash per Share:
• Current ast per Share:
• P/E ttm:
• P/E forward:
• P/E ttm high:
• P/E ttm low:
• P/S ttm:
• P/B ttm:
• P/FCF ttm:
• PEG ratio:
• Cash Ratio ttm:
• Quick Ratio ttm:
• Current Ratio ttm:
• Gross Mgn ttm:
• EBITDA Mgn ttm:
• Operating Mgn ttm:
• Net Income Mgn ttm:
• Trailing Div yield:
• Forward Div yield:
• Payout Ratio ttm:
• Ex-Dividend date:
• Target Price High:
• Target Price Low:
• Target Price Mean:
• Number of Analysts:
• Debt Ratio ttm:
• Debt to Equity ttm:
• Total Net Debt:
At a glance:
Bull Thesis:
Bear Thesis:
Main Competitors:
Moat:
Income Statements:
Quarterly
Annual
    Unit: USD2026-03-31 2025-12-31 2025-09-30 2025-06-30 2025-03-31 2024-12-31 2024-09-30 2024-06-30 2024-03-31 2023-12-31 2023-09-30 2023-06-30 2023-03-31 2022-12-31 2022-09-30 2022-06-30 2022-03-31 2021-12-31 2021-09-30 2021-06-30 2021-03-31 2020-12-31 2020-09-30 2020-06-30 2020-03-31 2019-12-31 2019-09-30 2019-06-30 2019-03-31 2018-12-31 2018-09-30 2018-06-30 2018-03-31 2017-12-31 2017-09-30 2017-06-30 2017-03-31 2016-12-31 2016-09-30 2016-06-30 2016-03-31 2015-12-31 2015-09-30 2015-06-30 2015-03-31 2014-12-31 2014-09-30 2014-06-30 2014-03-31 2013-12-31 2013-09-30 2013-06-30 2013-03-31 2012-12-31 2012-09-30 2012-06-30 2012-03-31 2011-12-31 2011-09-30 2011-06-30 2011-03-31 2010-12-31 2010-09-30 2010-06-30 2010-03-31 2009-12-31 2009-09-30 2009-06-30 2009-03-31 2008-12-31 2008-09-30 2008-06-30 2008-03-31 2007-12-31 2007-09-30 2007-06-30 2007-03-31 2006-12-31 2005-12-31 2005-09-30 2005-06-30 2004-03-31 
                                                                                      
      revenue:
                                                                                      
      material sales
    83,749,000 95,535,000 82,634,000 88,650,000 86,155,000 93,265,000 83,428,000 95,442,000 93,284,000 82,240,000 92,492,000 77,107,000 70,190,000 88,339,000 84,182,000 71,869,000 86,691,000 85,768,000 75,609,000 77,438,000 79,808,000             59,753,000 47,041,000 46,828,000 46,637,000 29,201,000 23,465,000 22,315,000 24,304,000 27,796,000 34,128,000 24,324,000 26,818,000 28,139,000 27,494,000 35,926,000 35,327,000 25,538,000 30,286,000 27,137,000 12,752,000 10,111,000 10,984,000 12,848,000 10,529,000                          
      royalty and license fees
    54,210,000 72,581,000 53,317,000 75,667,000 73,569,000 64,411,000 74,590,000 59,551,000 68,268,000 72,865,000 45,915,000 64,399,000 55,210,000 75,585,000 71,450,000 60,278,000 59,802,000 55,995,000 63,939,000 48,212,000 50,886,000             53,798,000 12,013,000 53,667,000 7,025,000 43,563,000 5,209,000 42,018,000 5,342,000 34,441,000 5,224,000 33,733,000 4,375,000 27,992,000 5,357,000 28,064,000 1,779,000 23,050,000 1,456,000 21,201,000 1,299,000 15,445,000 396,000 15,435,000 422,000                      41,413.75 165,655 42,000  
      contract research services
    4,252,000 4,811,000 3,662,000 7,477,000 6,553,000 4,617,000 3,609,000 3,512,000 3,707,000 3,215,000 2,670,000 5,059,000 5,067,000 5,108,000 4,924,000 4,414,000 3,977,000 4,484,000 4,070,000 4,010,000 3,306,000             2,316,000 2,629,000 2,018,000 1,904,000                                              
      total revenue
    142,211,000 172,927,000 139,613,000 171,794,000 166,277,000 162,293,000 161,627,000 158,505,000 165,259,000 158,320,000 141,077,000 146,565,000 130,467,000 169,032,000 160,556,000 136,561,000 150,470,000 146,247,000 143,618,000 129,660,000 134,000,000             115,867,000 61,683,000 102,513,000 55,566,000 74,577,000 30,214,000 64,392,000 29,703,000 62,312,000 39,419,000 58,092,000 31,223,000 56,174,000 32,892,000 64,127,000 37,839,000 49,478,000 32,826,000 49,359,000 14,976,000 28,133,000 12,504,000 29,987,000 12,620,000 18,658,583 21,777,140 11,252,415 9,600,540 10,795,040 7,055,861 8,446,829 4,246,650 4,851,012 5,145,393 2,956,354 2,833,858 3,587,168 2,625,639 2,145,598 2,716,819 2,898,826 3,077,281 2,315,170 3,014,630  2,296,063 7,851,932 3,011,995 2,129,990 
      yoy
    -14.47% 6.55% -13.62% 8.38% 0.62% 2.51% 14.57% 8.15% 26.67% -6.34% -12.13% 7.33% -13.29% 15.58% 11.79% 5.32% 12.29%                 55.37% 104.15% 59.20% 87.07% 19.68% -23.35% 10.84% -4.87% 10.93% 19.84% -9.41% -17.48% 13.53% 0.20% 29.92% 152.66% 75.87% 162.52% 64.60% 18.67% 50.78% -42.58% 166.49% 31.45% 72.84% 208.64% 33.21% 126.07% 122.53% 37.13% 185.72% 49.85% 35.23% 95.97% 37.79% 4.31% 23.75% -14.68% -7.32% -9.88%  34.02% -70.51% 0.09%      
      qoq
    -17.76% 23.86% -18.73% 3.32% 2.45% 0.41% 1.97% -4.09% 4.38% 12.22% -3.74% 12.34% -22.82% 5.28% 17.57% -9.24% 2.89% 1.83% 10.77% -3.24%              87.84% -39.83% 84.49% -25.49% 146.83% -53.08% 116.79% -52.33% 58.08% -32.14% 86.06% -44.42% 70.78% -48.71% 69.47% -23.52% 50.73% -33.50% 229.59% -46.77% 124.99% -58.30% 137.61% -32.36% -14.32% 93.53% 17.21% -11.07% 52.99% -16.47% 98.91% -12.46% -5.72% 74.05% 4.32% -21.00% 36.62% 22.37% -21.03% -6.28% -5.80% 32.92% -23.20%   -70.76% 160.69% 41.41%  
      cost of sales
    36,121,000 41,298,000 35,491,000 39,203,000 38,134,000 37,352,000 35,812,000 38,328,000 36,969,000 36,019,000 34,248,000 32,139,000 32,970,000 30,098,000 37,396,000 27,239,000 33,163,000 32,243,000 31,481,000 27,969,000 23,298,000 26,998,000 23,378,000 12,643,000 22,459,000 18,202,000 17,286,000 24,072,000 15,814,000 18,325,000 16,123,000 11,635,000 7,458,000 16,936,000 13,465,000 11,310,000 12,987,000                                              
      gross margin
    106,090,000 131,629,000 104,122,000 132,591,000 128,143,000 124,941,000 125,815,000 120,177,000 128,290,000 122,301,000 106,829,000 114,426,000 97,497,000 138,934,000 123,160,000 109,322,000 117,307,000 114,004,000 112,137,000 101,691,000 110,702,000 114,545,000 93,701,000 45,325,000 89,818,000 83,527,000 80,229,000 94,096,000 71,951,000 51,818,000 61,427,000 44,514,000 36,114,000 98,931,000 48,218,000 91,203,000 42,579,000                                              
      yoy
    -17.21% 5.35% -17.24% 10.33% -0.11% 2.16% 17.77% 5.03% 31.58% -11.97% -13.26% 4.67% -16.89% 21.87% 9.83% 7.50% 5.97% -0.47% 19.68% 124.36% 23.25% 37.14% 16.79% -51.83% 24.83% 61.19% 30.61% 111.39% 99.23% -47.62% 27.39% -51.19% -15.18%                                                  
      qoq
    -19.40% 26.42% -21.47% 3.47% 2.56% -0.69% 4.69% -6.32% 4.90% 14.48% -6.64% 17.36% -29.82% 12.81% 12.66% -6.81% 2.90% 1.66% 10.27% -8.14% -3.36% 22.25% 106.73% -49.54% 7.53% 4.11% -14.74% 30.78% 38.85% -15.64% 37.99% 23.26% -63.50% 105.17% -47.13% 114.20%                                               
      gross margin %
    74.60% 76.12% 74.58% 77.18% 77.07% 76.98% 77.84% 75.82% 77.63% 77.25% 75.72% 78.07% 74.73% 82.19% 76.71% 80.05% 77.96% 77.95% 78.08% 78.43% 82.61% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% 85.38% 78.17% 88.97% 76.63% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0%  0% 0% 0% 0% 
      operating expenses:
                                                                                      
      research and development
    35,246,000 38,503,000 36,336,000 36,358,000 34,900,000 46,287,000 36,089,000 36,826,000 37,985,000 33,641,000 33,099,000 32,318,000 31,423,000 31,906,000 30,414,000 28,197,000 26,545,000 26,940,000 25,327,000 24,101,000 23,305,000 22,186,000 20,814,000 21,397,000 19,497,000 19,827,000 16,787,000 18,833,000 15,829,000 14,795,000 13,616,000 12,949,000 12,357,000 15,045,000 11,596,000 10,685,000 11,818,000 11,182,000 10,118,000 10,969,000 10,476,000 12,641,000 11,434,000 10,647,000 9,919,000 12,515,000 7,915,000 10,544,000 10,156,000 10,099,000 7,862,000 7,316,000 8,938,000 7,958,000 8,177,000 7,236,000 6,661,000 5,943,190 6,079,433 5,551,492 6,555,118 7,695,701 4,831,299 4,701,508 4,466,631 4,532,618 4,938,705 5,324,695 5,219,062 6,302,396 5,750,361 5,053,353 5,151,524 5,343,810 4,568,299 5,543,824 5,453,329  5,292,286 13,891,104 4,552,047 4,323,715 
      selling, general and administrative
    20,032,000 18,825,000 18,039,000 20,440,000 17,014,000 19,529,000 15,664,000 19,841,000 19,252,000 16,830,000 18,084,000 17,077,000 15,396,000 18,513,000 18,442,000 19,869,000 21,062,000 22,769,000 20,960,000 20,239,000 16,404,000 16,217,000 13,579,000 16,147,000 15,403,000 19,082,000 12,623,000 15,939,000 11,969,000 12,526,000 12,120,000 11,562,000 10,791,000 15,197,000 11,695,000 9,839,000 10,077,000 10,148,000 8,465,000 7,688,000 6,660,000 8,901,000 7,240,000 6,705,000 6,200,000 8,559,000 6,625,000 6,545,000 6,430,000 6,827,000 6,411,000 6,336,000 5,171,000 4,789,000 5,275,000 5,189,000 4,311,000 5,615,053 4,957,085 4,495,821 3,871,957 3,321,795 3,452,815 3,624,582 2,642,246 2,927,838 2,656,005 2,715,071 2,622,945              
      amortization of acquired technology and other intangible assets
    5,588,000 4,552,000 4,553,000 4,548,000 4,545,000 4,552,000 4,551,000 4,549,000 4,548,000 4,551,000 4,557,000 3,994,000 2,891,000 2,897,000 3,562,000 5,502,000 5,498,000 5,504,000 5,505,000 5,497,000 5,488,000 5,495,000 5,494,000 5,490,000 5,490,000 5,493,000 5,493,000 5,490,000 5,486,000 5,483,000 5,493,000 5,495,000 5,491,000 5,498,000 5,498,000 5,495,000 5,492,000                                              
      patent costs
    2,369,000 2,410,000 1,886,000 2,588,000 1,906,000 1,964,000 2,352,000 2,401,000 1,982,000 2,300,000 2,572,000 2,229,000 2,255,000 2,254,000 2,018,000 2,259,000 1,798,000 2,157,000 2,359,000 1,809,000 1,835,000 1,938,000 2,095,000 1,858,000 1,638,000 1,688,000 1,659,000 1,716,000 1,770,000 1,773,000 1,937,000 2,029,000 1,725,000 1,914,000 1,875,000 1,674,000 1,547,000                   2,255,000 1,868,000 1,976,129 1,938,143 1,915,060 1,613,042 1,468,140 1,177,383 843,907 781,259 729,416 955,119 823,729 731,531              
      royalty and license expense
    104,000 103,000 170,000 117,000 114,000 120,000 154,000 123,000 1,651,000 233,000 81,000 169,000 164,000 281,000 261,000 181,000 154,000 172,000 258,000 149,000 112,000 2,930,000 3,293,000 1,618,000 3,284,000 2,948,000 2,837,000 3,454,000 2,537,000 1,968,000 2,229,000 1,568,000 1,231,000 1,585,500 1,764,000 2,991,000 1,587,000 914,000 815,000 1,966,000 875,000 1,807,000 1,105,000 1,673,000 785,000 1,459,000 803,000 1,501,000 756,000 1,165,000 624,000 1,172,000 312,000 754,000 283,000 786,000 250,000 477,622 461,917 218,255 201,784 368,808 218,474 168,560 120,060 115,795 111,122 85,431 82,931 100,731 98,617 95,284 103,185 83,121 91,132 36,595 94,998      
      total operating expenses
    63,339,000 64,393,000 60,984,000 64,051,000 58,479,000 72,452,000 58,810,000 63,740,000 65,418,000 57,555,000 58,393,000 55,787,000 52,129,000 55,851,000 54,697,000 56,008,000 55,057,000 57,542,000 54,409,000 51,795,000 47,144,000 48,766,000 45,275,000 46,510,000 45,312,000 49,038,000 39,399,000 45,432,000 37,591,000 36,545,000 35,395,000 33,603,000 31,595,000 41,051,000 32,428,000 30,684,000 30,521,000 13,530,000 33,217,000 30,367,000 27,157,000 35,688,000 31,057,000 62,573,000 29,452,000 39,099,000 26,812,000 35,289,000 31,211,000 30,058,000 28,579,000 27,628,000 22,130,000 19,762,000 18,565,000 17,077,000 14,178,000 15,092,139 15,842,071 12,323,168 12,344,563 11,005,316 10,938,406 10,355,973 8,470,982 9,020,669 8,938,169 9,267,117 8,827,456    7,823,731 8,030,670 7,150,030 8,313,675 8,183,390  7,775,627 19,832,573 6,474,752 6,322,262 
      operating income
    42,751,000 67,236,000 43,138,000 68,540,000 69,664,000 52,489,000 67,005,000 56,437,000 62,872,000 64,746,000 48,436,000 58,639,000 45,368,000 83,083,000 68,463,000 53,314,000 62,250,000 56,462,000 57,728,000 49,896,000 63,558,000 65,779,000 48,426,000 -1,185,000 44,506,000 34,489,000 40,830,000 48,664,000 34,360,000 15,273,000 26,032,000 10,911,000 4,519,000 57,880,000 15,790,000 60,519,000 12,058,000 34,759,000 -3,003,000 34,025,000 2,546,000 26,624,000 8,362,000 -4,481,000 1,771,000 17,075,000 6,080,000 28,838,000 6,628,000 19,420,000 4,247,000 21,731,000 -7,154,000 8,371,000 -6,061,000 12,910,000 -1,558,000 3,566,444 5,935,069 -1,070,753 -2,744,023 -210,276 -3,882,545 -1,909,144 -4,224,332 -4,169,657 -3,792,776 -6,310,763 -5,993,598 -5,793,193 -5,832,864 -5,929,945 -5,106,912 -5,131,844 -4,072,749 -5,998,505 -5,168,760  -5,479,564 -11,980,641 -3,462,757 -4,192,272 
      yoy
    -38.63% 28.10% -35.62% 21.45% 10.80% -18.93% 38.34% -3.76% 38.58% -22.07% -29.25% 9.99% -27.12% 47.15% 18.60% 6.85% -2.06% -14.16% 19.21% -4310.63% 42.81% 90.72% 18.60% -102.44% 29.53% 125.82% 56.85% 346.01% 660.35% -73.61% 64.86% -81.97% -62.52% 66.52% -625.81% 77.87% 373.61% 30.56% -135.91% -859.32% 43.76% 55.92% 37.53% -115.54% -73.28% -12.08% 43.16% 32.70% -192.65% 131.99% -170.07% 68.33% 359.18% 134.72% -202.12% -1305.69% -43.22% -1796.08% -252.87% -43.91% -35.04% -94.96% 2.37% -69.75% -29.52% -28.02% -34.98% 6.42% 17.36% 12.89% 43.22% -1.14% -1.20%  -25.67% -49.93% 49.27%      
      qoq
    -36.42% 55.86% -37.06% -1.61% 32.72% -21.66% 18.73% -10.24% -2.89% 33.67% -17.40% 29.25% -45.39% 21.35% 28.41% -14.36% 10.25% -2.19% 15.70% -21.50% -3.38% 35.83% -4186.58% -102.66% 29.04% -15.53% -16.10% 41.63% 124.97% -41.33% 138.58% 141.45% -92.19% 266.56% -73.91% 401.90% -65.31% -1257.48% -108.83% 1236.41% -90.44% 218.39% -286.61% -353.02% -89.63% 180.84% -78.92% 335.09% -65.87% 357.26% -80.46% -403.76% -185.46% -238.11% -146.95% -928.63% -143.68% -39.91% -654.29% -60.98% 1204.96% -94.58% 103.37% -54.81% 1.31% 9.94% -39.90% 5.29% 3.46% -0.68% -1.64% 16.12% -0.49% 26.00% -32.10% 16.05%   -54.26% 245.99% -17.40%  
      operating margin %
    30.06% 38.88% 30.90% 39.90% 41.90% 32.34% 41.46% 35.61% 38.04% 40.90% 34.33% 40.01% 34.77% 49.15% 42.64% 39.04% 41.37% 38.61% 40.20% 38.48% 47.43% Infinity% Infinity% -Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% 49.95% 25.60% 59.04% 21.70% 46.61% -9.94% 52.84% 8.57% 42.73% 21.21% -7.71% 5.67% 30.40% 18.48% 44.97% 17.52% 39.25% 12.94% 44.03% -47.77% 29.76% -48.47% 43.05% -12.35% 19.11% 27.25% -9.52% -28.58% -1.95% -55.03% -22.60% -99.47% -85.95% -73.71% -213.46% -211.50% -161.50% -222.15% -276.38% -187.97% -177.03% -132.35% -259.10% -171.46%  -238.65% -152.58% -114.97% -196.82% 
      interest income
    8,715,000 9,825,000 10,046,000 9,763,000 10,074,000 10,609,000 10,592,000 9,913,000 9,568,000 7,865,000 7,136,000 6,198,000 6,967,000 3,505,000 2,432,000 1,583,000 291,000 160,000 137,000 75,000 133,000 695,000 1,029,000 1,268,000 2,147,000 2,459,000 2,748,000 2,757,000 2,831,000 2,504,000 2,118,000 1,766,000 1,271,000 966,000 861,000 796,000 671,000 548,000 573,000 661,000 332,000 244,000 232,000 188,000 173,000 179,000 187,000 193,000 218,000 217,000 206,000 178,000 210,000 254,000 272,000 357,000 357,000 350,171 363,700 184,877 95,473 78,321 64,373 61,125 75,655 105,713 121,927 188,593 253,400 405,774 545,561 737,368 919,194 1,075,762 1,114,769 823,739 584,959  454,562 965,296 320,930 130,946 
      other income
    -6,173,000 -395,000 952,000 5,575,000 378,000 104,000 3,819,000     -784,000  -5,942,000 -804,000 89,000 -34,000 -80,000 -102,000 221,000 59,000 230,000 262,000 170,000 202,000 27,000 53,000 405,000 282,000 -16,500 -7,000 -12,000  -1,750 6,000 6,000 -19,000 54,000 -68,000 -1,829,000                                           
      interest and other income
    2,542,000 9,430,000 10,998,000 15,338,000 10,452,000 7,622,250 14,411,000   10,861,000 5,443,000 5,414,000  -2,437,000 1,628,000 1,672,000 257,000 80,000 35,000 296,000 192,000 925,000 1,291,000 1,438,000 2,349,000 2,486,000 2,801,000 3,162,000 3,113,000 1,272,250 2,111,000 1,754,000  580,250 867,000 802,000 652,000                                              
      income before income taxes
    45,293,000 76,666,000 54,136,000 83,878,000 80,116,000 55,325,000 81,416,000 64,890,000 70,497,000 75,607,000 53,879,000 64,053,000 51,632,000 80,646,000 70,091,000 54,986,000 62,507,000 56,542,000 57,763,000 50,192,000 63,750,000 66,704,000 49,717,000 253,000 46,855,000 36,975,000 43,631,000 51,826,000 37,473,000 17,760,000 28,143,000 12,665,000 5,743,000 58,849,000 16,657,000 61,321,000 12,710,000 35,382,000 -2,503,000 32,849,000 2,870,000 26,845,000 8,587,000 -4,305,000 1,932,000 17,239,000 6,250,000 29,010,000 6,829,000 19,621,000 4,440,000  -6,952,000                              
      income tax expense
    -9,397,000 -10,324,000 -10,111,000 -16,614,000 -15,672,000 -9,306,000 -14,546,000 -12,553,000 -13,644,000 -13,629,000 -2,363,000 -14,375,000 -11,793,000 -15,512,000 -16,636,000 -13,484,000 -12,537,000 -10,666,000 -11,654,000  -12,063,000 -12,802,000 -9,217,000  -8,700,000 -10,547,000 -6,669,000 -8,386,000  1,489,000 -5,325,000 -1,851,000    -14,134,000 -2,345,000   -11,047,000 -921,000 -2,406,000 -1,540,000 -7,466,000 -618,000   -8,588,000    -6,517,000  -493,250  -2,285,000   -535,642 -289,361                       
      net income
    35,896,000 66,342,000 44,025,000 67,264,000 64,444,000 46,019,000 66,870,000 52,337,000 56,853,000 61,978,000 51,516,000 49,678,000 39,839,000 65,134,000 53,455,000 41,502,000 49,970,000 45,876,000 46,109,000 40,541,000 51,687,000 53,902,000 40,500,000 815,000 38,155,000 26,428,000 36,962,000 43,440,000 31,474,000 19,249,000 22,818,000 10,814,000 5,959,000 32,813,000 13,520,000 47,187,000 10,365,000 25,819,000 -1,500,000 21,802,000 1,949,000 18,088,000 7,047,000 -11,771,000 1,314,000 13,126,000 4,284,000 20,422,000 4,022,000 57,886,000 5,542,000 15,382,000 -4,758,000 5,385,000 -5,468,000 10,964,000 -1,221,000 5,733,883 5,989,426 3,312,700 -11,880,856 -5,316,414 -7,186,570 -4,436,095 -2,978,331 -3,847,696 -4,672,847 -6,415,178 -5,569,599 -4,437,578 -5,302,983 -5,205,790 -4,193,385 -3,256,104 -2,960,565 -5,175,371 -4,583,801  -4,641,591 -11,160,021 -3,189,980 -4,061,424 
      yoy
    -44.30% 44.16% -34.16% 28.52% 13.35% -25.75% 29.80% 5.35% 42.71% -4.85% -3.63% 19.70% -20.27% 41.98% 15.93% 2.37% -3.32% -14.89% 13.85% 4874.36% 35.47% 103.96% 9.57% -98.12% 21.23% 37.30% 61.99% 301.70% 428.18% -41.34% 68.77% -77.08% -42.51% 27.09% -1001.33% 116.43% 431.81% 42.74% -121.29% -285.22% 48.33% 37.80% 64.50% -157.64% -67.33% -77.32% -22.70% 32.77% -184.53% 974.95% -201.35% 40.30% 289.68% -6.08% -191.29% 230.97% -89.72% -207.85% -183.34% -174.68% 298.91% 38.17% 53.79% -30.85% -46.53% -13.29% -11.88% 23.23% 32.82% 36.28% 79.12% 0.59% -8.52%  -36.22% -53.63% 43.69%      
      qoq
    -45.89% 50.69% -34.55% 4.38% 40.04% -31.18% 27.77% -7.94% -8.27% 20.31% 3.70% 24.70% -38.84% 21.85% 28.80% -16.95% 8.92% -0.51% 13.73% -21.56% -4.11% 33.09% 4869.33% -97.86% 44.37% -28.50% -14.91% 38.02% 63.51% -15.64% 111.00% 81.47% -81.84% 142.70% -71.35% 355.25% -59.86% -1821.27% -106.88% 1018.62% -89.22% 156.68% -159.87% -995.81% -89.99% 206.40% -79.02% 407.76% -93.05% 944.50% -63.97% -423.29% -188.36% -198.48% -149.87% -997.95% -121.29% -4.27% 80.80% -127.88% 123.47% -26.02% 62.00% 48.95% -22.59% -17.66% -27.16% 15.18% 25.51% -16.32% 1.87% 24.14% 28.79% 9.98% -42.80% 12.91%   -58.41% 249.85% -21.46%  
      net income margin %
    25.24% 38.36% 31.53% 39.15% 38.76% 28.36% 41.37% 33.02% 34.40% 39.15% 36.52% 33.89% 30.54% 38.53% 33.29% 30.39% 33.21% 31.37% 32.11% 31.27% 38.57% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% 28.32% 21.92% 46.03% 18.65% 34.62% -4.96% 33.86% 6.56% 29.03% 17.88% -20.26% 4.21% 23.37% 13.02% 31.85% 10.63% 116.99% 16.88% 31.16% -31.77% 19.14% -43.73% 36.56% -9.68% 30.73% 27.50% 29.44% -123.75% -49.25% -101.85% -52.52% -70.13% -79.32% -90.82% -217.00% -196.54% -123.71% -201.97% -242.63% -154.35% -112.32% -96.21% -223.54% -152.05%  -202.15% -142.13% -105.91% -190.68% 
      net income per common share:
                                                                                      
      basic
    760 1,400 930 1,410 1,350 970 1,400 1,100 1,190 1,300 1,080 1,040 830 1,370 1,120 870 1,050 960 970 850 1,090 1,130 850 20 800 560 780 920 660 410 480 230 130 690 280 990 220 550 -30 460 40 380 150 -250 30 280 90 440 90 1,260 120 340  120 -120 240 -30  0.13 0.07                       
      diluted
    760 1,400 920 1,410 1,350 960 1,400 1,100 1,190 1,290 1,080 1,040 830 1,360 1,120 870 1,050 970 970 850 1,080 1,130 850 20 800 560 780 920 660 410 480 230 130 690 280 990 220 550 -30 460 40 380 150 -250 30 290 90 440 90 1,240 120 330  120 -120 230 -30  0.12 -0.03                       
      weighted-average shares used for eps calculation
                                                                38,895,999 37,567,374 37,741,107 37,362,176 37,029,462 36,479,331 36,481,603 36,383,255 36,299,967 35,932,372 35,989,473 35,900,554 35,770,641 33,759,581 34,985,918 33,143,347 31,523,070  28,462,925  28,246,338 24,688,264 
      basic
    47,078,940,000 47,548,046,000 47,554,970,000 47,593,660,000 47,567,295,000 47,548,931,000 47,542,114,000 47,549,843,000 47,557,959,000 47,559,669,000 47,570,099,000 47,572,971,000 47,523,593,000 47,390,352,000 47,396,495,000 47,393,830,000 47,369,764,000 47,296,447,000 47,291,192,000 47,299,627,000 47,267,921,000 47,198,982,000 47,227,061,000 47,227,294,000 47,093,033,000 46,959,775,000 46,980,439,000 46,967,005,000 46,892,914,000 46,849,588,000 46,869,998,000 46,868,999,000 46,783,158,000 46,725,289,000 46,801,051,000 46,742,746,000 46,661,559,000 46,408,460,000 46,947,621,000 46,927,543,000 46,774,360,000 46,816,394,000 46,542,556,000 46,388,218,000 45,785,725,000 46,252,960,000 46,197,713,000 46,266,142,000 46,177,661,000 45,898,019,000 45,912,512,000 45,859,286,000 45,823,414,000 45,951,276,000 46,006,290,000 45,953,312,000 45,749,072,000 43,737,968 45,314,893 45,024,373                       
      diluted
    47,205,952,000 47,658,295,000 47,676,500,000 47,674,886,000 47,689,657,000 47,652,662,000 47,669,439,000 47,628,113,000 47,628,492,000 47,622,763,000 47,632,431,000 47,618,115,000 47,567,007,000 47,468,507,000 47,466,934,000 47,457,892,000 47,440,281,000 47,365,435,000 47,362,575,000 47,356,864,000 47,329,704,000 47,236,994,000 47,260,331,000 47,243,991,000 47,122,829,000 46,995,462,000 47,013,919,000 46,996,702,000 46,931,999,000 46,896,766,000 46,914,553,000 46,901,098,000 46,848,798,000 46,805,194,000 46,871,720,000 46,810,238,000 46,742,894,000 46,535,980,000 46,947,621,000 47,041,854,000 46,907,558,000 47,494,188,000 46,723,373,000 46,388,218,000 46,214,247,000 46,685,145,000 46,633,763,000 46,614,726,000 46,651,438,000 46,543,605,000 46,594,843,000 46,496,120,000 45,823,414,000 46,883,602,000 46,006,290,000 46,857,309,000 45,749,072,000 45,140,394 46,799,557 45,201,175                       
      cash dividends declared per common share
    500 337.5 450 450 450 300 400 400 400 262.5 350 350 350 225 300 300 300 150 200 200 200 112.5 150 150 150 75 100 100 100 45 60 60 60 22.5 30 30 30                                              
      other loss
           -1,460,000 -1,943,000 -795,000 -1,693,000  -703,000                                                                      
      interest and other loss
           8,453,000 7,625,000    6,264,000                                                                      
      income tax benefit
                       -9,651,000    562,000     -5,999,000    216,000 -4,904,000 -3,137,000   -2,741,250 1,003,000       -4,113,000 -1,966,000  -2,807,000 38,265,000 1,102,000  2,194,000  326,000   1,835,512   -296,456 -329,813   464,162                  
      revenue
                         71,831,000 117,079,000 57,968,000 112,277,000 101,729,000 97,515,000 118,168,000 87,765,000 70,143,000 77,550,000 56,149,000 43,572,000                                                  
      other expense
                                    -47,000                                                  
      interest and other expense
                                    1,224,000                                                  
      technology development and support revenue
                                         414,000 1,540,000 59,000 57,000 75,000 67,000 35,000 30,000 43,000 41,000 137,000 733,000 890,000 1,084,000 1,021,000 925,000 2,577,000 1,124,000 1,704,000 1,669,000                          
      cost of material sales
                                         4,298,500 6,458,000 5,684,000 5,052,000 8,084,000 7,246,000 39,086,000 8,581,000 12,079,000 7,388,000 11,951,000 9,897,000 7,732,000 9,783,000 8,282,000 3,092,000 735,000 1,094,000 1,611,000 1,088,000                          
      patent costs and amortization of acquired technology and other intangible assets
                                         3,878,750 7,361,000                                            
      interest expense
                                         -5,250 -5,000 -8,000 -8,000 -23,000 -7,000 -12,000 -12,000 -15,000 -17,000 -21,000 -17,000 -16,000 -13,000 -10,000 -8,000 -5,000 -5,000 -18,000 -20,000 -18,244 -13,263 -8,430 -9,638 -9,207 -5,957 -5,648 -7,059 -3,692 -386 -298 -2,643 -12,637 -15,680 -13,213 -5,667 -5,002 -2,585 -605   -40,796 -144,676 -48,153 -98 
      patent costs and amortization of acquired technology
                                           4,060,000 4,094,000 4,255,000 4,032,000 4,462,000 3,967,000 4,487,000 4,081,000 4,748,000 3,972,000 4,235,000 3,899,000 4,522,000 4,617,000 5,526,000 3,736,000                            
      income before income tax expense
                                                       21,899,000  1,562,000  13,249,000 -1,221,000  6,525,068 3,602,061                       
      net loss per common share:
                                                                                      
      basic
                                                        -100                              
      diluted
                                                        -100                              
      gain on stock warrant liability
                                                              239,562 4,496,367 -8,926,212    713,243    173,242              
      income before income tax benefit
                                                          -5,794,000   3,898,371   -11,584,400 -4,986,601   -3,442,493                  
      other comprehensive income:
                                                                                      
      unrealized gain on available-for-sale securities
                                                         4,000 55,000 65,000 -104,000                          
      amortization of prior service cost and actuarial loss for retirement plan
                                                                                      
      included in net periodic pension cost
                                                         111,250 148,000 149,000 148,000                          
      total other comprehensive income
                                                         115,250 203,000 214,000 44,000                          
      comprehensive income
                                                         1,184,000 -5,265,000 11,178,000                           
      loss on stock warrant liability
                                                                 -4,845,439 -3,362,441 -2,582,428  90,025 -1,001,612 -292,710               
      comprehensive loss
                                                            -1,177,000                          
      commercial revenue
                                                             4,976,078 9,881,533 5,278,704 4,744,075 4,511,121 2,836,587 1,951,892 1,830,147 1,888,490 1,621,416 1,239,056 1,369,137 1,355,282 1,324,924 1,395,487 1,555,065          
      developmental revenue
                                                             5,681,445.75 11,895,607 5,973,711 4,856,465 6,283,919 4,219,274 6,494,937 2,416,503 2,962,522 3,523,977 1,717,298 1,464,721 2,231,886 1,300,715 750,111 1,161,754          
      cost of chemicals sold
                                                             662,673.75 2,405,493 142,540 102,662 -1,849,128 1,258,435 1,017,416 460,786 715,002 277,218 318,191 170,987 203,093 266,563 246,962 195,476 165,626 281,062 165,039 281,549  25,834 83,947 12,303 57,561 
      basic and diluted net income per common share
                                                             -0.015   -0.31 -0.14 -0.19 -0.12 -0.08 -0.1 -0.13 -0.18 -0.15 -0.12 -0.15 -0.15 -0.12 -0.095 -0.08 -0.16 -0.15  -0.17 -0.39 -0.11 -0.17 
      weighted-average shares used for eps calculation
                                                                38,895,999 37,567,374 37,741,107 37,362,176 37,029,462 36,479,331 36,481,603 36,383,255 36,299,967 35,932,372 35,989,473 35,900,554 35,770,641 33,759,581 34,985,918 33,143,347 31,523,070  28,462,925  28,246,338 24,688,264 
      general and administrative
                                                                         2,774,141 2,342,962 2,679,944 2,373,546 2,438,113 2,209,537 2,568,217 2,353,514  2,309,678 5,395,253 1,760,402 1,849,407 
      total operating expense
                                                                         6,089,444.25 8,458,503 8,075,543           
      contract research revenue
                                                                             951,617 1,229,306 1,305,246 1,114,524      
      development chemical revenue
                                                                             243,876 229,774 366,998 209,206      
      commercial chemical revenue
                                                                             871,996 1,185,050 229,631 1,313,000      
      royalty and license revenue
                                                                             354,025 183,151 163,295 127,900      
      technology development revenue
                                                                             477,312 250,000 250,000 250,000      
      contract research
                                                                                  942,368.75 3,769,475 1,514,325 412,232 
      development chemical
                                                                                  719,410.5 2,877,642 1,123,852  
      commercial chemical
                                                                                  7,848.75 31,395   
      technology development fees
                                                                                  251,941.25 1,007,765 331,818 700,000 
      royalty expense
                                                                                  147,829 462,269 150,000 91,579 
      deemed dividend
                                                                                     -46,176 
      net income attributable to common shareholders
                                                                                  -4,641,591 -11,160,021  -4,107,600 
      and diluted net income per common share
                                                                                  7,074,682 28,298,728   
      development chemicals
                                                                                     796,358 
      commercial chemicals
                                                                                     66,420 
      license fees
                                                                                     154,980 
      debt conversion and extinguishment expense
                                                                                      
    Balance Sheets:
    Quarterly
    Annual
      Unit: USD2026-03-31 2025-12-31 2025-09-30 2025-06-30 2025-03-31 2024-12-31 2024-09-30 2024-06-30 2024-03-31 2023-12-31 2023-09-30 2023-06-30 2023-03-31 2022-12-31 2022-09-30 2022-06-30 2022-03-31 2021-12-31 2021-09-30 2021-06-30 2021-03-31 2020-12-31 2020-09-30 2020-06-30 2020-03-31 2019-12-31 2019-09-30 2019-06-30 2019-03-31 2018-12-31 2018-09-30 2018-06-30 2018-03-31 2017-12-31 2017-09-30 2017-06-30 2017-03-31 2016-12-31 2016-09-30 2016-06-30 2016-03-31 2015-12-31 2015-09-30 2015-06-30 2015-03-31 2014-12-31 2014-09-30 2014-06-30 2014-03-31 2013-12-31 2013-09-30 2013-06-30 2013-03-31 2012-12-31 2012-09-30 2012-06-30 2012-03-31 2011-12-31 2011-09-30 2011-06-30 2011-03-31 2010-12-31 2010-09-30 2010-06-30 2010-03-31 2009-12-31 2009-09-30 2009-06-30 2009-03-31 2008-12-31 2008-09-30 2008-06-30 2008-03-31 2007-12-31 2007-09-30 2007-06-30 2007-03-31 2006-12-31 2005-12-31 2005-09-30 2005-06-30 2004-03-31 
                                                                                        
        assets
                                                                                        
        current assets:
                                                                                        
        cash and cash equivalents
      159,352,000 138,353,000 121,609,000 95,804,000 157,473,000 98,980,000 79,559,000 92,856,000 74,012,000 91,985,000 79,323,000 93,470,000 158,294,000 93,430,000 187,750,000 213,896,000 357,424,000 311,993,000 535,157,000 542,914,000 726,279,000 630,012,000 162,620,000 133,566,000 222,744,000 131,627,000 235,541,000 324,277,000 225,048,000 211,022,000 101,638,000 103,777,000 177,154,000 132,840,000 69,153,000 109,438,000 96,117,000 139,365,000 54,416,000 69,930,000 110,091,000 97,513,000 89,956,000 109,251,000 125,189,000 45,418,000 37,391,000 75,554,000 35,931,000 70,586,000 67,085,000 80,702,000 45,536,000 85,923,000 74,193,000 159,599,000 144,246,000 111,795,229 67,124,442 65,240,065 258,105,759 20,368,852 8,202,740 11,754,285 7,553,643 22,701,126 10,608,785 9,881,422 6,064,487 28,321,581 54,415,132 39,540,102 12,702,080 33,870,696 60,605,836 61,495,627 24,524,178 31,097,533 30,654,249 31,139,911 32,806,773 43,548,959 
        short-term investments
      357,056,000 464,004,000 481,366,000 429,404,000 413,805,000 393,690,000 471,993,000 437,667,000 465,293,000 422,137,000 412,350,000 465,679,000 487,812,000 484,345,000 501,051,000 439,449,000 325,055,000 351,194,000 253,786,000 190,540,000 720,000 99,996,000 510,048,000 510,455,000 417,032,000 514,461,000 361,515,000 228,434,000 301,549,000 304,323,000 391,972,000 353,651,000 280,103,000 287,446,000 296,282,000 256,117,000 228,861,000 188,644,000 231,452,000 246,281,000 269,498,000 297,981,000 271,593,000 246,986,000 203,339,000 243,088,000 230,968,000 215,331,000 230,990,000 202,024,000 181,193,000 163,983,000 175,311,000 158,018,000 164,585,000 190,417,000 194,331,000 234,294,041 270,829,172 261,158,726 66,819,553 52,794,545 56,804,462 54,338,639 55,467,352 41,172,955 55,415,258 58,248,626 66,116,518 49,132,619 24,644,704 40,349,134 69,463,331 49,788,961 23,057,973 22,747,530 22,262,598 17,957,752 17,190,242 12,473,736 8,891,446 12,238,071 
        accounts receivable
      93,629,000 119,953,000 74,214,000 147,043,000 139,563,000 113,648,000 87,693,000 124,386,000 119,584,000 139,850,000 122,192,000 109,390,000 92,677,000 92,664,000 78,193,000 74,933,000 104,947,000 107,639,000 96,235,000 99,629,000 91,327,000 82,261,000 99,350,000 68,498,000 82,592,000 60,452,000 65,774,000 66,952,000 52,124,000 43,129,000 43,207,000 35,583,000 22,768,000 52,355,000 43,256,000 39,702,000 36,321,000 24,994,000 22,476,000 17,984,000 20,866,000 24,729,000 28,350,000 17,378,000 18,164,000 22,075,000 22,107,000 20,500,000 24,508,000 15,657,000 17,785,000 14,451,000 10,527,000 8,657,000 7,871,000 9,580,000 8,708,000 10,726,524 11,761,280 6,541,232 5,985,388 7,247,873 4,696,340 3,885,380 2,399,297 3,344,255 1,886,345 1,760,763 1,813,358 2,450,444 1,792,761 1,729,665 2,314,768 2,395,416 2,489,838 1,837,673 1,770,851 2,113,263 1,944,099 2,282,602 2,175,278 1,108,683 
        inventory
      248,213,000 240,912,000 212,621,000 208,199,000 197,398,000 182,938,000 175,958,000 171,843,000 172,905,000 175,795,000 181,406,000 175,855,000 174,245,000 183,220,000 180,194,000 165,635,000 143,240,000 134,160,000 121,485,000 104,653,000 101,422,000 91,591,000 84,098,000 84,523,000 74,068,000 63,953,000 57,771,000 60,138,000 68,041,000 70,000,000 69,031,000 56,043,000 53,638,000 36,265,000 32,733,000 24,437,000 16,668,000 17,314,000 16,103,000 16,467,000   13,688,000 16,969,000 38,967,000  29,834,000 20,664,000 14,592,000 10,595,000 7,852,000 8,673,000 9,082,000 11,018,000 9,451,000 8,571,000 5,574,000 3,842,729 2,230,620       641 42,700 1,330 2,209 2,209 2,209 2,209 41,165 41,165 2,209 2,209 25,265 30,598 36,431 38,222 39,691 27,327 
        other current assets
      74,028,000 123,836,000 147,503,000 130,352,000 110,175,000 110,575,000 126,643,000 132,729,000 89,478,000 87,365,000 83,444,000 33,753,000 37,193,000 45,791,000 30,005,000 38,244,000 29,120,000 20,948,000 48,476,000 55,156,000 39,587,000 20,746,000 30,038,000 33,117,000 15,635,000 21,946,000 10,415,000 8,893,000 5,410,000 6,366,000 11,943,000 20,311,000 14,301,000 10,276,000 9,227,000 7,191,000 5,775,000 6,392,000 7,499,000 5,561,000 4,683,000 2,387,000 4,523,000 4,773,000 3,653,000 4,356,000 13,335,000 13,074,000 11,150,000 6,623,000 6,387,000 6,242,000 7,632,000 3,929,000 4,390,000 3,902,000 2,472,000 1,645,504 1,715,179 2,841,934 1,683,215 1,988,239 624,180 456,068 372,585 410,599 502,479 560,464 483,896 462,908 649,900 741,257 583,406 673,931 745,936 739,044 639,676 606,267 497,746 427,035 413,953 179,329 
        total current assets
      932,278,000 1,087,058,000 1,037,313,000 1,010,802,000 1,018,414,000 899,831,000 941,846,000 959,481,000 921,272,000 917,132,000 878,715,000 878,147,000 950,221,000 899,450,000 977,193,000 932,157,000 959,786,000 925,934,000 1,055,139,000 992,892,000 959,335,000 924,606,000 886,154,000 830,159,000 812,071,000 792,439,000 731,016,000 688,694,000 652,172,000 634,840,000 617,791,000 569,365,000 547,964,000 519,182,000 450,651,000 436,885,000 383,742,000 385,370,000 342,030,000 366,320,000 432,395,000 447,684,000 423,895,000 410,220,000 407,340,000 370,505,000 350,998,000 363,411,000 337,729,000 327,048,000 280,302,000 274,051,000 248,088,000 267,545,000 260,490,000 372,069,000 355,331,000 362,304,027 353,660,693 335,781,957 332,593,915 82,399,509 70,327,722 70,434,372 65,792,877 67,629,576 68,455,567 70,452,605 74,480,468 80,369,761 81,504,706 82,362,367 85,104,750 86,770,169 86,901,792 86,822,083 49,222,568 51,805,413 50,322,767 46,361,506 44,327,141 57,102,369 
        property and equipment
      213,146,000 214,947,000 209,802,000 205,131,000 196,263,000 195,239,000 191,195,000 185,474,000 175,896,000 175,150,000 174,638,000 157,566,000 145,281,000 143,445,000 137,713,000 138,028,000 131,879,000 128,832,000 118,988,000 113,187,000 107,815,000 102,113,000 96,830,000 92,003,000 88,350,000 87,872,000 86,266,000 83,595,000 80,615,000 69,739,000 67,467,000 62,348,000 58,428,000 56,450,000 49,358,000 38,691,000 28,552,000 27,203,000 25,768,000 22,610,000 22,362,000 22,407,000 21,490,000 20,905,000 20,485,000 19,922,000 17,860,000 16,973,000 15,004,000 14,893,000 14,698,000 13,904,000 12,512,000 11,808,000    10,883,939    9,711,093  10,248,341 10,624,506 11,048,763   12,437,957 12,859,628 13,275,767 13,080,957 13,299,355 13,525,714 13,388,135 13,474,034 13,783,819 14,074,093 13,553,611 11,772,332 11,523,883 3,243,837 
        acquired technology, net of accumulated amortization of 225,627 and 220,392
      101,548,000                                                                                  
        other intangible assets, net of accumulated amortization of 13,622 and 13,269
      3,666,000                                                                                  
        goodwill
      15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,535,000 15,548,000                                            
        investments
      419,673,000 377,034,000 422,929,000 432,368,000 369,027,000 457,593,000 396,931,000 362,459,000 312,939,000 299,548,000 301,193,000 211,361,000 213,369,000 259,861,000 173,871,000 200,142,000 164,130,000 168,076,000 8,500,000 8,500,000 8,500,000 5,000,000 5,000,000 5,000,000 5,000,000 5,000,000 5,000,000 5,000,000      14,794,000 14,794,000 14,775,000 14,789,000 14,960,000 15,217,000 15,767,000 16,092,000 2,187,000 3,024,000 3,888,000 4,034,000 3,047,000 2,606,000 2,522,000 3,051,000 7,417,000 7,971,000 5,781,000 4,868,000 1,270,000 1,169,000 1,172,000 971,000                   95,940 95,789 42,770 1,828,708 1,953,560 2,027,061 2,931,277 
        deferred income taxes
      79,455,000 79,454,000 77,339,000 82,909,000 81,410,000 78,320,000 72,138,000 66,664,000 63,040,000 59,108,000 49,637,000 70,364,000 63,292,000 58,161,000 43,005,000 36,998,000 35,788,000 33,453,000 32,476,000 35,579,000 36,864,000 37,695,000 31,978,000 30,075,000 28,729,000 30,375,000 26,437,000 25,204,000 24,781,000 24,377,000 13,910,000 10,534,000 29,944,000     8,661,000 10,084,000 10,097,000 12,548,000 12,326,000 15,785,000 14,863,000 18,028,000 18,459,000 17,363,000 18,288,000 20,558,000 21,563,000                                 
        other assets
      129,415,000 128,932,000 119,179,000 115,047,000 109,383,000 106,815,000 109,686,000 98,845,000 102,382,000 105,289,000 101,447,000 102,074,000 104,224,000 109,739,000 133,428,000 128,188,000 126,222,000 135,710,000 133,111,000 114,676,000 106,704,000 103,341,000 103,067,000 96,394,000 89,335,000 86,090,000 89,957,000 79,220,000 75,765,000 64,526,000 39,151,000 40,084,000 2,391,000 604,000 347,000 317,000 215,000 307,000 423,000 543,000 645,000 174,000 232,000 345,000 405,000 425,000 508,000 494,000 602,000 242,000 282,000 275,000 259,000 277,000 262,000 289,000 284,000 298,964 312,384 323,235 332,460 216,529 266,111 270,932 245,557 227,276 237,758 236,908 83,491 69,772 72,272 74,772 77,272 79,772 82,272 94,772 97,272 89,772 99,772 109,772 109,772 121,773 
        total assets
      1,894,716,000 1,963,762,000 1,947,451,000 1,931,698,000 1,864,487,000 1,832,333,000 1,810,882,000 1,776,561,000 1,683,715,000 1,668,961,000 1,622,916,000 1,540,855,000 1,535,712,000 1,532,820,000 1,530,323,000 1,499,438,000 1,487,231,000 1,466,919,000 1,428,591,000 1,350,715,000 1,310,500,000 1,269,228,000 1,224,961,000 1,161,057,000 1,136,376,000 1,120,157,000 1,062,550,000 1,011,080,000 968,190,000 933,424,000 883,744,000 833,249,000 795,140,000 779,956,000 727,170,000 707,635,000 655,443,000 627,559,000 584,753,000 580,002,000 556,046,000 559,412,000 534,323,000 525,171,000 525,464,000 489,847,000 472,170,000 487,369,000 465,956,000 462,754,000 400,021,000 393,505,000 367,923,000 385,524,000 381,001,000 385,921,000 369,230,000 373,877,725 365,205,718 347,013,124 343,175,692 92,327,131 80,531,926 81,340,381 77,473,444 80,139,887 81,860,906 84,721,076 89,507,492 96,228,505 98,205,857 99,294,976 102,682,025  105,420,383 105,958,781 69,095,168   72,610,497 70,899,952  
        liabilities and shareholders’ equity
                                                                                        
        current liabilities:
                                                                                        
        accounts payable
      17,037,000 23,344,000 34,728,000 38,467,000 28,294,000 36,590,000 24,698,000 23,636,000 12,841,000 10,933,000 20,624,000 7,330,000 9,741,000 9,519,000 13,357,000 14,048,000 27,064,000 14,955,000 10,939,000 10,334,000 14,741,000 13,801,000 9,626,000 10,244,000 10,370,000 13,296,000 9,217,000 7,744,000 7,024,000 10,532,000 13,330,000 7,863,000 10,434,000 13,774,000 13,780,000 17,772,000 11,147,000 8,112,000 5,544,000 6,368,000 7,294,000 6,849,000 10,334,000 6,656,000 6,184,000 9,260,000 7,039,000 12,227,000 8,368,000 5,256,000 8,042,000 10,555,000 5,622,000 7,596,000 5,451,000 7,071,000 4,600,000 4,776,446 5,780,710 3,161,943 2,277,646 2,155,489 1,597,514 1,747,143 1,620,909 1,275,695 1,915,730 1,542,610 1,311,724 1,585,015 1,673,009 1,461,456 1,029,672 861,428 1,233,927 1,800,554 1,137,882 1,808,869 1,249,576 699,481 937,687 428,920 
        accrued expenses
      40,389,000 52,564,000 42,834,000 44,082,000 35,089,000 46,026,000 52,955,000 58,624,000 42,099,000 52,080,000 38,500,000 35,072,000 25,346,000 51,002,000 49,975,000 38,757,000 26,960,000 45,474,000 42,736,000 27,247,000 19,171,000 41,404,000 33,692,000 31,083,000 21,648,000 49,022,000 35,360,000 35,744,000 27,470,000 36,057,000 31,790,000 24,405,000 29,033,000 35,019,000 20,694,000 12,442,000 9,977,000 19,845,000 13,190,000 10,701,000 6,746,000 17,387,000 12,979,000 16,424,000 7,525,000 14,986,000 10,320,000 9,977,000 6,956,000 16,039,000 9,661,000 7,406,000 5,706,000 10,394,000 9,179,000 7,920,000 6,506,000 9,019,722 6,519,459 5,667,855 4,968,815 6,906,289 5,738,504 4,378,779 3,470,776 5,238,870 4,719,417 3,889,312 3,498,595 5,296,433 4,733,161 3,458,367 3,088,965 4,578,147 3,703,177 3,039,027 3,277,851 5,245,536 5,168,223 4,306,446 2,488,511 1,773,677 
        deferred revenue
      21,038,000 21,011,000 23,264,000 36,005,000 22,772,000 33,074,000 47,393,000 63,784,000 19,157,000 47,713,000 66,828,000 29,732,000 37,419,000 45,599,000 67,254,000 99,106,000 111,778,000 120,864,000 123,475,000 122,978,000 128,546,000 105,215,000 138,391,000 120,150,000 99,565,000 97,333,000 91,188,000 82,472,000 86,296,000 80,782,000 69,143,000 69,247,000 59,736,000 14,981,000 10,603,000 10,061,000 10,064,000 10,282,000 10,211,000 10,232,000 10,353,000 10,107,000 20,830,000 22,020,000 25,626,000 2,466,000 2,036,000 3,095,000 3,375,000 1,910,000 3,684,000 4,189,000 3,826,000 4,273,000 5,001,000 5,338,000 5,897,000 5,534,176 5,911,922 4,816,882 5,081,214 1,294,668 343,959 864,881 1,041,731 1,403,927 287,634 2,002,450 2,350,723 2,739,790 1,787,634 150,000 150,000 172,688 550,000 650,000 900,000 150,000 2,078,788 1,672,538 662,121 67,204 
        other current liabilities
      19,300,000 11,094,000 7,814,000 7,001,000 26,944,000 9,720,000 6,119,000 5,955,000 20,882,000 8,096,000 5,391,000 8,598,000 42,451,000 29,577,000 7,613,000 3,302,000 12,452,000 6,645,000 3,111,000 2,004,000 3,874,000 4,540,000 1,051,000 1,218,000 4,971,000 1,857,000 12,627,000 13,776,000 10,784,000 5,811,000 16,000 25,000 25,000 50,000 1,199,000 1,146,000 2,042,000 1,967,000 1,672,000 423,000 757,000 167,000 104,000 53,000 56,000 111,000 493,000 441,000 1,041,000 24,000 15,000 940,000 35,000 36,000 478,000 589,000 284,000 186,952 24,546                        
        total current liabilities
      97,764,000 108,013,000 108,640,000 125,555,000 113,099,000 125,410,000 131,165,000 151,999,000 94,979,000 118,822,000 131,343,000 80,732,000 114,957,000 135,697,000 138,199,000 155,213,000 178,254,000 187,938,000 180,261,000 162,563,000 166,332,000 164,960,000 182,760,000 162,695,000 136,554,000 161,508,000 148,392,000 139,736,000 131,574,000 133,182,000 114,279,000 101,540,000 99,228,000 63,824,000 46,276,000 41,421,000 33,230,000 40,206,000 30,617,000 27,724,000 25,150,000 34,510,000 44,247,000 45,153,000 39,391,000 26,823,000 19,888,000 25,740,000 19,740,000 23,229,000 21,402,000 23,090,000 15,189,000 22,299,000 20,109,000 20,918,000 17,287,000 19,517,296 18,236,637 18,234,858 25,437,460 25,044,687 20,660,254 11,019,290 12,312,302 13,965,959 13,020,649 13,582,639 13,309,309 15,769,505 14,342,072 12,248,091 11,446,094 12,790,531 12,665,372 12,667,848 12,494,001 14,382,673 11,974,854 9,896,732 6,556,587 3,539,098 
        retirement plan benefit liability
      56,911,000 56,541,000 55,703,000 55,285,000 54,867,000 54,450,000 54,288,000 53,870,000 52,568,000 52,249,000 61,165,000 60,707,000 60,248,000 59,790,000 67,305,000 68,188,000 67,481,000 66,773,000 80,676,000 79,966,000 79,246,000 78,527,000 52,900,000 52,305,000 51,711,000 51,117,000 46,007,000 45,377,000 44,747,000 44,055,000 34,937,000 34,350,000 33,763,000 33,176,000 32,226,000 31,228,000 28,106,000 27,563,000 24,865,000 24,292,000 24,485,000 22,594,000 12,235,000 11,750,000 11,265,000 10,916,000 10,257,000 9,984,000 9,709,000 9,436,000 10,579,000 10,332,000 10,084,000 9,837,000 8,685,000 8,543,000 8,401,000 8,259,690 7,773,056 7,541,337 7,309,619 7,077,901 6,002,998 5,807,038                   
        other liabilities
      34,333,000 36,246,000 36,718,000 34,022,000 34,841,000 35,411,000 36,303,000 37,122,000 37,976,000 38,658,000 39,183,000 42,240,000 43,199,000 43,685,000 86,233,000 80,707,000 78,461,000 76,077,000 87,874,000 70,396,000 62,876,000 55,941,000 58,008,000 54,970,000 51,548,000 48,554,000 31,089,000 30,283,000 34,072,000 23,896,000 18,337,000 18,334,000                                                   
        total liabilities
      190,736,000 202,743,000 202,645,000 217,086,000 205,155,000 215,808,000 224,132,000 249,723,000 198,815,000 221,735,000 240,550,000 202,089,000 236,247,000 257,451,000 318,498,000 334,129,000 355,931,000 367,005,000 392,269,000 359,099,000 358,032,000 356,514,000 345,325,000 321,287,000 289,679,000 308,708,000 275,983,000 260,047,000 251,989,000 242,918,000 208,237,000 182,568,000 152,491,000 120,902,000 104,160,000 99,823,000 90,292,000 99,091,000 88,936,000 86,082,000 85,150,000 92,647,000 82,864,000 84,234,000 76,067,000 41,105,000 32,390,000 38,965,000 32,952,000 35,068,000 34,572,000 36,200,000 28,239,000 35,289,000 32,143,000 33,029,000 29,324,000 31,650,525 29,291,536 29,223,038 36,358,922 34,897,612 29,603,731 25,521,611 18,590,612 20,512,361 20,002,076 19,719,955 19,361,814 19,514,042 18,294,509 14,747,191 14,223,094 15,784,114 15,800,726 15,947,153 15,932,601 17,949,173  18,539,096  6,639,098 
        commitments and contingencies
                                                                                        
        shareholders’ equity:
                                                                                        
        preferred stock, par value 0.01 per share...
      2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000  2,000    2,000 2,000  2,000  
        common stock, par value 0.01 per share...
      490,000 489,000 489,000 489,000 489,000 488,000 488,000 488,000 488,000 487,000 487,000 487,000 487,000 491,000 491,000 491,000 491,000 491,000 491,000 491,000 491,000 490,000 490,000 490,000 489,000 489,000 488,000 488,000 488,000 487,000 487,000 487,000 486,000 485,000 485,000 484,000 484,000 483,000 483,000 483,000 483,000 482,000 475,000 475,000 474,000 471,000 469,000 469,000 469,000 468,000 467,000 466,000 466,000 465,000 465,000 465,000 463,000 461,133 460,620 455,522 453,533 389,366 383,152 381,971 375,935 368,184 366,772 364,420 363,287 361,320 360,297 359,689 358,475 355,632 351,176 348,760 316,810 313,854 295,455  284,367  
        additional paid-in capital
      745,385,000 744,692,000 739,052,000 732,068,000 722,275,000 723,719,000 717,190,000 712,234,000 702,609,000 699,554,000 693,899,000 686,501,000 679,390,000 681,335,000 674,773,000 666,087,000 658,050,000 658,728,000 646,049,000 638,991,000 632,138,000 635,595,000 628,051,000 621,585,000 621,967,000 620,236,000 614,194,000 611,596,000 616,206,000 617,334,000 613,310,000 608,932,000 609,404,000 611,063,000 606,415,000 603,438,000 605,331,000 604,364,000 596,453,000 593,170,000 592,769,000 589,885,000 586,533,000 583,338,000 580,282,000 581,114,000 577,971,000 575,454,000 573,574,000 572,401,000 568,896,000 566,409,000 564,379,000 564,883,000 563,383,000 562,152,000 560,346,000 561,492,336 560,635,634 548,871,155 541,145,617 280,102,227 267,554,133 265,437,511 258,599,927 256,340,530 254,673,492 253,117,552 251,812,110 256,696,849 255,591,116 254,953,573          170,334,196 
        retained earnings
      1,102,489,000 1,090,479,000 1,045,628,000 1,023,184,000 977,556,000 934,655,000 907,776,000 860,058,000 826,879,000 789,553,000 744,227,000 709,372,000 676,347,000 653,277,000 602,399,000 563,191,000 535,936,000 500,212,000 463,820,000 427,188,000 396,130,000 353,930,000 307,144,000 273,758,000 280,060,000 249,003,000 227,286,000 195,036,000 156,309,000 129,552,000 112,337,000 92,346,000 84,360,000 99,126,000 67,725,000 55,617,000 9,844,000                                              
        accumulated other comprehensive income
      -2,567,000 781,000 919,000 153,000 294,000  2,578,000                                                       -6,037,959 -5,301,389 -5,479,581                   
        treasury stock
      -141,819,000 -75,424,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -41,284,000 -40,635,000 -40,635,000 -40,635,000 -40,635,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -40,158,000 -33,158,000 -17,658,000 -10,658,000 -10,658,000 -10,658,000 -10,658,000 -10,658,000 -5,202,000                             
        total shareholders’ equity
      1,703,980,000 1,761,019,000 1,744,806,000 1,714,612,000 1,659,332,000 1,616,525,000 1,586,750,000 1,526,838,000 1,484,900,000 1,447,226,000 1,382,366,000 1,338,766,000 1,299,465,000 1,275,369,000 1,211,825,000 1,165,309,000 1,131,300,000 1,099,914,000 1,036,322,000 991,616,000 952,468,000 912,714,000 879,636,000 839,770,000 846,697,000 811,449,000 786,567,000 751,033,000 716,201,000 690,506,000 675,507,000 650,681,000 642,649,000 659,054,000 623,010,000 607,812,000 565,151,000 528,468,000 495,817,000 493,920,000 470,896,000 466,765,000 451,459,000 440,937,000 449,397,000 448,742,000 439,780,000 448,404,000 433,004,000 427,686,000 365,449,000 357,305,000 339,684,000 350,235,000 348,858,000 352,892,000 339,906,000 342,227,200 335,914,182 317,790,086 306,816,770 57,429,519 50,928,195 55,818,770 58,882,832 59,627,526 61,858,830 65,001,121 70,145,678 76,714,463 79,911,348 84,547,785 88,458,931 89,215,957 89,619,657 90,011,628 53,162,567 54,382,363 57,616,463 54,071,401 55,514,238 67,741,093 
        total liabilities and shareholders’ equity
      1,894,716,000 1,963,762,000 1,947,451,000 1,931,698,000 1,864,487,000 1,832,333,000 1,810,882,000 1,776,561,000 1,683,715,000 1,668,961,000 1,622,916,000 1,540,855,000 1,535,712,000 1,532,820,000 1,530,323,000 1,499,438,000 1,487,231,000 1,466,919,000 1,428,591,000 1,350,715,000 1,310,500,000 1,269,228,000 1,224,961,000 1,161,057,000 1,136,376,000 1,120,157,000 1,062,550,000 1,011,080,000 968,190,000 933,424,000 883,744,000 833,249,000 795,140,000 779,956,000 727,170,000 707,635,000 655,443,000 627,559,000 584,753,000 580,002,000 556,046,000 559,412,000 534,323,000 525,171,000 525,464,000 489,847,000 472,170,000 487,369,000 465,956,000 462,754,000 400,021,000 393,505,000 367,923,000 385,524,000 381,001,000 385,921,000 369,230,000 373,877,725 365,205,718 347,013,124 343,175,692 92,327,131 80,531,926 81,340,381 77,473,444 80,139,887 81,860,906 84,721,076 89,507,492 96,228,505 98,205,857 99,294,976 102,682,025  105,420,383 105,958,781 69,095,168   72,610,497 70,899,952  
        acquired technology, net of accumulated amortization of 220,392 and 203,621
       56,783,000                                                                                 
        other intangible assets, net of accumulated amortization of 13,269 and 11,842
       4,019,000                                                                                 
        acquired technology, net of accumulated amortization of 216,199 and 203,621
        60,976,000                                                                                
        other intangible assets, net of accumulated amortization of 12,910 and 11,842
        4,378,000                                                                                
        acquired technology, net of accumulated amortization of 212,007 and 203,621
         65,168,000                                                                               
        other intangible assets, net of accumulated amortization of 12,550 and 11,842
         4,738,000                                                                               
        acquired technology, net of accumulated amortization of 207,814 and 203,621
          69,361,000                                                                              
        other intangible assets, net of accumulated amortization of 12,194 and 11,842
          5,094,000                                                                              
        acquired technology, net of accumulated amortization of 203,621 and 186,850
           73,554,000                                                                             
        other intangible assets, net of accumulated amortization of 11,842 and 10,414
           5,446,000                                                                             
        accumulated other comprehensive loss
           -1,055,000  -4,660,000 -3,794,000 -1,086,000 -14,965,000 -16,312,000 -15,477,000 -18,452,000 -24,556,000 -23,178,000 -21,895,000 -18,235,000 -32,756,000 -33,772,000 -35,009,000 -36,019,000 -14,767,000 -14,781,000 -14,537,000 -16,997,000 -14,119,000 -14,805,000 -15,520,000 -16,234,000 -9,994,000 -10,451,000 -10,968,000 -11,464,000 -11,459,000 -11,571,000 -10,352,000 -10,666,000 -9,587,000 -9,701,000 -10,522,000 -9,819,000 -3,678,000 -3,958,000 -4,212,000 -4,382,000 -4,073,000 -4,147,000 -4,246,000 -4,368,000 -5,213,000 -5,327,000 -5,536,000 -5,702,000 -5,396,000 -5,599,000 -5,813,000 -5,857,307 -5,579,227 -5,944,320 -5,877,409                  -120,577 -86,095  -30,819 
        acquired technology, net of accumulated amortization of 199,428 and 186,850
            77,747,000                                                                            
        other intangible assets, net of accumulated amortization of 11,484 and 10,414
            5,804,000                                                                            
        acquired technology, net of accumulated amortization of 195,235 and 186,850
             81,940,000                                                                           
        other intangible assets, net of accumulated amortization of 11,125 and 10,414
             6,163,000                                                                           
        acquired technology, net of accumulated amortization of 191,043 and 186,850
              86,132,000                                                                          
        other intangible assets, net of accumulated amortization of 10,769 and 10,414
              6,519,000                                                                          
        acquired technology, net of accumulated amortization of 186,850 and 189,671
               90,325,000                                                                         
        other intangible assets, net of accumulated amortization of 10,414 and 8,989
               6,874,000                                                                         
        acquired technology, net of accumulated amortization of 182,657 and 189,671
                94,518,000                                                                        
        other intangible assets, net of accumulated amortization of 10,055 and 8,989
                7,233,000                                                                        
        acquired technology, net of accumulated amortization of 178,459 and 189,671
                 98,216,000                                                                       
        other intangible assets, net of accumulated amortization of 9,696 and 8,989
                 7,592,000                                                                       
        acquired technology, net of accumulated amortization of 174,820 and 189,671
                  35,843,000                                                                      
        other intangible assets, net of accumulated amortization of 9,341 and 8,989
                  7,947,000                                                                      
        acquired technology, net of accumulated amortization of 189,671 and 173,635
                   38,382,000                                                                     
        other intangible assets, net of accumulated amortization of 8,989 and 7,565
                   8,247,000                                                                     
        acquired technology, net of accumulated amortization of 187,132 and 173,635
                    40,921,000                                                                    
        other intangible assets, net of accumulated amortization of 8,631 and 7,565
                    8,657,000                                                                    
        acquired technology, net of accumulated amortization of 183,928 and 173,635
                     39,375,000                                                                   
        other intangible assets, net of accumulated amortization of 8,273 and 7,565
                     9,015,000                                                                   
        acquired technology, net of accumulated amortization of 178,782 and 173,635
                      44,521,000                                                                  
        other intangible assets, net of accumulated amortization of 7,918 and 7,565
                      9,370,000                                                                  
        acquired technology, net of accumulated amortization of 173,635 and 153,050
                       49,668,000                                                                 
        other intangible assets, net of accumulated amortization of 7,565 and 6,155
                       9,711,000                                                                 
        acquired technology, net of accumulated amortization of 168,489 and 153,050
                        54,814,000                                                                
        other intangible assets, net of accumulated amortization of 7,206 and 6,155
                        10,028,000                                                                
        acquired technology, net of accumulated amortization of 163,343 and 153,050
                         59,960,000                                                               
        other intangible assets, net of accumulated amortization of 6,848 and 6,155
                         10,386,000                                                               
        acquired technology, net of accumulated amortization of 158,197 and 153,050
                          65,106,000                                                              
        other intangible assets, net of accumulated amortization of 6,496 and 6,155
                          10,641,000                                                              
        acquired technology, net of accumulated amortization of 153,050 and 132,468
                           70,253,000                                                             
        other intangible assets, net of accumulated amortization of 6,155 and 4,768
                           10,685,000                                                             
        acquired technology, net of accumulated amortization of 147,903 and 132,468
                            75,364,000                                                            
        other intangible assets, net of accumulated amortization of 5,807 and 4,768
                            11,033,000                                                            
        acquired technology, net of accumulated amortization of 142,758 and 132,468
                             80,509,000                                                           
        other intangible assets, net of accumulated amortization of 5,458 and 4,768
                             11,382,000                                                           
        acquired technology, net of accumulated amortization of 137,613 and 132,468
                              85,629,000                                                          
        other intangible assets, net of accumulated amortization of 5,113 and 4,768
                              11,727,000                                                          
        acquired technology, net of accumulated amortization of 132,468 and 111,890
                               90,774,000                                                         
        other intangible assets, net of accumulated amortization of 4,768 and 3,384
                               12,072,000                                                         
        acquired technology, net of accumulated amortization of 127,323 and 111,890
                                95,919,000                                                        
        other intangible assets, net of accumulated amortization of 4,420 and 3,384
                                12,420,000                                                        
        acquired technology, net of accumulated amortization of 122,179 and 111,890
                                 101,063,000                                                       
        other intangible assets, net of accumulated amortization of 4,071 and 3,384
                                 12,769,000                                                       
        acquired technology, net of accumulated amortization of 117,034 and 111,890
                                  106,208,000                                                      
        other intangible assets, net of accumulated amortization of 3,726 and 3,384
                                  13,114,000                                                      
        acquired technology, net of accumulated amortization of 111,890 and 91,312
                                   110,951,000                                                     
        other intangible assets, net of accumulated amortization of 3,384 and 2,000
                                   13,456,000                                                     
        acquired technology, net of accumulated amortization of 106,755 and 91,312
                                    116,086,000                                                    
        other intangible assets, net of accumulated amortization of 3,036 and 2,000
                                    13,804,000                                                    
        acquired technology, net of accumulated amortization of 101,611 and 91,312
                                     121,230,000                                                   
        other intangible assets, net of accumulated amortization of 2,687 and 2,000
                                     14,153,000                                                   
        acquired technology, net of accumulated amortization of 96,461 and 91,312
                                      126,380,000                                                  
        other intangible assets, net of accumulated amortization of 2,342 and 2,000
                                      14,498,000                                                  
        acquired technology, net of accumulated amortization of 91,312 and 70,714
                                       131,529,000                                                 
        other intangible assets, net of accumulated amortization of 2,000 and 615
                                       14,840,000                                                 
        acquired technology, net of accumulated amortization of 86,162 and 70,714
                                        136,679,000                                                
        other intangible assets, net of accumulated amortization of 1,652 and 615
                                        15,188,000                                                
        acquired technology, net of accumulated amortization of 81,013 and 70,714
                                         141,828,000                                               
        other intangible assets, net of accumulated amortization of 1,303 and 615
                                         15,537,000                                               
        acquired technology, net of accumulated amortization of 75,864 and 70,714
                                          146,977,000                                              
        other intangible assets, net of accumulated amortization of 957 and 615
                                          15,883,000                                              
        acquired technology, net of accumulated amortization of 70,714 and 54,837
                                           152,127,000                                             
        other intangible assets, net of accumulated amortization of 615 and none
                                           16,225,000                                             
        accumulated deficit
                                           -25,557,000 -51,376,000 -49,876,000 -71,678,000 -73,627,000 -91,715,000 -98,762,000 -86,991,000 -88,305,000 -101,431,000 -105,716,000 -126,137,000 -130,159,000 -188,045,000 -193,587,000 -208,969,000 -204,211,000 -209,596,000 -204,128,000 -215,092,000 -213,870,962 -219,604,845 -225,594,271 -228,906,971 -217,026,115 -211,709,701 -204,523,131 -200,087,036 -197,108,705 -193,261,009 -188,588,162 -182,172,984 -180,472,203 -176,034,625 -170,731,642 -165,525,852 -161,332,467 -158,076,363 -155,115,798 -149,940,427 -145,356,626 -130,169,822 -125,528,231   
        acquired technology, net of accumulated amortization of 65,565 and 54,837
                                            157,276,000                                            
        other intangible assets, net of accumulated amortization of 311 and none
                                            16,139,000                                            
        acquired technology, net of accumulated amortization of 60,416 and 54,837
                                             162,469,000                                           
        inventories
                                              14,709,000 12,748,000    37,109,000                                     
        acquired technology, net of accumulated amortization of 57,587 and 54,837
                                              69,265,000                                          
        acquired technology, net of accumulated amortization of 54,837 and 43,838
                                               72,015,000                                         
        acquired technology, net of accumulated amortization of 52,087 and 43,838
                                                74,765,000                                        
        acquired technology, net of accumulated amortization of 49,338 and 43,838
                                                 77,514,000                                       
        acquired technology, net of accumulated amortization of 46,588 and 43,838
                                                  80,264,000                                      
        acquired technology, net of accumulated amortization of 43,838 and 32,841
                                                   83,014,000                                     
        acquired technology, net of accumulated amortization of 41,089 and 32,841
                                                    85,763,000                                    
        acquired technology, net of accumulated amortization of 38,339 and 32,841
                                                     88,513,000                                   
        acquired technology, net of accumulated amortization of 35,591 and 32,841
                                                      91,261,000                                  
        acquired technology, net of accumulated amortization of 32,841 and 21,868
                                                       94,011,000                                 
        acquired technology, net of accumulated amortization of 30,091 and 21,868
                                                        96,768,000                                
        acquired technology, net of accumulated amortization of 27,351 and 21,868
                                                         99,494,000                               
        acquired technology, net of accumulated amortization of 24,610 and 21,868
                                                          102,196,000                              
        acquired technology
                                                           104,624,000    390,795        1,234,272   2,505,576 2,929,344 3,353,112 3,776,880 4,200,648 4,624,416 5,048,184 5,471,952 5,895,720 6,319,488 8,014,559 8,438,327 8,862,095 10,980,935 
        20,184 and 18,735
                                                            11,713,000                            
        acquired technology, net of accumulated amortization of
                                                                     386,736 810,504                  
        19,126 and 17,000
                                                            107,367,000                            
        19,663 and 18,735
                                                             12,011,000                           
        17,029 and 17,000
                                                             380,000                           
        19,154 and 18,735
                                                              12,268,000                          
        17,014 and 17,000
                                                              376,000                          
        stock warrant liability
                                                                 4,588,178 13,109,785 10,659,755 8,951,791 5,589,350 3,006,922 3,720,165 3,810,190 2,808,578 2,515,868              
        18,376,487 and 17,335,662
                                                                10,827,191                        
        16,984,912 and 16,950,718
                                                                405,450                        
        18,027,557 and 17,335,662
                                                                 10,487,827                       
        16,970,257 and 16,950,718
                                                                 420,105                       
        17,680,439 and 17,335,662
                                                                  9,814,557                      
        16,955,603 and 16,950,718
                                                                  434,760                      
        deferred license fees
                                                                   4,028,486 4,028,486 4,028,487 6,178,886 6,047,467 6,097,868 6,148,267 6,148,267 6,148,267 6,148,268 7,178,268 7,177,457 7,178,268 7,178,268 7,178,267 7,178,268 7,178,268 3,478,267 2,918,267 2,168,268 1,266,667 
        16,991,110 and 15,788,490
                                                                    9,938,093                    
        16,950,718 and 15,716,446
                                                                                        
        16,606,630 and 15,788,490
                                                                                        
        16,563,982 and 15,716,446
                                                                                        
        16,212,271 and 15,788,490
                                                                                        
        16,140,214 and 15,716,446
                                                                                        
        unrealized gain on available-for-sale securities
                                                                      -7,994 25,517 77,575 105,311 141,265 126,497             
        15,435,321 and 13,902,617
                                                                        11,509,541                
        15,292,677 and 14,021,374
                                                                        1,658,040                
        14,922,162 and 13,902,617
                                                                         11,949,755               
        14,868,910 and 14,021,374
                                                                         2,081,808               
        unrealized loss on available for sale securities
                                                                            -7,440 -35,835  -50,202 -16,682 -44,611 -27,092 -82,846     
        preferred stock, par value .01 per share, 5,000,000 shares authorized, 200,000 shares of series a nonconvertible preferred stock issued and outstanding
                                                                              2,000          
        additional paid-in-capital
                                                                              253,590,921 250,240,994 247,359,526 244,821,277 202,811,276 199,505,981 187,609,407 179,396,198 177,856,974  
        unrealized gain on available for sale securities
                                                                              33,387          
        preferred stock, par value .01 per share, 5,000,000 shares authorized, 200,000 shares of series a nonconvertible preferred stock issued and outstanding (liquidation value of 7.50 per share or 1,500,000), 300,000 shares of series b convertible preferred stock authorized and none outstanding, 5,000 shares of series c-1 convertible preferred stock authorized and none outstanding, 5,000 shares of series d convertible preferred stock authorized and none outstanding
                                                                                2,000 2,000 2,000      
        restricted cash
                                                                                     3,975,000 4,050,000  
        current portion of long-term debt
                                                                                     300,000 300,000  
        long-term debt, less current portion
                                                                                     3,975,000 4,050,000  
        commitments
                                                                                        
        deferred compensation
                                                                                       -269,955 
        200,000 shares of series a nonconvertible preferred stock issued
                                                                                        
        and outstanding
                                                                                     2,000   
        28,752,855 and 27,903,385 shares issued and outstanding
                                                                                     287,529   
        capital lease obligations
                                                                                       2,630 
        200,000 shares series a nonconvertible preferred stock issued and
                                                                                        
        outstanding (liquidation value of 7.50 per share or 1,500,000),
                                                                                        
        300,000 shares series b convertible preferred stock issued and
                                                                                        
        outstanding (liquidation value of 21.48 per share or 6,444,000),
                                                                                        
        5,000 shares of series c-1 convertible preferred stock authorized and
                                                                                        
        none outstanding, 5,000 shares of series d convertible preferred stock
                                                                                        
        authorized and none outstanding
                                                                                       5,000 
        common stock
                                                                                        
        27,228,302 and 24,196,765 shares issued and outstanding, respectively
                                                                                       272,283 
        deficit accumulated during development-stage
                                                                                       -102,569,612 
      Cashflow Statements:
      Quarterly
      Annual
        Unit: USD2026-03-31 2025-12-31 2025-09-30 2025-06-30 2025-03-31 2024-12-31 2024-09-30 2024-06-30 2024-03-31 2023-12-31 2023-09-30 2023-06-30 2023-03-31 2022-12-31 2022-09-30 2022-06-30 2022-03-31 2021-12-31 2021-09-30 2021-06-30 2021-03-31 2020-12-31 2020-09-30 2020-06-30 2020-03-31 2019-12-31 2019-09-30 2019-06-30 2019-03-31 2018-12-31 2018-09-30 2018-06-30 2018-03-31 2017-12-31 2017-09-30 2017-06-30 2017-03-31 2016-12-31 2016-09-30 2016-06-30 2016-03-31 2015-12-31 2015-09-30 2015-06-30 2015-03-31 2014-12-31 2014-09-30 2014-06-30 2014-03-31 2013-12-31 2013-09-30 2013-06-30 2013-03-31 2012-12-31 2012-09-30 2012-06-30 2012-03-31 2011-12-31 2011-09-30 2011-06-30 2011-03-31 2010-12-31 2010-09-30 2010-06-30 2010-03-31 2009-12-31 2009-09-30 2009-06-30 2009-03-31 2008-12-31 2008-09-30 2008-06-30 2008-03-31 2007-12-31 2007-09-30 2007-06-30 2007-03-31 2005-06-30 2004-03-31 
                                                                                       
          cash flows from operating activities:
                                                                                       
          net income
        35,896,000 66,342,000 44,025,000 67,264,000 64,444,000 46,019,000 66,870,000 52,337,000 56,853,000 61,978,000 51,516,000 49,678,000 39,839,000 65,134,000 53,455,000 41,502,000 49,970,000 45,876,000 46,109,000 40,541,000 51,687,000 53,902,000 40,500,000 815,000 38,155,000 26,428,000 36,962,000 43,440,000 31,474,000 19,249,000 22,818,000 10,814,000 5,959,000 32,813,000 13,520,000 47,187,000 10,365,000 25,819,000 -1,500,000 21,802,000 1,949,000 18,088,000 7,047,000 -11,771,000 1,314,000 13,126,000 4,285,000 20,421,000 4,022,000 57,886,000 5,542,000   5,385,000 -5,468,000 10,964,000 -1,221,000 5,733,883 5,989,426 3,312,700 -11,880,856 -5,316,414 -7,186,570 -4,436,095 -2,978,331       -5,205,790 -4,193,385  -2,960,565 -5,175,371 -4,583,801  -97,018,319 
          adjustments to reconcile net income to net cash from operating activities:
                                                                                       
          depreciation
        7,563,000 7,457,000 7,530,000 6,854,000 6,548,000 6,452,000 6,396,000 6,476,000 6,616,000 7,281,000 6,921,000 6,711,000 6,496,000 6,833,000 6,453,000 5,902,000 5,627,000 5,497,000 5,242,000 4,966,000 4,263,000 4,070,000 3,864,000 3,668,000 3,615,000 3,498,000 3,159,000 3,041,000 2,758,000 2,518,000 1,672,000 2,250,000 2,172,000 1,281,000 1,240,000 1,188,000 1,210,000 1,268,000 1,163,000 937,000 902,000 863,000 784,000 737,000 702,000 578,000 562,000 436,000 501,000 551,000 508,000 476,000 509,000 529,000 522,000 509,000 418,000 358,841 358,708 361,696 371,901 377,537 384,481 431,241 513,557 516,800 516,700 518,654 517,472 521,910 494,944 480,393 445,937 426,687 427,370 454,040 466,139 -5,320,356 6,058,470 
          amortization of intangibles
        5,588,000 4,552,000 4,553,000 4,548,000 4,545,000 4,552,000 4,551,000 4,549,000 4,548,000 4,551,000 4,557,000 3,994,000 2,891,000 2,897,000 3,562,000 5,502,000 5,498,000 5,504,000 5,505,000 5,497,000 5,488,000 5,495,000 5,494,000 5,490,000 5,490,000 5,493,000 5,493,000 5,490,000 5,486,000 5,483,000 5,493,000 5,495,000 5,491,000 5,498,000 5,498,000 5,495,000 5,492,000 5,453,000 5,460,000 2,829,000 2,750,000 2,750,000 2,749,000 2,750,000 2,750,000 2,749,000 2,750,000 2,748,000 2,750,000 2,749,000 2,741,000 2,741,000 2,742,000   14,000 15,000 14,655 14,655 14,655 4,884 386,736 423,768 423,768 423,768 423,768 423,768 423,768 423,768 423,768 423,768 423,768 423,768 423,768 423,768 423,768 -5,122,247 5,969,783 
          investment losses
        2,086,000                                                                               
          impairment of minority investments
        415,000                                                                               
          stock-based compensation
        7,554,000 5,339,000 6,469,000 9,343,000 7,076,000 6,220,000 5,289,000 9,349,000 9,174,000                                                                       
          deferred income tax expense
        3,000         -11,322,000    -19,070,000 -5,594,000 -902,000 -1,380,000 -2,478,000 2,768,000 943,000 515,000    940,000 -3,143,000 -1,415,000 -626,000 -592,000 -28,634,000 -3,492,000 19,240,000 72,000 17,592,000 -604,000 6,359,000 1,049,000                                           
          retirement plan expense, net of benefit payments
        375,000 423,000 424,000 424,000 423,000 423,000 423,000 632,000 330,000 782,000 950,000 615,000 782,000                                                                   
          decrease in assets:
                                                                                       
          accounts receivable
        26,324,000 -45,739,000 72,829,000 -7,480,000 -25,915,000 -25,955,000 36,693,000 -4,802,000 20,266,000 -17,658,000 -12,802,000 -16,713,000 -13,000 -14,471,000 -3,260,000 30,014,000 2,692,000 -11,404,000 3,394,000 -8,302,000 -9,066,000 17,089,000 -30,852,000 14,094,000 -22,140,000 5,322,000 1,178,000 -14,828,000 -8,995,000 78,000 -7,624,000 -12,815,000 29,587,000 -9,099,000 -3,554,000 -3,381,000 -11,327,000 -2,518,000 -3,022,000 2,882,000 3,863,000 3,621,000 -10,972,000 786,000 3,911,000 32,000 -1,607,000 4,008,000 -8,851,000 2,128,000 -3,334,000 -3,924,000 -1,870,000 -786,000 1,709,000 -872,000 2,019,000 1,034,756 -5,220,048 -555,844 1,262,485 -2,551,533 -810,960 -1,486,083 944,958 -1,457,910 -125,582 52,595 637,086 -657,683 -63,096 585,103 80,648 94,422 -652,165 -66,822 342,412 1,521,684 -1,108,683 
          inventory
        -7,301,000 -28,291,000 -4,422,000 -10,801,000 -14,460,000 -6,980,000 -4,115,000 1,062,000 2,890,000 5,611,000 -5,551,000 -1,610,000 8,975,000 -658,000 -16,239,000 -22,999,000 -9,164,000 -14,171,000 -17,773,000 -3,681,000 -10,498,000 -7,799,000 228,000 -10,455,000 -10,726,000 -7,965,000 2,367,000 3,972,000 1,735,000 -3,554,000 -14,033,000 -2,405,000 -17,373,000 -3,532,000 -8,296,000 -7,769,000 646,000 -1,211,000 470,000    3,281,000    -9,170,000 -6,072,000 -3,997,000 -2,742,000 821,000 409,000 1,936,000 -1,567,000 -880,000 -2,997,000 -1,731,000 -1,612,109        42,059 -41,370     -38,956 23,056 5,333  -27,327 
          other current assets
        39,808,000 33,667,000 -17,151,000 -20,177,000 400,000 16,068,000 6,086,000 -43,251,000 -2,113,000 -3,921,000 -49,691,000 3,440,000 8,598,000 -21,288,000 9,475,000 -9,505,000 -3,525,000 36,039,000 -7,914,000 -11,112,000 5,400,000 9,351,000 3,113,000 -13,673,000 7,706,000 -10,636,000 -1,786,000 -2,993,000 177,000 4,976,000 8,942,000 -5,033,000 -4,025,000 -1,049,000 -2,036,000 -1,415,000 616,000 1,107,000 -1,803,000 -878,000 -2,296,000 2,136,000 250,000 -1,120,000 703,000 8,979,000 -261,000 -1,564,000 -4,887,000 -248,000 -145,000 1,390,000 -3,703,000 461,000 -488,000 -1,430,000 -827,000 69,675 1,124,546 -1,158,719 305,024 -1,364,060 -168,112 -83,483 38,655 91,880 57,985 -76,568 -20,988 186,992 91,357 -157,851 90,525 72,005 -6,892 -99,368 -33,409  128,519 
          other assets
        -483,000 -11,330,000 -4,132,000 -5,664,000 -2,568,000 1,429,000 -10,841,000 3,537,000 2,907,000 -3,842,000 627,000 2,150,000 5,515,000 23,689,000 -5,240,000 -1,966,000 9,488,000 -2,599,000 -18,535,000 -7,872,000 -7,133,000 -4,760,000 -2,779,000 -2,697,000 -3,245,000 -3,032,000 -4,413,000 -2,880,000 -2,966,000 -26,153,000 140,000 -37,732,000 -177,000 -257,000 -30,000 -102,000 92,000 116,000 120,000 103,000 -472,000 58,000 113,000 60,000 20,000 83,000 -14,000   40,000 -7,000 -16,000 18,000 -15,000 27,000 -5,000 15,000 13,420 10,851 9,225 -115,931 49,582 4,821 -25,375 -18,281 10,482 -850 -153,417 -13,719 2,500 2,500 2,500 2,500 2,500 12,500 2,500 -7,500  -121,773 
          increase in liabilities:
                                                                                       
          accounts payable and accrued expenses
        -15,362,000 1,810,000 -4,328,000 18,040,000 -13,408,000 952,000 -2,962,000 20,344,000 -7,977,000 4,079,000 17,619,000 6,465,000 -24,116,000 -3,879,000 14,343,000 -2,865,000 -4,261,000 5,213,000 13,725,000 4,100,000 -21,136,000 11,328,000 699,000 9,008,000 -29,340,000 17,343,000 272,000 10,018,000 -12,117,000 1,124,000 13,562,000 -8,682,000 -4,441,000 12,516,000 5,820,000 6,367,000 -8,283,000 9,496,000 491,000 3,509,000 -9,134,000 -402,000 366,000 9,410,000 -8,584,000 6,174,000 -5,033,000 6,512,000 -4,598,000 3,349,000 451,000 6,651,000 -6,837,000 3,180,000 -361,000 3,886,000 -1,987,000 1,467,861 3,470,371 1,583,337 253,119 52,752 871,135 1,185,884 278,171 -1,607,897 974,189 921,250 -498,481 -1,184,063 1,149,001 915,678 -259,176 -1,290,162 -50,460 433,501 -909,422  2,844,997 
          other current liabilities
        8,291,000 1,965,000 747,000 -20,020,000 16,867,000 3,246,000 164,000 -14,927,000 12,786,000 2,705,000 -3,375,000 -33,685,000 12,874,000 21,460,000 2,800,000 -9,150,000 5,807,000 3,534,000 1,107,000 -1,870,000 -666,000 3,489,000 -167,000 -3,753,000 3,114,000 -10,770,000 -1,149,000 2,992,000 3,744,000 5,795,000 -9,000 -25,000 -1,149,000 53,000 -602,000 -219,000 4,367,000 -261,000 -334,000 590,000 63,000 51,000 -3,000 -55,000 -382,000 52,000 -600,000 1,017,000 10,000 -925,000   14,000 -208,000 206,000 -1,000 -1,139                      
          deferred revenue
        -188,000 -1,894,000 -13,381,000 13,109,000 -8,491,000 -16,158,000 -20,747,000 38,067,000 -27,270,000 -15,968,000 27,545,000 -7,120,000 -8,616,000 -226,164,000 39,985,000 47,085,000 45,891,000 41,463,000 67,205,000 39,816,000 53,000,000 48,169,000 68,517,000 31,998,000 43,685,000 43,472,000 45,636,000 35,133,000 33,080,000 30,699,000 35,517,000 34,092,000 30,331,000 6,539,000 1,358,000 399,000 106,000 64,000 1,046,000 2,250,000 401,000 -1,000 2,030,000 46,382,000 2,000,000 101,000 3,692,000 636,000 755,000 1,332,000 44,000 1,676,000 292,000 293,000 1,042,000 1,254,601 1,685,000 345,000 1,300,000 1,864,601 -520,922 450,000 125,000 1,364,860 1,079,007 -385,773 -426,567 914,656 1,712,634 -150,000 -111,371 -391,183 -116,051 -281,395 750,000 550,977 67,204 
          other liabilities
        -1,693,000 -581,000 2,585,000 -978,000 -337,000 -1,345,000 -819,000 -854,000 -682,000 -525,000 -3,057,000 -959,000 -486,000 -42,548,000 5,526,000 2,246,000 2,384,000 -11,797,000 17,478,000 7,520,000 6,935,000 -2,067,000 3,038,000 3,422,000 2,994,000 17,465,000 806,000 -3,789,000 3,132,000 5,559,000 3,000                                                 
          net cash from operating activities
        108,876,000 31,149,000 97,183,000 51,936,000 30,562,000 34,713,000 79,858,000 67,013,000 72,156,000 37,070,000 60,309,000 9,777,000 47,621,000 2,641,000 38,044,000 33,522,000 52,608,000 56,779,000 75,210,000 29,620,000 29,496,000 72,965,000 43,797,000 26,284,000 5,746,000 56,166,000 53,867,000 49,829,000 34,050,000 26,840,000 45,004,000 11,137,000 38,815,000 62,104,000 14,632,000 54,985,000 1,644,000 40,004,000 4,103,000 36,021,000 210,000 32,991,000 5,443,000 28,198,000 46,980,000 28,493,000 -6,231,000 32,328,000 -7,320,000 22,411,000 7,041,000 26,433,000 -10,898,000 10,575,000 -2,022,000 11,213,000 -2,012,000 8,614,730 5,954,554 222,645 1,617,498 773,609 -2,215,766 -2,315,133 -442,848 -2,778,445 -3,033,609 -4,292,983 -4,505,171 -983,487 -522,949 -2,906,327 -3,372,401 -1,646,332 -2,575,906 -3,579,712 -3,294,814  -39,905,736 
          capital expenditures
        -5,762,000 -12,602,000 -12,201,000 -15,722,000 -7,572,000 -16,552,000 -12,117,000 -16,054,000 -7,362,000 -7,793,000 -23,993,000 -18,996,000 -8,332,000 -12,565,000 -6,138,000 -12,051,000 -8,674,000 -15,342,000 -11,043,000 -10,337,000 -9,965,000 -9,354,000 -8,691,000 -7,321,000 -4,093,000 -5,104,000 -5,830,000 -6,021,000 -13,634,000 -4,790,000 -6,791,000 -6,170,000 -4,150,000 -6,582,000 -15,101,000 -6,845,000 1,297,000 -2,939,000 -1,946,000 -2,109,000 -173,000 -453,000 -1,637,000 -1,235,000 -2,636,000 -1,939,000 -1,579,000 -1,665,000 -1,222,000 -1,765,000 -1,886,000 -549,000 -224,000 -252,000 -1,802,000 -698,072 -1,034,966 -475,365 -74,233 -55,076 -89,300 -76,486 -30,452 -95,801 -689,754 -219,578 -564,266 -341,471 -144,255 -175,865  -8,420,286 
          free cash flows
        103,114,000 18,547,000 84,982,000 36,214,000 22,990,000 18,161,000 67,741,000 50,959,000 64,794,000 29,277,000 36,316,000 -9,219,000 39,289,000 -9,924,000 31,906,000 21,471,000 43,934,000 41,437,000 64,167,000 19,283,000 19,531,000 63,611,000 35,106,000 18,963,000 1,653,000 51,062,000 48,037,000 43,808,000 20,416,000 22,050,000 38,213,000 4,967,000 34,665,000 55,522,000 -469,000 48,140,000 2,941,000 37,065,000 2,157,000 33,912,000 37,000 32,538,000 3,806,000 26,963,000 44,344,000 26,554,000 -7,810,000 30,663,000 -8,542,000 22,411,000 5,276,000 24,547,000 -11,447,000 10,575,000 -2,246,000 10,961,000 -3,814,000 8,614,730 5,256,482 -812,321 1,142,133 773,609 -2,289,999 -2,370,209 -532,148 -2,778,445 -3,110,095 -4,323,435 -4,600,972 -983,487 -1,212,703 -2,906,327 -3,591,979 -2,210,598 -2,917,377 -3,723,967 -3,470,679  -48,326,022 
          cash flows from investing activities:
                                                                                       
          purchases of property and equipment
        -8,605,000 -16,087,000 -12,847,000 -14,477,000 -13,059,000 -12,677,000 -13,626,000 -9,128,000 -7,206,000 -7,584,000 -24,934,000 -18,176,000 -9,098,000 -11,378,000 -9,783,000 -10,585,000 -10,751,000 -13,665,000 -8,828,000 -10,730,000 -9,938,000 -8,778,000 -7,409,000 -7,022,000 -4,782,000 -4,742,000 -4,995,000 -7,039,000 -13,283,000 -4,466,000 -7,505,000 -4,687,000 -8,733,000 -6,582,000 -13,504,000 -9,086,000 -631,000 -2,939,000 -2,199,000 -1,646,000 -516,000 -453,000 -1,504,000 -1,196,000 -1,950,000 -1,939,000 -1,263,000 -2,034,000 -917,000                        -219,578 -564,266 -341,471 -144,255 -175,865   
          purchase of intangibles
        -40,000,000                                     44,000                    -439,644                  -25,750 
          purchases of investments
        -116,009,000 -55,913,000 -127,642,000 -153,179,000 -38,772,000 -256,899,000 -163,192,000 -74,810,000 -99,947,000 -228,099,000 -187,956,000 -49,841,000 -65,207,000 -237,227,000 -176,847,000 -263,004,000 -24,915,000 -369,840,000 -78,389,000 -189,731,000 -4,220,000 -199,921,000 -255,640,000 -148,592,000 -283,848,000 -284,411,000 -198,124,000 -165,471,000 -127,804,000 -240,274,000 -137,336,000 -123,375,000 -138,019,000 -201,040,000 -85,088,000 -170,136,000 -70,017,000 -55,034,000 -131,297,000 -193,929,000 -238,204,000 -186,152,000 -215,563,000 -51,957,000 -107,050,000 -118,236,000 -56,444,000 -127,244,000                        -30,074,485 -33,991,201 -9,796,618 -8,946,902 -8,601,461  -54,884,893 
          proceeds from sale and maturity of investments
        174,483,000 121,500,000 90,000,000 75,000,000 110,000,000 272,307,000 103,148,000 54,650,000 42,970,000 227,758,000 155,500,000 75,876,000 115,031,000 165,584,000 141,342,000 111,290,000 50,240,000 112,744,000 15,240,000 100,000,000                                                           
          net cash from investing activities
        9,869,000 39,500,000 -50,489,000 -92,656,000 58,169,000 2,731,000 -73,670,000 -29,288,000 -64,183,000 -7,925,000 -57,890,000 -58,153,000 40,675,000 -82,969,000 -50,037,000 -162,299,000 14,562,000 -270,761,000 -71,977,000 -200,557,000 85,544,000 401,337,000 -6,780,000 -100,327,000 97,026,000 -155,540,000 -136,656,000 62,587,000 -9,105,000 85,212,000 -43,929,000 -76,722,000 14,438,000 2,883,000 -52,855,000 -35,486,000 -40,120,000 40,618,000 -19,686,000 -73,530,000 14,126,000 -25,906,000 -25,054,000 -44,577,000 36,969,000 -14,397,000 -16,876,000 14,302,000 -25,338,000 -20,649,000 -21,363,000 8,633,000 -21,396,000 6,126,000 -83,243,000 3,707,000 37,324,000 36,401,205 -9,836,627 -195,488,598 -14,865,428 3,906,480 -2,466,264 1,103,556 -14,373,589 14,203,717 2,818,772 7,923,545 -16,920,046 -24,358,009 15,158,502 29,172,014 -19,372,063 -27,206,467 -455,089 -576,157 -4,432,326 38,772,422 -23,775,206 
          cash flows from financing activities:
                                                                                       
          proceeds from issuance of common stock
        578,000 403,000 543,000 495,000 579,000 444,000 589,000 548,000 639,000 480,000 561,000 453,000 518,000 323,000 400,000 444,000 403,000 371,000 349,000 439,000 348,000 307,000 279,000 331,000 259,000 231,000 213,000 241,000 204,000 182,000 180,000 235,000 201,000 205,000 180,000 190,000 159,000 122,000 115,000 103,000 99,000    90,000    86,000                              73,897,512 
          repurchases of common stock
        -67,119,000                                                                               
          payment of withholding taxes related to stock-based compensation to employees
        -7,738,000 -101,000 -28,000 -44,000 -9,398,000 -135,000 -922,000 -271,000 -7,058,000 -311,000 -466,000 -248,000 -7,181,000 -59,000 -306,000 -948,000 -7,896,000 -69,000 -1,862,000 -3,384,000 -9,634,000 -101,000 -1,128,000 -8,349,000 -4,816,000 -60,000 -1,448,000 -8,715,000 -5,757,000 -22,000 -567,000 -5,199,000 -5,832,000  -829,000 -4,960,000 -3,541,000  -46,000   -24,000 -33,000    -10,000                                 
          cash dividends paid
        -23,467,000 -21,326,000 -21,404,000 -21,400,000 -21,419,000 -18,332,000 -19,152,000 -19,158,000 -19,527,000 -16,652,000 -16,661,000 -16,653,000 -16,769,000 -14,256,000 -14,247,000 -14,247,000 -14,246,000 -9,484,000 -9,477,000 -9,483,000 -9,487,000 -7,116,000 -7,114,000 -7,117,000 -7,098,000 -4,711,000 -4,712,000 -4,713,000 -4,717,000 -2,828,000 -2,827,000 -2,828,000 -2,831,000 -1,412,000 -1,412,000 -1,414,000 -1,414,000                                           
          net cash from financing activities
        -97,746,000 -53,905,000 -20,889,000 -20,949,000 -30,238,000 -18,023,000 -19,485,000 -18,881,000 -25,946,000 -16,483,000 -16,566,000 -16,448,000 -23,432,000 -13,992,000 -14,153,000 -14,751,000 -21,739,000 -9,182,000 -10,990,000 -12,428,000 -18,773,000 -6,910,000 -7,963,000 -15,135,000 -11,655,000 -4,540,000 -5,947,000 -13,187,000 -10,919,000 -2,668,000 -3,214,000 -7,792,000 -8,939,000 -1,300,000 -2,062,000 -6,178,000 -4,772,000 4,327,000 69,000 -2,652,000 -1,758,000 472,000 316,000 441,000 -4,178,000 -6,069,000 -15,056,000 -7,007,000 -1,997,000 1,739,000 705,000 100,000 -8,093,000 -4,971,000 -141,000 433,000 -2,861,000 -345,148 5,766,450 2,400,259 250,984,837 7,486,023 1,130,485 5,412,219 -331,046 667,069 942,200 186,373 -831,877 -752,055 239,477 572,335 1,575,848 2,117,659 2,141,204 41,127,318 1,153,785 -106,366,339 107,229,901 
          increase in cash and cash equivalents
        20,999,000 16,744,000 25,805,000 -61,669,000 58,493,000   18,844,000 -17,973,000   -64,824,000 64,864,000    45,431,000 -223,164,000 -7,757,000 -183,365,000 96,267,000 467,392,000 29,054,000 -89,178,000 91,117,000 -103,914,000 -88,736,000 99,229,000 14,026,000    44,314,000    -43,248,000 84,949,000 -15,514,000 -40,161,000 12,578,000 7,557,000 -19,295,000 -15,938,000 79,771,000       35,166,000 -40,387,000 11,730,000 -85,406,000 15,353,000 32,451,000 44,670,787 1,884,377 -192,865,694 237,736,907          14,875,030   -26,735,140 -889,791   -29,672,767 43,548,959 
          cash and cash equivalents, beginning of period
        138,353,000  98,980,000  91,985,000  93,430,000  311,993,000  630,012,000  131,627,000  211,022,000  132,840,000  139,365,000  97,513,000  45,418,000  70,586,000  85,923,000  111,795,000  20,368,852  22,701,126  28,321,581  33,870,696  31,097,533   
          cash and cash equivalents, end of period
        159,352,000  25,805,000 -61,669,000 157,473,000  -13,297,000 18,844,000 74,012,000  -14,147,000 -64,824,000 158,294,000  -26,146,000 -143,528,000 357,424,000  -7,757,000 -183,365,000 726,279,000  29,054,000 -89,178,000 222,744,000  -88,736,000 99,229,000 225,048,000  -2,139,000 -73,377,000 177,154,000  -40,285,000 13,321,000 96,117,000  -15,514,000 -40,161,000 110,091,000  -19,295,000 -15,938,000 125,189,000  -38,163,000 39,623,000 35,931,000  -13,617,000 35,166,000 45,536,000  -85,406,000 15,353,000 144,246,000  1,884,377 -192,865,694 258,105,759  -3,551,545 4,200,642 7,553,643  727,363 3,816,935 6,064,487  14,875,030 26,838,022 12,702,080  -889,791 36,971,449 24,524,178 -10,742,186 43,548,959 
          supplemental disclosures:
                                                                                       
          unrealized gain on available-for-sale securities
        -3,334,000 195,000 788,000 -319,000 1,320,000 -3,706,000 7,093,000 -310,000 -2,666,000  1,456,000 -1,354,000 3,202,000     -256,000 -4,000 31,000 -66,000 -569,000 -791,000 -1,138,000 2,380,000 14,000 35,000 132,000 60,000 68,000 55,000 150,000 69,000        -233,000    22,000          55,000 65,000 -104,000      32,069 -6,630 -33,511    14,768  28,395 -69,222 83,589  27,929 -17,519 55,754   
          common stock issued to board of directors and scientific advisory board that was earned and accrued for in a previous period
        300,000 300,000 300,000 300,000 300,000 300,000 300,000 300,000 300,000  300,000                                        
          accrued dividends included in other current liabilities and other liabilities
        419,000                                                                               
          net change in accounts payable and accrued expenses related to purchases of property and equipment
        2,843,000 3,485,000 646,000 -1,245,000 5,487,000 -3,875,000 1,509,000 -6,926,000 -156,000 -209,000 941,000 -820,000 766,000 -1,187,000 3,645,000 -1,466,000 2,077,000 -1,677,000 -2,215,000 393,000 -27,000 -576,000 -1,282,000 -299,000 689,000 -362,000 -835,000 1,018,000 -351,000 -324,000 714,000 -1,483,000 4,583,000  -1,597,000 2,241,000 1,928,000  253,000 -463,000 343,000  -133,000 -39,000 -686,000  -316,000 369,000 -305,000                               
          cash paid for income taxes, net of refunds
        38,376,000 17,443,000 8,379,000 43,350,000 2,266,000 11,201,000 13,509,000 42,178,000 5,085,000                                                                       
          impairment of property and equipment and right-of-use asset due to ovjp restructuring
                                                                                       
          investment gains
         -2,135,000                                                                              
          deferred income tax benefit
           -1,501,000 -3,091,000   -3,466,000 -3,936,000   -6,846,000 -5,936,000         -2,204,000 -1,906,000               -1,632,000 -100,000 4,995,000 -169,000  307,000 3,650,000 334,000  1,904,000 5,060,000 1,773,000                               
          cash and cash equivalents, beginning of year
                                                                                       
          cash and cash equivalents, end of year
                                                                                       
          repurchases of common stock included in other current liabilities
                                                                                       
          amortization of premium and discount on investments
           -1,025,000 -1,471,000 -1,469,000 -1,654,000 -2,040,000 -2,236,000 -2,167,000 -2,591,000 -3,248,000 -3,597,000 -2,992,000 -2,442,000 -756,000 -271,000 -144,000 -101,000 -58,000 -70,000 -667,000 -1,013,000 -1,275,000 -2,005,000 -2,115,000 -1,378,000 -1,409,000 -1,741,000 -1,940,000 -1,862,000 -1,363,000 -966,000 -816,000 -795,000 -698,000 -562,000 -514,000 -515,000 -504,000 -297,000 -218,000 -194,000 -150,000 -135,000 -126,000 -136,000 -133,000 -136,000 -122,000 -117,000 -103,000 -116,000 -166,000 -175,000 -199,000 -238,000 -291,282 -316,797 -102,452 -64,039 -50,846 -41,723 -36,549 -43,619 -69,494 -89,625 -122,059 -144,887 -101,738 -115,431 -389,034 -438,296 -122,307 -72,955 -70,701 -45,650   
          purchases of intangibles
                  -500,000 -66,012,000 -51,000  -4,749,000 -12,000  -96,000 -298,000     -401,000                                                   
          decrease in cash and cash equivalents
                 12,662,000     -26,146,000                -2,139,000    -40,285,000           8,027,000   -34,655,000             12,166,112 -3,551,545 4,200,642 -15,147,483    -22,257,094    -21,168,616    -6,573,355   
          stock-based compensation to employees
                 4,976,000 6,880,000 6,487,000 3,992,000 5,852,000 8,246,000 8,197,000 6,085,000 12,025,000 8,222,000 9,424,000 5,200,000 6,824,000 6,889,000 7,183,000 5,735,000 5,451,000 3,591,000 3,496,000 3,610,000 2,735,000 3,534,000 3,387,000 2,776,000 3,817,000 3,063,000 2,263,000 3,141,000 3,143,000 2,830,000 2,571,000 2,830,000 2,414,000 2,720,000 2,324,000 1,715,000 1,945,000 1,807,000                                 
          stock-based compensation to board of directors and scientific advisory board
                 510,000 423,000 418,000 423,000 445,000 347,000 344,000 430,000 352,000 348,000 374,000 330,000 514,000 425,000 454,000 254,000 422,000 242,000 368,000 516,000 1,130,000 1,231,000 1,106,000 897,000 719,000 562,000 619,000 709,000 442,000 382,000 483,000 408,000 473,000 159,000 293,000 366,000 266,000 266,000 260,000 203,000 212,000 203,000 170,000 224,000 133,000 211,000 224,000 213,000 124,688 534,158 188,637 529,480 671,729 276,318 234,962 149,703 433,994 144,789 104,987 71,524 399,325 112,078 116,985 116,628 435,714 90,086 119,378 109,533   
          the following non-cash activities occurred:
                                                                                       
          unrealized loss on available-for-sale securities
                     1,611,000 -2,616,000 -2,064,000 -5,031,000                 98,000   -23,000 -463,000 125,000    1,000    -28,000 15,000 43,000    -3,000       216,911 -10,550      27,736             
          cash paid for income tax
                  21,283,000                                                                     
          retirement plan expense
                     1,278,000 1,280,000 1,359,000 1,359,000 2,199,000 2,219,000 2,229,000 2,228,000 1,414,000 1,414,000 1,414,000 1,414,000 1,439,000 1,439,000 1,439,000 1,501,000  1,126,000 1,126,000 1,126,000  1,126,000 1,083,000 1,005,000                                           
          amortization of deferred revenue and recognition of unbilled receivables
                      -76,333,000 -61,090,000 -64,106,000 -59,826,000 -54,730,000 -53,345,000 -57,648,000 -71,489,000 -53,864,000 -18,133,000 -40,511,000 -34,289,000 -37,137,000 -36,966,000 -26,976,000 -16,580,000 -23,059,000                                                 
          change in excess inventory reserve
                      1,680,000 604,000 84,000 1,496,000 941,000 450,000 667,000 306,000 197,000 611,000 1,783,000 3,931,000 224,000                                                   
          repurchase of common stock
                                 -649,000 -477,000             -7,000,000 -15,500,000   -5,456,000                           
          deferred income taxes
                                                                                       
          proceeds from sale of investments
                              200,550,000 162,360,000 250,400,000 133,050,000 152,750,000 267,750,000 170,050,000 217,482,000 203,850,000 65,301,000 146,546,000 147,484,000 161,689,000 58,688,000 130,647,000 113,791,000 70,666,000 155,446,000 208,571,000 212,751,000 162,602,000 172,182,000 90,876,000 94,592,000 102,623,000 72,780,000 102,823,000 58,110,000 79,929,000 93,729,000 81,364,000  57,860,000 41,914,000 178,638,000             10,579,000 27,334,000 49,902,000 10,922,000 7,349,000 9,683,000 8,515,000 4,345,000 -14,748,723 39,555,723 
          change in earnout liability recorded for adesis acquisition
                                          40,000                                             
          proceeds from the exercise of common stock options
                                         9,000 -1,000 6,000 24,000 3,000 31,000 151,000 405,000 257,000 670,000 702,000  337,000    619,000                             
          common stock issued to employees that was earned and accrued for in a previous period
                                          174,000                                        
          inventory write-down
                                     2,585,000                                                
          excess tax benefits from share-based payment arrangements
                                                                                       
          retirement plan benefit expense
                                             961,000 1,022,000 953,000 1,029,000 921,000 921,000 920,000 592,000 422,000 419,000 419,000 419,000 415,000 416,000 417,000 417,000 435,000 388,000 389,000 388,000 381,718 381,718 381,718 381,718                   
          purchase of business, net of cash acquired
                                             -217,000                                          
          earnout liability recorded for adesis acquisition
                                            294,000 160,000                                          
          excess tax benefits accrued for in other current liabilities
                                                                                       
          amortization of deferred revenue
                                        -12,589,000 -3,916,000 -2,333,000 -2,183,000 -2,690,000 -2,125,000 -1,680,000 -1,569,000 -2,032,000 -1,963,000 -2,138,000 -3,716,000 -1,177,000 -449,000 -2,156,000 -542,000 -1,127,000 -2,598,000 -1,447,000 -1,157,000 -678,000 -2,599,000 -848,000 -920,000 -917,000 -1,040,651 -754,960 -774,332 -705,121                   
          change in earnout liability recorded for adesis acquistion
                                                                                       
          decrease in assets, net of effect of acquisition:
                                                                                       
          payment of withholding taxes on stock-based compensation to employees
                                                                                       
          common stock issued to the board of directors and scientific advisory board earned and accrued in a previous period
                                                                                       
          common stock issued to employees earned and accrued in a previous period
                                                                                       
          net change in accruals for purchases of property and equipment
                                                                                       
          excess tax benefits accrued in other current liabilities
                                                                                       
          increase in liabilities, net of effect of acquisition:
                                                                                       
          inventories
                                                -1,961,000    -1,858,000                                   
          payment of withholding taxes related to stock-based employee compensation
                                                -2,008,000    -4,970,000    -2,699,000 -278,000 -5,000 -189,000 -2,796,000 -6,000 -628,000 -35,000 -3,473,000 -474,033 -19,043 -41,821 -3,937,652 -19,050 -15,101 -16,034 -1,116,387 -10,031 -14,052 -12,597 -831,877           
          common stock issued to board of directors and scientific advisory board that was earned in a previous period
                                                300,000    300,000    323,000  300,000  328,000  299,943  314,181  309,802  299,968      
          common stock issued to employees that was accrued for in a previous period
                                                1,105,000    967,000                                   
          additions to intangibles
                                                         8,000 -260,000 -38,000 -69,000                           
          proceeds from issuance of common stock under espp
                                                  92,000    117,000                                 
          proceeds from the exercise of common stock options and warrants
                                                        616,000    66,000 160,000 380,000 402,000 541,000 59,994 5,740,013 2,422,840 5,119,944 7,451,007 1,083,618 5,361,262 722,682 599,803 903,365   19,500 239,477 572,335 1,575,848 2,117,659 2,170,204 3,098,295 1,153,785 -17,169,137 18,032,699 
          stock-based employee compensation
                                                        1,899,000 1,563,000 1,579,000 1,761,000 1,174,000 1,152,000 1,160,000 1,151,000 800,000 1,102,387 1,119,388 1,111,930 1,038,968 2,651,012 711,000 728,568 463,133 1,736,250 430,559 438,122 551,489 2,767,706 299,437 243,920 352,512 1,930,216 248,006 277,076 278,611   
          common stock issued to employees that was accrued for in a previous period, net of shares withheld for taxes
                                                        475,000  282,000  252,000  1,113,483  929,552               
          stock-based non-employee compensation
                                                                 3,426 965 1,461 473 3,914 2,460 40,848 493 4,520 1,998 991 4,119 13,839     
          non-cash expense under materials and license agreements
                                                                                       
          loss on stock warrant liability
                                                                 -239,562   4,845,439 3,362,441   -90,025 1,001,612             
          purchase of property and equipment
                                                          -1,765,000 -1,886,000 -549,000  -224,000 -252,000 -1,802,000  -698,072 -1,034,966 -475,365  -74,233 -55,076 -89,300  -76,486 -30,452 -95,801  -689,754         
          purchase of investments
                                                          -99,267,000 -83,172,000 -102,142,000  -31,795,000 -37,937,000 -139,512,000              -11,485,744         
          proceeds from the issuance of common stock
                                                          91,000 84,000 93,000  107,000 66,000 71,000  45,480 19,240 249,802,545  61,968 66,991 62,659          -29,000     
          property and equipment purchases included in accounts payable
                                                                                       
          property, equipment and intangible invoices included in accounts payable
                                                           -18,000 909,000                           
          net loss
                                                            -4,758,000              -4,672,847 -6,415,178 -5,569,599 -4,437,578          
          adjustments to reconcile net loss to net cash from operating activities:
                                                                                       
          purchases of short-term investments
                                                                                       
          proceeds from sale of short-term investments
                                                                 83,990,000 27,227,000 22,104,000 23,395,654 23,478,000 17,670,001 17,845,000 20,939,983 17,930,000 8,556,000 23,489,000 19,655,000           
          amortization of acquired technology
                                                                                       
          non-cash expense under a materials agreement
                                                                  9,181  338,961 313,764 243,459               
          purchase of acquired technology
                                                                                       
          fair value of stock warrant liability reclassified to shareholders’ equity upon exercise
                                                                  4,348,616                     
          increase in assets:
                                                                                       
          decrease (increase) in assets:
                                                                                       
          purchase of short-term investments
                                                                  -36,365,555 -216,557,632 -37,346,073  -20,062,032 -16,686,368 -35,224,272  -5,660,742 -15,535,003 -36,479,245           
          common stock issued for royalties that was earned in a previous period
                                                                      81,273  81,954  66,403      
          gain on stock warrant liability
                                                                    8,926,212    -713,243    -173,242           
          fair value of stock warrant liability reclassified to shareholders' equity upon exercise
                                                                    6,476,182                   
          amortization of deferred license fees and deferred revenue
                                                                     -1,237,225 -2,942,704 -710,626 -643,968              
          deferred license fees
                                                                     157,878 -165,455 800,000   -170,399 -170,400 -170,401 348,337 -127,089 -128,711 -127,900 -127,899 -127,901 -127,900 -3,158,666 4,366,667 
          retirement plan benefit liability
                                                                      342,083                 
          (increase) decrease in assets:
                                                                                       
          (decrease) increase in cash and cash equivalents
                                                                          727,363             
          common stock issued to employees that was earned in a previous period, net of shares withheld for taxes
                                                                          -11,556             
          common stock issued to non-employee that was earned in a previous period
                                                                                      
          non-cash charges to statement of operations:
                                                                                       
          non-cash expense under a development agreement
                                                                           272,926 309,375  324,505 316,134 241,901 181,129 209,351 499,030 37,072   
          increase (decrease) in liabilities:
                                                                                       
          common stock issued to employees that was earned in a previous period
                                                                            845,745  -12,842 -24,587 904,939  -5,673     
          non-cash expense under development and license agreements
                                                                                       
          net proceeds from issuance of common stock
                                                                                       
          common stock issued under a development agreement that was earned in a previous period
                                                                                      
          common stock issued to non-employees that was earned in a previous period
                                                                                991       
          repayment of loan
                                                                                       
          restricted cash
                                                                                       
          supplemental disclosure of cash flow information
                                                                                       
          cash paid for interest
                                                                                       
          common stock issued to board of directors and scientific advisory board that were earned in a previous period
                                                                                    260,000   
          common stock issued to employees that were earned in a previous period
                                                                                    969,257   
          common stock issued for royalties that were earned in a previous period
                                                                                    499,993   
          cash flows used in operating activities:
                                                                                       
          proceeds from loan
                                                                                       
          principal payments on capital lease
                                                                                      -17,391 
          issuance of common stock to employees
                                                                                       
          issuance of common stock options and warrants for services
                                                                                      1,689,481 
          issuance of common stock, options and warrants in connection with development agreement
                                                                                       
          issuance of common stock to board of directors and scientific advisory board
                                                                                       
          common stock, options and warrants in connection with development agreement
                                                                                       
          common stock to employees
                                                                                       
          common stock and options to board of directors and scientific advisory board
                                                                                       
          common stock options and warrants for services
                                                                                       
          payment of loan
                                                                                       
          amortization of discounts on convertible promissory note
                                                                                      14,734,168 
          amortization of premium on investments
                                                                                      129,003 
          issuance of common stock and warrants in connection
                                                                                       
          with amended research and license agreements
                                                                                      3,120,329 
          issuance of common stock in connection with
                                                                                       
          employee bonus
                                                                                      790,521 
          issuance of redeemable common stock, common stock options and
                                                                                       
          warrants in connection with the ppg development agreement
                                                                                      15,458,319 
          issuance of common stock, options and warrants to board of directors
                                                                                       
          and scientific advisory board
                                                                                      2,591,089 
          issuance of common stock in connection with license agreement
                                                                                      71,816 
          acquired in-process technology
                                                                                      350,000 
          purchases of equipment
                                                                                      -8,420,286 
          proceeds from issuance of preferred stock
                                                                                      9,137,079 
          proceeds from issuance of convertible promissory
                                                                                       
          notes and equity instruments
                                                                                      15,000,000 
          repayment of convertible promissory notes
                                                                                      -8,819,997