7Baggers

Axcelis Technologies, Inc
(NASDAQ:ACLS) 

ACLS stock logo

Axcelis Technologies, Inc. designs, manufactures, and services ion implantation and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe, and Asia. The company offers high energy, high current, and medium current implanters for various application re...

Founded: 1978
Full Time Employees: 960
Sector: Technology
Industry: Semiconductor Equipment & Materials

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Quarterly
Annual
    Unit: USD2026-03-31 2025-12-31 2025-09-30 2025-06-30 2025-03-31 2024-12-31 2024-09-30 2024-06-30 2024-03-31 2023-12-31 2023-09-30 2023-06-30 2023-03-31 2022-12-31 2022-09-30 2022-06-30 2022-03-31 2021-12-31 2021-09-30 2021-06-30 2021-03-31 2020-12-31 2020-09-30 2020-06-30 2020-03-31 2019-12-31 2019-09-30 2019-06-30 2019-03-31 2018-12-31 2018-09-30 2018-06-30 2018-03-31 2017-12-31 2017-09-30 2017-06-30 2017-03-31 2016-12-31 2016-09-30 2016-06-30 2016-03-31 2015-09-30 2015-06-30 2015-03-31 2014-09-30 2014-06-30 2014-03-31 2013-09-30 2013-06-30 2013-03-31 2012-09-30 2012-06-30 2012-03-31 2011-09-30 2011-06-30 2011-03-31 2010-09-30 2010-06-30 2010-03-31 2009-09-30 2008-03-31 2007-12-31 2007-09-30 2007-06-30 2007-03-31 2006-12-31 2006-09-30 2006-06-30 2006-03-31 2005-12-31 2005-09-30 2005-06-30 2005-03-31 2004-12-31 2004-09-30 2004-06-30 2004-03-31 2003-12-31 2003-09-30 2003-06-30 2003-03-31 2002-12-31 2002-09-30 2002-06-30 2002-03-31 
                                                                                         
      revenue:
                                                                                         
      product
    188,008,000 224,601,000 201,218,000 183,402,000 182,824,000 241,255,000 246,826,000 245,380,000 243,418,000 300,603,000 283,367,000 265,673,000 246,007,000 258,584,000 221,540,000 213,926,000 196,531,000 198,529,000 169,151,000 140,156,000 126,609,000 115,777,000 104,799,000 117,194,000 112,133,000 102,304,000 64,290,000 68,714,000 84,197,000 98,883,000 88,496,000 112,521,000 116,022,000 110,446,000 98,161,000 96,539,000 81,978,000 63,959,000 59,302,000 58,859,000 62,175,000 73,795,000 72,748,000 67,530,000 32,360,000 34,795,000 55,015,000 42,934,000 40,769,000 34,452,000 37,093,000 51,465,000 47,538,000 64,350,000 84,334,000 86,603,000 66,162,000 50,693,000 40,278,000 25,871,000                          
      services
    10,948,000 13,729,000 12,393,000 11,142,000 9,739,000 11,162,000 9,738,000 11,132,000 8,954,000 9,685,000 8,959,000 8,297,000 8,013,000 7,467,000 7,635,000 7,251,000 7,064,000 7,155,000 7,543,000 7,118,000 6,167,000 6,422,000 5,606,000 5,771,000 6,858,000 5,419,000 5,163,000 5,591,000 7,280,000 6,800,000 6,878,000 6,812,000 6,163,000 5,950,000 6,321,000 6,251,000 4,915,000 5,399,000 6,348,000 5,592,000 5,346,000 5,522,000 5,689,000 5,753,000 6,171,000 6,355,000 5,825,000 5,897,000 6,732,000 6,274,000              41,272,000 44,402,000 43,193,000 42,062,000 46,863,000 44,081,000 -116,723,957.7 39,280,000 39,003,000 38,441,000 31,274,250 44,827,000 41,178,000 39,091,000         
      total revenue
    198,956,000 238,330,000 213,611,000 194,544,000 192,563,000 252,417,000 256,564,000 256,512,000 252,372,000 310,288,000 292,326,000 273,970,000 254,020,000 266,051,000 229,175,000 221,177,000 203,595,000 205,684,000 176,694,000 147,274,000 132,776,000 122,199,000 110,405,000 122,965,000 118,991,000 107,723,000 69,453,000 74,305,000 91,477,000 105,683,000 95,374,000 119,333,000 122,185,000 116,396,000 104,482,000 102,790,000 86,893,000 69,358,000 65,650,000 64,451,000 67,521,000 79,317,000 78,437,000 73,283,000 38,531,000 41,150,000 60,840,000 48,831,000 47,501,000 40,726,000 44,640,000 59,114,000 55,006,000                                 
      yoy
    3.32% -5.58% -16.74% -24.16% -23.70% -18.65% -12.23% -6.37% -0.65% 16.63% 27.56% 23.87% 24.77% 29.35% 29.70% 50.18% 53.34% 68.32% 60.04% 19.77% 11.58% 13.44% 58.96% 65.49% 30.08% 1.93% -27.18% -37.73% -25.13% -9.20% -8.72% 16.09% 40.62% 67.82% 59.15% 59.49% 28.69% -12.56% -16.30% -12.05% 75.24% 92.75% 28.92% 50.07% -18.88% 1.04% 36.29% -17.40% -13.64%                                     
      qoq
    -16.52% 11.57% 9.80% 1.03% -23.71% -1.62% 0.02% 1.64% -18.67% 6.14% 6.70% 7.85% -4.52% 16.09% 3.62% 8.64% -1.02% 16.41% 19.98% 10.92% 8.66% 10.68% -10.21% 3.34% 10.46% 55.10% -6.53% -18.77% -13.44% 10.81% -20.08% -2.33% 4.97% 11.40% 1.65% 18.29% 25.28% 5.65% 1.86% -4.55% -14.87% 1.12% 7.03% 90.19% -6.36% -32.36% 24.59% 2.80% 16.64% -8.77% -24.48% 7.47%                                  
      cost of revenue:
                                                                                         
      total cost of revenue
    118,375,000 126,398,000 124,805,000 107,201,000 103,795,000 136,194,000 146,594,000 144,103,000 136,321,000 172,392,000 162,642,000 154,267,000 150,001,000 156,530,000 125,854,000 121,996,000 113,829,000 116,200,000 100,182,000 83,260,000 76,341,000 69,224,000 62,244,000 71,066,000 73,442,000 63,407,000 38,872,000 42,556,000 53,971,000 62,116,000 55,461,000 70,333,000 75,029,000 79,676,000 64,731,000 63,728,000 52,179,000 42,411,000 41,546,000 39,320,000 44,105,000 50,138,000 51,263,000 49,903,000 23,387,000 26,666,000 39,100,000 31,855,000 30,764,000 27,783,000 30,273,000 36,326,000 34,470,000                                 
      gross profit
    80,581,000 111,932,000 88,806,000 87,343,000 88,768,000 116,223,000 109,970,000 112,409,000 116,051,000 137,896,000 129,684,000 119,703,000 104,019,000 109,521,000 103,321,000 99,181,000 89,766,000 89,484,000 76,512,000 64,014,000 56,435,000 52,975,000 48,161,000 51,899,000 45,549,000 44,316,000 30,581,000 31,749,000 37,506,000 43,567,000 39,913,000 49,000,000 47,156,000 36,720,000 39,751,000 39,062,000 34,714,000 26,947,000 24,104,000 25,131,000 23,416,000 29,179,000 27,174,000 23,380,000 15,144,000 14,484,000 21,740,000 16,976,000 16,737,000 12,943,000 14,367,000 22,788,000 20,536,000 26,895,000 34,138,000 31,081,000 21,470,000 19,868,000 13,007,000 7,820,000    43,590,000 41,250,000 51,264,000 53,266,000 47,942,000 39,042,000 -116,439,958.5 35,703,000 38,940,000 41,797,000 43,163,750 54,079,000 68,400,000 50,176,000 -68,589,967.6 13,899,000 27,016,000 27,675,000 -85,069,966.4 36,445,000 33,228,000 15,397,000 
      yoy
    -9.22% -3.69% -19.25% -22.30% -23.51% -15.72% -15.20% -6.09% 11.57% 25.91% 25.52% 20.69% 15.88% 22.39% 35.04% 54.94% 59.06% 68.92% 58.87% 23.34% 23.90% 19.54% 57.49% 63.47% 21.44% 1.72% -23.38% -35.21% -20.46% 18.65% 0.41% 25.44% 35.84% 36.27% 64.91% 55.43% 48.25% -7.65% -11.30% 7.49% 54.62% 101.46% 25.00% 37.72% -9.52% 11.91% 51.32% -25.50% -18.50% -51.88% -57.91% -26.68% -4.35% 35.37% 162.46% 297.46%    -82.06%    -9.08% 5.66% -144.03% 49.19% 23.12% -6.59% -369.76% -33.98% -43.07% -16.70% -162.93% 289.09% 153.18% 81.30% -19.37% -61.86% -18.70% 79.74%     
      qoq
    -28.01% 26.04% 1.68% -1.61% -23.62% 5.69% -2.17% -3.14% -15.84% 6.33% 8.34% 15.08% -5.02% 6.00% 4.17% 10.49% 0.32% 16.95% 19.52% 13.43% 6.53% 10.00% -7.20% 13.94% 2.78% 44.91% -3.68% -15.35% -13.91% 9.15% -18.54% 3.91% 28.42% -7.62% 1.76% 12.53% 28.82% 11.79% -4.09% 7.32% -19.75% 7.38% 16.23% 54.38% 4.56% -33.38% 28.06% 1.43% 29.31% -9.91% -36.95% 10.97% -23.64% -21.22% 9.84% 44.76% 8.06% 52.75% 66.33%     5.67% -19.53% -3.76% 11.11% 22.80% -133.53% -426.13% -8.31% -6.84% -3.17% -20.18% -20.94% 36.32% -173.15% -593.49% -48.55% -2.38% -132.53% -333.42% 9.68% 115.81%  
      gross margin %
    40.50% 46.97% 41.57% 44.90% 46.10% 46.04% 42.86% 43.82% 45.98% 44.44% 44.36% 43.69% 40.95% 41.17% 45.08% 44.84% 44.09% 43.51% 43.30% 43.47% 42.50% 43.35% 43.62% 42.21% 38.28% 41.14% 44.03% 42.73% 41.00% 41.22% 41.85% 41.06% 38.59% 31.55% 38.05% 38.00% 39.95% 38.85% 36.72% 38.99% 34.68% 36.79% 34.64% 31.90% 39.30% 35.20% 35.73% 34.76% 35.24% 31.78% 32.18% 38.55% 37.33% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% NaN% NaN% NaN% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% -Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% -Infinity% Infinity% Infinity% Infinity% -Infinity% Infinity% Infinity% Infinity% 
      operating expenses:
                                                                                         
      research and development
    28,516,000 30,126,000 24,640,000 27,064,000 27,128,000 27,654,000 26,395,000 25,786,000 25,662,000 24,911,000 24,093,000 24,130,000 23,773,000 22,089,000 20,563,000 18,731,000 16,973,000 16,416,000 16,707,000 16,623,000 15,685,000 16,320,000 14,867,000 16,040,000 14,606,000 13,596,000 12,930,000 13,720,000 13,685,000 14,245,000 12,845,000 12,553,000 12,233,000 10,917,000 11,003,000 11,256,000 9,895,000 8,795,000 8,493,000 8,478,000 8,636,000 8,581,000 7,899,000 8,199,000 7,950,000 8,845,000 9,257,000 8,148,000 8,503,000 9,206,000 9,851,000 10,478,000 11,669,000 11,389,000 11,829,000 11,818,000 9,872,000 9,477,000 9,133,000 7,648,000    17,598,000 18,228,000    18,212,000 -51,164,981 17,755,000       -48,375,980.3 16,273,000 15,927,000  -54,379,976.7 18,096,000 18,572,000  
      sales and marketing
    17,354,000 19,403,000 15,838,000 15,003,000 15,124,000 16,563,000 16,808,000 17,230,000 17,445,000 16,659,000 16,465,000 15,537,000 14,144,000 15,032,000 14,573,000 12,703,000 11,291,000 13,569,000 11,415,000 12,177,000 10,387,000 11,342,000 9,763,000 9,437,000 8,204,000 8,879,000 8,057,000 8,436,000 8,918,000 9,362,000 7,923,000 8,912,000 8,411,000 7,197,000 6,801,000 7,485,000 7,049,000 6,097,000 5,992,000 5,790,000 5,960,000 6,322,000 5,858,000 5,628,000 4,891,000 5,037,000 5,476,000 5,330,000 5,594,000 5,201,000 5,470,000 6,231,000 6,583,000 7,237,000 7,675,000 7,819,000 7,151,000 6,606,000 6,604,000 5,700,000    13,146,000 12,938,000    10,607,000 -34,564,988 10,691,000               
      general and administrative
    26,761,000 26,231,000 23,308,000 16,311,000 17,357,000 17,475,000 19,854,000 16,583,000 16,405,000 17,275,000 17,446,000 16,328,000 14,745,000 16,311,000 14,983,000 13,602,000 12,579,000 12,915,000 11,996,000 11,217,000 10,013,000 11,238,000 9,649,000 10,041,000 9,036,000 8,629,000 7,707,000 7,583,000 7,807,000 8,438,000 8,477,000 8,268,000 8,010,000 7,842,000 8,112,000 7,791,000 7,057,000 6,190,000 5,988,000 6,232,000 6,042,000 6,584,000 6,231,000 6,101,000 5,380,000 6,494,000 6,481,000 6,164,000 6,412,000 6,590,000 6,325,000 6,488,000 7,799,000 8,458,000 8,416,000 9,055,000 7,885,000 7,464,000 7,700,000 7,874,000    10,194,000 10,476,000    10,853,000 -34,995,987.8 11,994,000         9,099,000      
      total operating expenses
    72,631,000 75,760,000 63,786,000 58,378,000 59,609,000 61,692,000 63,057,000 59,599,000 59,512,000 58,845,000 58,004,000 55,995,000 52,662,000 53,432,000 50,119,000 45,036,000 40,843,000 42,900,000 40,118,000 40,017,000 36,085,000 38,900,000 34,279,000 35,518,000 31,846,000 31,104,000 28,694,000 29,739,000 30,410,000 32,045,000 29,245,000 29,733,000 28,654,000 25,956,000 25,916,000 26,532,000 24,001,000 21,082,000 20,473,000 20,500,000 20,920,000 21,487,000 19,996,000 19,938,000 20,509,000 20,536,000 21,414,000 19,754,000 20,131,000 22,430,000 22,224,000  28,932,000                         30,096,750 44,405,000       
      income from operations
    7,950,000 36,172,000 25,020,000 28,965,000 29,159,000 54,531,000 46,913,000 52,810,000 56,539,000 79,051,000 71,680,000 63,708,000 51,357,000 56,089,000 53,202,000 54,145,000 48,923,000 46,584,000 36,394,000 23,997,000 20,350,000 14,075,000 13,882,000 16,381,000 13,703,000 13,212,000 1,887,000 2,010,000 7,096,000 11,522,000 10,668,000 19,267,000 18,502,000 10,764,000 13,835,000 12,530,000 10,713,000 5,865,000 3,631,000 4,631,000 2,496,000 7,692,000 7,178,000 3,442,000   326,000        6,218,000 2,389,000        1,996,000  7,710,000 11,231,000 5,737,000     466,000 12,870,500 12,631,000 27,418,000 11,433,000 51,796,983.5 -30,506,000 -9,884,000 -11,407,000 38,715,981.2 -3,727,000 -9,124,000 -25,865,000 
      yoy
    -72.74% -33.67% -46.67% -45.15% -48.43% -31.02% -34.55% -17.11% 10.09% 40.94% 34.73% 17.66% 4.98% 20.40% 46.18% 125.63% 140.41% 230.97% 162.17% 46.49% 48.51% 6.53% 635.67% 714.98% 93.11% 14.67% -82.31% -89.57% -61.65% 7.04% -22.89% 53.77% 72.71% 83.53% 281.02% 170.57% 329.21% -23.75% -49.41% 34.54%   2101.84%                     -65.21%         -95.92% -75.15% -141.40% -377.40% -200.23% 33.79% 718.51% 8.33% -55.90%     
      qoq
    -78.02% 44.57% -13.62% -0.67% -46.53% 16.24% -11.17% -6.60% -28.48% 10.28% 12.51% 24.05% -8.44% 5.43% -1.74% 10.67% 5.02% 28.00% 51.66% 17.92% 44.58% 1.39% -15.26% 19.54% 3.72% 600.16% -6.12% -71.67% -38.41% 8.01% -44.63% 4.13% 71.89% -22.20% 10.42% 16.96% 82.66% 61.53% -21.59% 85.54% -67.55% 7.16% 108.54%            160.28%           -31.35% 95.76%      -96.38% 1.90% -53.93% 139.81% -77.93% -269.79% 208.64% -13.35% -129.46% -1138.80% -59.15% -64.72%  
      operating margin %
    4.00% 15.18% 11.71% 14.89% 15.14% 21.60% 18.29% 20.59% 22.40% 25.48% 24.52% 23.25% 20.22% 21.08% 23.21% 24.48% 24.03% 22.65% 20.60% 16.29% 15.33% 11.52% 12.57% 13.32% 11.52% 12.26% 2.72% 2.71% 7.76% 10.90% 11.19% 16.15% 15.14% 9.25% 13.24% 12.19% 12.33% 8.46% 5.53% 7.19% 3.70% 9.70% 9.15% 4.70% 0% 0% 0.54% 0% 0% 0% 0% 0% 0% NaN% Infinity% Infinity% NaN% NaN% NaN% NaN% NaN% NaN% NaN% Infinity% NaN% Infinity% Infinity% Infinity% NaN% NaN% NaN% NaN% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% -Infinity% -Infinity% -Infinity% Infinity% -Infinity% -Infinity% -Infinity% 
      other income:
                                                                                         
      interest income
    4,462,000 4,937,000 5,465,000 5,481,000 5,601,000 6,277,000 6,560,000 6,051,000 5,516,000 5,375,000 4,580,000 4,307,000 3,936,000 2,993,000 1,111,000 352,000 95,000 85,000 51,000 40,000 33,000 80,000 106,000 70,000 482,000 582,000 687,000 845,000 841,000 810,000 593,000 515,000 410,000 315,000 219,000 111,000 69,000 77,000 53,000 54,000 54,000 7,000 6,000 3,000 2,000 2,000 2,000 3,000 3,000 3,000 9,000 9,000 9,000 7,000 11,000 6,000 15,000 25,000 29,000 59,000    1,146,000 1,454,000 2,567,000 2,250,000 1,915,000 1,651,000 -3,798,998.5 1,505,000 1,284,000 1,010,000 301,250 571,000 338,000 296,000 -1,484,999.4 431,000 523,000 531,000 -2,849,998.8 874,000 1,019,000 957,000 
      interest expense
    -1,292,000 -1,336,000 -1,305,000 -1,355,000 -1,367,000 -1,445,000 -1,333,000 -1,339,000 -1,346,000 -1,320,000 -1,325,000 -1,349,000 -1,353,000 -1,475,000 -1,333,000 -1,250,000 -1,518,000 -1,263,000 -1,269,000 -1,274,000 -1,029,000 -1,313,000 -1,296,000 -1,299,000 -1,303,000 -1,306,000 -1,308,000 -1,311,000 -1,230,000 -1,323,000 -1,323,000 -1,127,000 -1,337,000 -1,337,000 -1,337,000 -1,336,000 -1,111,000 -1,346,000 -1,342,000 -1,338,000                                      4,662,998.1 -1,876,000 -1,409,000 -1,378,000 4,428,998.1 -1,535,000 -1,696,000 -1,198,000 
      other
    -495,000 245,000 970,000 1,906,000 -309,000 -718,000 3,225,000 -257,000 -1,710,000 4,300,000 -1,260,000 -2,050,000 -1,038,000 8,189,000 -7,971,000 -5,051,000 -1,617,000 -140,000 -963,000 -15,000 -1,153,000 1,617,000 900,000 421,000 -620,000 169,000 -890,000 -189,000 -173,000 -762,000 -592,000 -1,016,000 -102,000  138,000 16,000 -154,000 -412,000 -55,000 -238,000   49,000  1,352,000  292,000   829,000  551,000  1,563,000    342,000                            
      total other income
    2,675,000 3,846,000 5,130,000 6,032,000 3,925,000 4,114,000 8,452,000 4,455,000 2,460,000 8,355,000 1,995,000 908,000 1,545,000                         -1,681,000 -1,344,000 -1,522,000     1,050,000  43,000   832,000  560,000                          924,750 -1,082,000  3,830,000    -1,997,000 
      income before income taxes
    10,625,000 40,018,000 30,150,000 34,997,000 33,084,000 58,645,000 55,365,000 57,265,000 58,999,000 87,406,000 73,675,000 64,616,000 52,902,000 65,796,000 45,009,000 48,196,000 45,883,000 45,266,000 34,213,000 22,748,000 18,201,000 14,459,000 13,592,000 15,573,000 12,262,000 12,657,000 376,000 1,355,000 6,534,000 10,247,000 9,346,000 17,639,000 17,473,000 10,138,000 12,855,000 11,321,000 9,517,000 4,184,000 2,287,000 3,109,000 1,444,000 6,258,000 5,923,000 1,969,000   369,000       1,381,000 5,071,000 1,945,000        3,756,000 3,381,000 16,022,000 13,436,000 12,691,000 634,000   1,710,000 2,147,000 17,197,750 20,179,000 33,577,000 15,035,000   -8,933,000      
      income tax provision
    1,411,000 5,721,000 4,164,000 3,621,000 4,505,000 8,689,000 6,789,000 6,399,000 7,404,000 16,350,000 7,744,000 3,037,000 5,205,000 8,804,000 4,726,000 4,007,000 4,269,000 9,517,000 6,698,000 3,842,000 1,721,000 -215,000 2,807,000 2,271,000 1,041,000 2,945,000 -328,000 799,000 472,000 1,784,000 508,000 2,970,000 3,558,000 -81,542,000 1,014,000 -2,611,000 11,000 219,000 136,000 172,000    101,000                                          
      net income
    9,214,000 34,297,000 25,986,000 31,376,000 28,579,000 49,956,000 48,576,000 50,866,000 51,595,000 71,056,000 65,931,000 61,579,000 47,697,000 56,992,000 40,283,000 44,189,000 41,614,000 35,749,000 27,515,000 18,906,000 16,480,000 14,674,000 10,785,000 13,302,000 11,221,000 9,712,000 704,000 556,000 6,062,000 8,463,000 8,838,000 14,669,000 13,915,000 91,680,000 11,841,000 13,932,000 9,506,000 3,965,000 2,151,000 2,937,000 1,948,000 6,101,000 5,883,000 1,868,000 -4,704,000 -6,900,000 174,000 -4,750,000 -4,019,000 -8,988,000 -8,718,000 -471,000 -10,028,000 1,151,000 4,227,000 1,812,000 -6,273,000 -4,529,000 -11,101,000 -15,898,000    4,744,000 2,672,000 15,561,000 12,520,000 12,144,000 545,000 -630,000 -5,167,000 749,000 1,898,000 16,783,500 19,082,000 34,471,000 13,581,000 -29,286,500 -31,942,000 -78,878,000 -6,326,000 -4,829,250 191,000 -1,677,000 -17,831,000 
      yoy
    -67.76% -31.35% -46.50% -38.32% -44.61% -29.69% -26.32% -17.40% 8.17% 24.68% 63.67% 39.35% 14.62% 59.42% 46.40% 133.73% 152.51% 143.62% 155.12% 42.13% 46.87% 51.09% 1431.96% 2292.45% 85.10% 14.76% -92.03% -96.21% -56.44% -90.77% -25.36% 5.29% 46.38% 2212.23% 450.49% 374.36% 387.99% -35.01% -63.44% 57.23% -141.41% -188.42% 3281.03% -139.33% 17.04% -23.23% -102.00% 908.49% -59.92% -880.89% -306.25% -125.99% 59.86% -125.41% -138.08% -111.40%    -435.12%    -60.94% 390.28% -2570.00% -342.31% 1521.36% -71.29% -103.75% -127.08% -97.83% -86.02% -157.31% -159.74% -143.70% -314.69% 506.44% -16823.56% 4603.52% -64.52%     
      qoq
    -73.13% 31.98% -17.18% 9.79% -42.79% 2.84% -4.50% -1.41% -27.39% 7.77% 7.07% 29.10% -16.31% 41.48% -8.84% 6.19% 16.41% 29.93% 45.54% 14.72% 12.31% 36.06% -18.92% 18.55% 15.54% 1279.55% 26.62% -90.83% -28.37% -4.24% -39.75% 5.42% -84.82% 674.26% -15.01% 46.56% 139.75% 84.33% -26.76% 50.77% -68.07% 3.71% 214.94% -139.71% -31.83% -4065.52% -103.66% 18.19% -55.28% 3.10% 1750.96% -95.30% -971.24% -72.77% 133.28% -128.89% 38.51% -59.20% -30.17%     77.54% -82.83% 24.29% 3.10% 2128.26% -186.51% -87.81% -789.85% -60.54% -88.69% -12.05% -44.64% 153.82% -146.37% -8.31% -59.50% 1146.89% 30.99% -2628.40% -111.39% -90.60%  
      net income margin %
    4.63% 14.39% 12.17% 16.13% 14.84% 19.79% 18.93% 19.83% 20.44% 22.90% 22.55% 22.48% 18.78% 21.42% 17.58% 19.98% 20.44% 17.38% 15.57% 12.84% 12.41% 12.01% 9.77% 10.82% 9.43% 9.02% 1.01% 0.75% 6.63% 8.01% 9.27% 12.29% 11.39% 78.77% 11.33% 13.55% 10.94% 5.72% 3.28% 4.56% 2.89% 7.69% 7.50% 2.55% -12.21% -16.77% 0.29% -9.73% -8.46% -22.07% -19.53% -0.80% -18.23% Infinity% Infinity% Infinity% -Infinity% -Infinity% -Infinity% -Infinity% NaN% NaN% NaN% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% -Infinity% -Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% Infinity% -Infinity% -Infinity% -Infinity% -Infinity% -Infinity% Infinity% -Infinity% -Infinity% 
      net income per share
                                                                                         
      basic
    0.3 1.11 0.83 0.99 0.89 1.54 1.49 1.56 1.58 2.17 2.01 1.88 1.46 1.73 1.22 1.34 1.25 1.07 0.82 0.56 0.49 0.44 0.32 0.4 0.34 0.3 0.02 0.02 0.19 0.26 0.27 0.46 0.43 2.96 0.38 0.46 0.32 0.14 0.07 0.1   0.05           0.01 0.04 0.02        0.05 0.03 0.15 0.12 0.12 0.01 -0.008 -0.05 0.01 0.02             
      diluted
    0.3 1.1 0.83 0.98 0.88 1.54 1.49 1.55 1.57 2.15 1.99 1.86 1.43 1.71 1.21 1.32 1.22 1.05 0.81 0.55 0.48 0.42 0.32 0.39 0.33 0.28 0.02 0.02 0.18 0.25 0.26 0.43 0.41 2.73 0.35 0.42 0.29 0.13 0.07 0.1   0.05           0.01 0.04 0.02        0.05 0.03 0.15 0.12 0.12 0.01   0.01 0.02             
      shares used in computing net income per share:
                                                                                         
      basic weighted-average shares of common stock
    30,723 31,574 31,287 31,847 32,258 32,552 32,550 32,598 32,638 32,758 32,807 32,775 32,744                                                                         
      diluted weighted-average shares of common stock
    30,980 31,668 31,450 31,882 32,335 32,704 32,675 32,771 32,926 33,165 33,159 33,189 33,293                                                                         
      total other expense
                 9,707,000 -8,193,000 -5,949,000 -3,040,000 -1,318,000 -2,181,000 -1,249,000 -2,149,000 384,000 -290,000 -808,000 -1,441,000 -555,000 -1,511,000 -655,000 -562,000 -1,275,000 -1,322,000 -1,628,000 -1,029,000 -626,000 -980,000 -1,209,000 -1,196,000                                                 
      basic weighted-average common shares
                 33,043 33,011 33,096 33,245 33,555 33,537 33,677 33,715 33,257 33,477 33,116 32,872 32,559 32,344 32,729 32,683 32,286 32,365 32,214 32,094 30,866 31,274 30,589 29,772 29,195 29,221 29,097    113,152   110,649    107,855 107,639 107,067 106,417 106,097 105,936                              
      diluted weighted-average common shares
                 33,542 33,389 33,562 33,974 34,268 34,089 34,311 34,643 34,128 34,174 33,958 34,057 33,828 33,323 33,901 34,224 34,002 33,973 33,942 34,123 33,436 33,524 33,168 32,255 30,947 31,037 30,701    118,720   115,798    107,855 107,639 107,067 108,192 108,911 110,791                              
      restructuring charges
                                            282,000  8,000 10,000 2,288,000 160,000 200,000 112,000 421,000 1,801,000 578,000 153,000 2,881,000       430,000      535,000 53,000 399,000  -5,426,998.3 1,545,000 2,083,000 1,799,000             
      revenue
                                                                                         
      cost of revenue
                                                                   66,483,000 56,276,000 72,075,000 69,551,000 69,698,000 58,879,000 -163,155,941.5 51,679,000 53,238,000  60,203,500 73,817,000 82,948,000 84,048,000         
      operating expenses
                                                                                         
      other (expense) income
                                                                                         
      net earnings per share
                                                                                         
      basic
                                            0.02   0.02                                          
      diluted
                                            0.02   0.02                                          
      shares used in computing net earnings per share
                                                                                         
      basic weighted average common shares
                                            116,152 114,799 113,784                                           
      diluted weighted average common shares
                                            122,078 121,862 120,612                                           
      income taxes
                                             157,000 40,000  389,000 231,000 195,000 530,000 263,000 333,000 243,000 469,000 717,000 230,000 844,000 133,000 854,000 1,217,000 293,000 444,000     709,000 461,000 916,000 547,000 89,000 -1,156,999.5  961,000 249,000 414,250 1,097,000  1,454,000 -69,047,978.4 354,000 69,945,000  12,450,992.4 311,000 -2,731,000 -10,031,000 
      net income (loss) per share
                                                                                         
      basic
                                             0.05                                            
      diluted
                                             0.05                                            
      shares used in computing net income per share
                                                                                         
      other (expense) income:
                                                                                         
      other income
                                                                                         
      gain on sale of dry strip assets and intellectual property
                                                                                         
      net income per share
                                                                                         
      basic and diluted
                                                -0.04 -0.06  -0.04 -0.04 -0.08                                    
      shares used in computing net loss per share
                                                                                         
      basic and diluted weighted average common shares
                                                111,701                                         
      shares used in computing net loss per share:
                                                                                         
      basic and diluted weighted-average common shares
                                                 111,212  109,074 108,409 108,227                                    
      service
                                                      7,547,000 7,649,000 7,468,000 8,105,000 9,046,000 6,567,000 8,944,000 7,510,000 8,222,000 9,132,000                          
      net income per share
                                                                                         
      basic and diluted net income per share
                                                      -0.08  -0.09    -0.06 -0.04 -0.11 -0.15                          
      shares used in computing basic and diluted net income per share
                                                                                         
      total operating expense
                                                       23,350,000                                  
      revenue - sum
                                                         72,455,000 93,380,000                               
      cost of revenue - sum
                                                         45,560,000 59,242,000                               
      operating expenses - sum
                                                         27,084,000 27,920,000                               
      other income - sum
                                                         1,570,000                                
      royalties from sen
                                                                                         
      gain on sale of sen
                                                                                         
      equity loss of sen
                                                                                         
      weighted-average common shares outstanding
                                                            104,628   103,850                          
      weighted-average common shares
                                                             104,170 104,116                           
      royalties, primarily from sen
                                                               4,000    1,440,000 2,059,000 2,519,000 2,209,000 3,043,000 1,436,000                 
      amortization of intangible assets
                                                                   656,000 656,000 656,000 656,000 627,000 612,000 -1,835,999.3 612,000 612,000 612,000 459,000 612,000 612,000 612,000 -1,292,999.4 563,000 365,000 365,000     
      systems
                                                                   67,361,000 51,065,000 77,627,000 78,546,000 67,734,000 52,404,000 -155,722,944.7 47,083,000 48,947,000 59,693,000 69,498,000 79,402,000 106,834,000 91,756,000         
      equity income of sen
                                                                   1,905,000 4,667,000 8,532,000 2,372,000 6,146,000 2,216,000                 
      other—net
                                                                   275,000  -359,000 153,000 1,339,000   435,000               
      shares used in computing basic and diluted income per share
                                                                                         
      basic
                                                                   101,609 101,492 55 101,165 100,958 100,883 25,064 100,428 100,199 100,138             
      diluted
                                                                   102,503 102,421 156 101,612 101,080 101,823 25,064 100,428 100,604 100,929             
      restructuring credits
                                                                                         
      shares used in computing basic and diluted net income per share
                                                                                         
      basic
                                                                   101,609 101,492 55 101,165 100,958 100,883 25,064 100,428 100,199 100,138             
      diluted
                                                                   102,503 102,421 156 101,612 101,080 101,823 25,064 100,428 100,604 100,929             
      research & development
                                                                     13,500,000 17,597,000 18,191,000    17,543,000 15,867,000 12,002,250 16,645,000 15,927,000 15,437,000    16,176,000    17,712,000 
      selling
                                                                     8,479,750 11,743,000 11,569,000    12,004,000 11,870,000 9,170,750 12,248,000 12,836,000 11,599,000 -35,589,985.7 11,983,000 11,509,000 12,098,000 -33,891,985.8 10,912,000 11,742,000 11,238,000 
      general & administrative
                                                                     8,564,500 11,986,000 11,419,000    11,819,000 11,183,000 8,661,250 11,943,000 11,607,000 11,095,000    10,443,000     
      royalties, primarily sumitomo eaton nova corporation
                                                                         1,787,250 1,019,000 4,228,000  2,595,000 3,667,000 3,336,000          
      equity income of sumitomo eaton nova corporation
                                                                         2,840,000 1,395,000 7,626,000 2,339,000 5,553,000 9,065,000 7,578,000 5,569,000 1,133,500 41,000 1,298,000  898,750 2,235,000 3,322,000  
      shares used in computing net income per share
                                                                                         
      basic
                                                                   101,609 101,492 55 101,165 100,958 100,883 25,064 100,428 100,199 100,138             
      diluted
                                                                   102,503 102,421 156 101,612 101,080 101,823 25,064 100,428 100,604 100,929             
      royalties, primarily from sumitomo eaton nova corporation
                                                                            1,902,000             
      costs of revenue
                                                                            58,239,000             
      restructuring
                                                                                 -4,744,998.5 4,745,000       
      basic net income per share
                                                                             0.17 0.19 0.35 0.14 -0.298 -0.32 -0.8 -0.06 -0.05 98,090 -0.02 -0.18 
      diluted net income per share
                                                                             0.165 0.19 0.33 0.13 -0.298 -0.32 -0.8 -0.06 -0.05 98,213 -0.02 -0.18 
      shares used in computing
                                                                                         
      royalties
                                                                                3,377,000         
      net sales
                                                                                 56,520,750 59,007,000 84,671,000 82,405,000 -244,189,900 93,117,000 88,988,000 62,085,000 
      cost of products sold
                                                                                 39,373,250 45,108,000 57,655,000 54,730,000 39,780,000 56,672,000 55,760,000 46,688,000 
      general and adminstrative
                                                                                 7,595,750 10,841,000   8,604,750 10,799,000 11,673,000  
      royalty income of sumitomo eaton nova corporation
                                                                                 798,250 195,000       
      royalty income - other
                                                                                 23,750 70,000       
      other-net
                                                                                 -236,250 57,000 -719,000  -618,000 -828,000 -1,283,000 -361,000 
      income before taxes
                                                                                 -12,024,500 -31,588,000  -7,577,000 -7,942,000 502,000 -4,408,000 -27,862,000 
      shares used in computing:
                                                                                         
      royalty income
                                                                                   1,258,000 1,765,000 -7,403,997.3 3,483,000 3,354,000 567,000 
      other,net
                                                                                    -283,000     
      income tax credit
                                                                                    -1,251,000     
      amortization of goodwill and intangible assets
                                                                                     -1,094,999.5 365,000 365,000  
      other costs & expenses
                                                                                         
      general & adminstrative
                                                                                        11,947,000 
      amortization of goodwill & intangible assets
                                                                                        365,000 
    Balance Sheets:
    Quarterly
    Annual
      Unit: USD2026-03-31 2025-12-31 2025-09-30 2025-06-30 2025-03-31 2024-12-31 2024-09-30 2024-06-30 2024-03-31 2023-12-31 2023-09-30 2023-06-30 2023-03-31 2022-12-31 2022-09-30 2022-06-30 2022-03-31 2021-12-31 2021-09-30 2021-06-30 2021-03-31 2020-12-31 2020-09-30 2020-06-30 2020-03-31 2019-12-31 2019-09-30 2019-06-30 2019-03-31 2018-12-31 2018-09-30 2018-06-30 2018-03-31 2017-12-31 2017-09-30 2017-06-30 2017-03-31 2016-12-31 2016-09-30 2016-06-30 2016-03-31 2015-09-30 2015-06-30 2015-03-31 2014-09-30 2014-06-30 2014-03-31 2013-09-30 2013-06-30 2013-03-31 2012-09-30 2012-06-30 2012-03-31 2011-09-30 2011-06-30 2011-03-31 2010-09-30 2010-06-30 2010-03-31 2009-09-30 2007-06-30 2007-03-31 2006-12-31 2006-09-30 2006-06-30 2006-03-31 2005-12-31 2005-09-30 2005-06-30 2005-03-31 2004-09-30 2004-06-30 2004-03-31 2003-12-31 2003-09-30 2003-06-30 2003-03-31 2002-12-31 2002-09-30 2002-06-30 2002-03-31 
                                                                                       
        assets
                                                                                       
        current assets:
                                                                                       
        cash and cash equivalents
      150,829,000 145,451,000 187,501,000 173,649,000 183,957,000 123,512,000 120,066,000 145,166,000 133,963,000 167,297,000 142,300,000 132,504,000 164,479,000 185,595,000 308,552,000 287,167,000 297,141,000 294,923,000 271,085,000 219,731,000 206,766,000 203,479,000 211,967,000 190,340,000 174,745,000 139,881,000 155,317,000 136,340,000 163,104,000 177,993,000 148,716,000 147,297,000 140,957,000 133,407,000 113,889,000 108,558,000 69,429,000 70,791,000 65,623,000 60,981,000 67,571,000 79,871,000 78,085,000 74,548,000 32,536,000 35,588,000 43,039,000 48,317,000 34,639,000 42,441,000 35,220,000 33,797,000 37,218,000 44,413,000 37,857,000 44,782,000 49,116,000 47,886,000 34,801,000 41,244,000 63,782,000 45,412,000 140,451,000 90,452,000 69,347,000 59,222,000 71,417 85,806,000 90,011,000 91,701,000       122,255,000 150,651,000    
        short-term investments
      215,771,000 228,802,000 262,059,000 376,193,000 403,102,000 447,831,000 459,341,000 403,143,000 396,228,000 338,851,000 318,710,000 320,360,000 280,220,000 246,571,000 33,576,000                                                     87,688,000 88,884,000 86,924,000 23,549,000 18,616,000   23,916,000 36,926,000 35,021,000 34,992,000  12,477,000  
        accounts receivable
      161,814,000 168,479,000 147,636,000 138,841,000 164,949,000 203,149,000 183,543,000 188,080,000 208,544,000 217,964,000 192,327,000 159,199,000 189,597,000 169,773,000 173,893,000 146,120,000 118,987,000 104,410,000 78,257,000 79,544,000 75,932,000 86,865,000 45,161,000 64,909,000 64,238,000 83,753,000 49,046,000 62,279,000 70,947,000 78,727,000 84,977,000 74,429,000 75,588,000 75,302,000 69,835,000 48,561,000 67,083,000 50,573,000 44,993,000 63,482,000 47,471,000 38,674,000 42,002,000 42,753,000 29,904,000 32,067,000 38,121,000 29,321,000 30,220,000 23,150,000 24,978,000 34,978,000 30,464,000 39,881,000 57,969,000 49,948,000 40,957,000 34,264,000 34,293,000 26,632,000 79,696,000 80,040,000 73,635,000 98,163,000 103,636,000 91,707,000 79,379 65,914,000 75,191,000 79,491,000 110,259,000 106,756,000 104,118,000  74,164,000 73,227,000 79,216,000 60,311,000 78,958,000 70,044,000 51,687,000 
        inventories
      326,052,000 329,010,000 324,342,000 310,768,000 295,850,000 282,225,000 290,954,000 283,090,000 312,170,000 306,482,000 312,223,000 299,841,000 262,054,000 242,406,000 226,507,000 213,063,000 203,838,000 194,984,000 196,812,000 192,321,000 174,381,000 161,076,000 159,658,000 149,178,000 136,068,000 140,364,000 138,353,000 135,141,000 134,051,000 129,000,000 124,008,000 129,554,000 135,005,000 120,544,000 123,441,000 122,574,000 115,635,000 113,853,000 117,001,000 110,582,000 115,165,000 120,067,000 122,001,000 109,525,000 107,816,000 106,650,000 95,533,000 94,316,000 96,412,000 98,729,000 123,280,000 126,647,000 128,719,000 121,916,000 124,273,000 123,356,000 103,579,000 97,824,000 105,205,000 123,630,000 175,939,000 173,967,000 160,107,000 146,255,000 130,583,000 127,133,000 109,972 108,296,000 109,235,000 111,910,000 117,619,000 122,259,000 124,354,000  120,729,000 110,424,000 113,434,000 115,290,000 109,824,000 108,445,000 104,338,000 
        prepaid income taxes
      4,609,000 4,658,000 4,687,000 5,505,000 6,615,000 6,420,000 10,748,000 4,107,000                                                                          
        prepaid expenses and other current assets
      76,607,000 66,802,000 57,804,000 59,519,000 59,463,000 60,471,000 57,441,000 54,741,000 54,544,000 49,397,000 49,481,000 38,265,000 38,092,000 33,300,000 32,614,000 33,378,000 28,740,000 24,929,000 23,990,000 22,535,000 22,513,000 19,371,000 18,982,000 16,272,000 16,621,000 11,681,000 11,050,000 11,448,000 12,161,000 11,051,000 9,582,000 10,925,000 9,277,000 9,772,000 7,466,000 9,985,000 7,937,000 5,512,000 4,701,000 7,658,000 6,106,000 10,030,000 8,650,000 7,493,000 5,739,000 7,572,000 7,476,000 5,066,000 6,025,000 5,519,000 4,973,000 10,203,000 10,532,000 9,392,000 11,177,000 11,026,000 13,046,000 14,877,000 10,474,000 10,931,000 36,621,000 33,353,000 26,639,000 37,644,000 35,816,000 34,896,000 32,767 38,829,000              
        total current assets
      935,682,000 943,202,000 984,029,000 1,064,475,000 1,113,936,000 1,123,608,000 1,122,093,000 1,078,327,000 1,105,449,000 1,079,991,000 1,015,041,000 950,169,000 934,442,000 877,645,000 775,142,000 679,728,000 648,706,000 619,246,000 570,144,000 514,131,000 479,592,000 470,791,000 435,768,000 420,699,000 391,672,000 375,679,000 353,915,000 345,357,000 380,412,000 396,771,000 367,283,000 362,935,000 361,597,000 339,775,000 314,631,000 289,678,000 260,084,000 240,729,000 232,318,000 242,703,000 236,313,000 248,642,000 250,738,000 234,386,000 175,995,000 181,877,000 184,169,000 178,603,000 167,400,000 169,942,000 188,451,000 205,625,000 206,933,000 215,602,000 231,276,000 229,112,000 210,440,000 198,898,000 191,616,000 209,676,000 389,206,000 378,966,000 475,051,000 473,217,000 443,487,000 401,981,000 395,369 394,682,000 405,272,000 397,016,000 413,009,000 406,452,000 369,214,000  312,261,000 340,143,000 370,609,000 379,573,000 418,809,000 425,482,000 416,241,000 
        property, plant and equipment
      57,729,000 56,146,000 57,979,000 57,377,000 57,034,000 53,784,000 54,454,000 52,417,000 53,032,000 53,971,000 47,169,000 43,156,000 40,970,000 39,664,000 38,778,000 35,572,000 35,500,000 34,972,000 32,921,000 30,683,000 30,459,000 29,840,000 29,199,000 27,997,000 26,363,000 25,328,000 25,130,000 24,326,000 19,638,000 41,149,000 37,659,000 36,312,000 36,203,000 36,168,000 35,704,000 31,617,000 31,486,000 30,840,000 30,804,000 31,057,000 30,997,000 29,985,000 29,951,000 30,198,000 30,880,000 31,340,000 31,605,000 32,311,000 32,964,000 33,663,000 35,107,000 35,779,000 36,507,000 37,896,000 38,106,000 38,315,000 38,904,000 39,521,000 40,226,000 41,940,000 68,468,000  66,678,000    71,443               
        operating lease assets
      27,943,000 28,927,000 29,499,000 28,561,000 28,767,000 29,621,000 30,391,000 28,918,000 29,557,000 30,716,000 31,082,000 31,998,000 10,660,000 12,146,000 11,893,000 10,879,000 9,403,000 9,242,000 8,106,000 7,626,000 4,213,000 4,542,000 4,655,000 5,033,000 5,583,000 5,849,000 6,175,000 6,431,000 7,453,000                                                     
        finance lease assets
      13,835,000 14,154,000 14,440,000 14,704,000 15,025,000 15,346,000 15,668,000 15,989,000 16,310,000 16,632,000 16,981,000 17,305,000 17,623,000 17,942,000 18,265,000 18,590,000 18,914,000 19,238,000 19,563,000 19,889,000 20,216,000 20,544,000 20,872,000 21,200,000 21,528,000 21,880,000 22,231,000 22,563,000 22,895,000                                                     
        long-term restricted cash
      10,628,000 10,627,000 7,626,000 7,631,000 7,553,000 7,552,000 6,653,000 6,651,000 6,652,000 6,654,000 6,650,000 6,652,000 6,653,000 752,000 749,000 753,000 755,000 757,000 756,000 755,000 753,000 753,000 750,000 6,676,000 6,671,000 6,653,000 6,707,000 6,675,000 6,715,000 6,909,000 6,877,000 6,915,000 6,744,000 6,723,000 6,799,000 6,793,000 6,792,000 6,864,000 6,865,000 6,862,000 6,863,000 61,000   825,000 825,000 825,000    103,000 101,000 107,000 107,000 116,000 113,000                          
        deferred income taxes
      80,514,000 79,895,000 70,033,000 72,432,000 69,334,000 68,277,000 58,938,000 55,441,000 54,525,000 53,428,000 44,323,000 38,944,000 35,428,000 31,701,000 28,372,000 33,715,000 36,226,000 35,454,000 44,206,000 51,386,000 54,936,000 57,851,000 58,247,000 64,615,000 66,607,000 68,060,000 71,121,000 70,598,000 71,357,000 71,939,000 76,382,000 77,005,000 80,697,000 83,148,000                                           16,550,000 57,136,000    
        long-term investments
      203,339,000 182,396,000 143,214,000 31,114,000                                                                              
        other assets
      44,874,000 46,004,000 45,120,000 47,192,000 48,969,000 50,593,000 49,928,000 50,662,000 41,094,000 40,575,000 40,448,000 33,494,000 34,050,000 33,791,000 33,062,000 32,499,000 32,692,000 34,331,000 35,282,000 36,170,000 39,123,000 40,303,000 41,165,000 42,344,000 44,149,000 44,645,000 45,198,000 41,132,000 34,985,000 31,673,000 31,031,000 25,264,000 19,903,000 22,404,000 25,971,000 26,654,000 24,245,000 23,798,000 21,163,000 18,666,000 19,161,000 14,111,000 14,559,000 11,573,000 12,843,000 12,539,000 16,104,000 15,542,000 13,406,000 12,352,000 12,928,000 11,515,000 12,263,000 19,064,000 17,914,000 18,770,000 9,004,000 10,255,000 12,700,000 10,875,000 30,940,000 27,972,000 24,117,000 23,866,000 21,704,000 21,375,000 19,748 21,744,000 19,696,000 31,633,000 28,470,000 27,783,000 30,847,000  32,067,000 28,294,000 29,656,000 27,454,000 48,796,000 48,756,000 48,365,000 
        total assets
      1,374,544,000 1,361,351,000 1,351,940,000 1,323,486,000 1,340,618,000 1,348,781,000 1,338,125,000 1,288,405,000 1,306,619,000 1,281,967,000 1,201,694,000 1,121,718,000 1,079,826,000 1,013,641,000 906,261,000 811,736,000 782,196,000 753,240,000 710,978,000 660,640,000 629,292,000 624,624,000 590,656,000 588,564,000 562,573,000 548,094,000 530,477,000 517,082,000 543,455,000 548,441,000 519,232,000 508,431,000 505,144,000 488,218,000 383,105,000 354,742,000 322,607,000 302,231,000 291,150,000 299,288,000 293,334,000 292,799,000 295,313,000 276,157,000 220,543,000 226,581,000 232,703,000 227,281,000 213,770,000 215,957,000 236,589,000 253,020,000 255,810,000                      566,673,000 573,437,000 663,978,000  672,892,000 678,242,000 658,121,000 
        liabilities and stockholders’ equity
                                                                                       
        current liabilities:
                                                                                       
        accounts payable
      51,558,000 42,309,000 52,466,000 37,111,000 38,985,000 46,928,000 54,047,000 45,782,000 39,853,000 54,400,000 60,061,000 60,504,000 60,473,000 62,346,000 54,020,000 49,410,000 50,759,000 38,025,000 35,499,000 40,695,000 40,476,000 24,013,000 24,260,000 30,270,000 26,089,000 25,341,000 21,320,000 21,771,000 29,641,000 35,955,000 27,930,000 32,633,000 43,438,000 32,642,000 33,594,000 27,606,000 26,426,000 24,996,000 20,241,000 26,836,000 21,700,000 24,350,000 38,849,000 30,536,000 14,699,000 17,379,000 17,865,000 16,075,000 16,188,000 13,793,000 11,683,000 17,642,000 17,861,000 17,703,000 30,904,000 38,064,000 25,507,000 17,854,000 12,822,000 6,432,000 24,684,000 26,948,000 37,312,000 39,627,000 30,656,000 33,707,000 25,556 22,957,000 23,618,000 23,222,000 28,280,000 40,731,000 49,125,000  33,032,000 29,262,000 37,386,000 32,594,000 35,589,000 37,515,000 30,150,000 
        accrued compensation
      16,663,000 34,233,000 24,357,000 16,631,000 14,796,000 25,536,000 23,070,000 16,069,000 16,413,000 31,445,000 26,535,000 17,216,000 14,180,000 35,540,000 28,557,000 17,150,000 10,538,000 30,732,000 23,548,000 14,906,000 8,573,000 24,562,000 18,856,000 14,221,000 9,237,000 7,631,000 6,961,000 7,695,000 6,153,000 19,218,000 14,261,000 12,727,000 7,685,000 20,955,000 15,829,000 12,170,000 5,920,000 5,142,000 4,508,000 5,935,000 8,477,000 8,262,000 5,262,000 5,611,000 5,830,000 3,975,000 4,692,000 7,309,000 6,559,000 8,900,000 7,175,000 7,916,000 9,087,000 13,191,000 11,399,000 12,877,000 10,828,000 10,402,000 10,627,000 10,938,000 15,731,000 13,130,000 26,996,000 21,177,000 18,424,000 12,030,000 18,437 16,721,000 18,345,000 17,039,000 25,499,000 19,224,000 15,237,000  13,471,000 6,744,000 7,983,000 6,745,000 11,428,000 9,097,000 9,716,000 
        warranty
      9,314,000 9,516,000 9,258,000 10,903,000 11,882,000 13,022,000 14,547,000 14,502,000 14,355,000 14,098,000 11,464,000 10,867,000 9,599,000 8,299,000 8,482,000 8,348,000 7,203,000 6,424,000 5,741,000 4,690,000 4,181,000 4,280,000 4,151,000 3,942,000 3,431,000 2,759,000 3,251,000 4,045,000 4,319,000 4,819,000 4,545,000 4,698,000 4,583,000 4,112,000 4,154,000 3,537,000 2,748,000 2,426,000 2,597,000 2,958,000 3,288,000 3,532,000 2,886,000 1,909,000 1,160,000 1,326,000 1,496,000 1,461,000 1,419,000 1,539,000 2,107,000 2,589,000 3,110,000 3,639,000 4,131,000 3,060,000 1,629,000 974,000 730,000 1,029,000 5,567,000 4,609,000 5,229,000 6,569,000 5,276,000 4,910,000 5,739 8,321,000 8,957,000 9,615,000 14,642,000 15,762,000 16,498,000         
        income taxes
      14,026,000 11,383,000       26,850,000 6,164,000 582,000 6,598,000 13,183,000 4,304,000 540,000 321,000 1,734,000 887,000 623,000 622,000 648,000 654,000 328,000 298,000 344,000 294,000 269,000 329,000 491,000 462,000 205,000 163,000 389,000 273,000 285,000 255,000 252,000 240,000 235,000 196,000 177,000 262,000 297,000 322,000 545,000 430,000 474,000 262,000 226,000 356,000 356,000 210,000 576,000 777,000 650,000  1,725,000 1,367,000 1,099,000 856,000 817,000 1,474,000 3,906,000 2,043,000 2,478,000 2,869,000 3,021 2,627,000 2,628,000 3,346,000 5,919,000 5,694,000 8,003,000         
        deferred revenue
      68,352,000 65,494,000 81,486,000 89,827,000 110,456,000 94,673,000 138,682,000 148,390,000 164,700,000 164,677,000 148,299,000 138,890,000 156,876,000 123,471,000 101,169,000 62,685,000 60,477,000 60,454,000 54,502,000 34,112,000 20,417,000 21,221,000 13,118,000 29,181,000 28,892,000 24,601,000 23,300,000 10,176,000 16,639,000 19,513,000 14,393,000 11,927,000 15,507,000 16,181,000 14,447,000 13,832,000 12,179,000 10,335,000 7,074,000 13,781,000 8,119,000 9,400,000 8,429,000 8,247,000 4,867,000 4,227,000 3,836,000 3,911,000 5,728,000 5,714,000 6,641,000 8,398,000 7,216,000 9,857,000 10,933,000 10,880,000 10,170,000 10,097,000 5,295,000 10,093,000 40,642,000 34,928,000 28,811,000 40,420,000 34,728,000 32,408,000 30,140 33,682,000 33,311,000 35,765,000 36,183,000 30,923,000 26,172,000         
        current portion of finance lease obligation
      1,648,000 1,575,000 1,505,000 1,437,000 1,370,000 1,345,000 1,399,000 1,452,000 1,503,000 1,511,000 1,438,000 1,367,000 1,297,000 1,229,000 1,164,000 1,101,000 1,039,000 979,000 921,000 864,000 809,000 756,000 705,000 654,000 573,000 399,000 252,000 108,000                                                      
        other current liabilities
      42,353,000 33,150,000 29,917,000 21,198,000 22,881,000 26,018,000 20,519,000 17,984,000 12,894,000 12,834,000 12,799,000 13,018,000 12,334,000 12,943,000 13,924,000 13,955,000 15,747,000 12,639,000 16,361,000 10,585,000 8,774,000 8,945,000 7,965,000 8,193,000 6,807,000 7,639,000 7,674,000 7,960,000 8,815,000 5,030,000 4,938,000 4,542,000 5,482,000 5,124,000 5,388,000 4,957,000 5,310,000 4,592,000 5,057,000 4,584,000 4,153,000 4,014,000 4,620,000 3,748,000 3,462,000 3,681,000 4,100,000 4,250,000 4,432,000 3,768,000 3,711,000 4,070,000 4,298,000 4,456,000 4,518,000 3,855,000 4,561,000 4,424,000 3,760,000 2,868,000 8,614,000 8,765,000 13,670,000 11,587,000 12,627,000 10,089,000 11,333 8,449,000 7,685,000 6,543,000 8,219,000 14,218,000 9,060,000  21,719,000 17,686,000 15,782,000 18,400,000 20,684,000 26,613,000 18,759,000 
        total current liabilities
      203,914,000 197,660,000 198,989,000 177,107,000 200,370,000 207,522,000 252,264,000 244,179,000 276,568,000 285,129,000 261,178,000 248,460,000 267,942,000 248,132,000 207,856,000 152,970,000 147,497,000 150,140,000 137,195,000 106,474,000 83,878,000 84,431,000 69,383,000 86,759,000 75,373,000 68,664,000 63,027,000 52,084,000 66,058,000 84,997,000 66,272,000 66,690,000 77,084,000 79,287,000 73,697,000 62,357,000 52,835,000 47,731,000 39,712,000 54,290,000 45,914,000 49,820,000 60,343,000 50,373,000 31,727,000 32,072,000 33,225,000 33,453,000 34,552,000 34,070,000 31,673,000 40,825,000 42,148,000 49,623,000 62,535,000 68,736,000 54,420,000 45,118,000 34,333,000 32,216,000 96,055,000 89,854,000 190,141,000 195,640,000 178,406,000 170,230,000 94,226 92,757,000 94,544,000 95,530,000 118,742,000 126,552,000 124,095,000  92,968,000 76,126,000 87,182,000 87,187,000 87,715,000 94,476,000 82,204,000 
        long-term finance lease obligation
      40,310,000 40,754,000 41,166,000 41,567,000 41,958,000 42,329,000 42,671,000 43,004,000 43,328,000 43,674,000 44,070,000 44,455,000 44,831,000 45,185,000 45,508,000 45,822,000 46,128,000 46,415,000 46,672,000 46,923,000 47,167,000 47,393,000 47,593,000 47,787,000 47,976,000                                                         
        long-term deferred revenue
      41,214,000 43,445,000 47,434,000 39,915,000 28,868,000 43,501,000 25,344,000 25,621,000 43,718,000 46,208,000 53,730,000 43,650,000 44,849,000 31,306,000 21,420,000 8,864,000 14,363,000 7,982,000 3,738,000 1,406,000 1,725,000 1,837,000 3,851,000 1,236,000 5,214,000 4,650,000 4,141,000 3,904,000 3,842,000 3,071,000 3,381,000 3,248,000 3,015,000 1,964,000 1,985,000 1,070,000 942,000 674,000 788,000 650,000 667,000 736,000 455,000 409,000 175,000 101,000 257,000 154,000 259,000 321,000 544,000 761,000 1,241,000 2,087,000 2,374,000 2,417,000 1,365,000 895,000 910,000 659,000 2,905,000 3,427,000 5,054,000 9,468,000 8,932,000 10,671,000 11,177 8,880,000 12,426,000 7,796,000            
        other long-term liabilities
      44,463,000 44,815,000 44,207,000 42,514,000 42,184,000 42,639,000 42,252,000 40,653,000 41,262,000 42,074,000 41,745,000 41,116,000 20,383,000 21,762,000 16,587,000 17,153,000 14,935,000 9,744,000 11,694,000 11,735,000 8,862,000 9,361,000 9,166,000 7,758,000 6,838,000 7,204,000 7,165,000 7,187,000 7,853,000 4,279,000 4,759,000 5,144,000 5,794,000 5,643,000 5,317,000 5,185,000 4,906,000 4,785,000 5,136,000 4,950,000 4,852,000 6,541,000 6,539,000 6,520,000 7,266,000 7,136,000 7,058,000 6,129,000 5,829,000 5,713,000 4,944,000 5,771,000 6,000,000 5,190,000 5,317,000 5,090,000 4,023,000 3,630,000 3,781,000 3,982,000 6,881,000 6,878,000 4,349,000 4,601,000 4,543,000 4,335,000 4,999 5,530,000 4,810,000 5,289,000 10,505,000 10,683,000 7,756,000  3,270,000 2,979,000 4,423,000 4,756,000 3,968,000 3,913,000 3,726,000 
        total liabilities
      329,901,000 326,674,000 331,796,000 301,103,000 313,380,000 335,991,000 362,531,000 353,457,000 404,876,000 417,085,000 400,723,000 377,681,000 378,005,000 346,385,000 291,371,000 224,809,000 222,923,000 214,281,000 199,299,000 166,538,000 141,632,000 143,022,000 129,993,000 143,540,000 135,401,000 128,667,000 122,630,000 111,616,000 126,302,000 140,104,000 122,158,000 122,817,000 133,617,000 134,608,000 128,703,000 116,304,000 106,364,000 100,776,000 93,222,000 107,476,000 99,019,000 104,683,000 114,923,000 104,888,000 52,819,000 53,255,000 54,778,000 54,551,000 40,640,000 40,104,000 37,161,000 47,357,000 49,389,000                             
        commitments and contingencies
                                                                                       
        stockholders’ equity:
                                                                                       
        common stock, 0.001 par value...
      31,000 31,000 31,000 31,000 32,000 32,000 33,000 33,000 33,000 33,000 33,000 33,000 33,000 33,000 33,000 33,000 33,000 33,000 33,000 34,000 34,000 34,000 33,000 33,000 33,000 33,000 32,000 32,000 33,000 33,000 32,000 32,000 32,000 32,000 31,000 31,000 30,000 30,000 29,000 29,000 116,000 116,000 114,000 114,000 112,000 112,000 111,000 110,000 109,000 108,000             101,000    101               
        additional paid-in capital
      537,185,000 533,309,000 532,951,000 535,667,000 547,020,000 548,654,000 545,350,000 542,677,000 546,979,000 547,189,000 543,577,000 540,120,000 547,692,000 550,299,000 549,735,000 549,401,000 554,633,000 559,883,000 559,913,000 561,680,000 567,199,000 570,102,000 566,195,000 562,839,000 559,182,000 559,878,000 559,063,000 556,283,000 568,335,000 565,116,000 562,083,000 559,207,000 557,498,000 556,147,000 550,058,000 546,491,000 538,747,000 535,408,000 533,392,000 530,389,000 530,034,000 527,274,000 523,997,000 521,107,000 516,992,000 514,946,000 513,411,000 508,976,000 506,647,000 505,478,000 503,728,000 502,351,000 501,169,000 498,012,000 496,583,000 495,330,000 492,343,000 490,686,000 489,308,000 487,047,000 475,514,000 472,477,000 469,967,000 468,779,000 466,020,000 464,647,000 466,454 466,496,000 458,962,000 458,615,000 457,177,000 454,550,000 453,993,000  450,803,000 448,659,000 448,276,000 447,533,000 448,006,000 445,121,000 444,939,000 
        retained earnings
      512,753,000 503,539,000 488,771,000 487,164,000 485,673,000 470,318,000 432,429,000 396,718,000 358,303,000 319,506,000 261,521,000 206,813,000 156,014,000 118,892,000 70,893,000 39,582,000 4,019,000                                            17,000,000 12,255,000 9,583,000            -104,777,000 -72,835,000 6,043,000 12,369,000 19,202,000 19,011,000 20,688,000 
        accumulated other comprehensive loss
      -5,326,000 -2,202,000 -1,609,000 -479,000 -5,487,000 -6,214,000 -2,218,000 -4,480,000 -3,572,000 -1,846,000 -4,160,000 -2,929,000 -1,918,000           -420,000 -1,313,000            -336,000 -2,279,000  -786,000                                   1,419,000  -5,096,000 -5,492,000 -8,623,000 -6,828,000 -16,043,000 
        total stockholders’ equity
      1,044,643,000 1,034,677,000 1,020,144,000 1,022,383,000 1,027,238,000 1,012,790,000 975,594,000 934,948,000 901,743,000 864,882,000 800,971,000 744,037,000 701,821,000 667,256,000 614,890,000 586,927,000 559,273,000 538,959,000 511,679,000 494,102,000 487,660,000 481,602,000 460,663,000 445,024,000 427,172,000 419,427,000 407,847,000 405,466,000 417,153,000 408,337,000 397,074,000 385,614,000 371,527,000 353,610,000 254,402,000 238,438,000 216,243,000 201,455,000 197,928,000 191,812,000 194,315,000 188,116,000 180,390,000 171,269,000 167,724,000 173,326,000 177,925,000 172,730,000 173,130,000 175,853,000 199,428,000 205,663,000 206,421,000                      345,435,000 369,332,000 447,373,000 452,508,000 456,209,000 454,853,000 447,191,000 
        total liabilities and stockholders’ equity
      1,374,544,000 1,361,351,000 1,351,940,000 1,323,486,000 1,340,618,000 1,348,781,000 1,338,125,000 1,288,405,000 1,306,619,000 1,281,967,000 1,201,694,000 1,121,718,000 1,079,826,000 1,013,641,000 906,261,000 811,736,000 782,196,000 753,240,000 710,978,000 660,640,000 629,292,000 624,624,000 590,656,000 588,564,000 562,573,000 548,094,000 530,477,000 517,082,000 543,455,000 548,441,000 519,232,000 508,431,000 505,144,000 488,218,000 383,105,000 354,742,000 322,607,000 302,231,000 291,150,000 299,288,000 293,334,000 292,799,000 295,313,000 276,157,000 220,543,000 226,581,000 232,703,000 227,281,000 213,770,000 215,957,000 236,589,000 253,020,000 255,810,000                      566,673,000 573,437,000 663,978,000  672,892,000 678,242,000 658,121,000 
        accumulated other comprehensive income
                   -1,968,000 -5,771,000 -2,089,000 588,000 1,765,000 1,750,000 2,669,000 2,083,000 3,435,000 1,078,000   -258,000 -1,310,000 -207,000 -17,000 448,000 682,000 936,000 3,227,000 2,176,000 738,000 182,000   176,000    633,000 285,000 2,889,000 5,833,000 5,068,000 5,097,000 3,077,000 2,950,000 4,469,000 3,364,000 4,833,000 5,198,000 9,196,000 7,557,000 5,160,000 1,036,000 4,372,000 5,612,000     3,181,000  -2,724 1,326,000   3,536,000 3,956,000 8,032,000   -4,293,000      
        accumulated deficit
                       -22,722,000 -50,017,000 -70,281,000 -81,656,000 -91,969,000 -106,643,000 -117,428,000 -130,730,000 -140,226,000 -149,938,000 -150,642,000 -151,198,000 -157,260,000 -165,723,000 -174,561,000 -189,230,000 -204,745,000 -296,425,000 -308,266,000 -322,198,000 -331,704,000 -335,669,000 -337,820,000                           -31,187               
        finance lease obligation
                               48,149,000 48,297,000 48,441,000 48,549,000                                                     
        short-term restricted cash
                                149,000 149,000 149,000   730,000 770,000 750,000                                                
        sale leaseback obligation
                                   47,757,000 47,746,000 47,735,000 47,724,000 47,714,000 47,704,000 47,692,000 47,681,000 47,586,000 47,586,000 47,586,000 47,586,000 47,586,000 47,586,000 47,586,000                                      
        preferred stock, 0.001 par value...
                                                                                       
        treasury stock
                                                                        -1,218        -1,218,000 -1,218,000 -1,218,000 -1,218,000 -1,218,000 -1,218,000 -1,218,000 
        current assets
                                                                                       
        current liabilities
                                                                                       
        stockholders’ equity
                                                                                       
        restricted cash
                                                 67,000    1,583,000 104,000 103,000       3,742,000 4,047,000 6,843,000 7,239,000 15,168,000 12,194,000 11,019,000 9,164,000 9,225,000 8,878,000 8,037 8,149,000 7,424,000 3,805,000 3,370,000 3,370,000 3,380,000         
        current portion of long-term debt
                                                  1,164,000 1,054,000 762,000 185,000                74,217,000 74,217,000 74,217,000                
        long-term debt
                                                  13,651,000 13,946,000 14,238,000 14,815,000              77,624,000 76,887,000 76,165,000 75,457,000 50,783,000 125,000 125,000,000 125,000,000 125,000,000 125,000,000 125,000,000 125,000,000     125,000,000 125,000,000 125,000,000 125,000,000 
        restricted cash, long-term
                                                     825,000                                  
        preferred stock
                                                                                       
        common stock
                                                        108,000 108,000 108,000 107,000 106,000 106,000 105,000 104,000 104,000 104,000 102,000 102,000  101,000 101,000 101,000  101,000 100,000 100,000 100,000 100,000 100,000  99,000 99,000 99,000  98,000 98,000 98,000 
        investment in sen
                                                                  123,295,000 126,988,000 126,688,000 119,163,000 120,604,000 111,317,000 108,815               
        current portion of convertible subordinated debt
                                                                                       
        marketable securities
                                                                  18,000,000 34,000,000 63,200,000 91,539,000 94,880,000 80,145,000 93,797               
        goodwill
                                                                  46,773,000 46,773,000 46,773,000 46,773,000 46,773,000 46,773,000 46,773 46,773,000 46,773,000 46,773,000 46,773,000 46,773,000 46,773,000  47,948,000 40,682,000 40,682,000 40,682,000 40,682,000 39,282,000 39,282,000 
        intangible assets
                                                                  12,237,000 12,893,000 13,549,000 14,205,000 14,861,000 15,488,000 16,100 15,835,000 16,446,000 17,059,000 18,283,000 18,895,000 19,507,000  19,799,000 12,411,000 12,776,000 13,141,000 13,506,000 13,871,000 14,236,000 
        restricted cash, long-term portion
                                                                    1,137,000 2,694,000 2,718,000 2,576,000 3,195 2,562,000 2,532,000 2,583,000 2,616,000 2,616,000 2,616,000         
        convertible subordinated debt
                                                                  78,375,000                     
        property, plant & equipment
                                                                   68,063,000  66,534,000 66,777,000 68,056,000  72,633,000 73,016,000 73,332,000 76,163,000 77,604,000 79,044,000  88,378,000 90,015,000 91,712,000 93,597,000 95,940,000 96,363,000 94,195,000 
        accumulated other comprehensive gain
                                                                   256,000                    
        current portion, long term debt
                                                                    74,217,000                   
        deferred compensation
                                                                        -5,385        -891,000 -1,080,000 -731,000 -782,000 -1,256,000 -1,331,000 -1,273,000 
        investment in sumitomo eaton nova corporation
                                                                         108,817,000 110,387,000 106,514,000 93,628,000 85,455,000 81,099,000  66,220,000 61,892,000 61,396,000 57,868,000 55,159,000 54,488,000 45,802,000 
        other current assets
                                                                          34,527,000 23,185,000 20,208,000 16,356,000 16,578,000    4,133,000     
        accumulated other comprehensive income-foreign currency translation adjustments
                                                                          4,618,000 9,768,000            
        retained earnings deficit
                                                                                       
        cash & cash equivalents
                                                                            138,004,000 139,095,000 120,784,000  91,293,000 116,622,000   194,673,000 198,759,000 229,578,000 
        deferred income taxes & other current assets
                                                                                2,159,000 2,944,000  18,329,000 35,354,000 35,757,000 30,638,000 
        liabilities and stockholders’ equity
                                                                                       
        warranty reserve
                                                                                17,326,000 14,948,000 14,363,000 16,625,000 20,014,000 21,251,000 23,579,000 
        income taxes payable
                                                                                7,420,000 7,486,000 11,668,000 12,823,000    
        convertible debt
                                                                                125,000,000 125,000,000      
        long-term convertible debt
                                                                                  125,000,000     
      Cashflow Statements:
      Quarterly
      Annual
        Unit: USD2026-03-31 2025-12-31 2025-09-30 2025-06-30 2025-03-31 2024-12-31 2024-09-30 2024-06-30 2024-03-31 2023-12-31 2023-09-30 2023-06-30 2023-03-31 2022-12-31 2022-09-30 2022-06-30 2022-03-31 2021-12-31 2021-09-30 2021-06-30 2021-03-31 2020-12-31 2020-09-30 2020-06-30 2020-03-31 2019-12-31 2019-09-30 2019-06-30 2019-03-31 2018-12-31 2018-09-30 2018-06-30 2018-03-31 2017-12-31 2017-09-30 2017-06-30 2017-03-31 2016-12-31 2016-09-30 2016-06-30 2016-03-31 2015-09-30 2015-06-30 2015-03-31 2014-09-30 2014-06-30 2014-03-31 2013-09-30 2013-06-30 2013-03-31 2012-09-30 2012-06-30 2012-03-31 2011-09-30 2011-06-30 2011-03-31 2010-09-30 2010-06-30 2010-03-31 2009-09-30 2007-06-30 2007-03-31 2006-12-31 2006-09-30 2006-06-30 2006-03-31 2005-12-31 2005-09-30 2005-06-30 2005-03-31 2004-09-30 2004-06-30 2004-03-31 2003-12-31 2003-09-30 2003-06-30 2003-03-31 2002-12-31 2002-09-30 2002-06-30 2002-03-31 
                                                                                         
          cash flows from operating activities
                                                                                         
          net income
        9,214,000 34,297,000 25,986,000 31,376,000 28,579,000 49,956,000 48,576,000 50,865,000 51,595,000 71,056,000 65,931,000 61,579,000 47,697,000 56,992,000 40,283,000 44,190,000 41,614,000 35,749,000 27,515,000 18,906,000 16,480,000 14,674,000 10,785,000 13,302,000 11,221,000 9,712,000 704,000 556,000 6,062,000 8,463,000 8,838,000 14,669,000 13,915,000 91,680,000 11,841,000 13,932,000 9,506,000 3,965,000 2,151,000 2,937,000 1,948,000 6,101,000 5,883,000 1,868,000   174,000    -8,717,000 -471,000 -10,028,000 1,151,000 4,227,000 1,812,000 -6,273,000 -4,529,000 -11,101,000 -74,849,000 4,745,000 2,672,000 15,561,000 12,520,000 12,144,000 545,000 2,516,145 -5,167,000 749,000 1,898,000 19,082,000 34,471,000 13,581,000 3,270,000 -31,942,000 -78,878,000 -6,326,000 -6,833,000 191,000 -1,677,000 -17,831,000 
          adjustments to reconcile net income to net cash from operating activities:
                                                                                         
          depreciation and amortization
        4,436,000 4,461,000 4,328,000 4,515,000 4,309,000 4,267,000 3,906,000 3,861,000 3,775,000 3,581,000 3,230,000 3,158,000 3,100,000 2,993,000 2,890,000 2,876,000 2,848,000 2,825,000 2,657,000 2,691,000 2,645,000 2,593,000 2,517,000 2,466,000 2,363,000 2,297,000 1,983,000 1,985,000 1,615,000 1,564,000 1,432,000 1,328,000 1,448,000 1,250,000 1,320,000 1,255,000 1,177,000 1,065,000 1,132,000 1,143,000 918,000 1,310,000 1,156,000 1,142,000 1,142,000 1,159,000 1,140,000 1,229,000 1,325,000 1,394,000 1,794,000 1,729,000 1,896,000 2,171,000 2,127,000 1,882,000 1,656,000 1,774,000 1,937,000 -3,576,000 4,709,000 4,460,000 4,448,000 4,286,000 4,513,000 4,339,000 -15,813,716 4,944,000 5,315,000 5,576,000 4,992,000 5,005,000 5,001,000   2,926,000 2,930,000     
          deferred income taxes
        -658,000 -8,941,000 2,399,000 -3,098,000 -1,057,000 -10,084,000 -3,497,000 -916,000 -1,097,000 -7,395,000 -5,210,000 -3,792,000 -3,621,000 2,120,000 2,482,000 1,682,000 2,252,000 8,699,000 6,451,000 3,494,000 1,613,000 -714,000 2,364,000 2,136,000 899,000 2,486,000 -523,000 759,000 582,000                                                   
          stock-based compensation expense
        4,899,000 5,105,000 5,344,000 5,421,000 4,903,000 5,380,000 5,412,000 5,469,000 4,690,000 5,239,000 5,082,000 4,749,000 3,199,000 3,654,000 3,562,000 3,527,000 2,701,000 3,097,000 3,186,000 3,377,000 2,407,000 2,758,000 2,921,000 3,082,000 1,724,000 2,033,000 2,151,000 2,317,000 1,672,000 2,181,000 2,415,000 2,056,000 1,132,000 1,347,000 1,745,000 1,505,000 1,075,000 1,249,000 1,851,000 1,241,000 838,000 1,412,000 1,929,000 1,126,000 1,597,000 1,010,000 1,172,000 1,461,000 805,000 839,000 1,401,000 928,000 1,082,000 1,520,000 902,000 1,222,000 1,385,000 751,000 817,000                       
          provision for doubtful accounts
        65,000     3,000 3,443,000 -459,000 380,000                                                                       
          provision for excess and obsolete inventory
        950,000 1,265,000 883,000 867,000 875,000 1,846,000 1,274,000 1,401,000 1,445,000 1,299,000 1,418,000 1,425,000 1,069,000 1,273,000 1,231,000 1,034,000 1,027,000 982,000 885,000 904,000 984,000 960,000 1,028,000 906,000 802,000 833,000 632,000 722,000 607,000 548,000 487,000 685,000 485,000 -9,682,000 533,000 436,000 578,000 -91,000 327,000   298,000   346,000                                     
          accretion of discounts and premiums on short-term and long-term investments
        39,000 -819,000 -1,081,000                                                                               
          unrealized currency loss on foreign denominated transactions
        2,930,000   -6,055,000 -752,000 10,911,000                                                                            
          mark-to-market adjustment on forward exchange contracts
        479,000 -1,020,000 128,000 587,000 -130,000 -850,000                                                                            
          changes in operating assets and liabilities:
                                                                                         
          accounts receivable
        5,996,000 -21,333,000 -8,695,000 28,873,000 38,586,000 -21,865,000 3,765,000 17,967,000 7,042,000 -24,081,000 -34,847,000 28,935,000 -20,762,000 10,179,000 -31,666,000 -30,584,000 -15,199,000 -26,279,000 1,042,000 -3,340,000 10,431,000 -40,502,000 20,357,000 -471,000 19,223,000 -35,234,000 12,886,000 8,704,000 7,642,000 6,345,000 -10,752,000 514,000 16,000 -5,199,000 -21,073,000 18,877,000 -16,178,000 -6,237,000 18,550,000   3,025,000   1,671,000     1,458,000 10,127,000 -4,794,000 4,810,000 17,423,000 -7,674,000 8,245,000           -16,715,867 9,147,000 3,661,000 3,911,000     1,540,000 6,761,000 -18,614,000  -8,998,000 -16,869,000 11,989,000 
          inventories
        -3,132,000 -7,969,000 -17,488,000 -4,374,000 -12,386,000 -5,382,000 -1,652,000 24,378,000 -11,427,000 9,537,000 -16,200,000 -42,189,000 -21,105,000 -8,734,000 -22,188,000 -16,021,000 -11,490,000 572,000 -7,177,000 -15,915,000 -16,503,000 959,000 -9,488,000 -11,047,000 1,924,000 -1,351,000 -5,441,000 -4,990,000 -6,171,000 -5,645,000 4,463,000 2,132,000 -11,462,000 13,940,000 -710,000 -6,683,000 -844,000 962,000 -5,994,000 -2,683,000 1,143,000       3,024,000         -4,562,000 5,592,000 8,252,000        -5,976,880 601,000 1,523,000 3,857,000 5,049,000    -8,633,000 4,180,000 2,063,000  -1,671,000 -2,016,000 1,595,000 
          prepaid expenses and other current assets
        -10,087,000 -8,537,000 2,148,000 -136,000 1,311,000 -3,593,000 -2,261,000 -360,000 -5,489,000 447,000 -11,398,000 -301,000 -4,794,000 -1,672,000 443,000 -3,452,000 -1,852,000 924,000 -1,570,000 16,000 -3,325,000 -4,618,000 1,502,000 229,000 -4,435,000 51,000 278,000 741,000 -1,174,000 -1,485,000 1,321,000 -1,864,000 592,000 -2,221,000 2,608,000 -1,906,000 -2,347,000 -998,000 2,996,000               1,468,000 38,000 4,404,000                          
          accounts payable and other current liabilities
        -1,138,000 4,826,000 29,708,000 -2,499,000 -25,844,000 2,325,000 15,803,000 10,577,000 -29,118,000 813,000 9,350,000 4,710,000 -22,976,000 13,697,000 16,188,000 5,089,000 -3,582,000 4,113,000 10,651,000 8,290,000 -1,008,000 7,522,000 -1,268,000 10,119,000 1,689,000 3,737,000 -1,328,000 -4,648,000 -16,911,000 10,169,000 -2,840,000 -6,196,000 -1,836,000 3,655,000 10,557,000 7,739,000 3,049,000 4,921,000 -7,843,000 2,639,000 1,082,000 -11,364,000 9,747,000 11,466,000    634,000 599,000 5,043,000                         11,877,000 -7,303,000 891,000  -6,759,000 10,324,000 -3,450,000 
          deferred revenue
        1,627,000 -19,588,000 -482,000 -10,687,000 1,106,000 -24,397,000 -10,743,000 -33,994,000 -1,963,000 8,479,000 19,629,000 -19,085,000 47,160,000 31,552,000 51,524,000 -3,128,000 6,418,000 10,196,000 22,729,000 13,369,000 -909,000 6,077,000 -13,459,000 -3,692,000 4,859,000 1,808,000 13,362,000 -6,400,000 -2,098,000 4,810,000 2,603,000 -3,321,000 1,963,000 1,726,000 1,494,000 1,774,000 2,085,000 3,171,000 -6,579,000 5,649,000 226,000 1,296,000 216,000 1,455,000             486,000 4,840,000 526,000  5,192,000 4,490,000  6,229,000 580,000 1,762,000  -3,154,000 2,179,000 1,877,000 4,643,000 7,571,000 13,937,000         
          income taxes
        2,878,000 10,935,000 214,000 -228,000 2,194,000 5,098,000 -5,741,000 -29,765,000 21,374,000 7,458,000 -5,996,000 -6,567,000 8,891,000 3,767,000 255,000 -1,387,000 858,000 277,000 3,000 -29,000 2,000 303,000 24,000 -48,000 53,000 23,000 -56,000 -161,000 32,000 257,000 43,000 -217,000 113,000 -20,000 27,000 5,000 2,000 17,000 35,000 20,000 30,000 -31,000 -28,000 132,000 138,000 -48,000 61,000   84,000   76,000 169,000 626,000 3,000                 893,000         
          other assets and liabilities
        -359,000 -3,413,000 -2,620,000 -3,199,000 -1,281,000 1,433,000 5,029,000 -11,044,000 -1,399,000 -2,389,000 -6,778,000 -1,368,000 -1,802,000 577,000 -1,003,000 -374,000 175,000 -3,046,000 -212,000 -940,000 2,281,000 4,192,000 1,809,000 -84,000 -645,000 -462,000 -4,667,000 -7,562,000 -4,207,000 -1,904,000 -6,753,000 -6,639,000 -317,000 -505,000 -251,000 19,000 -749,000 -3,776,000 -2,865,000      -818,000      -3,201,000 -257,000 6,483,000    684,000 1,619,000 54,000        -3,034,200 -9,153,000 10,342,000 1,846,000            
          net cash from operating activities
        18,139,000 -6,567,000 45,350,000 39,727,000 39,795,000 12,780,000 45,748,000 40,067,000 42,223,000 65,575,000 24,020,000 32,715,000 34,559,000 122,384,000 64,001,000 3,452,000 25,770,000 38,109,000 66,160,000 30,823,000 15,098,000 -5,964,000 19,092,000 16,898,000 39,677,000 -13,249,000 19,981,000 -7,977,000 -12,349,000 29,745,000 1,880,000 6,840,000 8,500,000 15,962,000 8,925,000 34,065,000 -2,668,000 4,216,000 3,690,000   655,000 3,028,000 8,740,000             -601,000              3,879,000 36,446,000 4,612,000         
          capital expenditures
        -1,839,000 -2,335,000 -2,015,000 -1,985,000 -4,960,000 -4,658,000 -3,899,000 -2,004,000 -1,620,000 -10,153,000 -5,301,000 -2,962,000 -2,240,000 -3,807,000 -3,520,000 -1,853,000 -1,503,000 -3,017,000 -3,309,000 -1,045,000 -1,347,000 -1,867,000 -2,592,000 -1,685,000 -1,290,000 -905,000 -2,307,000 -4,502,000 -4,255,000 -863,000 -2,177,000 -952,000 -723,000 -375,000 -733,000 -1,116,000 -245,000 -402,000                                    
          free cash flows
        16,300,000 -8,902,000 43,335,000 37,742,000 34,835,000 8,122,000 41,849,000 38,063,000 40,603,000 55,422,000 18,719,000 29,753,000 32,319,000 118,577,000 60,481,000 1,599,000 24,267,000 35,092,000 62,851,000 29,778,000 13,751,000 -7,831,000 16,500,000 15,213,000 38,387,000 -14,154,000 17,674,000 -12,479,000 -16,604,000 28,882,000 -297,000 5,888,000 7,777,000 15,587,000 8,925,000 33,332,000 -3,784,000 3,971,000 3,288,000   655,000 3,028,000 8,740,000             -601,000              3,879,000 36,446,000 4,612,000         
          cash flows from investing activities
                                                                                         
          expenditures for property, plant and equipment and capitalized software
        -1,839,000 -2,335,000 -2,015,000 -1,985,000 -4,960,000 -4,658,000 -3,899,000 -2,004,000 -1,620,000 -10,153,000 -5,301,000 -2,962,000 -2,240,000 -3,807,000 -3,520,000 -1,853,000 -1,503,000 -3,017,000 -3,309,000 -1,045,000 -1,347,000 -1,867,000 -2,592,000 -1,685,000 -1,290,000 -905,000 -2,307,000 -4,502,000 -4,255,000 -863,000 -2,177,000 -952,000 -723,000 -375,000                                                
          purchases of short-term and long-term investments
        -160,696,000 -139,372,000 -161,452,000                                                                               
          maturities and sales of short-term investments
        151,896,000 134,400,000 164,845,000 90,051,000 297,924,000                                                                             
          net cash from investing activities
        -10,639,000 -7,307,000 1,378,000 -4,613,000 40,469,000 9,121,000 -56,553,000 -5,603,000 -55,691,000 -26,679,000 -941,000 -40,189,000 -33,049,000 -216,802,000 -37,096,000 -1,853,000 -1,503,000 -3,017,000 -3,309,000 -1,045,000 -1,347,000 -1,699,000 -2,592,000 -1,685,000 -1,290,000 -905,000 -2,307,000 -4,502,000 -4,255,000 -863,000 -2,177,000 -952,000 -723,000 -375,000 -5,061,000 -733,000 -1,116,000 -137,000 -240,000          613,000 253,000       24,000 2,580,000 56,000 87,597,000 10,433,000 25,512,000    12,633,000      -19,875,000 20,624,000         
          cash flows from financing activities
                                                                                         
          net settlement on restricted stock grants
        -1,023,000 -258,000 -104,000 -2,569,000 -1,583,000 -155,000 -241,000 -8,468,000 -2,699,000 -797,000 -349,000 -11,558,000 -3,907,000 -626,000 -70,000 -5,896,000 -3,315,000 -21,000 -48,000 -4,141,000 -2,354,000 -27,000 -28,000 -2,698,000 -1,162,000 -30,000 -11,000 -1,310,000 -281,000 -26,000 -6,000 -1,161,000 -226,000 -50,000 -848,000 -286,000                                             
          repurchase of common stock
         -25,231,000 -32,335,000 -45,337,000 -18,178,000 -15,131,000 -15,363,000 -14,996,000 -14,999,000 -15,001,000 -12,499,000 -12,500,000 -12,499,000 -12,500,000 -12,497,000 -12,498,000 -20,000,000 -12,499,000 -12,500,000 -13,358,000 -11,635,000 -7,501,000 -3,709,000                                                       
          principal payments on finance lease obligation
        -374,000 -345,000 -336,000 -327,000 -349,000 -400,000 -389,000 -379,000 -357,000 -325,000 -317,000 -309,000 -289,000 -259,000 -253,000 -246,000 -229,000 -201,000 -200,000 -187,000 -175,000 -147,000 -144,000                                                           
          net cash from financing activities
        -1,397,000 -24,621,000 -32,775,000 -46,987,000 -20,110,000 -14,543,000 -15,993,000 -22,601,000 -18,055,000 -15,023,000 -13,165,000 -23,410,000 -16,670,000 -12,343,000 -12,453,000 -17,631,000 -23,053,000 -11,783,000 -12,403,000 -16,615,000 -11,652,000 1,005,000 286,000 467,000 -4,145,000 -1,217,000 632,000 -14,370,000 1,547,000 853,000 461,000 -348,000 220,000 4,743,000 1,822,000 6,260,000 2,245,000 768,000 1,149,000     34,866,000 290,000 533,000 1,277,000 14,609,000 354,000 49,000 16,000 49,000 977,000 28,000 -116,000 436,000       576,000 670,000 24,674,000 1,813,000 -3,288,396 989,000 881,000 1,422,000 1,170,000 1,930,000 1,816,000 586,000 2,310,000 743,000 48,000    
          effect of exchange rate changes on cash and cash equivalents
        -724,000 -554,000 -106,000 1,643,000 292,000 -3,013,000 1,700,000 -661,000 -1,813,000 1,128,000 -120,000 -1,092,000 -55,000 -16,193,000 6,929,000 6,056,000 1,002,000 530,000 907,000 -196,000 1,188,000 -1,827,000 -1,085,000 -80,000 640,000 -268,000 703,000 45,000 123,000 -426,000 487,000 931,000 -406,000 -138,000 -349,000 -462,000 105,000 321,000 43,000   -88,000                                        
          net increase in cash, cash equivalents and restricted cash
        5,379,000 -39,049,000 13,847,000 -10,230,000 60,446,000     25,001,000   -15,215,000 -122,954,000 21,381,000 -9,976,000 2,216,000 23,839,000 51,355,000 12,967,000 3,287,000 -8,485,000 15,701,000 15,600,000 34,882,000 -15,639,000 19,009,000 -26,804,000 -14,934,000 29,309,000 651,000 6,471,000 7,591,000 20,192,000 5,337,000                                               
          cash, cash equivalents and restricted cash at beginning of period
        156,078,000 131,064,000 173,951,000 186,347,000 295,680,000 204,232,000 146,534,000 184,902,000 140,880,000 77,655,000                                             
          cash, cash equivalents and restricted cash at end of period
        161,457,000 -39,049,000 13,847,000 -10,230,000 191,510,000 4,345,000 -25,098,000 11,202,000 140,615,000 25,001,000 9,794,000 -31,976,000 171,132,000 -122,954,000 21,381,000 -9,976,000 297,896,000 23,839,000 51,355,000 12,967,000 207,519,000 -8,485,000 15,701,000 15,600,000 181,416,000 -15,639,000 19,009,000 -26,804,000 169,968,000 29,309,000 651,000 6,471,000 148,471,000 20,192,000 5,337,000 39,130,000 76,221,000                                             
          unrealized currency gain on foreign denominated transactions
         4,164,000                                                                                
          proceeds from employee stock purchase plan purchases
         1,213,000   1,143,000   1,100,000   951,000                                                                   
          proceeds from exercise of stock options
                 25,000 91,000 367,000 298,000 491,000 268,000 344,000 563,000 2,512,000 679,000 458,000 2,783,000 4,499,000 2,066,000 643,000 568,000 1,828,000 445,000 467,000 376,000 446,000 4,403,000 1,822,000 6,759,000 2,531,000 490,000 1,181,000 362,000 194,000 1,872,000 728,000 937,000 475,000 306,000 1,277,000 907,000 157,000 49,000 16,000 45,000 802,000 33,000 42,000 197,000 49,000 23,000 32,000                       
          supplemental disclosure of cash flow information
                                                                                         
          cash paid for:
                                                                                         
          interest
                                                                                         
          accretion of discounts and premiums on marketable securities
            -618,000 -2,268,000 -3,544,000 -3,317,000 -3,306,000 -3,614,000 -2,710,000 -2,913,000 -2,840,000                                                                     
          purchase of short-term investments
            -252,495,000 -105,226,000 -184,879,000 -103,894,000 -145,121,000 -117,226,000 -82,640,000 -127,134,000 -61,809,000 -212,995,000                                                                    
          maturities of short-term investments
             119,005,000 132,225,000 100,295,000 91,050,000 100,700,000 87,000,000 89,907,000 31,000,000                                                                     
          net decrease in cash, cash equivalents and restricted cash
             4,345,000 -25,098,000 11,202,000 -33,336,000                            -1,434,000                                             
          currency loss on foreign denominated transactions
               4,945,000 6,560,000 -5,235,000 1,770,000 4,374,000 1,343,000                                                                     
          gain on sale of equipment
                                             -86,000                                            
          proceeds from sale of equipment
                                             108,000                                            
          proceeds from employee stock purchase plan
                         670,000 1,000   500,000 490,000 19,000 456,000   434,000   390,000             4,000 175,000 36,000 239,000 37,000 169,000 -931,000 411,000 585,000 352,000 572,000 395,000 611,000 -2,147,537 841,000 445,000 864,000 940,000 1,284,000 1,152,000         
          changes in operating assets & liabilities:
                                                                                         
          financing fees and other expenses
                                             -29,000                                           
          deferred taxes
                                      623,000 3,693,000 2,451,000 -80,009,000 834,000 -2,888,000 -22,000 54,000 -15,000   -13,000 -37,000 134,000 100,000 22,000 312,000 220,000 -4,000 56,000 3,000 617,000 378,000      167,000                       
          principal payments on term loan
                                                                                         
          principal payments on sale leaseback obligation
                                                                                         
          proceeds from financing obligations
                                                                                         
          expenditures for property, plant and equipment
                                           -733,000 -1,116,000 -245,000 -402,000                                           
          decrease in restricted cash
                                             1,000 -3,000 1,000 73,000 4,000 2,000 758,000     -1,000 3,000 -2,000      305,000 2,797,000 319,000             10,000 420,000         
          net increase in cash and cash equivalents
                                             5,168,000 4,642,000    3,537,000 43,795,000             1,230,000      49,999,000                   
          cash and cash equivalents at beginning of period
                                             78,889,000 30,753,000 46,290,000 44,986,000 46,877,000 45,743,000 45,020,000 -102,757,000 140,451,000 71,417,000 -108,186,705              
          cash and cash equivalents at end of period
                                             5,168,000 4,642,000 -6,590,000 67,571,000 1,786,000 3,537,000 74,548,000 -3,052,000 -7,451,000 43,039,000 13,678,000 -7,802,000 42,441,000 1,423,000 -3,421,000 37,218,000 6,556,000 -6,925,000 44,782,000 1,230,000 13,085,000 34,801,000 -22,538,000 18,370,000 45,412,000 49,999,000 21,105,000 10,125,000 59,222,000 -85,734,583 -4,205,000              
          supplemental disclosure of total cash, cash equivalents and restricted cash:
                                                                                         
          restricted cash at end of period
                                             -1,000 3,000 -1,000 6,863,000                                         
          total cash, cash equivalents and restricted cash at end of period
                                             5,167,000 4,645,000 -6,591,000 74,434,000                                         
          proceeds from sale leaseback obligation
                                                 48,940,000                                      
          provision for excess inventory
                                                549,000   242,000   59,000 81,000 159,000 2,211,000 272,000   125,000                            
          changes in operating assets & liabilities
                                                                                         
          net cash (used in) provided by operating activities
                                                                                         
          expenditures for property, plant, and equipment
                                                                                         
          net cash provided by financing activities
                                                267,000 1,876,000                                        
          effect of exchange rate changes on cash
                                                   509,000           664,000 425,000           -341,965 -429,000 546,000 226,000 38,000 -190,000 483,000         
          net (decrease) increase in cash and cash equivalents
                                                                                         
          net cash used for investing activities
                                                                                         
          net increase (decrease) in cash and cash equivalents
                                                                                         
          adjustments to reconcile net loss to net cash from operating activities:
                                                                                         
          net loss
                                                    -4,704,000   -4,750,000 -4,020,000 -8,988,000                                
          adjustments to reconcile net loss to net cash used for operating activities:
                                                                                         
          gain on sale of dry strip assets and intellectual property
                                                                                         
          proceeds from sale of dry strip assets and intellectual property
                                                       800,000 400,000                                
          increase in restricted cash
                                                                                         
          proceeds from issuance of term loan
                                                                                         
          purchases of property, plant, and equipment
                                                                                         
          net decrease in cash and cash equivalents
                                                                                         
          cash flows from operating activities:
                                                                                         
          accounts payable & other current liabilities
                                                               3,168,000 8,884,000 6,580,000 4,922,000    3,585,000 12,255,000        -1,050,000 10,691,000         
          cash flows from investing activities:
                                                                                         
          cash flows from financing activities:
                                                                                         
          benefit from excess inventory
                                                            248,000   246,000 403,000 573,000 758,000                       
          taxes
                                                             59,000 -17,000 33,000                          
          financing fees and other incomes
                                                                                         
          adjustments to reconcile net income to net cash from operating activities
                                                                                         
          undistributed loss of sen
                                                                                         
          gain on sale of sen
                                                                                         
          accretion of premium on convertible debt
                                                                                         
          proceeds from sale of sen
                                                                                         
          payments related to sale of sen
                                                                                         
          repayment of convertible debt
                                                                                         
          amortization of intangible assets
                                                                    656,000 656,000 656,000 656,000 627,000 612,000 -1,833,552 612,000 612,000 612,000 612,000 612,000 612,000 661,000 564,000 365,000 365,000     
          cash dividends from sen
                                                                                         
          operating activities
                                                                                         
          adjustments required to reconcile net income to net cash from operating activities
                                                                                         
          accretion of premium on convertible subordinated debt
                                                                                         
          stock compensation expense
                                                                    1,349,000 1,081,000  1,892,000 1,311,000 1,263,000  549,000 14,000 30,000   79,000  24,000 34,000 51,000     
          undistributed income of sen
                                                                                         
          changes in operating assets and liabilities
                                                                                         
          other current assets
                                                                                  990,000 1,203,000 -2,356,000    -12,017,000 
          cash dividend from sen
                                                                    5,677,000                    
          investing activities
                                                                                         
          purchases of marketable securities
                                                                                         
          sales and maturities of marketable securities
                                                                    16,000,000 29,200,000 30,500,000 25,499,000 15,001,000 32,763,000                
          financing activities
                                                                                         
          proceeds from issuance of convertible subordinated debt
                                                                                         
          repayment of convertible subordinated debt
                                                                                         
          proceeds from the exercise of stock options
                                                                    562,000 394,000 224,000 98,000 62,000 1,202,000 -1,140,859 148,000 436,000 558,000 230,000 646,000 664,000 585,000    48,000 54,000 50,000 
          accretion of premium on long-term debt
                                                                     737,000 722,000 708,000                  
          expenditures for property, plant & equipment
                                                                                 -1,808,000 -1,015,000 -1,135,000 -1,035,000 -399,000 -2,469,000 -5,067,000 -3,816,000 
          purchased in-process research and development
                                                                                         
          impairment of fixed assets
                                                                          -724,275 109,000              
          proceeds from sale of building
                                                                              5,958,000         
          acquisition of businesses
                                                                                         
          decrease (increase) in restricted cash
                                                                                         
          proceeds from issuance of convertible debt
                                                                                       
          cash paid for interest
                                                                                         
          cash paid for income taxes
                                                                                         
          acquisition of businesses, net of cash acquired of 400 in 2003
                                                                                         
          other—net
                                                                                         
          undistributed income of sumitomo eaton nova corporation
                                                                                         
          purchases of short-term investments
                                                                                         
          sales and maturities of short-term investments
                                                                           27,350,000              
          expenditures for demo and evaluation tools
                                                                                         
          maturities (purchases) of short-term investments
                                                                                         
          net increase in cash & cash equivalents
                                                                              -1,091,000 18,311,000 27,535,000 6,309,000 -25,329,000 -5,633,000 -28,396,000 -44,022,000 -4,086,000 -30,819,000 105,401,000 
          cash & cash equivalents at beginning of period
                                                                             108,295,000 93,249,000 -4,353,000 150,651,000 124,177,000 
          cash & cash equivalents at end of period
                                                                             91,701,000 -1,091,000 18,311,000 120,784,000  -25,329,000 -5,633,000 122,255,000  -4,086,000 -30,819,000 229,578,000 
          stock compensation expense, net of forfeitures
                                                                              63,000           
          acquisition of matrix integrated systems, net of cash acquired
                                                                                         
          (purchase) sale of short-term investments
                                                                                         
          other-net
                                                                                  720,000 -1,354,000 -423,000  596,000 204,000 269,000 
          proceeds from sale of short-term investments
                                                                                14,972,000         
          adjustments to reconcile to net cash from operating activities
                                                                                         
          depreciation
                                                                                 2,849,000    2,365,000 2,613,000 2,754,000 2,566,000 
          changes in operating assets & liabilities, excluding amounts related to business combination
                                                                                         
          sales (purchases) of short-term investments
                                                                                         
          acquisition of matrix integrated systems, net of cash acquired of 400
                                                                                         
          issuance of common stock under employee stock purchase plan
                                                                                         
          acquisition of treasury shares
                                                                                         
          proceeds from long-term debt
                                                                                     121,578,000 
          operating activities:
                                                                                         
          adjustments required to reconcile net income to net cash used by operating activities:
                                                                                         
          income taxes payable
                                                                                  -67,000 -4,184,000 -1,156,000     
          other assets
                                                                                  -3,759,000 1,272,000 -2,291,000  -204,000 -168,000 522,000 
          net cash used by operating activities
                                                                                  -25,824,000 -2,591,000 -28,061,000  -15,687,000 -15,764,000 -14,030,000 
          investing activities:
                                                                                         
          sale of short-term investments
                                                                                         
          net cash used by investing activities
                                                                                  -2,101,000 -3,045,000 -984,000 -34,595,000 9,036,000 -17,301,000 -4,143,000 
          financing activities:
                                                                                         
          issuance of common stock from employee stock purchase plan
                                                                                  2,135,000 743,000  2,886,000 2,736,000 
          effect of foreign exchange rate changes on cash
                                                                                         
          purchases of short-term investments-net
                                                                                         
          proceeds from long-term debt-net
                                                                                         
          effect of foreign exchange rate changes
                                                                                   3,000 -94,000  -321,000 2,192,000 -790,000 
          adjustments to reconcile to net cash provided (used) by operating activities:
                                                                                         
          amortization of goodwill & intangible assets
                                                                                     365,000 365,000 365,000 365,000 
          changes in operating assets & liabilities, excluding acquisition of a business & non-cash restructuring charges:
                                                                                         
          net cash provided (used) by operating activities
                                                                                         
          proceeds from sale of austin, texas facility
                                                                                         
          net proceeds from sale of axcelis common shares
                                                                                         
          payment of previously declared dividend to eaton corporation
                                                                                         
          net transfers from parent company
                                                                                         
          effect of exchange rate changes on cash & cash equivalents
                                                                                         
          deferred income taxes and other current assets
                                                                                      415,000   
          payable to eaton corporation
                                                                                         
          net cash provided (used) by financing activities
                                                                                       54,000 124,364,000