ACLS Stock Cash Flow Statements

Axcelis Technologies Quarterly Cash Flow Statements Chart

Quarterly

Annual

Stock-Based Compensation

Operating Cash Flow

Investing Cash Flow

Financing Cash Flow

Free Cash Flow

Capital Expenditure

Axcelis Technologies Quarterly Cash Flow Statements Table

Quarterly

Annual

Unit: USD	2025-06-30	2025-03-31	2024-12-31	2024-09-30	2024-06-30	2024-03-31	2023-12-31	2023-09-30	2023-06-30	2023-03-31	2022-12-31	2022-09-30	2022-06-30	2022-03-31	2021-12-31	2021-09-30	2021-06-30	2021-03-31	2020-12-31	2020-09-30	2020-06-30	2020-03-31	2019-12-31	2019-09-30	2019-06-30	2019-03-31	2018-12-31	2018-09-30	2018-06-30	2018-03-31	2017-12-31	2017-09-30	2017-06-30	2017-03-31	2016-12-31	2016-09-30	2016-06-30	2016-03-31	2015-06-30	2015-03-31	2014-09-30	2014-06-30	2014-03-31	2013-09-30	2013-06-30	2013-03-31	2012-03-31	2011-06-30	2011-03-31	2010-09-30	2010-06-30	2010-03-31	2007-06-30	2007-03-31	2006-12-31	2006-09-30	2006-06-30	2006-03-31	2005-12-31	2005-09-30	2005-06-30	2005-03-31	2004-09-30	2004-06-30	2004-03-31	2003-12-31	2003-09-30	2003-06-30	2003-03-31	2002-12-31	2002-09-30	2002-06-30	2002-03-31

cash flows from operating activities
net income	31,376,000	28,579,000	49,956,000	48,576,000	50,865,000	51,595,000	71,056,000	65,931,000	61,579,000	47,697,000	56,992,000	40,283,000	44,190,000	41,614,000	35,749,000	27,515,000	18,906,000	16,480,000	14,674,000	10,785,000	13,302,000	11,221,000	9,712,000	704,000	556,000	6,062,000	8,463,000	8,838,000	14,669,000	13,915,000	91,680,000	11,841,000	13,932,000	9,506,000	3,965,000	2,151,000	2,937,000	1,948,000	5,883,000	1,868,000	-4,704,000	-6,900,000	174,000	-4,750,000	-4,020,000	-8,988,000	-10,028,000	4,227,000	1,812,000	-6,273,000	-4,529,000	-11,101,000	4,745,000	2,672,000	15,561,000	12,520,000	12,144,000	545,000	2,516,145	-5,167,000	749,000	1,898,000	19,082,000	34,471,000	13,581,000	3,270,000	-31,942,000	-78,878,000	-6,326,000	-6,833,000	191,000	-1,677,000	-17,831,000
adjustments to reconcile net income to net cash from operating activities:
depreciation and amortization	4,515,000	4,309,000	4,267,000	3,906,000	3,861,000	3,775,000	3,581,000	3,230,000	3,158,000	3,100,000	2,993,000	2,890,000	2,876,000	2,848,000	2,825,000	2,657,000	2,691,000	2,645,000	2,593,000	2,517,000	2,466,000	2,363,000	2,297,000	1,983,000	1,985,000	1,615,000	1,564,000	1,432,000	1,328,000	1,448,000	1,250,000	1,320,000	1,255,000	1,177,000	1,065,000	1,132,000	1,143,000	918,000	1,156,000	1,142,000	1,142,000	1,159,000	1,140,000	1,229,000	1,325,000	1,394,000	1,896,000	2,127,000	1,882,000	1,656,000	1,774,000	1,937,000	4,709,000	4,460,000	4,448,000	4,286,000	4,513,000	4,339,000	-15,813,716	4,944,000	5,315,000	5,576,000	4,992,000	5,005,000	5,001,000			2,926,000	2,930,000
deferred income taxes	-3,098,000	-1,057,000	-10,084,000	-3,497,000	-916,000	-1,097,000	-7,395,000	-5,210,000	-3,792,000	-3,621,000	2,120,000	2,482,000	1,682,000	2,252,000	8,699,000	6,451,000	3,494,000	1,613,000	-714,000	2,364,000	2,136,000	899,000	2,486,000	-523,000	759,000	582,000																																								0	0
stock-based compensation expense	5,421,000	4,903,000	5,380,000	5,412,000	5,469,000	4,690,000	5,239,000	5,082,000	4,749,000	3,199,000	3,654,000	3,562,000	3,527,000	2,701,000	3,097,000	3,186,000	3,377,000	2,407,000	2,758,000	2,921,000	3,082,000	1,724,000	2,033,000	2,151,000	2,317,000	1,672,000	2,181,000	2,415,000	2,056,000	1,132,000	1,347,000	1,745,000	1,505,000	1,075,000	1,249,000	1,851,000	1,241,000	838,000	1,929,000	1,126,000	1,597,000	1,010,000	1,172,000	1,461,000	805,000	839,000	1,082,000	902,000	1,222,000	1,385,000	751,000	817,000
benefit from doubtful accounts			3,000	3,443,000	0	-459,000	380,000																												0
benefit from excess and obsolete inventory	867,000	875,000	1,846,000	1,274,000	1,401,000	1,445,000	1,299,000	1,418,000	1,425,000	1,069,000	1,273,000	1,231,000	1,034,000	1,027,000	982,000	885,000	904,000	984,000	960,000	1,028,000	906,000	802,000	833,000	632,000	722,000	607,000	548,000	487,000	685,000	485,000	-9,682,000	533,000	436,000	578,000	-91,000	327,000					346,000
accretion of discounts and premiums on short-term and long-term investments
unrealized currency (gain) loss on foreign denominated transactions	-6,055,000	-752,000
mark-to-market adjustment on forward exchange contracts	587,000	-130,000	-850,000
changes in operating assets and liabilities:
accounts receivable	28,873,000	38,586,000	-21,865,000	3,765,000	17,967,000	7,042,000	-24,081,000	-34,847,000	28,935,000	-20,762,000	10,179,000	-31,666,000	-30,584,000	-15,199,000	-26,279,000	1,042,000	-3,340,000	10,431,000	-40,502,000	20,357,000	-471,000	19,223,000	-35,234,000	12,886,000	8,704,000	7,642,000	6,345,000	-10,752,000	514,000	16,000	-5,199,000	-21,073,000	18,877,000	-16,178,000	-6,237,000	18,550,000					1,671,000					1,458,000	4,810,000	-7,674,000	8,245,000										-16,715,867	9,147,000	3,661,000	3,911,000					1,540,000	6,761,000	-18,614,000		-8,998,000	-16,869,000	11,989,000
inventories	-4,374,000	-12,386,000	-5,382,000	-1,652,000	24,378,000	-11,427,000	9,537,000	-16,200,000	-42,189,000	-21,105,000	-8,734,000	-22,188,000	-16,021,000	-11,490,000	572,000	-7,177,000	-15,915,000	-16,503,000	959,000	-9,488,000	-11,047,000	1,924,000	-1,351,000	-5,441,000	-4,990,000	-6,171,000	-5,645,000	4,463,000	2,132,000	-11,462,000	13,940,000	-710,000	-6,683,000	-844,000	962,000	-5,994,000	-2,683,000	1,143,000						3,024,000						-4,562,000	5,592,000	8,252,000							-5,976,880	601,000	1,523,000	3,857,000	5,049,000				-8,633,000	4,180,000	2,063,000		-1,671,000	-2,016,000	1,595,000
prepaid expenses and other current assets	-136,000	1,311,000	-3,593,000	-2,261,000	-360,000	-5,489,000	447,000	-11,398,000	-301,000	-4,794,000	-1,672,000	443,000	-3,452,000	-1,852,000	924,000	-1,570,000	16,000	-3,325,000	-4,618,000	1,502,000	229,000	-4,435,000	51,000	278,000	741,000	-1,174,000	-1,485,000	1,321,000	-1,864,000	592,000	-2,221,000	2,608,000	-1,906,000	-2,347,000	-998,000	2,996,000												38,000	4,404,000
accounts payable and other current liabilities	-2,499,000	-25,844,000	2,325,000	15,803,000	10,577,000	-29,118,000	813,000	9,350,000	4,710,000	-22,976,000	13,697,000	16,188,000	5,089,000	-3,582,000	4,113,000	10,651,000	8,290,000	-1,008,000	7,522,000	-1,268,000	10,119,000	1,689,000	3,737,000	-1,328,000	-4,648,000	-16,911,000	10,169,000	-2,840,000	-6,196,000	-1,836,000	3,655,000	10,557,000	7,739,000	3,049,000	4,921,000	-7,843,000	2,639,000	1,082,000	9,747,000	11,466,000				634,000	599,000	5,043,000																					11,877,000	-7,303,000	891,000		-6,759,000	10,324,000	-3,450,000
deferred revenue	-10,687,000	1,106,000	-24,397,000	-10,743,000	-33,994,000	-1,963,000	8,479,000	19,629,000	-19,085,000	47,160,000	31,552,000	51,524,000	-3,128,000	6,418,000	10,196,000	22,729,000	13,369,000	-909,000	6,077,000	-13,459,000	-3,692,000	4,859,000	1,808,000	13,362,000	-6,400,000	-2,098,000	4,810,000	2,603,000	-3,321,000	1,963,000	1,726,000	1,494,000	1,774,000	2,085,000	3,171,000	-6,579,000	5,649,000	226,000	216,000	1,455,000										486,000	4,840,000	526,000	5,192,000	4,490,000		6,229,000	580,000	1,762,000		-3,154,000	2,179,000	1,877,000	4,643,000	7,571,000	13,937,000
income taxes	-228,000	2,194,000	5,098,000	-5,741,000	-29,765,000	21,374,000	7,458,000	-5,996,000	-6,567,000	8,891,000	3,767,000	255,000	-1,387,000	858,000	277,000	3,000	-29,000	2,000	303,000	24,000	-48,000	53,000	23,000	-56,000	-161,000	32,000	257,000	43,000	-217,000	113,000	-20,000	27,000	5,000	2,000	17,000	35,000	20,000	30,000	-28,000	132,000	138,000	-48,000	61,000			84,000	76,000	626,000	3,000																893,000
other assets and liabilities	-3,199,000	-1,281,000	1,433,000	5,029,000	-11,044,000	-1,399,000	-2,389,000	-6,778,000	-1,368,000	-1,802,000	577,000	-1,003,000	-374,000	175,000	-3,046,000	-212,000	-940,000	2,281,000	4,192,000	1,809,000	-84,000	-645,000	-462,000	-4,667,000	-7,562,000	-4,207,000	-1,904,000	-6,753,000	-6,639,000	-317,000	-505,000	-251,000	19,000	-749,000	-3,776,000	-2,865,000					-818,000						6,483,000			684,000	1,619,000	54,000							-3,034,200	-9,153,000	10,342,000	1,846,000
net cash from operating activities	39,727,000	39,795,000	12,780,000	45,748,000	40,067,000	42,223,000	65,575,000	24,020,000	32,715,000	34,559,000	122,384,000	64,001,000	3,452,000	25,770,000	38,109,000	66,160,000	30,823,000	15,098,000	-5,964,000	19,092,000	16,898,000	39,677,000	-13,249,000	19,981,000	-7,977,000	-12,349,000	29,745,000	1,880,000	6,840,000	8,500,000	15,962,000	8,925,000	34,065,000	-2,668,000	4,216,000	3,690,000			3,028,000	8,740,000										-601,000													3,879,000	36,446,000	4,612,000
capex	-1,985,000	-4,960,000	-4,658,000	-3,899,000	-2,004,000	-1,620,000	-10,153,000	-5,301,000	-2,962,000	-2,240,000	-3,807,000	-3,520,000	-1,853,000	-1,503,000	-3,017,000	-3,309,000	-1,045,000	-1,347,000	-1,867,000	-2,592,000	-1,685,000	-1,290,000	-905,000	-2,307,000	-4,502,000	-4,255,000	-863,000	-2,177,000	-952,000	-723,000	-375,000	0	-733,000	-1,116,000	-245,000	-402,000			0	0										0													0	0	0
free cash flows	37,742,000	34,835,000	8,122,000	41,849,000	38,063,000	40,603,000	55,422,000	18,719,000	29,753,000	32,319,000	118,577,000	60,481,000	1,599,000	24,267,000	35,092,000	62,851,000	29,778,000	13,751,000	-7,831,000	16,500,000	15,213,000	38,387,000	-14,154,000	17,674,000	-12,479,000	-16,604,000	28,882,000	-297,000	5,888,000	7,777,000	15,587,000	8,925,000	33,332,000	-3,784,000	3,971,000	3,288,000			3,028,000	8,740,000										-601,000													3,879,000	36,446,000	4,612,000

cash flows from investing activities
expenditures for property, plant and equipment and capitalized software	-1,985,000	-4,960,000	-4,658,000	-3,899,000	-2,004,000	-1,620,000	-10,153,000	-5,301,000	-2,962,000	-2,240,000	-3,807,000	-3,520,000	-1,853,000	-1,503,000	-3,017,000	-3,309,000	-1,045,000	-1,347,000	-1,867,000	-2,592,000	-1,685,000	-1,290,000	-905,000	-2,307,000	-4,502,000	-4,255,000	-863,000	-2,177,000	-952,000	-723,000	-375,000
purchases of short-term and long-term investments
maturities and sales of short-term investments	90,051,000	297,924,000
net cash from investing activities	-4,613,000	40,469,000	9,121,000	-56,553,000	-5,603,000	-55,691,000	-26,679,000	-941,000	-40,189,000	-33,049,000	-216,802,000	-37,096,000	-1,853,000	-1,503,000	-3,017,000	-3,309,000	-1,045,000	-1,347,000	-1,699,000	-2,592,000	-1,685,000	-1,290,000	-905,000	-2,307,000	-4,502,000	-4,255,000	-863,000	-2,177,000	-952,000	-723,000	-375,000	-5,061,000	-733,000	-1,116,000	-137,000	-240,000									613,000	253,000				24,000	2,580,000	56,000	10,433,000	25,512,000				12,633,000						-19,875,000	20,624,000
cash flows from financing activities
net settlement on restricted stock grants	-2,569,000	-1,583,000	-155,000	-241,000	-8,468,000	-2,699,000	-797,000	-349,000	-11,558,000	-3,907,000	-626,000	-70,000	-5,896,000	-3,315,000	-21,000	-48,000	-4,141,000	-2,354,000	-27,000	-28,000	-2,698,000	-1,162,000	-30,000	-11,000	-1,310,000	-281,000	-26,000	-6,000	-1,161,000	-226,000	-50,000	0	-848,000	-286,000
repurchase of common stock	-45,337,000	-18,178,000	-15,131,000	-15,363,000	-14,996,000	-14,999,000	-15,001,000	-12,499,000	-12,500,000	-12,499,000	-12,500,000	-12,497,000	-12,498,000	-20,000,000	-12,499,000	-12,500,000	-13,358,000	-11,635,000	0	0	0	-7,501,000	-3,709,000	0
proceeds from employee stock purchase plan purchases			1,143,000	0			1,100,000	0			951,000	0
principal payments on finance lease obligation	-327,000	-349,000	-400,000	-389,000	-379,000	-357,000	-325,000	-317,000	-309,000	-289,000	-259,000	-253,000	-246,000	-229,000	-201,000	-200,000	-187,000	-175,000	-147,000	-144,000
net cash from financing activities	-46,987,000	-20,110,000	-14,543,000	-15,993,000	-22,601,000	-18,055,000	-15,023,000	-13,165,000	-23,410,000	-16,670,000	-12,343,000	-12,453,000	-17,631,000	-23,053,000	-11,783,000	-12,403,000	-16,615,000	-11,652,000	1,005,000	286,000	467,000	-4,145,000	-1,217,000	632,000	-14,370,000	1,547,000	853,000	461,000	-348,000	220,000	4,743,000	1,822,000	6,260,000	2,245,000	768,000	1,149,000	246,000	267,000	943,000	34,866,000	290,000	533,000	1,277,000	14,609,000	354,000	49,000	977,000	-116,000	436,000						576,000	670,000	24,674,000	1,813,000	-3,288,396	989,000	881,000	1,422,000	1,170,000	1,930,000	1,816,000	586,000	2,310,000	0	743,000	48,000
effect of exchange rate changes on cash and cash equivalents	1,643,000	292,000	-3,013,000	1,700,000	-661,000	-1,813,000	1,128,000	-120,000	-1,092,000	-55,000	-16,193,000	6,929,000	6,056,000	1,002,000	530,000	907,000	-196,000	1,188,000	-1,827,000	-1,085,000	-80,000	640,000	-268,000	703,000	45,000	123,000	-426,000	487,000	931,000	-406,000	-138,000	-349,000	-462,000	105,000	321,000	43,000
net increase in cash, cash equivalents and restricted cash	-10,230,000	60,446,000					25,001,000			-15,215,000	-122,954,000	21,381,000	-9,976,000	2,216,000	23,839,000	51,355,000	12,967,000	3,287,000	-8,485,000	15,701,000	15,600,000	34,882,000	-15,639,000	19,009,000	-26,804,000	-14,934,000	29,309,000	651,000	6,471,000	7,591,000	20,192,000	5,337,000
cash, cash equivalents and restricted cash at beginning of period	0	131,064,000	0	0	0	173,951,000	0	0	0	186,347,000	0	0	0	295,680,000	0	0	0	204,232,000	0	0	0	146,534,000	0	0	0	184,902,000	0	0	0	140,880,000	0	0	0	77,655,000
cash, cash equivalents and restricted cash at end of period	-10,230,000	191,510,000	4,345,000	-25,098,000	11,202,000	140,615,000	25,001,000	9,794,000	-31,976,000	171,132,000	-122,954,000	21,381,000	-9,976,000	297,896,000	23,839,000	51,355,000	12,967,000	207,519,000	-8,485,000	15,701,000	15,600,000	181,416,000	-15,639,000	19,009,000	-26,804,000	169,968,000	29,309,000	651,000	6,471,000	148,471,000	20,192,000	5,337,000	39,130,000	76,221,000
accretion of discounts and premiums on marketable securities		-618,000	-2,268,000	-3,544,000	-3,317,000	-3,306,000	-3,614,000	-2,710,000	-2,913,000	-2,840,000
purchase of short-term investments		-252,495,000	-105,226,000	-184,879,000	-103,894,000	-145,121,000	-117,226,000	-82,640,000	-127,134,000	-61,809,000	-212,995,000
unrealized currency loss on foreign denominated transactions
maturities of short-term investments			119,005,000	132,225,000	100,295,000	91,050,000	100,700,000	87,000,000	89,907,000	31,000,000
proceeds from exercise of stock options							0	0	0	25,000	91,000	367,000	298,000	491,000	268,000	344,000	563,000	2,512,000	679,000	458,000	2,783,000	4,499,000	2,066,000	643,000	568,000	1,828,000	445,000	467,000	376,000	446,000	4,403,000	1,822,000	6,759,000	2,531,000	490,000	1,181,000	362,000	194,000	728,000	937,000	475,000	306,000	1,277,000	907,000	157,000	49,000	802,000	42,000	197,000	49,000	23,000	32,000
net decrease in cash, cash equivalents and restricted cash			4,345,000	-25,098,000	11,202,000	-33,336,000																												-1,434,000
supplemental disclosure of cash flow information
cash paid for:
interest
currency loss on foreign denominated transactions					4,945,000	6,560,000	-5,235,000	1,770,000	4,374,000	1,343,000
gain on sale of equipment																																			-86,000
proceeds from sale of equipment																																			108,000
proceeds from employee stock purchase plan															670,000	1,000			500,000	0	490,000	19,000	456,000	0			434,000	0			390,000	0									0			0			175,000	36,000	239,000	0	37,000	169,000	411,000	585,000	352,000	572,000	395,000	611,000	-2,147,537	841,000	445,000	864,000	940,000	1,284,000	1,152,000
changes in operating assets & liabilities:
financing fees and other incomes																																			0	-29,000
deferred taxes																												623,000	3,693,000	2,451,000	-80,009,000	834,000	-2,888,000	-22,000	54,000	-15,000			-37,000	134,000	100,000	22,000	312,000	220,000	-4,000	56,000	378,000					167,000
principal payments on term loan
principal payments on sale leaseback obligation
proceeds from financing obligations
expenditures for property, plant and equipment																																	-733,000	-1,116,000	-245,000	-402,000
decrease in restricted cash																																			1,000	-3,000	1,000	73,000	2,000	758,000										305,000	2,797,000	319,000												10,000	420,000
net increase in cash and cash equivalents																																			5,168,000	4,642,000				43,795,000										1,230,000					49,999,000
cash and cash equivalents at beginning of period																																			0	0	0	78,889,000	0	30,753,000	0	0	46,290,000	0	0	44,986,000	46,877,000	0	45,743,000	0	0	45,020,000	0	140,451,000	0	0	0	71,417,000	-108,186,705	0
cash and cash equivalents at end of period																																			5,168,000	4,642,000	-6,590,000	67,571,000	3,537,000	74,548,000	-3,052,000	-7,451,000	43,039,000	13,678,000	-7,802,000	42,441,000	37,218,000	-6,925,000	44,782,000	1,230,000	13,085,000	34,801,000	18,370,000	45,412,000	49,999,000	21,105,000	10,125,000	59,222,000	-85,734,583	-4,205,000
supplemental disclosure of total cash, cash equivalents and restricted cash:
restricted cash at end of period																																			-1,000	3,000	-1,000	6,863,000
total cash, cash equivalents and restricted cash at end of period																																			5,167,000	4,645,000	-6,591,000	74,434,000
proceeds from sale leaseback obligation																																							0	48,940,000
benefit from excess inventory																																						549,000		242,000			59,000	81,000	159,000	2,211,000	248,000	290,000	246,000	403,000	573,000	758,000
changes in operating assets & liabilities
cash flows used in investing activities
expenditures for property, plant, and equipment
effect of exchange rate changes on cash																																								509,000								664,000	425,000										-341,965	-429,000	546,000	226,000	38,000	-190,000	483,000
net increase/(decrease) in cash and cash equivalents
net cash (used in) investing activities
gain on sale of dry strip assets and intellectual property
proceeds from sale of dry strip assets and intellectual property																																												0	800,000	400,000
increase in restricted cash																																														3,000
proceeds from issuance of term loan
purchases of property, plant, and equipment
net decrease in cash and cash equivalents
cash flows from operating activities:
accounts payable & other current liabilities																																																	3,168,000	8,884,000	6,580,000	4,922,000			3,585,000	12,255,000								-1,050,000	10,691,000
cash flows from investing activities:
cash flows from financing activities:
taxes																																																-17,000	33,000
adjustments to reconcile net income to net cash from operating activities
undistributed loss of sen
gain on sale of sen
accretion of premium on convertible debt
proceeds from sale of sen
payments related to sale of sen
repayment of convertible debt
operating activities
adjustments required to reconcile net income to net cash from operating activities
amortization of intangible assets																																																					656,000	656,000	656,000	656,000	627,000	612,000	-1,833,552	612,000	612,000	612,000	612,000	612,000	612,000	661,000	564,000	365,000	365,000
accretion of premium on convertible subordinated debt
stock compensation expense																																																					1,349,000	1,081,000		1,892,000	1,311,000	1,263,000		549,000	14,000	30,000			79,000		24,000	34,000	51,000
undistributed income of sen
changes in operating assets and liabilities
other current assets																																																																			990,000	1,203,000	-2,356,000				-12,017,000
cash dividend from sen																																																					0	5,677,000
investing activities
purchases of marketable securities
sales and maturities of marketable securities																																																					16,000,000	29,200,000	30,500,000	25,499,000	15,001,000	32,763,000
financing activities
proceeds from issuance of convertible subordinated debt
repayment of convertible subordinated debt
proceeds from the exercise of stock options																																																					562,000	394,000	224,000	98,000	62,000	1,202,000	-1,140,859	148,000	436,000	558,000	230,000	646,000	664,000	585,000				48,000	0	54,000	50,000
accretion of premium on long-term debt																																																						737,000	722,000	708,000
expenditures for property, plant & equipment																																																																		-1,808,000	-1,015,000	-1,135,000	-1,035,000	-399,000	-2,469,000	-5,067,000	-3,816,000
purchased in-process research and development
impairment of fixed assets																																																											-724,275	109,000
proceeds from sale of building																																																															0	0	5,958,000
acquisition of businesses
decrease (increase) in restricted cash
proceeds from issuance of convertible debt																																																							0	0
cash paid for interest
cash paid for income taxes
acquisition of businesses, net of cash acquired of 400 in 2003
other—net
undistributed income of sumitomo eaton nova corporation
purchases of short-term investments
sales and maturities of short-term investments																																																												27,350,000
expenditures for demo and evaluation tools
maturities (purchases) of short-term investments
net increase in cash & cash equivalents																																																															-1,091,000	18,311,000	27,535,000	6,309,000	-25,329,000	-5,633,000	-28,396,000	-44,022,000	-4,086,000	-30,819,000	105,401,000
cash & cash equivalents at beginning of period																																																														108,295,000	0	0	93,249,000	-4,353,000	0	0	150,651,000	0	0	0	124,177,000
cash & cash equivalents at end of period																																																														91,701,000	-1,091,000	18,311,000	120,784,000		-25,329,000	-5,633,000	122,255,000		-4,086,000	-30,819,000	229,578,000
stock compensation expense, net of forfeitures																																																															63,000
acquisition of matrix integrated systems, net of cash acquired
(purchase) sale of short-term investments
other-net																																																																			720,000	-1,354,000	-423,000		596,000	204,000	269,000
proceeds from sale of short-term investments																																																																	14,972,000
adjustments to reconcile to net cash from operating activities
depreciation																																																																		2,849,000				2,365,000	2,613,000	2,754,000	2,566,000
changes in operating assets & liabilities, excluding amounts related to business combination
sales (purchases) of short-term investments
acquisition of matrix integrated systems, net of cash acquired of 400
issuance of common stock under employee stock purchase plan
acquisition of treasury shares
proceeds from long-term debt																																																																						0	0	0	121,578,000
operating activities:
adjustments required to reconcile net income to net cash used by operating activities:
income taxes payable																																																																			-67,000	-4,184,000	-1,156,000
other assets																																																																			-3,759,000	1,272,000	-2,291,000		-204,000	-168,000	522,000
net cash used by operating activities																																																																			-25,824,000	-2,591,000	-28,061,000		-15,687,000	-15,764,000	-14,030,000
investing activities:
sale of short-term investments
net cash used by investing activities																																																																			-2,101,000	-3,045,000	-984,000	-34,595,000	9,036,000	-17,301,000	-4,143,000
financing activities:
issuance of common stock from employee stock purchase plan																																																																			2,135,000	0	743,000		2,886,000	0	2,736,000
effect of foreign exchange rate changes on cash
purchases of short-term investments-net
proceeds from long-term debt-net
effect of foreign exchange rate changes																																																																				3,000	-94,000		-321,000	2,192,000	-790,000
adjustments to reconcile to net cash provided (used) by operating activities:
amortization of goodwill & intangible assets																																																																						365,000	365,000	365,000	365,000
changes in operating assets & liabilities, excluding acquisition of a business & non-cash restructuring charges:
net cash provided (used) by operating activities
proceeds from sale of austin, texas facility
net proceeds from sale of axcelis common shares
payment of previously declared dividend to eaton corporation
net transfers from parent company
effect of exchange rate changes on cash & cash equivalents
deferred income taxes and other current assets																																																																							415,000
payable to eaton corporation
net cash provided (used) by financing activities																																																																								54,000	124,364,000

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