7Baggers
Quarterly
Annual
    Unit: USD2025-09-30 2025-06-30 2025-03-31 2024-12-31 2024-09-30 2024-06-30 2024-03-31 2023-12-31 2023-09-30 2023-06-30 2023-03-31 2022-12-31 2022-09-30 2022-06-30 2022-03-31 2021-12-31 2021-09-30 2021-06-30 2021-03-31 2020-12-31 2020-09-30 2020-06-30 2020-03-31 2019-12-31 2019-09-30 2019-06-30 2019-03-31 2018-12-31 2018-09-30 2018-06-30 2018-03-31 2017-12-31 2017-09-30 2017-06-30 2017-03-31 2016-12-31 2016-09-30 2016-06-30 2016-03-31 2015-09-30 2015-06-30 2015-03-31 2014-09-30 2013-12-31 2012-12-31 2012-09-30 2012-06-30 2012-03-31 2010-06-30 2010-03-31 2009-09-30 2009-06-30 2009-03-31 2008-12-31 2008-03-31 2007-12-31 2007-09-30 2007-06-30 2007-03-31 2006-12-31 2006-09-30 2006-06-30 2006-03-31 2005-12-31 2005-09-30 2005-06-30 2005-03-31 2004-12-31 2004-09-30 2004-06-30 2004-03-31 2003-12-31 2003-09-30 2003-06-30 2003-03-31 2002-12-31 
      
                                                                                
      operating activities
                                                                                
      net income
    -363,505,000 -228,727,000 -196,859,000 -1,335,628,000 -211,168,000 -262,333,000 -295,776,000 -642,395,000 -283,479,000 -236,398,000 -206,561,000 -223,465,000 -170,758,000 -173,296,000 -156,489,000                              -8,474,334 -10,325,464 -6,479,554 -6,583,102 -16,892,120 -12,182,585 -10,170,736 -10,249,508 -8,157,449  -20,727,686 -17,484,853 -15,176,246 -16,726,710 -11,183,007 -13,281,870 -11,876,795 -13,025,003 -12,125,919 -16,453,035 -11,867,837 -10,887,437 -12,535,153 -11,804,431 -11,683,319 -11,298,989 -11,952,088 -14,039,505 -12,405,511 -12,826,891 -13,766,895 -12,719,075 
      adjustments to reconcile net income to net cash from operating activities:
                                                                                
      depreciation of long-lived assets
    8,122,000 12,776,000 12,134,000 9,476,000 17,036,000 17,997,000 16,606,000 14,176,000 16,544,000 11,477,000 9,789,000 10,201,000 8,997,000 8,362,000 2,842,000 4,997,000 6,178,000 4,211,000 5,514,000                                                          
      amortization of intangible assets
    2,011,000 2,001,000 2,007,000 9,247,000 4,760,000 4,709,000 4,725,000 4,939,000 4,403,000 4,796,000 4,959,000 5,957,000 4,864,000 5,184,000 5,190,000 1,374,000 365,000 366,000 364,000 300,000 437,000 223,000 175,000 180,000 180,000 163,000 175,000 182,000 176,000 177,000 158,000 150,000 153,000 147,000 143,000 147,000 148,000 150,000 145,000 113,000 113,556 608,444 608,444      566,880 562,175     575,002 585,939 571,914                    
      lower of cost or net realizable value inventory adjustments, benefit from excess and obsolete inventory and other adjustments
                                                                                
      stock-based compensation
    12,237,000 13,080,000 11,087,000 18,083,000 24,107,000 26,309,000 13,704,000 33,834,000 45,854,000 39,918,000 43,302,000 44,643,000 46,739,000 44,859,000 43,386,000 41,657,000 13,998,000 11,120,000 9,695,000 7,877,000 3,070,000 3,143,000 3,045,000 2,963,000 2,804,000 2,626,000 2,497,000 2,382,000 2,064,000 2,320,000 2,005,000 1,921,000 2,496,000 2,330,000 2,462,000 2,545,000 2,368,000 2,160,000 2,217,000 2,400,000 1,737,870 1,697,130 1,148,267      386,799 505,611 619,897 691,696 469,122 -41,471,535,494,720 1,219,825  1,412,440 1,283,923 1,388,930 427,194 1,032,446                
      loss on extinguishment of convertible debt instruments and debt
    5,475,000 3,652,000                                                                          
      provision/(recoveries) for losses on accounts receivable
    13,292,000 4,632,000 40,000                                                                          
      amortization of discount/(premium) of debt issuance costs on convertible debt instruments and long-term debt
                                                                                
      benefit from common stock warrants
    10,866,000 9,475,000 9,124,000 22,690,000 5,967,000 5,832,000 4,495,000 -1,528,000 -1,565,000 127,000 14,175,000  8,571,000 2,090,000 1,852,000 1,820,000 1,294,000 1,747,000 1,705,000 399,849,000 17,215,000 5,417,000 2,566,000 -3,731,000 4,582,000 1,483,000 4,179,000 2,258,000 2,126,000 3,921,000 1,885,000 1,790,000 26,057,000                                            
      deferred income tax benefit
              -947,000                                                                  
      impairment
    97,524,000 20,599,000 1,064,000 940,909,000 4,185,000 3,937,000 284,000 8,280,000 665,000                                                                    
      recovery on service contracts
                                                                                
      loss on sale of long-lived assets
       366,000                                                                         
      change in fair value of contingent consideration
    -1,129,000 -168,000 -11,819,000                                                                          
      right of use asset impairment
                                                                                
      lease origination costs
       -1,041,000 -1,136,000 -1,331,000 -1,935,000 -2,098,000 -2,907,000 -2,660,000 -2,824,000 -2,841,000 -1,537,000 -1,613,000 -2,521,000 -3,336,000                                                            
      change in fair value of convertible debenture
    -9,240,000 7,338,000                                                                          
      change in fair value of debt
    2,719,000                                                                            
      loss on equity method investments
    3,262,000 45,850,000 2,370,000 3,134,000 8,690,000 7,240,000 13,113,000 21,816,000 7,030,000 7,623,000 5,317,000 9,862,000 4,280,000 2,191,000 3,833,000 3,968,000                                                             
      change in fair value of derivative financial instruments
       1,565,000                                                                         
      changes in operating assets and liabilities that provide/(use) cash:
                                                                                
      accounts receivable
    2,041,000 1,578,000 12,251,000 -20,394,000 22,786,000 -41,175,000 96,436,000 -88,083,000 53,406,000 -89,821,000 1,730,000 -28,940,000 -33,970,000 -4,180,000 36,170,000 61,728,000 -41,011,000 -48,427,000 109,000 70,303,000 -67,611,000 -19,404,000 1,011,000 -1,056,000 1,854,000 4,870,000 4,978,000 -5,008,000 6,788,000 -8,523,000 -7,655,000 37,538,000 -37,601,000 -8,366,000 5,021,000 83,000 671,000 -1,993,000 11,966,000  -4,752,925 8,323,925       -391,103 -684,145 -195,565 379,173 399,822 1,086,600 203,246 -1,073,674 -1,577,206 644,787 -1,310,695 300,274 353,835 -316,389 250,938 181,004 -574,580 801,605 1,064,483 735,953 853,462 -1,893,805 622,536 -210,344 -310,175 953,067 624,495 -758,628 
      inventory
    16,165,000 34,713,000 -18,357,000 98,423,000 42,793,000 26,387,000 -38,312,000 3,106,000 -142,030,000 -140,135,000 -129,572,000 -117,939,000 -86,325,000 -95,743,000 -63,702,000 -8,363,000 -19,840,000 -23,797,000 -46,791,000 -5,671,000 -19,735,000 -17,402,000 -20,581,000 8,210,000 -7,411,000 -7,716,000 -17,564,000 6,487,000 6,066,000 5,060,000 1,428,000 -4,089,000 -1,984,000 -8,977,000 -3,786,000 5,854,000 -866,000 4,222,000 -6,398,000          -3,399,905 -351,707 -172,487 95,273 -578,997  -806,843 1,162,413 -461,539 1,171,698 -1,216,819 -845,388 44,087 471,195 -536,089 -75,669 696,345 -968,347 -817,704 73,730 -14,623 319,781 -1,242,287 135,923 -226,563 -86,599 -99,934 -188,356 
      contract assets
    1,264,000 -5,790,000 580,000 12,356,000 -11,952,000 -4,253,000 1,356,000 -1,218,000 -15,233,000 -9,130,000 -14,677,000 -32,488,000 -6,641,000 -430,000 44,000                                                              
      prepaid expenses and other assets
    -10,134,000 1,115,000 40,576,000 11,660,000 -21,971,000 -6,368,000 -14,496,000 38,972,000 -15,601,000 14,700,000 -5,522,000 -9,864,000 -31,003,000 -24,547,000 -27,107,000          887,000    -284,000 180,000 1,376,000 -3,546,000 -656,000 -1,503,000 1,569,000 -284,000 -993,000 -724,000 -1,832,000                                      
      accounts payable, accrued expenses, and other liabilities
    84,727,000 -51,655,000 47,578,000 -30,281,000 -13,365,000 -41,573,000 25,755,000 501,000 21,941,000 -14,541,000 13,821,000 -24,494,000 74,289,000 63,759,000 -25,096,000 -4,084,000 24,945,000 27,563,000 -23,516,000 16,132,000 31,049,000 7,632,000 -2,933,000 6,586,000 12,061,000 4,013,000 -2,781,000 -2,657,000 -924,000 -4,619,000 -2,066,000 4,906,000 13,270,000 838,000 -7,584,000 3,268,000                                         
      payments of contingent consideration
    -2,317,000 -6,024,000 -708,000 -52,000 -9,164,000 -895,000 -2,000,000 -2,667,000                                                              
      payments of operating lease liability
    -5,925,000 -5,515,000 -5,618,000                                                                          
      deferred revenue and other contract liabilities
    -32,043,000 -33,241,000 -21,697,000 10,751,000 -53,972,000 -9,956,000 -32,500,000 34,705,000 1,861,000 31,586,000 -9,748,000 34,560,000 61,660,000 -27,591,000 -28,014,000                                                              
      net cash from operating activities
    -89,814,000 -191,810,000 -105,568,000 -131,241,000 -174,936,000 -254,738,000 -167,728,000 -242,651,000 -238,908,000 -348,092,000 -276,919,000 -306,574,000 -116,936,000 -195,194,000 -209,919,000 -9,675,000 -101,866,000 -129,536,000 -117,099,000 1,434,000 -45,663,000 -51,232,000 -60,015,000 279,000 -3,313,000 -12,225,000 -36,263,000 -15,975,000 3,537,000 -21,151,000 -24,028,000 21,112,000 -22,959,000 -34,476,000 -23,859,000 33,000 -13,908,000 -8,845,000 -6,916,000          -13,500,232 -11,003,515 -8,485,575 -8,488,590 -12,807,283  -15,492,715 -13,382,416 -10,538,090 -14,622,886 -10,767,370 -13,320,089 -11,238,652 -10,480,739 -11,067,632 -9,782,714 -10,708,695 -9,209,444 -10,168,219 -8,064,173 -7,282,538 -9,904,068 -8,645,476 -10,384,861 -8,314,116 -10,834,318 -8,483,485 -10,826,448 
      capex
    -30,100,000 -40,419,000 -46,059,000 -39,587,000 -89,716,000 -106,252,000 -98,693,000 -186,002,000 -171,493,000 -158,677,000 -179,954,000 -123,535,000 -167,232,000 -87,916,000 -85,190,000 -83,054,000 -68,624,000 -27,449,000 -13,211,000 -11,261,000 -6,256,000 -2,502,000 -2,507,000 -1,048,000 -1,791,000 -1,376,000 -1,468,000 -1,874,000 -925,000 -1,317,000 -1,026,000 -2,270,000 -763,000 -754,000 -303,000 -279,000 61,000 -636,000 -1,889,000          -828,996 -385,996 -22,002 -9,513 -14,809  -570,153 -827,135 -939,022 -635,831 -542,417 -160,000 -594,066 -188,267 -332,461 630,577 -689,268 -364,606 -576,285 -445,030 -463,664 -308,992 -398,839 -337,794 -152,190 -88,229 -49,135 238,374 
      free cash flows
    -119,914,000 -232,229,000 -151,627,000 -170,828,000 -264,652,000 -360,990,000 -266,421,000 -428,653,000 -410,401,000 -506,769,000 -456,873,000 -430,109,000 -284,168,000 -283,110,000 -295,109,000 -92,729,000 -170,490,000 -156,985,000 -130,310,000 -9,827,000 -51,919,000 -53,734,000 -62,522,000 -769,000 -5,104,000 -13,601,000 -37,731,000 -17,849,000 2,612,000 -22,468,000 -25,054,000 18,842,000 -23,722,000 -35,230,000 -24,162,000 -246,000 -13,847,000 -9,481,000 -8,805,000          -14,329,228 -11,389,511 -8,507,577 -8,498,103 -12,822,092  -16,062,868 -14,209,551 -11,477,112 -15,258,717 -11,309,787 -13,480,089 -11,832,718 -10,669,006 -11,400,093 -9,152,137 -11,397,963 -9,574,050 -10,744,504 -8,509,203 -7,746,202 -10,213,060 -9,044,315 -10,722,655 -8,466,306 -10,922,547 -8,532,620 -10,588,074 
      ​
                                                                                
      investing activities
                                                                                
      purchases of property, plant and equipment
    -27,705,000 -38,618,000 -40,451,000 -33,950,000 -59,225,000 -101,302,000 -92,621,000 -181,178,000 -164,708,000 -150,757,000 -168,565,000 -119,057,000 -159,715,000 -79,444,000 -78,394,000 -80,782,000 -58,322,000 -23,183,000 -9,879,000 -11,261,000 -6,256,000 -2,502,000 -2,507,000 -1,048,000 -1,791,000 -1,376,000 -1,468,000 -1,874,000 -925,000 -1,317,000 -1,026,000 -2,270,000 -763,000 -754,000 -303,000 -279,000 61,000 -636,000 -1,889,000                                      
      purchases of equipment related to power purchase agreements and equipment related to fuel delivered to customers
    -2,395,000 -1,801,000 -5,608,000 -5,637,000 -30,491,000 -4,950,000 -6,072,000 -4,824,000 -6,785,000 -7,920,000 -11,389,000 -4,478,000 -7,517,000 -8,472,000 -6,796,000 -2,272,000 -10,302,000 -4,266,000 -3,332,000                                                          
      proceeds from sale of long-lived assets
                                                                                
      cash paid for non-consolidated entities and non-marketable equity securities
    -292,000 -324,000 -514,000 -4,248,000 -655,000 -41,822,000 -21,891,000 -5,790,000 -25,917,000 -817,000 -40,077,000 50,000 -8,435,000 2,114,000 -32,253,000                                                              
      net cash from investing activities
    -30,392,000 -40,743,000 -46,573,000       509,691,000 95,796,000 -658,721,000 -286,016,000 -8,547,000 273,914,000 -726,597,000 390,923,000 -986,838,000 -418,379,000 -23,619,000 -15,164,000 -50,196,000 -6,355,000 -5,273,000 -2,655,000 -4,042,000 -2,274,000 -2,044,000 -1,168,000 -12,057,000 -4,303,000 -16,072,000 -7,746,000 -10,906,000 -9,639,000 -12,937,000 -16,296,000 -15,206,000 -13,636,000          34,854,772 13,499,272 10,598,071 17,844,829 -53,190,885 -5,047,064,560,284,542 55,166,647 7,137,225 -223,247 -30,657,749 56,821,892 -3,141,304 -80,678,566 -87,646,490 7,840,637 -20,191,211 -25,708,548 288,709 17,028,767 -10,480,057 3,999,921 -9,507,423 -20,665,169 -950,780     
      financing activities
                                                                                
      proceeds from public and private offerings, net of transaction costs
    75,756,000 139,000 276,053,000 64,623,000 221,129,000 266,774,000 305,346,000         3,000 5,000 3,587,825,000                                                          
      payments of tax withholding on behalf of employees for net stock settlement of stock-based compensation
    -498,000 -158,000 -49,000 -850,000 -1,075,000 -324,000 -278,000 -2,085,000 -4,968,000 -364,000 -2,590,000 -924,000 -20,151,000 -1,195,000 -1,465,000 -1,358,000                                                             
      contributions by non-controlling interest
    775,000                                                                            
      proceeds from exercise of stock options
       58,000 29,000 26,000 41,000 300,000 581,000 58,000 674,000 166,000 1,315,000 529,000 291,000 2,204,000 611,000 -4,000 4,709,000 8,688,000 7,537,000 9,694,000 6,104,000 1,333,000 -321,000 124,000 81,000 46,000 25,000 17,000 50,000 57,000 3,000   83,000   35,000 -2,167 133,167                                   
      principal payments on convertible debentures
                                                                               
      premium on principal of convertible debenture settled in cash
    -2,594,000 -1,238,000                                                                          
      proceeds from debt issuance
    49,875,000                                                                            
      principal payments on long-term debt
    -10,711,000 -344,000 -344,000 -2,800,000 -41,000 -385,000 -300,000 -300,000 -303,000 -5,077,000 -330,000 -58,595,000 -26,705,000 -16,843,000 -19,246,000 -19,552,000 -13,565,000 -1,103,000 -14,461,000 -20,175,000 -6,219,000 -16,311,000 -5,315,000 -3,641,000 -3,665,000 -368,000 -17,153,000 -4,246,000 -6,223,000 -1,072,000 -4,649,000 -8,031,000 -2,983,000 -1,228,000 -50,000              -104,540 -103,211                           
      cash paid for closing fees related to doe loan guarantee
    -252,000                                                                            
      proceeds from finance obligations
       5,871,000    13,986,000 12,676,000 49,662,000 27,927,000 38,906,000 48,932,000 17,775,000 17,273,000 55,478,000 21,288,000 21,498,000 10,661,000 17,691,000 19,890,000                                                        
      principal repayments of finance obligations and finance leases
    -23,672,000 -22,902,000 -23,373,000 -23,122,000 -22,029,000 -21,405,000 -20,908,000 -20,231,000 -19,183,000 -17,711,000 -16,500,000 -15,697,000 -13,988,000 -12,741,000 -12,427,000                                                              
      net cash from financing activities
    87,020,000 32,832,000 193,232,000  252,424,000 243,686,000 283,065,000   18,463,000 7,181,000 -36,144,000 -10,597,000 -12,475,000 -18,241,000 16,017,000 -25,532,000 12,921,000 3,594,373,000 924,942,000 409,022,000 177,482,000 4,083,000 176,005,000 69,029,000 42,376,000 37,650,000 66,128,000 4,274,000 -257,000 49,199,000 11,769,000 36,444,000 35,584,000 -786,000 16,525,000 6,746,000 23,218,000 23,396,000    -382,639      -25,782,593 -8,791,664 -3,245,506 -187,833 1,188,108  82,324 24,384 280,320   317,515 -160,221 214,641,358 -43,677 98,270 70,731,290 340,542 182,212 196,299 -16,059 239,070 421,185 55,166,123 -39,230 194,860 12,720 152,261 
      effect of exchange rate changes on cash
    5,407,000 -89,000 -5,189,000 11,595,000 -6,328,000 9,948,000 4,187,000 -9,929,000 4,269,000 -43,000 -2,096,000 -4,307,000 6,962,000 -689,000 634,000 -743,000 104,000 -112,000 -51,000 155,000 -76,000 -15,000 1,000 172,000 -71,000 -13,000 -35,000 -8,000 -13,000 -82,000 46,000 62,000 128,000 123,000 35,000 -93,000 -96,000 -9,000 77,000          -51,817 -15,892 278,075 -174,746 -36,769 -156,921,718,991 -77,877 126,381 444,994                    
      decrease in cash and cash equivalents
    25,159,000    31,581,000    -468,609,000                       16,871,000    3,528,000                                         
      decrease in restricted cash
    -52,938,000 -44,702,000 -54,249,000                                                                          
      cash, cash equivalents, and restricted cash beginning of period
    1,040,709,000 1,169,144,000 1,549,344,000 3,132,194,000 1,634,284,000 369,500,000 110,153,000                                                
      cash, cash equivalents, and restricted cash end of period
    -27,779,000 -199,810,000 1,076,611,000 40,514,000 -18,711,000 -149,178,000 1,168,084,000 6,654,000 -390,835,000 180,019,000 1,373,306,000 -1,005,746,000 -406,587,000 -216,905,000 3,178,582,000 -720,998,000 263,629,000 -1,103,565,000 4,693,128,000 902,912,000 348,119,000 76,039,000 307,214,000 171,183,000 62,990,000 26,096,000 109,231,000 48,101,000 6,630,000                                                
      supplemental disclosure of cash flow information
                                                                                
      cash paid for interest, net of capitalized interest of 14.8 million as of september 30, 2025 and 8.3 million as of september 30, 2024, respectively
                                                                                
      summary of non-cash activity
                                                                                
      recognition of right of use asset - finance leases
         3,570,000 520,000 800,000 4,018,000 4,843,000 8,163,000 4,574,000 8,070,000 11,219,000 5,675,000 5,994,000 5,292,000                                                          
      recognition of right of use asset - operating leases
    1,450,000 12,168,000 9,428,000 14,432,000 1,431,000 2,491,000 2,913,000 13,295,000 21,172,000 33,858,000 22,470,000 59,210,000 78,660,000 20,282,000 20,070,000 45,254,000 25,812,000 26,551,000 12,720,000                                                          
      principal payment on convertible debenture paid in common stock
    20,000,000 30,000,000                                                                          
      (decrease)/increase to inventory due to net transfers between inventory and long-lived assets
                                                                                
      contributions of property, plant, and equipment from non-controlling interest
                                                                               
      earnouts from acquisitions paid in common stock and warrants
                                                                              
      purchases of long lived asset from financing agreement
                                                                                
      accrued purchase of fixed assets, cash to be paid in subsequent period
    -12,322,000 -6,633,000 47,447,000 3,915,000 -33,306,000 -29,110,000 113,449,000 28,804,000 22,284,000 43,789,000 65,701,000 506,000 22,133,000 32,974,000 6,707,000                                                              
      lower of cost or net realizable value inventory adjustments and benefit from excess and obsolete inventory
     12,904,000 8,262,000                                                                          
      amortization of premium of debt issuance costs on convertible debt instruments and long-term debt
                                                                                
      (recovery)/loss on service contracts
     -22,869,000 -2,937,000 -2,481,000                                                                         
      cash paid for interest, net of capitalized interest of 8.9 million as of june 30, 2025 and 5.2 million as of june 30, 2024, respectively
                                                                                
      net transfers between inventory and long-lived assets
     4,318,000 476,000 -250,000 3,062,000 3,341,000 16,008,000 3,000 20,000 264,000 441,000 297,000 406,000 427,000 489,000                                                              
      amortization of (premium)/discount of debt issuance costs on convertible debt instruments and long-term debt
      -320,000                                                                          
      deferred income tax expense
               -529,000   -414,000                                                              
      principal payment on convertible debenture
      -45,000,000                                                                          
      cash paid for closing fees related to loan guarantee
      -12,817,000                                                                          
      increase in cash and cash equivalents
      90,151,000            14,345,000                   -9,675,000 -34,249,000   -842,000 2,921,000    -12,147,120       -6,311,799 -854,935 8,993,660 -64,846,829 61,276,522 39,678,379 -6,094,426 -10,036,023 -44,747,001 46,054,522 -16,143,878 -92,077,439 116,514,129 -3,270,672 -29,875,655 34,314,047 -8,580,193 7,042,760 -18,347,931 -3,298,676 -19,172,421 -28,889,460 43,830,482 -4,444,656 -4,704,890 26,746,678 -12,984,056 
      cash paid for interest, net of capitalized interest of 5.0 million and 2.1 million, respectively
      6,692,000                                                                          
      accrued debt extinguishment costs, cash to be paid in subsequent period
          1,245,000                                                                      
      loss on extinguishment of convertible senior notes and debt
                                                                                
      benefit from losses on accounts receivable
           7,459,000 52,000                                                                    
      amortization of (premium)/discount of debt issuance costs on convertible senior notes and long-term debt
       -1,095,000 -1,013,000                                                                        
      deferred income tax (benefit)/expense
           -7,913,000 -2,133,000                                                                    
      fair value adjustment to contingent consideration
       -10,561,000 146,000 3,768,000 -9,200,000 3,708,000 2,239,000 15,308,000 8,769,000 19,073,000 -144,000 -2,461,000 19,936,000 -8,530,000 560,000 -790,000 -2,290,000                                                         
      net realized loss on investments
             -264,000 1,000 80,000 468,000 847,000 -155,000                                                             
      (accretion)/amortization of premium on available-for-sale securities
           -1,466,000 805,000 -4,000 -5,945,000                                                                  
      change in fair value for equity securities
           -2,434,000 -70,000 -3,842,000 -5,075,000 -4,705,000 4,221,000 13,484,000 5,159,000 -7,022,000 607,000                                                            
      change in fair value of convertible senior note
                                                                                
      proceeds from sales of long-lived assets
                                                                                
      purchases of available-for-sale securities
                                                    -10,002,573 -20,009,065 -40,960,321 -4,998,396 -71,880,092  -67,261,648 -36,716,088 -119,536,310 -183,324,987 -133,321,754                  
      proceeds from sales of available-for-sale securities
               6,113,000 469,563,000                                                              
      proceeds from maturities of available-for-sale securities
           45,001,000 52,411,000 592,922,000 315,827,000 38,500,000 41,750,000 100,199,000 67,430,000                                                              
      purchases of equity securities
                                                                                
      proceeds from sales of equity securities
           67,987,000                                                                    
      net cash paid for acquisitions
               -30,433,000 -26,473,000     173,000                                                        
      net cash (used in)/provided by investing activities
       -43,835,000 -89,871,000 -148,074,000 -120,584,000                                                                      
      proceeds from non-controlling interest
                                                                                
      proceeds from convertible debentures
                                                                                
      cash penalty from early settlement of convertible senior notes
                                                                                
      principal payment on convertible debentures
                                                                                
      net cash provided by/(used in) financing activities
           -8,330,000                                                                     
      increase/(decrease) in cash and cash equivalents
          37,840,000                                                                      
      (decrease)/increase in restricted cash
       -71,239,000 -50,292,000 -38,664,000 -38,900,000                                                                      
      cash paid for interest, net of capitalized interest of 8.3 million, 8.1 million and 13.1 million, respectively
                                                                                
      net tangible assets (liabilities) acquired (assumed) in a business combination
                  56,929,000                                                              
      common stock issued for acquisitions
                                                                                
      contributions of property, plant, and equipment from consolidated vie
                                                                                
      intangible assets acquired in a business combination
               13,430,000 60,522,000                                                              
      purchases of long-lived asset from financing agreement
                                                                               
      lower of cost or net realizable value inventory adjustment and benefit from excess and obsolete inventory
        14,409,000 13,684,000 39,675,000 59,853,000 22,129,000                                                                    
      loss on extinguishment of convertible senior notes
        14,047,000                                                                      
      (recoveries)/benefit from losses on accounts receivable
        -145,000 134,000 -1,447,000                                                                      
      net realized gain on investments
                                                                                
      other-than-temporary impairment of available-for-sale securities
                                                                                
      accretion of premium on available-for-sale securities
                                                                                
      cash paid for interest, net of capitalized interest of 8.3 million as of september 30, 2024 and 6.0 million as of september 30, 2023
                                                                                
      loss on service contracts
         3,483,000 3,809,000          5,187,000                                                            
      cash paid for interest, net of capitalized interest of 5.2 million at june 30, 2024 and 4.0 million at june 30, 2023
                                                                                
      amortization of debt issuance costs and discount on convertible senior notes
          330,000 514,000 504,000 574,000 621,000 741,000 633,000 675,000 661,000 647,000 645,000 634,000 1,092,000 4,878,000 5,655,000 3,812,000 2,716,000 2,564,000 1,917,000 1,871,000 2,469,000 1,911,000 1,998,000                                                
      deferred income tax expense/
          163,000                                                                      
      changes in operating assets and liabilities that provide (use) cash:
                                                                                
      cash paid for interest, net of capitalized interest of 2.1 million and 2.0 million
          9,111,000                                                                      
      loss on extinguishment of debt
                                                                                
      impairment of goodwill
                                                                                
      loss/(benefit) on service contracts
           20,740,000 35,037,000 635,000 221,000                                                                  
      loss on disposal of assets
                                                                              
      purchase of intangible assets
                       -319,000                                                         
      purchase of available-for-sale securities
               -543,293,000 -152,099,000 -29,057,000 -114,173,000 -1,296,421,000 -358,060,000 -1,099,723,000 -405,168,000                                                          
      purchase of equity securities
               -10,000 -4,990,000 -80,000 -49,734,000                                                            
      net cash provided by/(used in) investing activities
           267,564,000                                                                     
      proceeds from exercise of warrants, net of transaction costs
                   -5,000 5,000 15,445,000             -66,000                                            
      (decrease)/increase in cash and cash equivalents
              -215,769,000 -1,057,123,000 -508,198,000                                                                
      increase in restricted cash
           -17,570,000 77,774,000 75,462,000 39,731,000 51,377,000 101,611,000 22,758,000 32,043,000                                                              
      cash paid for interest, net of capitalized interest of 8.1 million, 13.1 million and 4.8 million
                                                                                
      conversion of convertible senior notes to common stock
                    15,345,000                                                          
      earnouts from acquisitions paid in stock
                                                                              
      settlement of liability from acquisitions
                                                                                
      net realized (gain)/loss on investments
                                                                                
      cash paid for interest, net of capitalized interest of 6.0 million at september 30, 2023 and 9.8 million at september 30, 2022
                                                                                
      net tangible liabilities assumed in a business combination
                                                                               
      cash paid for interest, net of capitalized interest of 4.0 million
                                                                                
      impairment of long-lived assets
              1,083,000 4,455,000    8,895,000                                                             
      cash paid for interest, net of capitalized interest of 2.0 million
              7,869,000                                                                  
      net tangible assets acquired in a business combination
                                                                                
      (gain)/loss on extinguishment of debt
                                                                                
      benefit from common stock warrants recorded as a reduction to revenue
                                                                                
      (benefit)/loss on service contracts
               13,339,000 -3,853,000                                                                
      amortization of premium on available-for-sale securities
               -5,393,000 1,823,000 2,270,000 2,290,000                                                              
      benefit from bad debts and other assets
                              307,000 880,000                                                 
      proceeds from issuance of convertible senior notes
                       -2,000      -201,000 96,057,000                                              
      repurchase of convertible senior notes
                                                                              
      purchase of capped calls and common stock forward
                                                                                
      proceeds from long-term debt
                       50,000,000    -50,000 14,785,000 84,761,000                                                  
      proceeds from the termination of capped calls
                                                                                
      cash paid for interest, net of capitalized interest of 13.1 million, 4.8 million and 0
                                                                                
      net tangible assets (liablities) acquired (assumed) in a business combination
                                                                                
      conversion of preferred stock to common stock
                         441,000 26,509,000                                                     
      cash paid for interest, net of capitalized interest of 9.8 million
                                                                                
      cash paid for interest, net capitalized interest of 5.8 million
                                                                                
      benefit on service contracts
                  -7,297,000    -361,000                                                          
      cash paid for interest, net capitalized interest of 4.3 million
                  5,731,000                                                              
      net income attributable to the company
                   -192,914,000 -106,671,000 -99,634,000 -60,746,000 -510,641,000 -39,379,000 -8,656,000 -37,479,000 -11,737,000 -21,229,000 -18,561,000 -33,938,000 -16,847,000 -15,565,000 -25,868,000 -19,835,000 -19,439,000 -40,983,000 -42,619,000 -24,039,000 -19,211,000 -13,394,000 -13,128,000 -11,754,000 -10,213,000 -9,225,179 -11,051,821 -9,351,034 -28,877,167                                 
      (gain) loss on extinguishment of debt
                                                                                
      loss (benefit) on service contracts
                                                                                
      loss on disposal of leased assets
                                                                              
      change in fair value of common stock warrant liability
                             -1,706,000 2,126,000 -978,000 -1,716,000 -334,000 -1,258,000 -1,266,000 1,878,000 12,296,000 2,280,000 365,000 -1,975,000 -1,456,000 -1,278,000    -485,471                                  
      deferred revenue
                   28,324,000 26,482,000 14,581,000 1,267,000 4,267,000 14,264,000 2,974,000 -591,000 1,136,000 -2,325,000 -1,322,000 -2,505,000 555,000 981,000 4,373,000 -272,000 279,000 11,798,000 535,000 -1,322,000 6,719,000 -121,000 -670,000 -1,244,000    -2,070,538      -952,651 790,305 -622,479 -713,165 -877,475 -7,823,029,383,388 377,203 -823,540 534,199 -227,942 1,164,501 -468,800 -774,276 685,317 102,031 -260,025 -1,316,647 -484,652 -465,855 -733,067 -23,099 1,888,811 -442,350 634,104 242,625 -257,282 -1,313,299 508,420 
      proceeds from sales of equities
                                                                                
      cash paid for non-consolidated entities and non marketable equity securities
                                                                                
      proceeds from sale of leased assets
                                                                              
      payments for redemption of preferred stock
                                  -3,700,000                                          
      proceeds from termination of capped calls
                                                                              
      repayments of finance obligations and finance leases
                   -19,217,000 -3,132,000                                                            
      increase in cash, cash equivalents and restricted cash
                   -720,998,000 263,629,000   902,912,000    171,183,000 62,990,000 26,096,000 -922,000    20,914,000                                              
      cash paid for interest, net capitalized interest of 4.8 million, 0 and 0
                                                                                
      common stock issued for acqusitions
                                                                                
      gain on extinguishment of debt
                                                                               
      income tax benefit
                        -6,523,000       -1,636,000 -1,716,000 -2,912,000 -2,953,000                                              
      prepaid expenses, and other assets
                    -5,498,000 -18,326,000 -4,641,000  6,861,000 -1,023,000 -10,794,000    1,018,000                                                  
      proceeds from sales and maturities of available-for-sale securities
                    845,561,000                                                            
      net cash paid for acquisition
                                                                                
      cash paid for interest, net capitalized interest of 2.6 million
                                                                                
      cash paid for interest
                     8,653,000 2,608,000 11,967,000 7,509,000 4,311,000 5,155,000 4,139,000 6,368,000 3,815,000 4,858,000 2,719,000 5,423,000 2,361,000 2,554,000 6,434,000 411,000 44,000 1,902,000 6,700,000 252,000 1,079,000 232,000 127,000 85,406 90,594                                   
      change in accounts payable related to accrued purchases of property, plant and equipment
                                                                                
      proceeds from borrowing of long-term debt
                                                                                
      repayments of finance obligations
                      -9,806,000 -8,578,000 -6,851,000 -6,053,000 -5,730,000 -2,252,000 -3,391,000 -2,536,000 -53,534,000 -6,126,000 -7,378,000                                                
      increase/(decrease) in cash, cash equivalents and restricted cash
                      3,058,844,000                                                          
      purchases of equipment related to ppa and equipment related to fuel delivered to customers
                                                                                
      proceeds from issuance of preferred stock and warrants, net of transaction costs
                                                                                
      proceeds from public offerings, net of transaction costs
                       927,316,000 344,667,000   120,330,000 9,833,000 4,767,000 23,498,000 2,283,000    2,328,000 1,130,000                                            
      proceeds from borrowing of long-term debt, net of transaction costs
                                   19,526,000   23,993,000 -468,000                                        
      summary of non-cash investing and financing activity
                                                                                
      recognition of right of use assets
                                                                                
      conversion of convertible notes to common stock
                       19,680,000                                                         
      depreciation of property, plant and equipment, and leased property
                        3,598,000 2,933,000 2,850,000 3,045,000 3,448,000 2,720,000 2,776,000 2,422,000 2,797,000 3,015,000 2,780,000 2,594,000 2,413,000 2,181,000 2,002,000 1,738,000 1,384,000 957,000 571,000                                      
      benefit from loss contracts related to service
                                                                              
      purchases for construction of leased property
                        -7,443,000 -2,408,000 -3,848,000 -3,681,000 -864,000 -1,181,000 -806,000 -120,000 -243,000 -9,861,000 -3,277,000 -13,802,000 -6,983,000 -10,152,000 -9,336,000 -12,658,000 -16,357,000                                        
      proceeds from issuance of preferred stock, net of transaction costs
                                                                                
      purchase of capped calls
                                                                               
      recognition of right of use asset
                        29,455,000 20,733,000 6,189,000 48,744,000 44,096,000   20,480,000                                                 
      decrease in cash, cash equivalents and restricted cash
                         76,039,000 -62,286,000      6,630,000                                                
      increase in finance obligations
                          9,024,000  31,640,000      1,241,000 12,072,000 15,372,000 -2,938,000 2,230,000 -1,208,000 5,447,000                                        
      accrual for loss contracts related to service
                                   -752,000 -2,482,000 -2,186,000 -1,811,000 -1,748,000                                      
      purchase of intangible asset
                               -50,000                                                
      purchase of capped call and common stock forward
                               -43,500,000                                              
      proceeds from sale/leaseback transactions accounted for as finance obligations
                               43,237,000                                                 
      net transfers between inventory, leased assets and property, plant and equipment
                               969,000                                                 
      benefit from bad debts and other
                            346,000                                                    
      purchases of intangible assets
                                                                               
      proceeds from sale/leaseback transactions accounted for as finance leases
                                                                                
      increase in property, plant and equipment financed as long-term debt or financing leases
                                                                                
      loss on disposal of leased property
                                                                               
      proceeds from issuance of preferred stock and warrant, net of transaction costs
                                                                                
      purchase of treasury stock
                                                    -3,053 -438,453 -31,610 -502,808  -45,838                      
      proceeds from short-term borrowing, net of transaction costs
                                       -201,000 23,874,000                                      
      principal payments on short-term borrowing
                                                                              
      issuance of common stock for acquisitions
                                                                                
      cash flows from operating activities:
                                                                                
      cash flows from investing activities:
                                                                                
      cash flows from financing activities:
                                                                                
      other supplemental cash flow information:
                                                                                
      summary of non-cash investing and financing activity:
                                                                                
      proceeds from sale/leaseback transactions accounted for as capital leases
                                                                                
      noncash financing activity-conversion of preferred stock to common stock
                                                                                
      amortization of debt issuance costs
                                  379,000  200,000 149,000 147,000  162,000                                        
      cash, cash equivalents, and restricted cash beginning of year
                                  68,055,000                                              
      cash, cash equivalents, and restricted cash end of year
                                  88,969,000                                              
      loss on acquisition activity
                                                                                
      amortization and accelerated recognition of debt issuance costs
                                                                                
      net cash acquired in purchase acquisitions
                                                                                
      change in restricted cash
                                   5,343,000 3,462,000 1,856,000 734,000 -8,695,000 1,968,000 -29,000 -31,000                                      
      proceeds from issuance of common stock and warrants, net of transaction costs
                                                                                
      cash and cash equivalents, beginning of year
                                                                                
      cash and cash equivalents, end of year
                                                                                
      summary of noncash investing and financing activities:
                                                                                
      conversions of preferred stock to common stock
                                                                                
      cash and cash equivalents, beginning of period
                                    46,014,000 63,961,000 -71 146,205,071      14,580,983 80,844,500 -1,207,693,814,822,928 12,076,938 26,899,866 21,877,726 18,976,767 88,685,255 27,257,641 
      cash and cash equivalents, end of period
                                    5,867,000 -9,675,000 11,765,000 3,528,000 -23,554,000 -842,000 66,882,000 -24,130,000 -22,398,210 131,537,210 -12,147,120      -4,479,870 8,269,184 -854,935 8,993,660 15,997,671 -1,956,797,737,326,864 51,755,317 -6,094,426 -10,036,023 -44,747,001 72,954,388 -16,143,878 -92,077,439 116,514,129 18,607,054 -29,875,655 34,314,047 -8,580,193 26,019,527 -18,347,931 -3,298,676 -19,172,421 59,795,795 43,830,482 -4,444,656 -4,704,890 54,004,319 -12,984,056 
      summary of noncash financing activity-conversions of preferred stock to common stock:
                                                                                
      summary of noncash financing activity-conversion of preferred stock to common stock:
                                                                                
      proceeds from exercise of warrants
                                       2,000 109,000    23,250                                  
      proceeds from disposal of property, plant and equipment and leased property
                                                                                
      proceeds from issuance of preferred stock and warrants
                                                                                
      preferred stock issuance costs
                                                                                
      proceeds from issuance of common stock and warrants
                                                                               
      common stock issuance costs
                                                                                
      noncash investing activity-issuance of common stock for acquisitions
                                                                                
      gain on disposal of property, plant and equipment and leased property
                                                                                
      note receivable
                                         17,000 16,000 16,000 16,081 15,919 15,691                                  
      accounts payable, accrued expenses, product warranty reserve and other liabilities
                                         4,154,000 2,423,000    1,843,302                                  
      purchases for construction of leased assets
                                          -11,747,000                                      
      principal payments on finance obligations
                                          -556,000                                      
      principal payments on obligations under capital lease
                                                                                
      depreciation of property, plant and equipment, and investment in leased property
                                           512,000 493,806 475,194 499,557                                  
      gain on acquisition activity
                                                                                
      gain on disposal of property, plant and equipment
                                                                                
      changes in operating assets and liabilities that provide (use) cash, net of effects of acquisitions:
                                                                                
      cash acquired in purchase acquisitions
                                                                                
      proceeds from disposal of property, plant and equipment
                                              4,492           -2,590                      
      stock issuance costs
                                                               83,858 -120,678   -37,784             
      proceeds from lease agreements recognized as finance obligations
                                                                                
      noncash investing activity - issuance of common stock for acquisition of hypulsion
                                                                                
      gain on bargain purchase
                                                                                
      changes in operating assets and liabilities that provide (use) cash, net of effects of acquisition:
                                                                                
      purchase of relion, net of cash acquired
                                                                               
      principal payments on obligations under capital lease and finance obligation
                                                                                
      gain on sale of equity interest in joint venture
                                                                                
      prepaid expenses and other current assets
                                                    1,158,515 663,666 68,944 86,630 731,062 -1,565,499,179,334 1,005,107 787,974 953,068 -136,080 -381,206 -769,012 -719,287 72,030 229,578 59,025 -350,645 -165,878 126,805 484,283 -78,423 -153,620 -280,007 -475,248 808,756 -2,764,799 1,809,590 -1,369,894 
      proceeds from sale of equity interest in joint venture
                                                                                
      purchase of property, plant and equipment
                                                    -828,996 -385,996 -22,002 -9,513 -14,809  -570,153 -827,135 -939,022 -635,831 -542,417 -160,000 -594,066 -188,267 -332,461 630,577 -689,268 -364,606 -576,285 -445,030 -463,664 -308,992 -398,839 -337,794 -152,190 -88,229 -49,135 238,374 
      restricted cash
                                                    -16 -56 -501,632 13,249 -1,776,965                        
      proceeds from issuance of preferred stock
                                                                                
      repayment of borrowings under line of credit
                                                                                
      proceeds from finance obligation
                                                                                
      changes in operating assets and liabilities that provide (use) cash, net of effects of acquisition:
                                                                                
      depreciation of property, plant and equipment and investment in leased property
                                                                                
      benefit from bad debts
                                                    -82,400 92,560 11,903 70,497                        
      loss on sale of leased assets
                                                                                
      goodwill impairment charge
                                                                                
      impairment loss on available-for-sale securities
                                                         4,942,229 2,794,646                      
      net unrealized gains on trading securities
                                                    -2,469,113 -665,919                           
      change in fair value of auction rate debt securities repurchase agreement
                                                    2,469,113 665,919 570,106 513,761 3,049,994                        
      gain on repayable government assistance
                                                                                
      changes in assets and liabilities:
                                                                                
      accounts payable and accrued expenses
                                                    5,272,939 -1,221,865 228,272 -556,416 -6,302,853      -29,835 473,330 -109,750 -451,790 -1,310,949 1,126,092 770,192 298,334 -484,974 141,733 505,181 -2,238,654 911,243 -10,479 -21,626 1,215,339 -1,398,378 764,056 
      investment in leased property
                                                    -283,561 -2,461,526                        
      proceeds from trading securities
                                                    25,675,000 8,250,001                           
      proceeds from maturities and sales of available-for-sale securities
                                                    19,976,357 25,927,949 48,782,026 22,839,489 22,942,507 -230,986,668,244,695,260 122,998,448 45,171,119 120,252,085 199,031,301 192,186,063                  
      proceeds from stock option exercises and employee stock purchase plan
                                                      38,022 38,471 -165,156,014,412                       
      (repayment) proceeds of borrowings under line of credit
                                                                                
      proceeds from long term debt
                                                      1,652,445                        
      repayment of government assistance
                                                                                
      depreciation and amortization
                                                    790,474 822,470 890,165 960,210 932,790 -33,147,698,418,893 1,061,087 1,029,984 1,038,144 978,135 800,761 808,513 811,088 795,500 804,689 776,472 832,687 903,168 846,611 1,082,034 1,062,597 1,051,180 1,010,767 980,343 976,875 1,035,831 1,099,001 1,143,462 
      loss on disposal of property, plant and equipment
                                                                               
      equity in losses of affiliates
                                                                   4,438,355 448,274 448,274 450,455 453,050 451,142 433,523 465,818 457,943 476,840 479,887 485,201 465,187 
      noncash prepaid development costs
                                                                       350,000 358,481 327,795 336,941 407,287 364,761 429,240 
      in-kind services
                                                                                
      amortization of deferred grant revenue
                                                                       -50,000 -50,000 -50,000 -50,000 -50,000 -50,000 -50,000 -50,000 -50,000 
      amortization and write-off of deferred rent
                                                                                
      in-process research and development
                                                                           3,000,000  
      changes in assets and liabilities, net of effects of acquisitions:
                                                                                
      cash paid for acquisitions
                                                           -504,634                    
      investment in affiliate
                                                                                
      proceeds from issuance of common and preferred stock
                                                                              
      proceeds from initial public offering
                                                                                
      repayment of loans due to general hydrogen shareholders
                                                                              
      (repayment) proceeds from borrowings under line of credit
                                                     -8,250,000                           
      balance at march 31, 2010
                                                                                
      trading securities – auction rate debt securities
                                                     45,813,097                           
      available-for-sale securities
                                                     41,990,705                           
      auction rate debt securities repurchase agreement
                                                     5,311,903                           
      amortization of intangible asset
                                                      544,114 525,154 506,198 -17,106,028,803,210          687,500 687,500 687,500 687,500 687,500 687,500 687,500 687,500 514,847 772,292 
      proceeds from borrowings under line of credit
                                                                                
      principal payments on long-term debt and borrowings under line of credit
                                                      54,494                          
      balance at september 30, 2009
                                                                                
      trading securities – auction rate debt securities
                                                                                
      auction rate debt securities repurchase agreement
                                                                                
      net unrealized (gains) losses on trading securities
                                                       -513,761 -3,049,994                        
      gain on termination of repayable government assistance
                                                                                
      principle payments on loan
                                                                                
      cash released from escrow
                                                                                
      balance at june 30, 2009
                                                                                
      principal payments on long-term debt and capital lease obligations
                                                               -3,906,641 -47,269 -47,269 -47,268 -433,762 -17,253 -16,828 -16,414 -363,575 -18,959 -11,889 -20,803 -344,341 -44,449 -1,274 -1,245  
      balance at march 31, 2009
                                                                                
      trading securities – auction rate debt securities
                                                                                
      auction rate debt securities repurchase agreement
                                                                                
      (gain) loss on disposal of property, plant and equipment
                                                                                
      goodwill impairment charge
                                                                                
      gain on auction rate debt securities repurchase agreement
                                                                                
      december 31, 2005
                                                                                
      unrealized gain on available-for-sale securities, net of reclassification adjustments for realized net incomees and gains
                                                                                
      total comprehensive loss
                                                                                
      private placement
                                                                                
      stock based compensation
                                                                  1,518,089  658,516 845,489 959,613  1,007,044 1,000,205 1,264,911  1,170,222 372,342 247,126  
      stock option exercises
                                                                                
      stock issued under employee stock purchase plan
                                                                                
      december 31, 2006
                                                                                
      foreign currency translation gain
                                                                                
      warrants
                                                                                
      december 31, 2007
                                                                                
      foreign currency translation loss
                                                                                
      conversion of preferred stock
                                                                                
      treasury stock
                                                                                
      december 31, 2008
                                                                                
      gain on settlement of repayable government assistance
                                                                                
      government assistance receivable
                                                          37,468 -73,642 648,758                    
      repayable government assistance
                                                                                
      balance at september 30, 2008
                                                                                
      accounts payable, accrued expenses and other current liabilities
                                                          -1,311,469                      
      government assistance payable
                                                          79,699                      
      proceeds from stock options and employee stock purchase plan
                                                          128,162                      
      unaudited proforma revenue
                                                          3,131,754                      
      unaudited proforma net income
                                                          -14,689,744                      
      unaudited proforma basic and diluted loss per share
                                                          -0.17                      
      stock-based compensation expense
                                                                                
      december 31, 2004
                                                                                
      unrealized gain on available-for-sale securities
                                                                                
      public offering
                                                                                
      amortization of restricted stock
                                                                                
      warrants issued for acquisition
                                                                                
      allowance for bad debts
                                                                                
      interest on repayable government assistance
                                                            110,846                    
      changes in assets and liabilities, net of effects of acquired companies:
                                                                                
      accounts payable, accrued expenses and other liabilities
                                                            1,407,532                    
      increase in notes receivable
                                                              -1,500,000                  
      proceeds from public offerings
                                                                                
      government assistance
                                                                                
      proceeds from shares issued for stock option exercises and employee stock purchase plan
                                                            41,337    7,726 209,678 3,591  130,023 357,370 198,626  2,900 250,959 441,988  5,219 196,134 13,965  
      current assets
                                                                                
      property, plant and equipment
                                                                                
      identifiable intangible assets
                                                                                
      goodwill
                                                                                
      total assets acquired
                                                                                
      current liabilities
                                                                                
      long term liabilities
                                                                                
      total liabilities assumed
                                                                                
      net assets acquired
                                                                                
      proceeds from acquisition
                                                                           36,521,491  
      changes in assets and liabilities, net of effects of acquisition in 2003:
                                                                                
      integration costs and expenses associated with acquisition
                                                                           -7,055,750  
      proceeds from maturities and sales of marketable securities
                                                                444,440,244                
      purchases of marketable securities
                                                                -524,524,744 -264,119,556 -45,743,215 -104,193,498 -95,253,054 -1,461,346 -4,030,829          
      cash placed in escrow
                                                                                
      proceeds from maturities of marketable securities
                                                                  53,916,313              
      proceeds from issuance of common stock
                                                                               
      proceeds from sale of marketable securities
                                                                   83,371,710 70,228,774 2,114,661 21,635,881          
      (gain)/loss on disposal of property, plant and equipment
                                                                                
      changes in assets and liabilities, net of effects of acquisition:
                                                                                
      marketable securities
                                                                        4,463,585 -9,198,431 -20,266,330 -612,986 4,060,880 6,022,797 5,800,837 -2,822,243 
      prepaid development costs
                                                                                
      proceeds from secondary public offering
                                                                                
      cash from investing activities
                                                                             5,934,568 35,217,443  
      amortization of deferred rent
                                                                                
      write-off of deferred rent
                                                                                
      due from investor
                                                                                
      due to investor
                                                                                
      cash released from (placed in) escrow
                                                                                
      proceeds from stock option exercises
                                                                                
      principal payments on capital lease obligations
                                                                                
    The information provided in this report is taken from www.sec.gov and many other data providers. While we have conducted our best efforts to ensure that the parsed data is accurate, we cannot guarantee its accuracy. Please use caution and understand that any consequences of its use are your own responsibility.