7Baggers

FormFactor, Inc
(NASDAQ:FORM) 

FORM stock logo

FormFactor, Inc. designs, manufactures, and sells probe cards, analytical probes, probe stations, metrology systems, thermal systems, and cryogenic systems to semiconductor companies and scientific institutions. It operates in two segments, Probe Cards and Systems. The company offers probe cards to ...

Founded: 1993
Full Time Employees: 1,836
Sector: Technology
Industry: Semiconductors

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At a glance:
  • Strong Leverage to Advanced Packaging & HBM Demand: FormFactor is positioned to benefit from rising test and probe requirements driven by AI accelerators, HBM memory, and advanced packaging, which typically require more complex and higher-value probe solutions.
  • Probe Card Mix Shifts Toward Higher-Complexity Nodes: Industry migration to smaller geometries and heterogeneous integration increases probe density and performance requirements, supporting demand for premium probe cards and potentially improving average selling prices and margins over time.
  • Cyclical Semiconductor Test Spending Remains a Key Swing Factor: Revenue and profitability can be sensitive to wafer fab utilization and customers’ capex cycles; digestion periods or memory/logic slowdowns can pressure near-term orders even if long-term secular drivers remain intact.
  • Concentration Risk with Large Customers and End-Markets: Results may be influenced by purchasing patterns of a limited number of large semiconductor customers and by exposure to specific end-markets (e.g., memory or high-performance compute), increasing quarter-to-quarter volatility.
  • Execution Focus on Margin Discipline and Operational Efficiency: Operational improvements—manufacturing efficiency, product mix optimization, and cost control—remain important to sustaining profitability and cash generation through semiconductor cycle fluctuations.
Bull Thesis:
  • Indispensable Role in Advanced Semiconductor Manufacturing: As chip complexity increases with smaller nodes and advanced packaging, the demand for FormFactor's high-performance probe cards, essential for wafer-level testing, grows. Their technology is critical for ensuring chip quality and yield in leading-edge processes.
  • Leverage to AI, HPC, and Advanced Packaging Trends: The proliferation of AI, High-Performance Computing (HPC), and advanced packaging technologies (e.g., chiplets, HBM) drives the need for more sophisticated and rigorous testing solutions. FormFactor's specialized probe cards are well-positioned to benefit from these high-growth segments.
  • Anticipated Memory Market Recovery: A significant portion of FormFactor's revenue is tied to the memory market (DRAM and NAND). An expected recovery in memory demand, particularly for AI applications and new device generations, could provide a strong tailwind for their memory probe card business.
  • Strong Market Position and Intellectual Property: FormFactor holds a leading market share in the probe card industry and possesses a robust portfolio of intellectual property. This strong competitive advantage creates significant barriers to entry and helps sustain its leadership in a specialized and technologically demanding market.
Bear Thesis:
  • High Exposure to Semiconductor Industry Cyclicality: FormFactor's revenue and profitability are highly sensitive to the cyclical nature of semiconductor capital expenditures. Downturns in customer spending, driven by macroeconomic factors or inventory corrections, can lead to significant revenue fluctuations and reduced demand for their products.
  • Prolonged Weakness or Volatility in Memory Market: Despite recovery expectations, a slower-than-anticipated rebound or continued volatility in the DRAM and NAND markets could negatively impact FormFactor. Its substantial exposure to this segment makes it vulnerable to prolonged periods of weak demand or oversupply.
  • Customer Concentration Risk: FormFactor relies on a relatively small number of large customers (e.g., major foundries and IDMs). A significant reduction in capital expenditure, a shift in strategy, or increased pricing pressure from one or more key customers could materially affect FormFactor's financial performance.
  • Intense Competition and High R&D Demands: The probe card market is competitive, requiring continuous innovation and substantial R&D investment to maintain technological leadership. Failure to keep pace with evolving chip architectures or increased pricing pressure from competitors could erode margins and market share.
Main Competitors:
  • Advantest Corporation ($ATEYY) (Probe cards, Automatic Test Equipment (ATE), wafer-level test solutions), A major global provider of semiconductor test equipment, Advantest competes directly with FormFactor in the probe card market, offering a range of advanced probe cards for wafer-level testing. They also provide broader ATE solutions, influencing overall customer spend in the test segment.
  • Micronics Japan Co., Ltd. (MJC) ($6871.T) (Probe cards, test solutions for semiconductors), MJC is a specialized manufacturer of probe cards and test solutions, directly competing with FormFactor across various probe card technologies, including advanced logic, memory, and high-frequency applications. They focus heavily on the consumable aspect of semiconductor testing.
  • Technoprobe S.p.A. (Probe cards (cantilever, MEMS, advanced logic, memory)), One of the largest privately-held probe card manufacturers globally, Technoprobe is a direct and significant competitor to FormFactor, particularly in high-performance and advanced probe card technologies for logic and memory devices. They compete on technology, performance, and global reach.
  • Japan Electronic Materials Corporation (JEM) ($6855.T) (Probe cards, ceramic products for semiconductor manufacturing), JEM is a key player in the probe card market, offering a variety of probe card types, including those for memory and logic devices. They compete with FormFactor by providing specialized probe card solutions and leveraging their expertise in ceramic materials for semiconductor applications.
Moat:
FormFactor operates in a highly specialized and technologically demanding segment of the semiconductor industry. Its primary moat stems from its **technological leadership and extensive intellectual property** in advanced probe card solutions, particularly MEMS-based technologies crucial for testing complex logic, memory (DRAM, NAND), and high-frequency devices at wafer-level. This requires significant R&D investment and deep engineering expertise. Furthermore, **strong, long-standing relationships with leading semiconductor manufacturers** and being designed into their critical test flows create significant switching costs. The competitive landscape is characterized by a few large, diversified players like Advantest, which also offer broader test solutions, and several highly specialized probe card manufacturers such as Micronics Japan, Technoprobe, and Japan Electronic Materials. Competition revolves around performance, reliability, cost-of-test, and the ability to rapidly innovate and adapt to the semiconductor industry's relentless technology roadmap.
Income Statements:
Quarterly
Annual
    Unit: USD2026-03-28 2025-12-27 2025-09-27 2025-06-28 2025-03-29 2024-12-28 2024-09-28 2024-06-29 2024-03-30 2023-12-30 2023-09-30 2023-07-01 2023-04-01 2022-12-31 2022-09-24 2022-06-25 2022-03-26 2021-12-25 2021-09-25 2021-06-26 2021-03-27 2020-12-26 2020-09-26 2020-06-27 2020-03-28 2019-12-28 2019-09-28 2019-06-29 2019-03-30 2018-12-29 2018-09-29 2018-06-30 2018-03-31 2017-12-30 2017-09-30 2017-07-01 2017-04-01 2016-12-31 2016-09-24 2016-06-25 2016-03-26 2015-12-26 2015-09-26 2015-06-27 2015-03-28 2014-12-27 2014-09-27 2014-06-28 2014-03-29 2013-12-28 2013-09-28 2013-06-29 2013-03-30 2012-12-29 2012-09-29 2012-06-30 2012-03-31 2011-12-31 2011-09-24 2011-06-25 2011-03-26 2010-09-25 2010-06-26 2010-03-27 2009-09-26 2009-06-27 2009-03-28 2008-09-27 2008-06-28 2008-03-29 2007-12-29 2007-09-29 2007-06-30 2007-03-31 2006-12-30 2006-09-30 2006-07-01 2006-04-01 2005-12-31 2005-09-24 2005-06-25 2005-03-26 2004-12-25 2004-09-27 2004-09-25 2004-06-28 2004-06-26 2004-03-29 2004-03-27 2003-12-27 2003-09-28 2003-09-27 2003-06-30 2003-06-29 2003-06-28 
                                                                                                   
      revenues
    226,144,000 215,163,000 202,676,000 195,798,000 171,356,000 189,483,000 207,917,000 197,474,000 168,725,000 168,163,000 171,575,000 155,916,000 167,448,000 165,987,000 180,869,000 203,907,000 197,174,000 204,998,000 189,964,000 188,076,000 186,636,000 197,043,000 177,996,000 157,824,000 160,753,000 178,629,000 140,604,000 138,018,000 132,213,000 140,887,000 134,989,000 135,509,000 118,290,000 131,901,000 143,735,000 143,976,000 128,829,000 123,888,000 123,299,000 83,083,000 53,611,000 71,782,000 65,862,000 73,885,000 70,829,000 71,285,000 73,933,000 67,352,000 55,959,000 48,546,000 67,634,000 62,733,000 52,620,000 47,654,000 41,262,000 54,813,000 34,806,000 30,224,000 52,115,000 46,558,000 40,428,000 47,347,000 57,640,000 39,666,000 43,773,000 31,198,000 27,369,000 52,584,000 52,013,000 65,703,000 85,421,500 125,291,000 114,124,000 102,271,000 98,693,000 96,757,000 92,433,000 81,330,000 71,819,000 62,374,000 52,337,000 50,965,000 46,113,000 51,377,000 51,377,000  43,154,000 37,118,000 37,118,000 31,463,000 26,076,000 26,076,000  22,094,000 22,094,000 
      yoy
    31.97% 13.55% -2.52% -0.85% 1.56% 12.68% 21.18% 26.65% 0.76% 1.31% -5.14% -23.54% -15.08% -19.03% -4.79% 8.42% 5.65% 4.04% 6.72% 19.17% 16.10% 10.31% 26.59% 14.35% 21.59% 26.79% 4.16% 1.85% 11.77% 6.81% -6.08% -5.88% -8.18% 6.47% 16.57% 73.29% 140.30% 72.59% 87.21% 12.45% -24.31% 0.70% -10.92% 9.70% 26.57% 46.84% 9.31% 7.36% 6.35% 1.87% 63.91% 14.45% 51.18% 57.67% -20.83% 17.73% -13.91% -36.16% -9.59% 17.38% -7.64% 51.76% 110.60% -24.57% -15.84% -52.52% -67.96% -58.03% -54.42% -35.76% -13.45% 29.49% 23.47% 25.75% 37.42% 55.12% 76.61% 59.58% 55.75% 21.40% 1.87%  6.86% 38.42% 38.42%  65.49% 42.35%  42.41% 18.02%     
      qoq
    5.10% 6.16% 3.51% 14.26% -9.57% -8.87% 5.29% 17.04% 0.33% -1.99% 10.04% -6.89% 0.88% -8.23% -11.30% 3.41% -3.82% 7.91% 1.00% 0.77% -5.28% 10.70% 12.78% -1.82% -10.01% 27.04% 1.87% 4.39% -6.16% 4.37% -0.38% 14.56% -10.32% -8.23% -0.17% 11.76% 3.99% 0.48% 48.40% 54.97% -25.31% 8.99% -10.86% 4.31% -0.64% -3.58% 9.77% 20.36% 15.27% -28.22% 7.81% 19.22% 10.42% 15.49% -24.72% 57.48% 15.16% -42.01% 11.94% 15.16% -14.61% -17.86% 45.31% -9.38% 40.31% 13.99% -47.95% 1.10% -20.84% -23.08% -31.82% 9.78% 11.59% 3.63% 2.00% 4.68% 13.65% 13.24% 15.14% 19.18% 2.69% 10.52% -10.25% 0.00%   16.26% 0.00% 17.97% 20.66% 0.00%   0.00%  
      cost of revenues
    139,350,000 124,399,000 122,050,000 122,860,000 106,833,000 115,903,000 123,212,000 110,574,000 105,987,000 100,229,000 102,290,000 95,633,000 106,370,000 120,784,000 118,656,000 109,538,000 102,950,000 115,439,000 109,745,000 111,793,000 109,930,000 119,429,000 101,247,000 91,657,000 93,363,000 104,324,000 85,286,000 82,666,000 79,692,000 84,865,000 82,019,000 79,291,000 73,161,000 83,272,000 86,105,000 82,209,000 81,258,000 83,613,000 96,111,000 57,656,000 43,819,000 50,592,000 47,407,000 50,582,000 48,040,000 50,337,000 49,791,000 47,328,000 43,634,000 44,288,000 55,088,000 46,328,000 43,545,000 50,798,000 33,110,000 38,646,000 30,650,000 35,199,000 40,141,000 36,668,000 36,359,000 54,541,000 54,709,000 41,994,000 36,435,000 32,524,000 31,048,000 40,583,000 40,912,000 53,131,000 39,140,750 58,609,000 53,663,000 48,567,000 47,536,000 46,492,000 43,707,000 40,500,000 36,518,000 33,980,000 30,434,000 28,691,000 26,504,000 25,471,000 25,471,000  20,158,000 18,026,000 18,026,000 15,447,000 13,213,000 13,213,000  11,469,000 11,469,000 
      gross profit
    86,794,000 90,764,000 80,626,000 72,938,000 64,523,000 73,580,000 84,705,000 86,900,000 62,738,000 67,934,000 69,285,000 60,283,000 61,078,000 45,203,000 62,213,000 94,369,000 94,224,000 89,559,000 80,219,000 76,283,000 76,706,000 77,614,000 76,749,000 66,167,000 67,390,000 74,305,000 55,318,000 55,352,000 52,521,000 56,022,000 52,970,000 56,218,000 45,129,000 48,629,000 57,630,000 61,767,000 47,571,000 40,275,000 27,188,000 25,427,000 9,792,000 21,190,000 18,455,000 23,303,000 22,789,000 20,948,000 24,142,000 20,024,000 12,325,000 4,258,000 12,546,000 16,405,000 9,075,000 -3,144,000 8,152,000 16,167,000 4,156,000 -4,975,000 11,974,000 9,890,000 4,069,000  2,931,000  7,338,000                               
      yoy
    34.52% 23.35% -4.82% -16.07% 2.85% 8.31% 22.26% 44.15% 2.72% 50.29% 11.37% -36.12% -35.18% -49.53% -22.45% 23.71% 22.84% 15.39% 4.52% 15.29% 13.82% 4.45% 38.74% 19.54% 28.31% 32.64% 4.43% -1.54% 16.38% 15.20% -8.09% -8.98% -5.13% 20.74% 111.97% 142.92% 385.81% 90.07% 47.32% 9.11% -57.03% 1.16% -23.56% 16.38% 84.90% 391.97% 92.43% 22.06% 35.81% -235.43% 53.90% 1.47% 118.36% -36.80% -31.92% 63.47% 2.14%  308.53%  -44.55%                                   
      qoq
    -4.37% 12.57% 10.54% 13.04% -12.31% -13.13% -2.53% 38.51% -7.65% -1.95% 14.93% -1.30% 35.12% -27.34% -34.07% 0.15% 5.21% 11.64% 5.16% -0.55% -1.17% 1.13% 15.99% -1.81% -9.31% 34.32% -0.06% 5.39% -6.25% 5.76% -5.78% 24.57% -7.20% -15.62% -6.70% 29.84% 18.12% 48.14% 6.93% 159.67% -53.79% 14.82% -20.80% 2.26% 8.79% -13.23% 20.57% 62.47% 189.46% -66.06% -23.52% 80.77% -388.65% -138.57% -49.58% 289.00% -183.54% -141.55% 21.07% 143.06%                                    
      gross margin %
    38.38% 42.18% 39.78% 37.25% 37.65% 38.83% 40.74% 44.01% 37.18% 40.40% 40.38% 38.66% 36.48% 27.23% 34.40% 46.28% 47.79% 43.69% 42.23% 40.56% 41.10% 39.39% 43.12% 41.92% 41.92% 41.60% 39.34% 40.10% 39.72% 39.76% 39.24% 41.49% 38.15% 36.87% 40.09% 42.90% 36.93% 32.51% 22.05% 30.60% 18.26% 29.52% 28.02% 31.54% 32.17% 29.39% 32.65% 29.73% 22.03% 8.77% 18.55% 26.15% 17.25% -6.60% 19.76% 29.49% 11.94% -16.46% 22.98% 21.24% 10.06% 0% 5.09% 0% 16.76% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% NaN% 0% 0% 0% 0% 0% 0% NaN% 0% 0% 
      operating expenses:
                                                                                                   
      research and development
    30,780,000 30,403,000 28,686,000 28,793,000 27,800,000 30,504,000 31,243,000 31,564,000 28,627,000 28,166,000 31,014,000 28,340,000 28,245,000 27,222,000 26,549,000 28,317,000 27,134,000 25,411,000 26,026,000 25,454,000 24,046,000 23,970,000 22,878,000 20,919,000 21,267,000 21,606,000 20,096,000 20,074,000 19,723,000 18,398,000 18,857,000 19,675,000 18,046,000 18,513,000 19,338,000 18,542,000 17,414,000 18,218,000 17,253,000 11,133,000 10,849,000 11,237,000 10,645,000 11,217,000 11,086,000 10,706,000 11,198,000 11,074,000 9,747,000 9,994,000 10,301,000 10,915,000 10,929,000 9,775,000 8,573,000 10,935,000 10,847,000 10,683,000 10,423,000 10,878,000 11,560,000 12,825,000 15,997,000 15,091,000 13,775,000 13,938,000 14,110,000 17,079,000 15,821,000 16,388,000 11,176,000 16,219,000 14,384,000 14,102,000 13,211,000 11,994,000 11,627,000 9,776,000 8,754,000 7,700,000 5,516,000 5,668,000 5,393,000 5,555,000 5,555,000  4,516,000 4,349,000 4,349,000     78 78 
      selling, general and administrative
    32,292,000 35,167,000 32,971,000 31,839,000 33,454,000 35,226,000 35,607,000 37,874,000 33,079,000 31,451,000 35,564,000 33,255,000 32,742,000 33,926,000 31,637,000 33,406,000 32,906,000 32,358,000 30,940,000 30,479,000 30,015,000 32,816,000 31,834,000 22,755,000 27,693,000 28,981,000 25,887,000 26,283,000 25,184,000 25,668,000 24,745,000 25,232,000 23,449,000 24,238,000 24,010,000 23,602,000 22,829,000 23,891,000 23,008,000 14,030,000 12,516,000 10,717,000 11,108,000 11,381,000 11,882,000 12,631,000 13,309,000 13,191,000 12,254,000 12,160,000 12,952,000 13,487,000 14,618,000 14,958,000 11,594,000 11,531,000 11,148,000 11,964,000 11,200,000 11,154,000 12,387,000 16,219,000 18,725,000 17,867,000 17,366,000 18,263,000 26,310,000 23,675,000 22,705,000 22,658,000 17,337,250 23,365,000 23,056,000 22,928,000 18,506,000 19,321,000 17,965,000 15,748,000 12,124,000 10,655,000 9,377,000 9,196,000 8,378,000 7,904,000 7,904,000  6,862,000 5,874,000 5,874,000       
      factory start-up costs
    7,074,000 1,704,000 964,000                                                                                             
      total operating expenses
    70,146,000 67,274,000 62,621,000 60,632,000 61,254,000 65,730,000 66,850,000 69,438,000 61,706,000 59,617,000 66,578,000 61,595,000 60,987,000 61,148,000 58,186,000 61,723,000 60,040,000 57,769,000 56,966,000 55,933,000 54,061,000 56,786,000 54,712,000 43,674,000 48,960,000 50,587,000 45,983,000 46,357,000 44,907,000 44,226,000 43,602,000 44,907,000 41,495,000 43,232,000 43,364,000 42,188,000 40,512,000 54,806,000 40,346,000 32,073,000 23,365,000 21,951,000 21,812,000 22,606,000 23,471,000 24,311,000 24,621,000 24,324,000 24,741,000 23,164,000 23,411,000 24,915,000 29,585,000 21,865,000 22,791,000 22,663,000 22,130,000 23,070,000 21,981,000 20,933,000 25,336,000 92,985,000 37,235,000 36,508,000 31,141,000 32,465,000 48,099,000 40,895,000 41,749,000 44,366,000 28,513,250 39,584,000 37,440,000 37,030,000 31,717,000 31,315,000 29,592,000 25,524,000 21,348,000 19,752,000 15,518,000 15,474,000 9,157,750 13,914,000 13,914,000  11,942,000         
      operating income
    16,648,000 23,490,000 18,005,000 12,306,000 3,269,000 7,850,000 17,855,000 17,772,000 21,303,000 81,270,000 2,707,000 -1,312,000 91,000 -15,945,000 4,027,000 32,646,000 34,184,000 31,790,000 23,253,000 20,350,000 22,645,000 20,828,000 22,037,000 22,493,000 18,430,000 23,718,000 9,335,000 8,995,000 7,614,000 11,796,000 9,368,000 11,311,000 3,634,000 5,397,000 14,266,000 19,579,000 7,059,000 -14,531,000 -13,158,000 -6,646,000 -13,573,000 -761,000 -3,357,000 697,000 -682,000 -3,363,000 -479,000 -4,300,000 -12,416,000 -18,906,000 -10,865,000 -8,510,000 -20,510,000 -25,009,000 -14,639,000 -6,496,000 -17,974,000              17,767,500 27,098,000 23,021,000 16,674,000 19,440,000 18,950,000 19,134,000 15,306,000 13,853,000 8,534,000 6,258,000 6,656,000 5,216,000 11,838,000 11,838,000  10,897,000 8,460,000 8,460,000 5,812,000 3,521,000 3,521,000  1,945,000 1,945,000 
      yoy
    409.27% 199.24% 0.84% -30.76% -84.65% -90.34% 559.59% -1454.57% 23309.89% -609.69% -32.78% -104.02% -99.73% -150.16% -82.68% 60.42% 50.96% 52.63% 5.52% -9.53% 22.87% -12.18% 136.07% 150.06% 142.05% 101.07% -0.35% -20.48% 109.52% 118.57% -34.33% -42.23% -48.52% -137.14% -208.42% -394.60% -152.01% 1809.46% 291.96% -1053.52% 1890.18% -77.37% 600.84% -116.21% -94.51% -82.21% -95.59% -49.47% -39.46% -24.40% -25.78% 31.00% 14.11%                  -8.60% 43.00% 20.31% 8.94% 40.33% 122.05% 205.75% 129.96% 165.59% -27.91% -47.14%  -52.13% 39.93% 39.93%  209.49% 140.27%  198.82% 81.03%     
      qoq
    -29.13% 30.46% 46.31% 276.45% -58.36% -56.03% 0.47% -16.58% -73.79% 2902.22% -306.33% -1541.76% -100.57% -495.95% -87.66% -4.50% 7.53% 36.71% 14.27% -10.13% 8.72% -5.49% -2.03% 22.05% -22.30% 154.08% 3.78% 18.14% -35.45% 25.92% -17.18% 211.25% -32.67% -62.17% -27.14% 177.36% -148.58% 10.43% 97.98% -51.04% 1683.57% -77.33% -581.64% -202.20% -79.72% 602.09% -88.86% -65.37% -34.33% 74.01% 27.67% -58.51% -17.99% 70.84% 125.35% -63.86%               -34.43% 17.71% 38.07% -14.23% 2.59% -0.96% 25.01% 10.49% 62.33% 36.37% -5.98% 27.61% -55.94% 0.00%   28.81% 0.00% 45.56% 65.07% 0.00%   0.00%  
      operating margin %
    7.36% 10.92% 8.88% 6.29% 1.91% 4.14% 8.59% 9.00% 12.63% 48.33% 1.58% -0.84% 0.05% -9.61% 2.23% 16.01% 17.34% 15.51% 12.24% 10.82% 12.13% 10.57% 12.38% 14.25% 11.46% 13.28% 6.64% 6.52% 5.76% 8.37% 6.94% 8.35% 3.07% 4.09% 9.93% 13.60% 5.48% -11.73% -10.67% -8.00% -25.32% -1.06% -5.10% 0.94% -0.96% -4.72% -0.65% -6.38% -22.19% -38.94% -16.06% -13.57% -38.98% -52.48% -35.48% -11.85% -51.64% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 0% 20.80% 21.63% 20.17% 16.30% 19.70% 19.59% 20.70% 18.82% 19.29% 13.68% 11.96% 13.06% 11.31% 23.04% 23.04% NaN% 25.25% 22.79% 22.79% 18.47% 13.50% 13.50% NaN% 8.80% 8.80% 
      interest income
    2,174,000 2,705,000 1,976,000 2,642,000 3,317,000 3,890,000 3,650,000 3,415,000 3,156,000 2,797,000 1,662,000 1,482,000 1,276,000 1,073,000 709,000 300,000 138,000 106,000 121,000 148,000 194,000 191,000 249,000 376,000 685,000 726,000 724,000 684,000 580,000 404,000 369,000 326,000 257,000 265,000 123,000 93,000 67,000 60,000 52,000 88,000 117,000 72,000 65,000 65,000 85,000 69,000 75,000 79,000 79,000 88,000 95,000 96,000 107,000 134,000 163,000 182,000 212,000 276,000 335,000 369,000 424,000 623,000 722,000 775,000 694,000 762,000 1,115,000 2,805,000 3,128,000 4,875,000 4,191,750 5,766,000 5,557,000 5,444,000 4,987,000 4,485,000 3,889,000 1,822,000 1,370,000 1,116,000 980,000 816,000 435,000 635,000 635,000  572,000 533,000 533,000 156,250 289,000 289,000  174,000 174,000 
      other income
    441,000 874,000 444,000 -6,000 890,000 617,000 -558,000 360,000 520,000 -1,546,000 788,000 450,000 23,000 -467,000 1,041,000 551,000 192,000    172,000 609,000 299,000 -67,000  379,000 226,000 81,000  -85,250 121,000 50,000  -171,000 311,000 107,000 -1,574,000 -946,000 -1,042,000 -302,000 -314,000 -37,000 982,000 100,000 1,501,000 155,000 228,000 -156,000 -66,000 82,000 -91,000 209,000 423,000 334,000 171,000 546,000 410,000 941,000  584,000  3,960,000  117,000    263,000  793,000 58,500 415,000   159,000 59,000 327,000     87,000 -199,500 -156,000 -156,000   -395,000  48,250 242,000 242,000  -30,000  
      income before income taxes and equity investment
    19,263,000 26,548,000 20,425,000                                                                                             
      provision for income taxes
    396,000 3,620,000 5,937,000 2,372,000 1,075,000 2,234,000 2,211,000 2,155,000 3,198,000 6,254,000 786,000 -208,000 48,000 -1,728,000 1,274,000 3,136,000 4,450,000 6,303,000 2,784,000 2,283,000 3,206,000 2,173,000 -499,000 2,162,000 2,816,000 5,811,000 1,584,000 2,290,000 2,032,000 -73,443,000 1,393,000 1,654,000 287,000 -1,142,000 1,028,000 1,040,000 367,000 -10,916,250 50,000 -43,744,000 30,000 89,750 215,000 24,000 121,000 89,500 101,000 -51,000 308,000 -38,000 -147,000 202,000 -207,000 -319,000 173,000 -1,551,000 102,000  157,000  207,000 231,000 200,000 240,000  32,728,000       9,867,000 7,167,000   8,069,000 6,019,000   -2,114,000 2,648,000   -4,820,000  -4,466,000  -3,422,000      -789,000 
      income from equity investment
    1,517,000                                                                                               
      net income
    20,384,000 23,218,000 15,656,000 9,086,000 6,401,000 9,705,000 18,736,000 19,392,000 21,781,000 75,846,000 4,371,000 828,000 1,342,000 -13,727,000 4,351,000 30,242,000 29,872,000 25,897,000 20,497,000 17,905,000 19,625,000 19,273,000 22,891,000 20,469,000 15,890,000 18,636,000 8,279,000 6,948,000 5,483,000 85,100,000 7,688,000 9,123,000 2,125,000 5,588,000 12,563,000 17,577,000 5,185,000 -15,444,000 -14,198,000 36,884,000 -13,800,000 -619,000 -2,525,000 838,000 783,000 -1,871,000 -277,000 -4,326,000 -12,711,000 -18,789,000 -10,714,000 -8,407,000 -19,773,000 603,000 -14,478,000 -4,217,000 -17,454,000 -26,975,000 -9,904,000 -7,678,000 -21,424,000 -95,827,000 -33,864,000 -38,184,000 -23,901,000 -65,846,000 -37,943,000 -14,041,000 -18,659,000 -17,961,000 14,634,750 22,223,000 18,650,000 14,832,000 18,920,000 15,819,000 15,281,000 10,768,000 10,481,000 9,778,000 5,012,000 4,911,000 5,822,000 7,497,000 7,497,000  6,756,000 5,176,000 5,176,000 4,068,000 2,505,000 2,505,000  1,287,000 1,287,000 
      yoy
    218.45% 139.24% -16.44% -53.15% -70.61% -87.20% 328.64% 2242.03% 1523.03% -652.53% 0.46% -97.26% -95.51% -153.01% -78.77% 68.90% 52.21% 34.37% -10.46% -12.53% 23.51% 3.42% 176.49% 194.60% 189.80% -78.10% 7.69% -23.84% 158.02% 1422.91% -38.80% -48.10% -59.02% -136.18% -188.48% -52.35% -137.57% 2394.99% 462.30% 4301.43% -1862.45% -66.92% 811.55% -119.37% -106.16% -90.04% -97.41% -48.54% -35.72% -3215.92% -26.00% 99.36% 13.29% -102.24% 46.18% -45.08% -18.53% -71.85% -70.75% -79.89% -10.36% 45.53% -10.75% 171.95% 28.09% 266.61% -359.27% -163.18% -200.05% -221.10% -22.65% 40.48% 22.05% 37.74% 80.52% 61.78% 204.89% 119.26% 80.02% 30.43% -33.15%  -13.82% 44.84% 44.84%  169.70% 106.63%  216.08% 94.64%     
      qoq
    -12.21% 48.30% 72.31% 41.95% -34.04% -48.20% -3.38% -10.97% -71.28% 1635.21% 427.90% -38.30% -109.78% -415.49% -85.61% 1.24% 15.35% 26.35% 14.48% -8.76% 1.83% -15.81% 11.83% 28.82% -14.73% 125.10% 19.16% 26.72% -93.56% 1006.92% -15.73% 329.32% -61.97% -55.52% -28.53% 239.00% -133.57% 8.78% -138.49% -367.28% 2129.40% -75.49% -401.31% 7.02% -141.85% 575.45% -93.60% -65.97% -32.35% 75.37% 27.44% -57.48% -3379.10% -104.16% 243.32% -75.84% -35.30% 172.36% 28.99% -64.16% -77.64% 182.98% -11.31% 59.76% -63.70% 73.54% 170.23% -24.75% 3.89% -222.73% -34.15% 19.16% 25.74% -21.61% 19.60% 3.52% 41.91% 2.74% 7.19% 95.09% 2.06% -15.65% -22.34% 0.00%   30.53% 0.00% 27.24% 62.40% 0.00%   0.00%  
      net income margin %
    9.01% 10.79% 7.72% 4.64% 3.74% 5.12% 9.01% 9.82% 12.91% 45.10% 2.55% 0.53% 0.80% -8.27% 2.41% 14.83% 15.15% 12.63% 10.79% 9.52% 10.52% 9.78% 12.86% 12.97% 9.88% 10.43% 5.89% 5.03% 4.15% 60.40% 5.70% 6.73% 1.80% 4.24% 8.74% 12.21% 4.02% -12.47% -11.52% 44.39% -25.74% -0.86% -3.83% 1.13% 1.11% -2.62% -0.37% -6.42% -22.71% -38.70% -15.84% -13.40% -37.58% 1.27% -35.09% -7.69% -50.15% -89.25% -19.00% -16.49% -52.99% -202.39% -58.75% -96.26% -54.60% -211.06% -138.63% -26.70% -35.87% -27.34% 17.13% 17.74% 16.34% 14.50% 19.17% 16.35% 16.53% 13.24% 14.59% 15.68% 9.58% 9.64% 12.63% 14.59% 14.59% NaN% 15.66% 13.94% 13.94% 12.93% 9.61% 9.61% NaN% 5.83% 5.83% 
      net income per share
                                                                                                   
      basic
    0.26 0.3 0.2 0.12 0.08 0.13 0.24 0.25 0.28 0.98 0.06 0.01 0.02 -0.18 0.06 0.39 0.38 0.33 0.26 0.23 0.25 0.24 0.3 0.27 0.21 0.24 0.11 0.09 0.07 1.16 0.1 0.12 0.03 0.08 0.17 0.24 0.07 0.035 -0.2 0.62 -0.24   0.01 0.01                   -0.77 -0.48 -1.33 -0.77 -0.29 -0.38 -0.37 0.308 0.46 0.39 0.31 0.41 0.34 0.33 0.26 0.26 0.25 0.13 0.13 0.15 0.2 0.2  0.18 0.14 0.14 0.14 0.07 0.07  0.12 0.12 
      diluted
    0.26 0.29 0.2 0.12 0.08 0.13 0.24 0.25 0.28 0.97 0.06 0.01 0.02 -0.17 0.06 0.38 0.38 0.33 0.26 0.23 0.25 0.24 0.29 0.26 0.2 0.24 0.11 0.09 0.07 1.13 0.1 0.12 0.03 0.07 0.17 0.24 0.07 0.035 -0.2 0.61 -0.24   0.01 0.01                   -0.77 -0.48 -1.33 -0.77 -0.29 -0.38 -0.37 0.298 0.45 0.38 0.3 0.39 0.33 0.32 0.25 0.26 0.23 0.12 0.12 0.15 0.19 0.19  0.17 0.13 0.13 0.11 0.07 0.07  0.04 0.04 
      weighted-average number of shares used in per share calculations:
                                                                                                   
      basic
    77,825 77,348 77,387 77,107 77,345 77,340 77,406 77,235 77,452 77,370 77,571 77,159 77,066 77,578 77,245 77,897 78,246 77,787 77,869 77,463 77,598 76,681 77,029 76,275 76,005 74,994 75,280 74,478 74,362 73,482 73,837 73,157 72,826 72,292 72,651 72,200 71,423  70,502 59,572 58,431   58,109 56,954                   49,890 49,582 49,394 49,201 48,988 48,835 48,743  48,291 47,893 47,384 45,172 46,417 45,920 41,593  39,733 39,274 39,018 37,647 37,632 37,632 37,083 37,381 37,083 37,083 21,047 34,117 34,117 4,539 10,894 10,894 
      diluted
    79,415 78,313 77,734 77,527 77,884 78,437 78,439 78,717 78,490 78,159 78,412 77,616 77,255 78,201 77,688 79,210 79,468 79,133 79,029 79,466 79,988 79,001 78,809 78,861 78,510 77,286 77,291 76,189 76,009 75,182 74,962 74,533 74,342 74,239 73,885 73,539 72,922  70,502 59,988 58,431   59,094 58,838                   49,890 49,582 49,394 49,201 48,988 48,835 48,743  49,729 49,516 49,060 47,193 48,494 48,165 43,473  41,762 41,497 41,197 40,054 40,499 40,499 40,231 40,609 40,042 40,042 34,165 37,905 37,905 29,266 31,170 31,170 
      gain on sale of business
           310,000 20,271,000                                                                                       
      loss from equity investment
     -290,000 -1,168,000 3,484,000                                                                                            
      income before income taxes
       14,942,000 7,476,000 11,939,000 20,947,000 21,547,000 24,979,000 82,100,000 5,157,000 620,000 1,390,000 -15,455,000 5,625,000 33,378,000 34,322,000 32,200,000 23,281,000 20,188,000 22,831,000 21,446,000 22,392,000 22,631,000 18,706,000 24,447,000 9,863,000 9,238,000 7,515,000 11,657,000 9,081,000 10,777,000 2,412,000 4,446,000 13,591,000 18,617,000 5,552,000 -15,417,000 -14,148,000 -6,860,000 -13,770,000 -726,000 -2,310,000 862,000 904,000 -3,139,000 -176,000 -4,377,000 -12,403,000 -18,736,000 -10,861,000 -8,205,000 -19,980,000 -24,541,000 -14,305,000 -5,768,000 -17,352,000              22,017,750 33,279,000 28,517,000 21,999,000 24,586,000 23,494,000 23,350,000 16,787,000 14,787,000 9,020,000 7,126,000 7,559,000 7,224,000 12,317,000 12,317,000  11,222,000 8,598,000 8,598,000 6,598,000 4,041,000 4,041,000  2,076,000 2,076,000 
      interest expense
                 -116,000 -152,000 -119,000 -192,000 -155,000 -151,000 -116,000 -180,000 -182,000 -193,000 -171,000 -318,000 -376,000 -422,000 -522,000 -595,000 -660,000 -777,000 -910,000 -967,000 -1,045,000 -1,109,000 -1,162,000                                                      -9,500 -11,000 -11,000  -13,000 -13,000 
      other expense
                     9,000 58,000 -194,000     -91,000    -84,000    -512,000                                         119,000       -112,000      -247,000  -395,000      -30,000 
      restructuring
                                                                   3,550,000  264,000 7,679,000                             
      restructuring and impairment charges
                                     481,000 16,000 44,000 269,000 12,697,000 85,000                                                         
      restructuring charges
                                           6,910,000  -3,000 59,000  503,000 584,000 28,000 59,000 1,997,000 443,000 143,000 92,000  333,000 2,481,000 136,000 -33,000 325,000 258,000  1,038,000 8,539,000 2,513,000     141,000 3,223,000                           
      impairment of long-lived assets
                                               8,000  390,000 86,000  743,000 567,000 15,000 121,000  49,000 143,000 61,000 168,000 98,000 100,000  351,000 55,402,000                                  
      net income per share
                                                                                                   
      basic and diluted
                                             -0.01 -0.04   -0.03  -0.08 -0.23 -0.34 -0.2 -0.16 -0.37 0.03 -0.29 -0.08 -0.35 -0.54 -0.2 -0.15 -0.42 -1.9 -0.68                                 
      weighted-average number of shares used in per share calculations:
                                                                                                   
      basic and diluted
                                         64,941    57,850 58,209   55,908 56,297 55,812 55,050 54,204 54,437 54,105 53,664 50,551 50,154 49,817 49,487 50,521 50,747 50,773 50,636 50,431 50,084                                 
      loss on sale of subsidiary
                                                       300,000                                            
      restructuring charges (credit)
                                                        3,980,000                                           
      impairments of long-lived assets
                                                        58,000                                           
      gross loss
                                                                                                   
      provision for (benefit from) income taxes
                                                                    377,000                               
      benefit from income taxes
                                                                      13,136,000    7,383,000 11,056,000       -1,001,000 758,000   -3,120,750 -4,820,000    -3,422,000      -789,000  
      gross margin
                                                                       12,001,000 11,101,000 12,572,000 46,280,750 66,682,000 60,461,000 53,704,000 51,157,000 50,265,000 48,726,000 40,830,000 35,201,000 28,286,000 21,776,000 22,130,000 19,449,000 25,752,000 25,752,000  22,839,000 19,092,000 19,092,000 16,016,000 12,863,000 12,863,000  10,625,000 10,625,000 
      restructuring charge
                                                                         5,320,000                          
      benefit from (provision for) income taxes
                                                                                                   
      stock-based compensation
                                                                                  100,000 108,000 127,000 144,000 160,000 154,000 154,000  157,000 409,000 409,000       
      other income and expense
                                                                                  -163,750 -630,000                
      amounts exclude stock-based compensation expense as follows:
                                                                                                   
      total
                                                                                  470 1,397 625  392.75 455 455  564         
      preferred stock dividend
                                                                                                   
      net income available to common stockholders
                                                                                      5,822,000 7,497,000 7,497,000           
      amounts exclude stock-based compensation expense, as follows:
                                                                                                   
      benefit for income taxes
                                                                                             -2,530,000 -1,536,000 -1,536,000    
      amounts exclude stock-based compensation, as follows:
                                                                                                   
      selling, general and administration
                                                                                                 234 234 
                                                                                                   
    Balance Sheets:
    Quarterly
    Annual
      Unit: USD2026-03-28 2025-12-27 2025-09-27 2025-06-28 2025-03-29 2024-12-28 2024-09-28 2024-06-29 2024-03-30 2023-12-30 2023-09-30 2023-07-01 2023-04-01 2022-12-31 2022-09-24 2022-06-25 2022-03-26 2021-12-25 2021-09-25 2021-06-26 2021-03-27 2020-12-26 2020-09-26 2020-06-27 2020-03-28 2019-12-28 2019-09-28 2019-06-29 2019-03-30 2018-12-29 2018-09-29 2018-06-30 2018-03-31 2017-12-30 2017-09-30 2017-07-01 2017-04-01 2016-12-31 2016-09-24 2016-06-25 2016-03-26 2015-12-26 2015-09-26 2015-06-27 2015-03-28 2014-12-27 2014-09-27 2014-06-28 2014-03-29 2013-12-28 2013-09-28 2013-06-29 2013-03-30 2012-12-29 2012-09-29 2012-06-30 2012-03-31 2011-12-31 2011-09-24 2011-06-25 2011-03-26 2010-09-25 2010-06-26 2010-03-27 2009-09-26 2009-06-27 2009-03-28 2008-09-27 2008-06-28 2008-03-29 2007-12-29 2007-09-29 2007-06-30 2007-03-31 2006-12-30 2006-09-30 2006-07-01 2006-04-01 2005-12-31 2005-09-24 2005-06-25 2005-03-26 2004-12-25 2004-09-25 2004-06-26 2004-03-27 2003-12-27 2003-09-27 2003-06-28 
                                                                                               
        assets
                                                                                               
        current assets:
                                                                                               
        cash and cash equivalents
      123,539,000 103,330,000 97,678,000 67,380,000 129,889,000 190,728,000 184,506,000 195,914,000 186,296,000 177,812,000 108,731,000 97,981,000 112,360,000 109,130,000 120,602,000 136,395,000 167,182,000 151,010,000 153,781,000 160,273,000 173,616,000 187,225,000 185,368,000 199,926,000 169,607,000 144,545,000 122,946,000 124,810,000 105,759,000 98,472,000 91,990,000 95,624,000 93,699,000 91,184,000 103,083,000 107,817,000 114,437,000 101,408,000 99,908,000 100,225,000 151,913,000 146,264,000 142,185,000 137,088,000 125,993,000 113,940,000 89,264,000 69,859,000 49,199,000 59,196,000 59,470,000 57,160,000 77,381,000 72,243,000 162,062,000 144,823,000 135,536,000 139,049,000 140,933,000 130,085,000 116,142,000 118,554,000 89,076,000 92,978,000 149,920,000 183,106,000 190,855,000 427,614,000 427,176,000 400,634,000  283,391,000 286,610,000 277,782,000 284,131,000 276,365,000 270,338,000 223,576,000 31,217,000 23,690,000 18,887,000 23,001,000 34,836,000 66,226,000 73,310,000 99,232,000 116,305,000 95,561,000 115,614,000 
        marketable securities
      179,742,000 171,842,000 168,351,000 181,949,000 169,099,000 169,295,000 169,961,000 161,710,000 162,863,000 150,507,000 135,693,000 138,943,000 123,891,000 129,006,000 130,991,000 129,919,000 129,174,000 125,055,000 110,898,000 95,962,000 94,093,000 67,810,000 56,100,000 61,177,000 69,759,000 76,327,000 77,025,000 52,071,000 54,086,000 50,531,000 50,109,000 47,275,000 48,370,000 48,988,000 31,809,000 22,156,000 7,497,000 7,497,000 7,505,000 18,108,000 35,270,000 41,325,000 41,654,000 41,668,000 45,660,000 49,897,000 65,103,000 79,182,000 94,798,000 91,895,000 96,868,000 97,362,000 76,183,000 93,545,000 114,101,000 132,901,000 144,784,000 157,642,000 175,099,000 194,142,000 217,090,000 252,916,000 308,685,000 339,850,000 312,687,000 303,712,000 327,800,000 107,839,000 115,559,000 155,083,000  253,802,000 239,588,000 227,782,000 208,263,000 181,128,000 160,306,000 176,546,000 180,391,000 177,892,000 174,394,000 166,474,000  114,994,000 101,354,000     
        accounts receivable
      132,155,000 125,416,000 133,316,000 115,199,000 98,605,000 104,294,000 116,866,000 113,277,000 96,407,000 102,957,000 88,965,000 94,013,000 103,969,000 88,143,000 110,497,000 107,726,000 113,505,000 115,541,000 105,807,000 108,265,000 103,500,000 107,603,000 96,946,000 86,616,000 90,100,000 97,868,000 84,750,000 71,289,000 81,492,000 95,333,000 88,869,000 84,779,000 78,524,000 81,515,000 87,950,000 91,710,000 79,439,000 70,225,000 77,530,000 86,137,000 35,743,000 36,725,000 36,682,000 43,979,000 41,055,000 45,152,000 47,776,000 41,962,000 37,057,000 30,189,000 46,320,000 38,964,000 33,453,000 28,919,000 16,891,000 27,726,000 21,203,000 12,662,000 29,142,000 28,017,000 23,648,000 35,927,000 44,105,000 34,519,000 48,233,000 34,214,000 24,899,000 40,094,000 45,555,000 57,214,000  86,191,000 78,575,000 73,280,000 54,571,000 54,097,000 44,884,000 49,944,000 43,967,000 35,468,000 33,346,000 28,842,000  33,642,000 34,168,000     
        inventories
      112,877,000 110,884,000 108,830,000 110,789,000 109,965,000 101,676,000 105,374,000 114,814,000 108,774,000 111,685,000 111,626,000 120,298,000 116,553,000 123,157,000 132,029,000 143,475,000 125,590,000 111,548,000 115,104,000 111,890,000 104,727,000 99,229,000 94,616,000 87,813,000 78,983,000 83,258,000 85,989,000 83,852,000 83,216,000 77,706,000 81,538,000 76,379,000 73,780,000 67,848,000 68,667,000 64,951,000 60,371,000 59,806,000 60,677,000 68,357,000 30,993,000 27,223,000 27,000,000 24,247,000 24,571,000 25,548,000 25,902,000 22,050,000 21,319,000 20,707,000 22,369,000 26,130,000 24,689,000 23,616,000 20,054,000 20,507,000 20,148,000 18,092,000 20,647,000 21,799,000 22,953,000 29,065,000 35,792,000 31,880,000 21,166,000 18,560,000 19,796,000 22,205,000 24,718,000 26,609,000  32,568,000 32,004,000 27,463,000 24,778,000 26,317,000 24,057,000 21,098,000 18,404,000 14,416,000 12,769,000 10,354,000 11,232,000 10,050,000 9,605,000 8,744,000 8,025,000 7,558,000 6,415,000 
        restricted cash
      897,000 1,063,000 1,058,000 1,061,000 967,000 3,746,000 3,773,000 5,939,000 5,865,000 1,152,000 1,171,000 1,144,000 1,207,000 1,221,000 1,263,000 2,102,000 2,026,000 2,233,000 2,019,000 1,857,000 2,798,000 1,904,000 1,477,000 1,424,000 2,107,000 1,981,000 765,000 818,000 824,000 849,000 129,000 116,000 663,000 372,000 4,000 4,000 4,000 106,000 120,000 438,000 435,000 435,000 435,000 435,000 435,000 435,000 435,000 435,000 435,000 435,000 436,000 421,000 420,000 318,000 318,000 317,000 317,000   383,000 383,000 680,000 680,000 680,000 680,000 680,000 680,000 680,000 2,250,000 2,250,000  2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,250,000 2,550,000 2,550,000 2,550,000 2,550,000  
        prepaid expenses and other current assets
      51,596,000 44,519,000 50,027,000 48,884,000 42,716,000 35,389,000 34,302,000 28,964,000 28,291,000 29,667,000 26,681,000 25,876,000 22,941,000 23,895,000 20,932,000 17,447,000 18,671,000 18,652,000 18,892,000 19,244,000 19,371,000 23,303,000 21,687,000 18,458,000 15,699,000 15,064,000 17,834,000 14,282,000 11,747,000 13,669,000 15,716,000 18,822,000 14,452,000 13,705,000 13,385,000 13,001,000 11,348,000 14,276,000 12,946,000 10,094,000 4,417,000 6,481,000 6,501,000 7,602,000 6,154,000 6,919,000 7,730,000 7,476,000 7,372,000 6,106,000 7,844,000 6,191,000 9,476,000 10,569,000 6,364,000 7,226,000 7,011,000 7,458,000 11,250,000 9,022,000 11,321,000 15,203,000 14,130,000 12,616,000 11,462,000 8,717,000 11,933,000 13,553,000 12,841,000 12,360,000  15,338,000 14,319,000 12,360,000 12,138,000 12,674,000 11,771,000 8,493,000 7,169,000 7,522,000 4,371,000 6,295,000 4,760,000 3,795,000 2,507,000 2,756,000 2,744,000 2,628,000 1,482,000 
        total current assets
      600,806,000 557,054,000 559,260,000 525,262,000 551,241,000 605,128,000 614,782,000 620,618,000 588,496,000 573,780,000 506,585,000 478,255,000 480,921,000 474,552,000 516,314,000 537,064,000 556,148,000 524,039,000 506,501,000 497,491,000 498,105,000 487,074,000 456,194,000 455,414,000 426,255,000 419,043,000 389,787,000 347,646,000 338,385,000 337,820,000 329,671,000 324,323,000 311,795,000 305,854,000 306,735,000 300,731,000 274,201,000 254,709,000 260,077,000 284,438,000 258,336,000 258,018,000 256,051,000 256,614,000 245,464,000 244,274,000 239,394,000 224,152,000 213,304,000 211,651,000 237,869,000 231,579,000 230,804,000 239,172,000 320,204,000 333,913,000 331,345,000 336,975,000 377,375,000 383,745,000 391,815,000 455,411,000 495,534,000 515,478,000 565,366,000 570,185,000 608,473,000 656,931,000 662,572,000 679,228,000  685,841,000 663,665,000 631,167,000 596,381,000 561,814,000 522,695,000 490,996,000 292,544,000 268,742,000 251,354,000 242,553,000  231,532,000 223,717,000     
        operating lease, right-of-use-assets
      16,404,000 17,202,000 17,471,000 19,475,000 20,054,000 22,579,000 25,034,000 26,650,000 28,543,000 30,519,000 29,824,000 31,001,000 30,420,000 31,362,000 31,508,000 33,499,000 35,764,000 35,210,000 36,669,000 38,485,000 37,208,000 30,756,000 29,320,000 29,027,000 36,212,000 31,420,000 32,300,000 33,274,000 34,397,000                                                             
        property, plant and equipment, net of accumulated depreciation
      248,444,000 259,068,000 257,912,000 259,288,000 208,317,000 210,230,000 204,108,000 204,102,000 205,772,000  203,510,000 204,577,000 198,232,000  163,384,000 157,814,000 152,179,000  140,098,000 125,348,000 112,312,000  97,528,000 83,662,000 63,745,000  56,240,000 54,436,000 54,697,000  52,857,000 49,161,000 47,851,000  46,555,000 45,667,000                                                      
        equity investment
      64,247,000 64,096,000 66,441,000 67,264,000 68,667,000                                                                                     
        goodwill
      215,412,000 216,029,000 200,841,000 200,858,000 199,700,000 199,171,000 200,137,000 199,548,000 199,653,000 201,090,000 200,485,000 211,929,000 211,773,000 211,444,000 209,105,000 212,357,000 211,553,000 212,299,000 213,293,000 214,548,000 214,218,000 212,761,000 220,757,000 200,293,000 200,378,000 199,196,000 188,559,000 189,121,000 188,925,000 189,214,000 189,427,000 189,531,000 190,367,000 189,920,000 189,704,000 189,192,000 188,185,000 188,010,000 188,776,000 188,517,000 30,731,000 30,731,000 30,731,000 30,731,000 30,731,000 30,731,000 30,731,000 30,731,000 30,731,000 30,731,000 30,731,000 29,958,000 31,100,000 30,994,000                                    
        intangible assets
      15,482,000                                                                                         
        deferred tax assets
      90,632,000 89,524,000 88,265,000 94,795,000 92,759,000 92,012,000 92,826,000 88,841,000 80,007,000 78,964,000 73,572,000 71,172,000 67,951,000 67,646,000 67,775,000 65,059,000 62,746,000 61,995,000 67,231,000 66,945,000 65,821,000 66,242,000 71,464,000 69,712,000 70,273,000 71,252,000 77,274,000 77,279,000 77,293,000 77,301,000 3,042,000 3,067,000 3,145,000 3,133,000 3,299,000 3,302,000 3,322,000 3,310,000 3,966,000 3,926,000 3,339,000  2,029,000 2,030,000 2,031,000 2,036,000 2,837,000 2,841,000 2,777,000 2,776,000 4,206,000 4,204,000 4,208,000 4,613,000 729,000 727,000 1,758,000 1,162,000 304,000 297,000 278,000 3,329,000 3,321,000 3,317,000 3,768,000 7,085,000 22,862,000 18,447,000 18,492,000 18,121,000  14,551,000 12,569,000 12,500,000 12,500,000 11,233,000 11,339,000 11,339,000 11,396,000 9,754,000 7,587,000 7,587,000 7,587,000 2,825,000 2,773,000 2,523,000 2,575,000 2,571,000  
        other assets
      2,411,000 2,433,000 2,042,000 3,185,000 3,303,000 4,008,000 3,669,000 2,751,000 2,810,000 2,795,000 3,267,000 3,790,000 3,686,000 3,994,000 4,229,000 3,980,000 2,799,000 1,981,000 1,930,000 1,980,000 1,867,000 1,165,000 1,009,000 966,000 1,016,000 1,203,000 1,362,000 1,343,000 1,409,000 968,000 1,163,000 1,203,000 1,361,000 2,259,000 1,755,000 1,959,000 2,246,000 2,600,000 1,982,000 2,000,000 1,157,000 853,000 865,000 864,000 831,000 1,150,000 1,225,000 1,291,000 1,273,000 1,271,000 1,004,000 989,000 589,000 1,200,000 3,495,000 4,081,000 4,357,000 4,693,000 3,987,000 5,110,000 5,899,000 6,059,000 8,027,000 8,211,000 3,599,000 1,248,000 1,214,000 7,518,000 9,587,000 9,780,000  10,108,000 1,612,000 1,478,000 945,000 994,000 739,000 868,000 461,000 473,000 645,000 684,000 274,000 272,000 331,000 349,000 356,000 444,000 445,000 
        total assets
      1,255,850,000 1,224,362,000 1,202,992,000 1,181,608,000 1,156,167,000 1,146,215,000 1,153,783,000 1,156,265,000 1,119,798,000 1,106,794,000 1,032,967,000 1,025,138,000 1,019,756,000 1,008,228,000 1,022,363,000 1,042,447,000 1,056,880,000 1,020,520,000 1,006,591,000 988,546,000 980,211,000 963,217,000 915,607,000 884,234,000 849,379,000 839,882,000 793,605,000 757,569,000 756,621,000 728,222,000 652,472,000 651,221,000 646,188,000 646,574,000 653,554,000 653,398,000 632,667,000 618,982,000 650,312,000 695,256,000 340,528,000 342,723,000 344,212,000 348,753,000 341,519,000 344,243,000 344,531,000 337,128,000 332,178,000 340,708,000 372,940,000 372,278,000 379,027,000 395,682,000 362,831,000 378,354,000 376,189,000 383,071,000 423,948,000 431,594,000 438,941,000 499,751,000 603,444,000 623,732,000 668,571,000 674,826,000 742,821,000 801,438,000 814,189,000 829,189,000  824,784,000 786,792,000 744,322,000 698,329,000 658,726,000 620,794,000 584,363,000 381,361,000 349,509,000 322,667,000 309,765,000  282,440,000 266,115,000     
        liabilities and stockholders’ equity
                                                                                               
        current liabilities:
                                                                                               
        accounts payable
      54,226,000 47,436,000 58,389,000 59,932,000 64,536,000 62,287,000 52,086,000 62,235,000 65,995,000 63,857,000 61,589,000 63,770,000 63,756,000 69,308,000 75,021,000 60,927,000 65,378,000 57,862,000 64,925,000 62,445,000 67,720,000 62,045,000 62,903,000 44,334,000 40,139,000 40,914,000 50,968,000 26,252,000 31,555,000 40,006,000 49,668,000 42,054,000 38,889,000 35,046,000 37,103,000 43,179,000 43,316,000 34,075,000 41,584,000 54,063,000 28,611,000 18,072,000 21,159,000 21,449,000 16,143,000 20,274,000 21,267,000 18,388,000 15,921,000 16,313,000 28,676,000 24,181,000 24,191,000 21,015,000 10,856,000 17,833,000 15,171,000 9,731,000 18,120,000 16,023,000 16,035,000 27,738,000 32,095,000 29,876,000 27,450,000 20,562,000 27,339,000 30,043,000 30,626,000 34,188,000  43,883,000 39,055,000 38,162,000 31,273,000 27,346,000 29,034,000 23,205,000 26,369,000 18,810,000 15,543,000 14,683,000 17,556,000 17,724,000 15,138,000 15,334,000 10,579,000 8,766,000 6,419,000 
        accrued liabilities
      42,123,000 47,535,000 41,574,000 38,545,000 34,909,000 43,742,000 46,508,000 49,523,000 37,716,000 41,037,000 36,487,000 31,413,000 31,981,000 42,115,000 46,328,000 54,835,000 47,438,000 50,836,000 54,625,000 51,487,000 43,468,000 55,342,000 44,026,000 37,620,000 29,175,000 36,439,000 30,015,000 29,500,000 22,559,000 27,731,000 24,877,000 29,860,000 23,496,000 32,887,000 30,747,000 33,444,000 26,292,000 30,184,000 29,466,000 51,088,000 17,477,000 21,507,000 18,492,000 19,660,000 17,033,000 21,217,000 19,102,000 17,205,000 13,814,000 13,985,000 15,313,000 13,808,000 14,381,000 17,270,000 17,412,000 16,107,000 14,106,000 13,966,000 14,170,000 15,176,000 15,555,000 22,517,000 32,002,000 21,667,000 16,718,000 16,229,000 18,368,000 20,768,000 20,115,000 21,650,000  21,749,000 27,498,000 19,379,000 28,334,000 21,850,000 23,214,000 15,710,000 20,467,000 20,164,000 18,358,000 15,132,000 14,685,000 15,089,000 13,381,000 9,032,000 10,147,000 9,337,000 6,703,000 
        current portion of long-term debt, net of unamortized issuance costs
      1,145,000  1,129,000                                                                                       
        deferred revenue
      26,291,000 20,091,000 21,623,000 16,450,000 14,996,000 15,847,000 20,972,000 17,953,000 17,519,000 16,704,000 13,855,000 19,899,000 23,779,000 29,846,000 31,974,000 31,255,000 27,002,000 23,224,000 23,275,000 22,655,000 18,644,000 20,964,000 13,670,000 13,789,000 9,830,000 9,810,000 8,315,000 7,198,000 6,885,000 4,941,000 4,795,000 4,927,000 4,515,000 4,978,000 6,590,000 9,452,000 6,590,000 5,305,000 4,934,000 4,868,000 3,406,000 3,892,000 4,215,000 5,766,000 5,962,000 6,303,000 5,466,000 7,238,000 7,392,000 7,030,000 6,937,000 6,113,000 6,538,000 6,189,000 6,093,000 6,232,000 5,449,000 4,798,000 5,960,000 4,409,000 4,774,000 7,034,000 8,648,000 11,557,000 10,001,000 9,771,000 8,901,000 5,437,000                    1,214,000 269,000 
        operating lease liabilities
      8,326,000 7,662,000 7,400,000 7,919,000 8,461,000 8,363,000 8,512,000 8,240,000 8,245,000 8,422,000 8,007,000 7,871,000 7,512,000 7,353,000 7,699,000 7,843,000 8,049,000 7,901,000 7,962,000 7,908,000 7,557,000 6,704,000 6,555,000 6,168,000 6,815,000 6,551,000 6,416,000 6,203,000 6,022,000                                                             
        total current liabilities
      132,111,000 123,861,000 130,115,000 123,967,000 124,015,000 131,345,000 129,176,000 139,041,000 130,558,000 131,095,000 129,526,000 124,103,000 128,170,000 149,667,000 163,756,000 159,585,000 154,657,000 148,754,000 160,000,000 153,851,000 146,649,000 154,571,000 136,274,000 123,236,000 117,494,000 136,560,000 141,907,000 102,810,000 100,643,000 102,518,000 105,401,000 110,360,000 96,630,000 92,161,000 97,189,000 104,622,000 90,849,000 82,707,000 85,030,000 118,758,000 49,647,000 43,581,000 44,032,000 47,055,000 39,296,000 47,862,000 46,460,000 43,324,000 37,799,000 37,770,000 51,894,000 45,051,000 45,869,000 45,047,000 34,795,000 40,450,000 34,907,000 28,595,000 38,250,000 35,990,000 36,364,000 57,342,000 73,017,000 63,273,000 54,732,000 47,207,000 55,410,000 58,543,000 59,231,000 62,072,000  72,817,000 78,687,000 66,752,000 75,592,000 63,758,000 66,763,000 56,334,000 60,434,000 43,106,000 36,825,000 32,477,000  34,215,000 30,083,000     
        long-term debt, less current portion, net of unamortized issuance costs
      10,782,000  11,359,000                                                                                       
        deferred tax liabilities
      1,568,000 1,600,000         317,000 2,704,000 2,905,000 2,732,000 2,232,000 2,909,000 3,131,000 3,623,000 4,264,000 4,613,000 4,965,000 5,346,000 5,682,000 6,343,000 6,095,000 6,986,000 2,244,000 2,339,000 2,306,000 2,355,000 3,290,000 3,312,000 3,487,000 3,379,000 4,231,000 4,070,000 3,770,000 3,703,000 5,779,000 5,662,000   2,208,000 2,208,000 2,208,000 2,208,000 3,029,000 3,029,000 3,029,000                                         
        long-term operating lease liabilities
      11,638,000 12,488,000 13,317,000 15,231,000 15,980,000 17,550,000 19,731,000 21,441,000 23,432,000 25,334,000 25,096,000 26,458,000 26,407,000 27,587,000 27,858,000 29,511,000 31,366,000 31,009,000 32,401,000 34,211,000 33,485,000 27,996,000 26,794,000 26,816,000 34,028,000 29,088,000 30,074,000 31,173,000 32,239,000                                                             
        deferred grant
      18,000,000 18,000,000 18,000,000 18,000,000 18,000,000 18,000,000 18,000,000 18,000,000 18,000,000 18,000,000 18,000,000 18,000,000 18,000,000                                                                             
        other liabilities
      22,952,000 21,939,000 20,586,000 22,743,000 20,371,000 19,344,000 19,378,000 17,102,000 11,017,000 10,247,000 5,754,000 5,845,000 5,868,000 5,568,000 5,562,000 5,542,000 5,878,000 5,920,000 5,794,000 6,201,000 6,189,000 6,242,000 5,841,000 8,392,000 11,703,000 10,612,000 4,834,000 4,645,000 4,705,000                                                             
        total liabilities
      197,051,000 188,959,000 193,377,000 191,585,000 190,293,000 198,447,000 198,773,000 208,349,000 196,048,000 197,990,000 192,279,000 190,875,000 195,384,000 199,943,000 214,061,000 212,462,000 210,207,000 204,740,000 220,201,000 218,999,000 213,678,000 219,133,000 201,465,000 193,512,000 182,962,000 198,885,000 179,059,000 153,467,000 163,633,000 148,058,000 162,421,000 172,553,000 175,178,000 187,937,000 198,704,000 218,792,000 217,317,000 217,926,000 234,690,000 271,672,000 54,317,000 48,042,000 50,678,000 53,745,000 46,150,000 54,807,000 55,300,000 52,114,000 46,665,000 46,622,000 62,257,000 55,397,000 56,416,000 56,424,000 40,378,000 45,945,000 43,317,000 36,419,000 46,610,000 44,300,000 45,678,000 71,735,000 86,558,000 77,298,000 66,482,000 58,784,000 69,317,000 71,912,000 78,120,000 80,703,000  89,742,000 95,361,000 81,708,000 80,717,000 68,317,000 70,415,000 60,002,000 63,572,000 46,169,000 39,302,000 35,035,000  34,469,000 30,397,000     
        stockholders’ equity:
                                                                                               
        common stock
                                                                                   46,000  40,000 40,000 39,000  39,000 38,000 38,000  34,000 34,000 
        250,000,000 shares authorized; 77,954,440 and 77,647,935 shares issued and outstanding
      78,000                                                                                         
        additional paid-in capital
      870,689,000 863,547,000 857,401,000 850,064,000 844,488,000 837,586,000 845,466,000 863,283,000 857,326,000 861,448,000 873,634,000 867,517,000 858,195,000 844,842,000 843,453,000 860,584,000 902,994,000 898,945,000 892,303,000 894,062,000 915,136,000 903,838,000 896,576,000 898,069,000 895,600,000 885,821,000 879,527,000 875,024,000 871,617,000 862,897,000 857,505,000 853,278,000 851,249,000 843,116,000 845,942,000 839,751,000 840,714,000 833,341,000 828,613,000 823,152,000 723,592,000 718,904,000 717,082,000 715,863,000 716,761,000 711,676,000 708,440,000 703,133,000 699,626,000 695,631,000 692,885,000 688,646,000 685,410,000 681,157,000 663,872,000 659,830,000 656,356,000 652,024,000 655,449,000 655,674,000 654,486,000 647,533,000 641,164,000 637,273,000 626,211,000 616,926,000 608,748,000 597,556,000 589,901,000 582,534,000  566,348,000 545,545,000 534,778,000 504,709,000 496,296,000 472,778,000 461,915,000 268,291,000 264,861,000 255,879,000 253,195,000 249,149,000 237,177,000 233,567,000 232,950,000 226,630,000 168,698,000 168,606,000 
        accumulated other comprehensive loss
      -7,658,000 -3,528,000   -6,037,000 -10,840,000 -1,773,000 -7,948,000 -6,765,000 -4,052,000 -8,509,000 -4,445,000 -4,186,000 -5,578,000 -17,899,000 -8,996,000 -4,477,000       458,000 -909,000            -2,135,000 -3,740,000  -663,000 -1,581,000 -2,222,000 -2,166,000 -1,998,000 -1,697,000 -1,761,000 -600,000  -106,000                          -244,000    -359,000 -220,000 -407,000 -617,000 -730,000 -274,000 -567,000  -4,000 -18,000  
        accumulated income
      195,690,000 175,306,000 152,088,000 136,432,000 127,346,000 120,945,000 111,240,000 92,504,000 73,112,000 51,331,000                                                                                
        total stockholders’ equity
      1,058,799,000 1,035,403,000 1,009,615,000 990,023,000 965,874,000 947,768,000 955,010,000 947,916,000 923,750,000 908,804,000 840,688,000 834,263,000 824,372,000 808,285,000 808,302,000 829,985,000 846,673,000  786,390,000 769,547,000 766,533,000  714,142,000 690,722,000 666,417,000  614,546,000 604,102,000 592,988,000  490,051,000 478,668,000 471,010,000  454,850,000 434,606,000 415,350,000  415,622,000 423,584,000 286,211,000  293,534,000 295,008,000 295,369,000  289,231,000 285,014,000 285,513,000  310,683,000 316,881,000 322,611,000  322,453,000 332,409,000 332,872,000  377,338,000 387,294,000 393,263,000 428,016,000 516,886,000 546,434,000 602,089,000 616,042,000 673,504,000 729,526,000    735,042,000 691,431,000 662,614,000  590,409,000 550,379,000 524,361,000  303,340,000 283,365,000 274,730,000  247,971,000 235,718,000     
        total liabilities and stockholders’ equity
      1,255,850,000 1,224,362,000 1,202,992,000 1,181,608,000 1,156,167,000 1,146,215,000 1,153,783,000 1,156,265,000 1,119,798,000 1,106,794,000 1,032,967,000 1,025,138,000 1,019,756,000 1,008,228,000 1,022,363,000 1,042,447,000 1,056,880,000  1,006,591,000 988,546,000 980,211,000  915,607,000 884,234,000 849,379,000  793,605,000 757,569,000 756,621,000  652,472,000 651,221,000 646,188,000  653,554,000 653,398,000 632,667,000  650,312,000 695,256,000 340,528,000  344,212,000 348,753,000 341,519,000  344,531,000 337,128,000 332,178,000  372,940,000 372,278,000 379,027,000  362,831,000 378,354,000 376,189,000  423,948,000 431,594,000 438,941,000 499,751,000 603,444,000 623,732,000 668,571,000 674,826,000 742,821,000 801,438,000 814,189,000 829,189,000  824,784,000 786,792,000 744,322,000 698,329,000 658,726,000 620,794,000 584,363,000 381,361,000 349,509,000 322,667,000 309,765,000  282,440,000 266,115,000     
        intangibles
       16,302,000 8,385,000 9,017,000 9,681,000 10,355,000 11,017,000 11,657,000 12,297,000 12,938,000 13,578,000 22,149,000 24,486,000 26,751,000 28,208,000 30,872,000 33,638,000 36,342,000 39,195,000 41,913,000 48,786,000 59,147,000 37,937,000 43,785,000 50,139,000 57,610,000 47,054,000 53,404,000 60,385,000 67,640,000 75,278,000 82,861,000 90,649,000 97,484,000 104,740,000 111,779,000 118,444,000 126,608,000 152,395,000 172,146,000 22,823,000 25,552,000 28,869,000 32,187,000 35,504,000 38,689,000 42,255,000 47,326,000 52,398,000 57,470,000 61,495,000 65,625,000 69,880,000 74,276,000                                    
        liabilities and stockholders' equity
                                                                                               
        current portion of term loan, net of unamortized issuance cost of 5 and 5
       1,137,000    1,106,000                                                                                    
        term loan, less current portion, net of unamortized issuance cost of 44 and 49
       11,071,000                                                                                        
        preferred stock, 0.001 par value:
                                                                                               
        10,000,000 shares authorized; no shares issued and outstanding
                                                                                               
        250,000,000 shares authorized; 77,647,935 and 77,114,633 shares issued and outstanding
       78,000                                                                                        
        250,000,000 shares authorized; 77,517,097 and 77,114,633 shares issued and outstanding
        78,000                                                                                       
        accumulated other comprehensive income
        48,000 3,450,000              -1,449,000 1,700,000 3,596,000 3,150,000 5,886,000 2,479,000   -659,000 -2,180,000 159,000 -599,000 780,000 1,158,000 1,691,000 5,185,000 3,021,000 1,996,000 507,000   110,000           -249,000 305,000 28,000 587,000 1,715,000 2,800,000 2,321,000 2,041,000 2,700,000 2,983,000 2,811,000 2,290,000 2,161,000 1,574,000 1,149,000 1,720,000 1,058,000 851,000 163,000 320,000 1,445,000  577,000              68,000   9,000 
        current portion of term loan, net of unamortized issuance costs
         1,121,000 1,113,000  1,098,000 1,090,000 1,083,000  1,067,000 1,150,000 1,142,000                                                                             
        term loan, less current portion, net of unamortized issuance costs
         11,644,000 11,927,000  12,488,000 12,765,000 13,041,000  13,586,000 13,765,000 14,034,000            13,642,000                                                                 
        250,000,000 shares authorized; 77,111,430 and 77,114,633 shares issued and outstanding
         77,000                                                                                      
        250,000,000 shares authorized; 77,075,636 and 77,114,633 shares issued and outstanding
          77,000                                                                                     
        term loan, less current portion, net of unamortized issuance cost of 49 and 55
           12,208,000                                                                                    
        250,000,000 shares authorized; 77,114,633 and 77,376,903 shares issued and outstanding
           77,000                                                                                    
        250,000,000 shares authorized; 77,447,989 and 77,376,903 shares issued and outstanding
            77,000                                                                                   
        250,000,000 shares authorized; 77,281,052 and 77,376,903 shares issued and outstanding
             77,000                                                                                  
        250,000,000 shares authorized; 77,241,118 and 77,376,903 shares issued and outstanding
              77,000                                                                                 
        property, plant and equipment
               204,399,000    189,848,000    146,555,000    104,103,000    58,747,000    54,054,000    46,754,000   45,153,000 42,663,000 42,678,000 43,791,000 23,707,000 23,853,000 23,821,000 24,485,000 25,077,000 25,498,000 26,610,000 29,210,000 30,049,000 35,190,000 36,945,000 39,630,000 42,054,000 45,515,000 32,912,000 34,225,000 34,376,000 35,132,000 34,872,000 35,078,000 36,053,000                             
        current portion of term loans, net of unamortized issuance cost of 5 and 5
               1,075,000    1,045,000    8,931,000                                                                        
        term loans, less current portion, net of unamortized issuance cost of 55 and 60
               13,314,000                                                                                
        250,000,000 shares authorized; 77,376,903 and 76,914,590 shares issued and outstanding
               77,000                                                                                
        assets held-for-sale
                33,718,000                                                                               
        liabilities held-for-sale
                8,521,000                                                                               
        250,000,000 shares authorized; 77,839,317 and 76,914,590 shares issued and outstanding
                78,000                                                                               
        accumulated deficit
                -24,515,000 -28,886,000 -29,714,000 -31,056,000 -17,329,000 -21,680,000 -51,922,000 -81,794,000 -107,691,000 -128,188,000 -146,093,000 -165,718,000 -184,991,000 -207,882,000 -228,351,000 -244,241,000 -262,877,000 -271,156,000 -278,104,000 -283,587,000 -368,687,000 -376,375,000 -385,498,000 -387,573,000 -393,161,000 -405,725,000 -423,301,000 -428,616,000 -413,172,000 -398,975,000 -435,859,000 -422,059,000 -421,440,000 -418,915,000 -419,753,000 -420,536,000 -418,665,000 -418,388,000 -414,062,000 -401,351,000 -382,562,000 -371,848,000 -363,441,000 -343,668,000 -344,270,000 -329,793,000 -325,576,000                              -806,000 -4,874,000 -7,379,000 
        250,000,000 shares authorized; 77,184,012 and 76,914,590 shares issued and outstanding
                 77,000                                                                              
        250,000,000 shares authorized; 77,142,023 and 76,914,590 shares issued and outstanding
                  77,000                                                                             
        term loans, less current portion, net of unamortized issuance cost of 60 and 65
                   14,389,000                                                                            
        250,000,000 shares authorized; 76,914,590 and 78,240,506 shares issued and outstanding
                   77,000                                                                            
        current portion of term loans, net of unamortized issuance costs
                    2,734,000 4,725,000 6,790,000  9,213,000 9,356,000 9,260,000  9,120,000 21,325,000 31,535,000                                                                 
        term loans, less current portion, net of unamortized issuance costs
                    14,653,000 14,915,000 15,175,000  17,742,000 20,123,000 22,390,000  26,874,000 28,725,000                                                                  
        250,000,000 shares authorized; 77,265,099 and 78,240,506 shares issued and outstanding
                    77,000                                                                           
        250,000,000 shares authorized; 77,194,733 and 78,240,506 shares issued and outstanding
                     77,000                                                                          
        250,000,000 shares authorized; 78,166,212 and 78,240,506 shares issued and outstanding
                      78,000                                                                         
        term loans, less current portion, net of unamortized issuance cost of 65 and 70
                       15,434,000                                                                        
        stockholders' equity:
                                                                                               
        250,000,000 shares authorized; 78,240,506 and 77,437,997 shares issued and outstanding
                       78,000                                                                        
        total stockholders' equity
                       815,780,000    744,084,000    640,997,000    580,164,000    458,637,000    401,056,000    294,681,000    289,436,000    294,086,000    339,258,000    346,652,000                                
        total liabilities and stockholders' equity
                       1,020,520,000    963,217,000    839,882,000    728,222,000    646,574,000    618,982,000    342,723,000    344,243,000    340,708,000    395,682,000    383,071,000                                
        250,000,000 shares authorized; 78,207,219 and 77,437,997 shares issued and outstanding
                        78,000                                                                       
        250,000,000 shares authorized; 77,454,800 and 77,437,997 shares issued and outstanding
                         77,000                                                                      
        250,000,000 shares authorized; 77,758,530 and 77,437,997 shares issued and outstanding
                          78,000                                                                     
        treasury stock
                          -5,738,000                                                                     
        current portion of term loans, net of unamortized issuance cost of 5 and 29
                           9,516,000                                                                    
        term loans, less current portion, net of unamortized issuance cost of 70 and 0
                           24,978,000                                                                    
        250,000,000 shares authorized; 77,437,997 and 75,764,990 shares issued and outstanding
                           78,000                                                                    
        250,000,000 shares authorized; 77,383,494 and 75,764,990 shares issued and outstanding
                            78,000                                                                   
        250,000,000 shares authorized; 76,501,459 and 75,764,990 shares issued and outstanding
                             77,000                                                                  
        250,000,000 shares authorized; 76,158,251 and 75,764,990 shares issued and outstanding
                              77,000                                                                 
        current portion of term loans, net of unamortized issuance cost of 29 and 160
                               42,846,000                                                                
        term loan, less current portion, net of unamortized issuance cost of 0 and 29
                               15,639,000  12,500,000                                                              
        250,000,000 shares authorized; 75,764,990 and 74,139,712 shares issued and outstanding
                               76,000                                                                
        refundable income taxes
                                478,000 524,000 1,261,000 1,260,000 1,320,000 1,328,000 2,307,000 2,242,000 1,837,000 1,092,000 1,105,000 1,391,000 1,391,000 1,517,000      782,000 782,000 782,000 782,000 782,000 792,000 1,568,000 5,414,000 5,667,000 3,000 3,000 905,000 910,000    417,000 425,000 318,000 18,130,000 14,791,000 10,328,000 27,179,000 18,231,000 9,207,000                    
        current portion of term loan, net of unamortized issuance cost of 57 and 160
                                46,193,000                                                               
        250,000,000 shares authorized; 75,696,234 and 74,139,712 shares issued and outstanding
                                76,000                                                               
        current portion of term loan, net of unamortized issuance cost of 93 and 160
                                 33,657,000                                                              
        250,000,000 shares authorized; 74,691,781 and 74,139,712 shares issued and outstanding
                                 75,000                                                              
        current portion of term loan, net of unamortized issuance cost of 128 and 160
                                  33,622,000                                                             
        term loan, less current portion, net of unamortized issuance cost of 10 and 29
                                  23,740,000                                                             
        250,000,000 shares authorized; 74,488,498 and 74,139,712 shares issued and outstanding
                                  74,000                                                             
        current portion of term loan, net of unamortized issuance cost of 160 and 307
                                   29,840,000                                                            
        term loan, less current portion, net of unamortized issuance cost of 29 and 272
                                   34,971,000                                                            
        deferred rent and other liabilities
                                   8,214,000 7,537,000 7,744,000 7,746,000 4,141,000 4,085,000 4,548,000 4,536,000 4,726,000 4,827,000 4,595,000 3,644,000 3,392,000 3,404,000 3,580,000 3,621,000 3,643,000 3,603,000 3,443,000 3,364,000 6,355,000 7,910,000 7,521,000 7,539,000 8,009,000 4,228,000 4,158,000 4,310,000 3,712,000 4,205,000 4,101,000 5,071,000 5,836,000 4,984,000 5,468,000 5,416,000 5,424,000 5,478,000 5,955,000 5,800,000 5,973,000     5,125,000    3,138,000           
        250,000,000 shares authorized; 74,139,712 and 72,532,176 shares issued and outstanding
                                   74,000                                                            
        current portion of term loan, net of unamortized issuance cost of 189 and 307
                                    26,061,000                                                           
        term loan, less current portion, net of unamortized issuance cost of 57 and 272
                                    46,193,000                                                           
        250,000,000 shares authorized; 74,101,623 and 72,532,176 shares issued and outstanding
                                    75,000                                                           
        current portion of term loan, net of unamortized issuance cost of 231and 307
                                     33,519,000                                                          
        term loan, less current portion, net of unamortized issuance cost of 113 and 272
                                     51,137,000                                                          
        250,000,000 shares authorized; 73,358,108 and 72,532,176 shares issued and outstanding
                                     74,000                                                          
        current portion of term loan, net of unamortized issuance cost of 270 and 307
                                      29,730,000                                                         
        term loan, less current portion, net of unamortized issuance cost of 185 and 272
                                      67,315,000                                                         
        250,000,000 shares authorized; 73,013,842 and 72,532,176 shares issued and outstanding
                                      74,000                                                         
        current portion of term loan, net of unamortized issuance cost of 307 and 424
                                       18,443,000                                                        
        income taxes payable
                                       807,000 589,000 167,000 50,000 442,000 86,000 1,662,000 153,000 110,000 166,000 180,000 158,000 68,000 625,000 493,000 532,000 172,000 568,000 446,000 268,000  434,000 278,000 181,000 100,000  382,000  53,000 272,000 173,000 105,000 190,000 349,000     40,000 5,316,000                 
        long-term income taxes payable
                                       1,028,000 1,076,000 1,046,000 1,290,000 1,315,000 1,277,000 1,240,000 1,026,000 1,069,000 1,034,000 902,000 1,025,000 1,094,000 2,208,000 2,318,000 2,473,000 2,497,000 2,453,000 2,786,000 2,803,000 3,028,000 1,355,000 1,337,000 4,100,000 4,112,000 4,155,000 4,209,000 4,243,000 6,423,000 6,423,000 6,423,000 6,334,000 6,153,000 8,429,000                       
        term loan, less current portion, net of unamortized issuance cost of 272 and 775
                                       87,228,000                                                        
        250,000,000 shares authorized; 72,532,176 and 70,907,847 shares issued and outstanding
                                       73,000                                                        
        current portion of term loan
                                        22,160,000 18,380,000 14,601,000 12,701,000 8,960,000 7,077,000                                                  
        term loan, less current portion
                                        92,123,000 104,506,000 116,872,000 125,475,000 137,777,000 141,417,000                                                  
        commitments and contingencies
                                                                                               
        250,000,000 shares authorized; 72,973,018 and 70,907,847 shares issued and outstanding
                                        73,000                                                       
        250,000,000 shares authorized; 72,346,116 and 70,907,847 shares issued and outstanding
                                         73,000                                                      
        10,000,000 shares authorized; no shares issued and outstanding at april 1, 2017 and december 31, 2016, respectively
                                                                                               
        250,000,000 shares authorized; 71,672,152 and 70,907,847 shares issued and outstanding at april 1, 2017 and december 31, 2016, respectively
                                          72,000                                                     
        10,000,000 shares authorized; no shares issued and outstanding at december 31, 2016 and december 26, 2015
                                                                                               
        250,000,000 shares authorized; 70,907,847 and 58,088,969 shares issued and outstanding at december 31, 2016 and december 26, 2015, respectively
                                           71,000                                                    
        10,000,000 shares authorized; no shares issued and outstanding at september 24, 2016 and december 26, 2015, respectively
                                                                                               
        250,000,000 shares authorized; 70,724,569 and 58,088,969 shares issued and outstanding at september 24, 2016 and december 26, 2015, respectively
                                            71,000                                                   
        10,000,000 shares authorized; no shares issued and outstanding at june 25, 2016 and december 26, 2015, respectively
                                                                                               
        250,000,000 shares authorized; 70,259,092 and 58,088,969 shares issued and outstanding at june 25, 2016 and december 26, 2015, respectively
                                             70,000                                                  
        10,000,000 shares authorized; no shares issued and outstanding at march 26, 2016 and december 26, 2015, respectively
                                                                                               
        250,000,000 shares authorized; 58,912,756 and 58,088,969 shares issued and outstanding at march 26, 2016 and december 26, 2015, respectively
                                              59,000                                                 
        10,000,000 shares authorized; no shares issued and outstanding at december 26, 2015 and december 27, 2014
                                                                                               
        250,000,000 shares authorized; 58,088,969 and 56,518,428 shares issued and outstanding at december 26, 2015 and december 27, 2014, respectively
                                               58,000                                                
        10,000,000 shares authorized; no shares issued and outstanding at september 26, 2015 and december 27, 2014, respectively
                                                                                               
        250,000,000 shares authorized; 58,160,215 and 56,518,428 shares issued and outstanding at september 26, 2015 and december 27, 2014, respectively
                                                58,000                                               
        10,000,000 shares authorized; no shares issued and outstanding at june 27, 2015 and december 27, 2014, respectively
                                                                                               
        250,000,000 shares authorized; 58,368,157 and 56,518,428 shares issued and outstanding at june 27, 2015 and december 27, 2014, respectively
                                                 58,000                                              
        10,000,000 shares authorized; no shares issued and outstanding at march 28, 2015 and december 27, 2014, respectively
                                                                                               
        250,000,000 shares authorized; 57,582,427 and 56,518,428 shares issued and outstanding at march 28, 2015 and december 27, 2014, respectively
                                                  58,000                                             
        capital leases, current portion
                                                      140,000 270,000 400,000 503,000 491,000 573,000                                    
        10,000,000 shares authorized; no shares issued and outstanding at december 27, 2014 and december 28, 2013
                                                                                               
        250,000,000 shares authorized; 56,518,428 and 54,649,600 shares issued and outstanding at december 27, 2014 and december 28, 2013, respectively
                                                   57,000                                            
        10,000,000 shares authorized; no shares issued and outstanding at september 27, 2014 and december 28, 2013, respectively
                                                                                               
        250,000,000 shares authorized; 56,411,839 and 54,649,600 shares issued and outstanding at september 27, 2014 and december 28, 2013, respectively
                                                    56,000                                           
        10,000,000 shares authorized; no shares issued and outstanding at june 28, 2014 and december 28, 2013, respectively
                                                                                               
        250,000,000 shares authorized; 56,112,677 and 54,649,600 shares issued and outstanding at june 28, 2014 and december 28, 2013, respectively
                                                     56,000                                          
        accumulated other comprehensive gain
                                                     213,000                                          
        10,000,000 shares authorized; no shares issued and outstanding at march 29, 2014 and december 28, 2013, respectively
                                                                                               
        250,000,000 shares authorized; 55,383,795 and 54,649,600 shares issued and outstanding at march 29, 2014 and december 28, 2013, respectively
                                                      55,000                                         
        capital leases, less current portion
                                                                                               
        10,000,000 shares authorized; no shares issued and outstanding at december 28, 2013 and december 29, 2012
                                                                                               
        250,000,000 shares authorized; 54,649,600 and 53,286,703 shares issued and outstanding at december 28, 2013 and december 29, 2012, respectively
                                                       55,000                                        
        capital leases, net of current portion
                                                         39,000 205,000 340,000                                    
        10,000,000 shares authorized; no shares issued and outstanding at september 28, 2013 and december 29, 2012, respectively
                                                                                               
        250,000,000 shares authorized; 54,552,657 and 53,286,703 shares issued and outstanding at september 28, 2013 and december 29, 2012, respectively
                                                        55,000                                       
        10,000,000 shares authorized; no shares issued and outstanding at june 29, 2013 and december 29, 2012, respectively
                                                                                               
        250,000,000 shares authorized; 54,237,172 and 53,286,703 shares issued and outstanding at june 29, 2013 and december 29, 2012, respectively
                                                         55,000                                      
        10,000,000 shares authorized; no shares issued and outstanding at march 30,2013 and december 29, 2012, respectively
                                                                                               
        250,000,000 shares authorized; 53,941,978 and 53,286,703 shares issued and outstanding at march 30, 2013 and december 29,2012, respectively
                                                          55,000                                     
        10,000,000 shares authorized; no shares issued and outstanding at december 29, 2012 and december 31, 2011, respectively
                                                                                               
        250,000,000 shares authorized; 53,286,703 and 49,268,479 shares issued and outstanding at december 29, 2012 and december 31, 2011, respectively
                                                           54,000                                    
        10,000,000 shares authorized; no shares issued and outstanding at september 29, 2012 and december 31, 2011, respectively
                                                                                               
        250,000,000 shares authorized; 50,248,434 and 49,268,479 shares issued and outstanding at september 29, 2012 and december 31, 2011, respectively
                                                            51,000                                   
        10,000,000 shares authorized; no shares issued and outstanding at june 30, 2012 and december 31, 2011, respectively
                                                                                               
        250,000,000 shares authorized; 49,987,469 and 49,268,479 shares issued and outstanding at june 30, 2012 and december 31, 2011, respectively
                                                             51,000                                  
        10,000,000 shares authorized; no shares issued and outstanding at march 31, 2012 and december 31, 2011, respectively
                                                                                               
        250,000,000 shares authorized; 49,610,899 and 49,268,479 shares issued and outstanding at march 31, 2012 and december 31, 2011, respectively
                                                              51,000                                 
        10,000,000 shares authorized; no shares issued and outstanding at december 31, 2011 and december 25, 2010, respectively
                                                                                               
        250,000,000 shares authorized; 49,268,479 and 50,587,917 shares issued and outstanding at december 31, 2011 and december 25, 2010, respectively
                                                               50,000                                
        retained earnings
                                                               -308,122,000         63,856,000 131,758,000 145,799,000 164,458,000  168,068,000 146,582,000 127,932,000 113,100,000 94,180,000 78,361,000 63,080,000 52,312,000 41,831,000 32,053,000 27,041,000 22,130,000 16,308,000 8,811,000 4,370,000    
        10,000,000 shares authorized; no shares issued and outstanding at september 24, 2011 and december 25, 2010, respectively
                                                                                               
        250,000,000 shares authorized; 50,460,810 and 50,587,917 shares issued and outstanding at september 24, 2011 and december 25, 2010, respectively
                                                                52,000                               
        10,000,000 shares authorized; no shares issued and outstanding at june 25, 2011 and december 25, 2010, respectively
                                                                                               
        250,000,000 shares authorized; 50,849,589 and 50,587,917 shares issued and outstanding at june 25, 2011 and december 25, 2010, respectively
                                                                 52,000                              
        10,000,000 shares authorized; no shares issued and outstanding at march 26, 2011 and december 25, 2010, respectively
                                                                                               
        250,000,000 shares authorized; 50,646,409 and 50,587,917 shares issued and outstanding at march 26, 2011 and december 25, 2010, respectively
                                                                  52,000                             
        property and equipment
                                                                   35,172,000 96,904,000 97,108,000 96,998,000 100,898,000 107,482,000 121,382,000 126,205,000 126,222,000  118,975,000 112,352,000 103,767,000 94,064,000 87,398,000 88,586,000 84,728,000 81,588,000 75,379,000 67,848,000 63,708,000 59,356,000 47,184,000 38,315,000 27,374,000 20,495,000 18,467,000 16,040,000 
        deferred tax liability
                                                                   2,134,000 2,134,000 2,134,000                          
        stockholders’ equity
                                                                                               
        10,000,000 shares authorized; no shares issued and outstanding at september 25, 2010 and december 26, 2009, respectively
                                                                                               
        250,000,000 shares authorized; 50,551,828 and 49,762,008 shares issued and outstanding at september 25, 2010 and december 26, 2009, respectively
                                                                   52,000                            
        10,000,000 shares authorized; no shares issued and outstanding at june 26, 2010 and december 26, 2009, respectively
                                                                                               
        250,000,000 shares authorized; 50,258,462 and 49,762,008 shares issued and outstanding at june 26, 2010 and december 26, 2009, respectively
                                                                    51,000                           
        10,000,000 shares authorized; no shares issued and outstanding at march 27, 2010 and december 26, 2009, respectively
                                                                                               
        250,000,000 shares authorized; 49,996,082 and 49,762,008 shares issued and outstanding at march 27, 2010 and december 26, 2009, respectively
                                                                     51,000                          
        deferred rent
                                                                      458,000 455,000 453,000 455,000 458,000 460,000  471,000 447,000 447,000 448,000 353,000 313,000 313,000 313,000 3,047,000 2,402,000 2,423,000 2,185,000       
        10,000,000 shares authorized; no shares issued and outstanding at september 26, 2009 and december 27, 2008, respectively
                                                                                               
        250,000,000 shares authorized; 49,752,366 and 49,062,308 shares issued and outstanding at september 26, 2009 and december 27, 2008, respectively
                                                                      50,000                         
        10,000,000 shares authorized; no shares issued and outstanding at june 27, 2009 and december 27, 2008, respectively
                                                                                               
        250,000,000 shares authorized; 49,467,371 and 49,062,308 shares issued and outstanding at june 27, 2009 and december 27, 2008, respectively
                                                                       49,000                        
        10,000,000 shares authorized; no shares issued and outstanding at march 28, 2009 and december 27, 2008, respectively
                                                                                               
        250,000,000 shares authorized; 49,333,595 and 49,062,308 shares issued and outstanding at march 28, 2008 and december 27, 2008, respectively
                                                                        49,000                       
        income tax payable
                                                                         1,840,000 225,000 100,000    279,000 8,264,000 7,653,000 9,016,000 12,544,000 9,697,000           
        long-term income tax payable
                                                                         7,414,000 13,089,000                     
        10,000,000 shares authorized; no shares issued and outstanding at september 27, 2008 and december 29, 2007, respectively
                                                                                               
        250,000,000 shares authorized; 49,062,308 and 48,642,258 shares issued and outstanding at september 27, 2008 and december 29, 2007, respectively
                                                                         49,000                      
        deferred revenue and customer advances
                                                                          7,807,000 5,674,000  6,674,000 6,371,000 8,485,000 7,273,000 6,556,000 5,186,000 4,562,000 3,588,000 16,000 2,924,000 2,662,000 2,770,000 1,402,000 1,564,000 1,278,000 1,005,000   
        10,000,000 shares authorized; no shares issued and outstanding at june 28, 2008 and december 29, 2007, respectively
                                                                                               
        250,000,000 shares authorized; 48,871,994 and 48,642,258 shares issued and outstanding at june 28, 2008 and december 29, 2007, respectively
                                                                          49,000                     
        total stockholders’ equity:
                                                                          736,069,000 748,486,000     617,612,000    317,789,000           
        long term tax payable
                                                                           12,658,000    9,780,000                
        10,000,000 shares authorized; no shares issued and outstanding at march 29, 2008 and december 29, 2007, respectively
                                                                                               
        250,000,000 shares authorized; 48,811,602 and 48,642,258 shares issued and outstanding at march 29, 2008 and december 29, 2007, respectively
                                                                           49,000                    
        stockholders' equity
                                                                                               
        long term income taxes payable
                                                                             10,991,000 11,239,000                 
        deferred rent and other long term liabilities
                                                                             5,934,000 5,435,000 5,176,000  4,559,000 3,652,000 3,668,000            
        10,000,000 shares authorized; no shares issued and outstanding at september 29, 2007 and december 30, 2006, respectively
                                                                                               
        250,000,000 shares authorized; 48,589,467 and 46,861,334 shares issued and outstanding at september 29, 2007 and december 30, 2006, respectively
                                                                             49,000                  
        10,000,000 shares authorized; no shares issued and outstanding at june 30, 2007 and december 30, 2006, respectively
                                                                                               
        250,000,000 shares authorized; 47,993,399 and 46,861,334 shares issued and outstanding at june 30, 2007 and december 30, 2006, respectively
                                                                              48,000                 
        10,000,000 shares authorized; no shares issued and outstanding at march 31, 2007 and december 30, 2006, respectively
                                                                                               
        250,000,000 shares authorized; 47,761,821 and 46,861,334 shares issued and outstanding at march 31, 2007 and december 30, 2006, respectively
                                                                               48,000                
        10,000,000 shares authorized; no shares issued and outstanding at december 30, 2006 and december 31, 2005, respectively
                                                                                               
        250,000,000 shares authorized; 46,861,334 and 40,236,686 shares issued and outstanding at december 30, 2006 and december 31, 2005, respectively
                                                                                47,000               
        deferred stock-based compensation
                                                                                    -2,495,000 -3,172,000 -4,200,000 -4,928,000 -5,413,000 -5,279,000 -6,131,000 -10,623,000 -11,249,000 -12,007,000 -12,514,000 
        10,000,000 shares authorized; no shares issued and outstanding at september 30, 2006 and december 31, 2005, respectively
                                                                                               
        250,000,000 shares authorized; 46,761,252 and 40,236,686 shares issued and outstanding at september 30, 2006 and december 31, 2005, respectively
                                                                                 47,000              
        authorized: 10,000,000 shares issued and outstanding: none at july 1, 2006 and december 31, 2005
                                                                                               
        authorized: 250,000,000 shares issued and outstanding: 46,032,874 shares at july 1, 2006 and 40,236,686 shares at december 31, 2005
                                                                                  47,000             
        authorized: 10,000,000 shares issued and outstanding: none in 2005 and 2004
                                                                                               
        authorized: 250,000,000 shares issued and outstanding: 40,236,686 shares in 2005 and 38,885,637 shares in 2004
                                                                                    40,000           
        deferred revenue and customer advances and other
                                                                                     4,132,000          
        notes receivable from stockholders
                                                                                            -661,000 -1,389,000 -1,426,000 
        liabilities, redeemable convertible preferred stock and stockholders’ equity
                                                                                               
        bank line of credit
                                                                                              1,375,000 
        notes payable, current portion
                                                                                               
        notes payable, less current portion
                                                                                               
        redeemable convertible preferred stock
                                                                                               
        authorized: 23,126,983 shares for 2002 and none in 2003
                                                                                               
        long-term marketable securities
                                                                                             17,943,000  
        preferred stock, 0.001 par value
                                                                                               
        short-term investments
                                                                                              3,855,000 
        deferred tax assets, current portion
                                                                                              2,571,000 
        deferred tax assets, less current portion
                                                                                              1,068,000 
        long term investments
                                                                                              2,944,000 
        current liabilities
                                                                                               
      Cashflow Statements:
      Quarterly
      Annual
        Unit: USD2026-03-28 2025-09-27 2025-06-28 2025-03-29 2024-12-28 2024-09-28 2024-06-29 2024-03-30 2023-12-30 2023-09-30 2023-07-01 2023-04-01 2022-12-31 2022-09-24 2022-06-25 2022-03-26 2021-12-25 2021-09-25 2021-06-26 2021-03-27 2020-12-26 2020-09-26 2020-06-27 2020-03-28 2019-12-28 2019-09-28 2019-06-29 2019-03-30 2018-12-29 2018-09-29 2018-06-30 2018-03-31 2017-12-30 2017-09-30 2017-07-01 2017-04-01 2016-12-31 2016-09-24 2016-06-25 2016-03-26 2015-12-26 2015-09-26 2015-06-27 2015-03-28 2014-12-27 2014-09-27 2014-06-28 2014-03-29 2013-12-28 2013-09-28 2013-06-29 2013-03-30 2012-12-29 2012-09-29 2012-06-30 2012-03-31 2011-12-31 2011-09-24 2011-06-25 2011-03-26 2010-09-25 2010-06-26 2010-03-27 2009-09-26 2009-06-27 2009-03-28 2008-09-27 2008-06-28 2008-03-29 2007-09-29 2007-06-30 2007-03-31 2006-12-30 2006-09-30 2006-07-01 2006-04-01 2005-12-31 2005-09-24 2005-06-25 2005-03-26 2004-12-25 2004-09-25 2004-06-26 2004-03-29 2004-03-27 2003-12-27 2003-09-27 
                                                                                               
          cash flows from operating activities:
                                                                                               
          net income
        20,384,000 15,656,000 9,086,000 6,401,000 9,705,000 18,736,000 19,392,000 21,781,000 75,846,000 4,371,000 828,000 1,342,000 -13,727,000 4,351,000 30,242,000 29,872,000 25,897,000 20,497,000 17,905,000 19,625,000 19,273,000 22,891,000 20,469,000 15,890,000 18,636,000 8,279,000 6,948,000 5,483,000 85,100,000 7,688,000 9,123,000 2,125,000 5,588,000 12,563,000 17,577,000 5,185,000  -14,197,000 36,884,000 -13,800,000   838,000 783,000                      -37,943,000 -14,041,000 -18,659,000 -17,961,000 25,057,000 18,650,000 14,832,000 18,920,000 15,819,000 15,281,000 10,768,000 10,481,000 9,778,000 5,012,000 4,911,000 5,822,000 7,497,000 6,683,000 5,176,000 5,176,000 4,068,000 2,505,000 
          adjustments to reconcile net income to net cash from operating activities:
                                                                                               
          depreciation and amortization
        9,172,000                                    13,224,000 23,164,000 5,171,000 5,239,000 5,896,000 5,967,000 6,024,000 5,884,000 6,336,000 7,970,000 8,054,000 8,131,000 7,055,000 7,282,000 7,165,000 7,407,000 8,905,000 2,577,000 2,576,000 2,843,000 2,245,000 2,775,000 2,883,000 2,935,000 7,836,000 8,222,000 8,662,000 8,215,000 7,876,000 8,113,000 8,287,000 7,949,000 7,827,000 6,954,000 6,470,000 6,146,000 6,174,000 5,483,000 5,753,000 4,683,000 4,329,000 4,420,000 4,363,000 3,401,000  1,670,000      
          reduction in the carrying amount of right-of-use assets
        1,566,000 1,635,000 1,790,000 1,803,000 1,674,000 1,934,000 1,780,000 1,415,000 1,833,000 1,642,000 2,224,000 1,690,000 2,253,000 1,486,000 1,922,000 2,492,000 1,760,000 1,760,000 1,841,000 1,811,000 1,661,000 1,875,000 908,000 1,511,000                                                                
          stock-based compensation expense
        8,063,000 9,516,000 9,391,000 9,796,000 10,213,000 8,936,000 10,209,000 10,405,000 9,283,000 10,839,000 9,204,000 9,290,000 9,464,000 7,995,000 6,358,000 7,520,000 7,799,000 7,920,000 6,588,000 7,077,000 7,056,000 5,509,000 5,642,000 5,623,000 6,088,000 6,504,000 5,289,000 5,295,000 5,406,000 4,537,000 4,128,000 3,756,000 5,060,000 4,587,000 3,390,000 3,302,000 3,245,000 3,202,000 1,541,000 2,734,000 3,060,000 3,100,000 2,506,000 2,909,000 3,256,000 3,934,000 3,519,000 2,570,000 2,999,000 2,958,000 3,132,000 3,035,000 3,560,000 2,968,000 3,478,000 3,043,000 4,188,000 3,340,000 2,352,000 3,969,000 4,219,000 3,894,000 5,258,000 4,503,000 7,122,000 4,787,000 5,094,000 6,694,000 6,117,000 5,857,000 6,424,000 7,679,000 6,223,000 5,976,000 4,667,000 4,372,000 570,000 1,505,000 752,000 754,000  609,000      
          deferred income tax benefit
        -1,136,000 6,490,000 -1,948,000 -691,000 689,000 -3,863,000 -8,888,000 -1,293,000  -2,644,000              -198,000                                                                
          provision for excess and obsolete inventories
        4,804,000 3,227,000 3,816,000 2,879,000 2,290,000 3,775,000 3,131,000 3,146,000   3,655,000 4,973,000 8,554,000 11,352,000 2,225,000 2,501,000 3,923,000 4,723,000 3,504,000 3,394,000 3,354,000 3,356,000 3,120,000 3,287,000 2,375,000 2,742,000 2,579,000 2,725,000 3,065,000 2,821,000 2,548,000 2,045,000 2,360,000 2,302,000 1,800,000 2,797,000 2,194,000 1,637,000 811,000 1,989,000 1,607,000 1,922,000 1,501,000 1,463,000 1,597,000 1,700,000 1,224,000 2,606,000 2,632,000 2,950,000 2,178,000 2,701,000  1,847,000 1,086,000 1,416,000 3,030,000 1,343,000 1,257,000 2,267,000 6,242,000 -688,000 1,200,000 -179,000   461,000 6,373,000 5,473,000  3,054,000 2,725,000 3,217,000 3,138,000 2,651,000 3,433,000 2,773,000 3,229,000 2,064,000 2,792,000        
          non-cash restructuring charges
        15,994,000 -41,000 58,000 2,102,000         -510,000 560,000 150,000 54,000                                                                       
          income from equity investment
        -1,517,000                                                                                       
          other adjustments to reconcile net income to net cash from operating activities
        25,000 685,000 -432,000 -1,024,000  -2,522,000 168,000 176,000  -426,000 1,668,000 133,000  3,923,000 -599,000 32,000  416,000 -929,000 2,140,000  -2,304,000                                                                  
          changes in assets and liabilities:
                                                                                               
          accounts receivable
        -7,014,000 -18,502,000 -15,863,000 6,293,000 11,379,000 -2,467,000 -17,299,000 6,466,000 -15,508,000 -966,000 9,096,000 -15,926,000 24,374,000 -3,876,000 4,564,000 966,000 -10,243,000 2,351,000 -4,770,000 3,576,000 -9,257,000 -5,652,000 3,561,000 7,803,000 -10,099,000 -13,597,000 10,372,000 13,805,000 -6,261,000 -4,239,000 -6,684,000 3,354,000 6,446,000 3,902,000 -12,111,000 -8,888,000 6,116,000 8,694,000 -22,917,000 1,260,000 -66,000 7,250,000 -3,095,000 4,172,000 1,969,000 -6,285,000 -4,852,000 -6,781,000 15,892,000 -7,327,000 -5,861,000 -4,806,000 9,373,000 10,922,000 -6,394,000 -8,743,000 16,350,000 -612,000 -4,273,000 5,338,000      4,020,000 5,451,000 11,656,000 12,282,000        -8,519,000 -2,072,000 -4,587,000 -3,788,000  527,000      
          inventories
        -7,428,000 -1,545,000 -2,171,000 -10,196,000 -686,000 6,896,000 -9,543,000 -4,926,000 -578,000 -3,030,000 -7,255,000 1,375,000 4,243,000 -755,000 -15,188,000 -17,080,000 -1,320,000 -9,947,000 -10,477,000 -9,911,000 -3,625,000 -7,477,000 -12,017,000 928,000 2,951,000 -5,672,000 -2,916,000 -8,658,000 508,000 -8,119,000 -6,279,000 -7,408,000 -1,365,000 -5,423,000 -5,502,000 -3,345,000 -3,000,000 -755,000 -2,228,000 -5,750,000 -1,830,000 -4,674,000 -1,178,000 -485,000 -1,250,000 -5,555,000 -1,954,000 -3,216,000 -1,233,000 811,000 -3,777,000 -3,781,000 5,279,000 -1,390,000 -1,441,000 -3,374,000                     -6,760,000 -4,877,000 -4,479,000 -1,914,000  -1,568,000      
          prepaid expenses and other current assets
        -5,743,000 1,190,000 -1,923,000 -3,794,000 802,000 -2,350,000 870,000 1,224,000 -1,296,000 -662,000 -2,108,000 1,009,000 -2,575,000 -3,311,000 1,439,000 -144,000 177,000 452,000 168,000 3,011,000 -588,000 -2,348,000 -3,031,000 -240,000 4,739,000 -3,637,000 -3,039,000 2,167,000 2,136,000 2,886,000 -4,513,000 -247,000 -270,000 -314,000 -1,614,000 3,068,000 -1,982,000 -2,536,000 -882,000 2,108,000 30,000 960,000 -1,565,000 748,000 265,000 -651,000 -108,000 -328,000 1,700,000 -1,637,000 3,202,000 292,000 43,000 894,000 -196,000 80,000  -2,144,000 2,089,000 2,579,000       -1,401,000 -846,000 2,757,000           -1,649,000        
          other assets
        32,000 -529,000 -9,000 469,000 -10,000 281,000 -3,000 17,000 -950,000 887,000 -28,000 -55,000 183,000 -77,000 33,000 -73,000 7,000 11,000 -294,000 -50,000 -40,000 -29,000 54,000 194,000 154,000 -23,000 -8,000 -564,000 10,000 34,000 1,000 662,000 -762,000 97,000 111,000 615,000 8,000 30,000 -286,000 -9,000 -54,000 313,000 9,000    -299,000 -16,000 -9,000 462,000 101,000    11,000 841,000 522,000 533,000    -15,000 6,000 6,383,000 606,000 114,000 110,000            -81,000     72,000 1,000 
          accounts payable
        7,525,000 -3,950,000 -886,000 10,535,000 545,000 -11,097,000 -2,631,000 4,948,000 845,000 -3,104,000 5,397,000 -1,819,000 -13,714,000 10,092,000 -2,629,000 10,150,000 -8,077,000 3,516,000 -7,750,000 5,722,000 -1,266,000 12,807,000 4,484,000 763,000 -10,101,000 21,189,000 -3,967,000 -7,148,000 -7,375,000 4,186,000 3,251,000 2,988,000 -2,299,000 -4,282,000 102,000 7,220,000 -7,448,000 -10,296,000 12,353,000 8,824,000 -3,278,000 191,000 5,998,000 -4,947,000 -1,843,000 3,598,000 1,782,000 618,000 -13,064,000 5,616,000 1,526,000 3,598,000 -7,354,000 -6,329,000 2,448,000 5,332,000 -8,327,000 1,806,000 -298,000 1,754,000  1,103,000 89,000       -2,013,000 1,412,000 8,213,000 2,782,000 2,023,000   6,456,000 814,000 531,000 -5,483,000  -1,309,000      
          accrued liabilities
        -5,264,000 3,413,000 3,517,000 -7,926,000 -3,693,000 -2,876,000 12,207,000 -1,963,000 2,844,000 5,338,000 -397,000 -10,209,000 -2,967,000 -9,137,000 7,222,000 -3,120,000 6,226,000 -6,716,000 12,497,000 -12,732,000 9,138,000 3,225,000 8,499,000 -6,970,000 8,373,000 -547,000 5,966,000 -6,275,000 3,164,000 -5,341,000 5,980,000 -9,521,000 1,858,000 -3,346,000 7,078,000 -4,780,000 1,278,000 -9,085,000 12,190,000 -3,597,000 2,573,000 -1,266,000 2,646,000 -4,286,000 2,281,000 1,984,000 3,288,000 212,000 -1,352,000 1,440,000 415,000 -2,977,000 -4,703,000 1,275,000 1,951,000 354,000     -7,378,000            -5,936,000 6,016,000 7,976,000 2,861,000 8,094,000 1,857,000 5,437,000 -1,718,000  1,738,000      
          other liabilities
        1,389,000 -1,891,000 1,775,000 712,000 503,000 2,015,000 6,231,000 1,085,000 4,193,000 11,000 137,000 319,000 -339,000 203,000 -14,000 87,000 238,000 -137,000 70,000 114,000 90,000 -20,000 259,000 33,000 -2,208,000 2,333,000 8,000 33,000                                                            
          deferred revenues
        5,981,000 5,055,000 1,753,000 -620,000 -5,184,000 2,943,000 441,000 4,499,000 2,739,000 -2,970,000 -3,899,000 -6,046,000 -2,490,000 1,049,000 -1,181,000 3,908,000 -26,000 478,000 3,933,000 -2,411,000 5,095,000 -49,000 3,978,000 -123,000 -495,000 1,409,000 285,000 1,931,000 247,000 -249,000 472,000 -444,000 -1,547,000 -2,854,000 2,861,000 1,510,000 253,000 66,000 -116,000 -486,000 -323,000 -1,551,000 -197,000 -342,000 838,000 -1,773,000 -154,000 363,000 94,000 823,000 -279,000 376,000 -231,000 -139,000 783,000 651,000 -1,162,000   136,000   701,000 229,000 865,000 3,956,000                      
          operating lease liabilities
        -1,872,000 -2,021,000 -2,002,000 -2,030,000 -1,975,000 -1,884,000 -1,887,000 -1,530,000 -1,861,000 -1,689,000 -2,344,000 -1,721,000 -2,190,000 -1,564,000 -1,827,000 -2,435,000 -1,788,000 -1,674,000 -2,035,000 -1,945,000 -1,819,000 -1,734,000 -1,171,000 -1,591,000 -1,340,000 -1,244,000 -726,000 -1,690,000                                                            
          net cash from operating activities
        44,961,000 26,991,000 18,893,000 23,539,000 35,913,000 26,731,000 21,878,000 33,012,000 9,250,000 20,571,000 22,472,000 12,309,000 20,738,000 24,247,000 42,646,000 44,155,000 38,927,000 34,282,000 33,799,000 32,356,000 45,047,000 41,762,000 43,108,000 39,339,000 37,670,000 28,002,000 34,738,000 20,638,000 22,562,000 16,080,000 20,736,000 9,322,000 26,455,000 17,587,000 24,478,000 17,803,000 14,935,000 6,078,000 -558,000 -3,032,000 6,921,000 7,531,000 14,281,000 7,389,000 12,244,000 5,936,000 6,355,000 -6,876,000 -3,248,000 3,041,000 4,072,000 -9,667,000 -10,708,000 -696,000 136,000 -14,960,000                6,036,000 46,530,000 17,508,000 33,845,000 7,490,000 15,631,000 11,494,000 12,566,000 -1,942,000  9,337,000      
          capital expenditures
        767,000 158,000 2,116,000 3,559,000 -1,244,000 -1,253,000 3,742,000 381,000 601,000 1,166,000 623,000 -304,000 -736,000 778,000 983,000 -33,000 1,502,000 496,000 273,000 -56,000                1,613,000 -344,000 2,212,000 -7,043,000 -9,155,000 -11,368,000 2,220,000  -2,729,000      
          free cash flows
        44,961,000 26,991,000 18,893,000 23,539,000 35,913,000 26,731,000 21,878,000 33,012,000 9,250,000 20,571,000 22,472,000 12,309,000 20,738,000 24,247,000 42,646,000 44,155,000 38,927,000 34,282,000 33,799,000 32,356,000 45,047,000 42,529,000 43,266,000 41,455,000 37,670,000 31,561,000 33,494,000 19,385,000 22,562,000 19,822,000 21,117,000 9,923,000 26,455,000 17,587,000 24,478,000 17,803,000 14,935,000 6,078,000 -558,000 -1,866,000 7,544,000 7,227,000 13,545,000 8,167,000 13,227,000 5,936,000 6,355,000 -6,876,000 -3,248,000 3,041,000 4,072,000 -9,700,000 -9,206,000 -200,000 409,000 -15,016,000                7,649,000 46,530,000 17,508,000 33,501,000 9,702,000 8,588,000 2,339,000 1,198,000 278,000  6,608,000      
          cash flows from investing activities:
                                                                                               
          acquisition of property, plant and equipment
        -15,192,000 -7,505,000 -66,256,000 -18,584,000 -7,663,000 -8,939,000 -8,398,000 -13,436,000 -9,933,000 -5,917,000 -20,476,000 -19,701,000 -26,230,000 -8,908,000 -14,510,000 -15,606,000 -15,143,000 -20,031,000 -17,852,000 -13,470,000 -13,978,000 -5,144,000 -24,693,000 -12,050,000 -6,605,000 -2,782,000 -5,432,000 -6,028,000 -7,543,000 -3,781,000 -4,714,000 -3,831,000 -3,838,000 -6,159,000 -4,294,000 -3,465,000 -3,304,000 -4,584,000 -2,522,000 -1,111,000 -1,996,000 -2,399,000 -2,802,000 -1,443,000 -1,131,000 -1,545,000 -1,356,000 -1,638,000 -1,167,000 -2,292,000 -2,346,000 -2,725,000 -1,830,000 -2,194,000 -2,124,000 -1,804,000                                
          proceeds from sale of assets
        76,000                                                                                       
          purchase of equity investment
         -67,156,000                                                                                    
          purchases of marketable securities
        -37,110,000 -21,555,000 -47,493,000 -26,330,000 -29,364,000 -31,203,000 -41,052,000 -37,472,000 -38,549,000 -30,263,000 -39,339,000 -27,311,000 -21,645,000 -27,905,000 -28,882,000 -23,462,000 -35,081,000 -43,712,000 -30,124,000 -41,062,000 -21,503,000 -9,995,000 -3,285,000 -16,441,000 -16,725,000 -38,826,000 -8,394,000 -12,382,000 -11,582,000 -8,269,000 -7,128,000 -3,587,000 -23,360,000 -12,683,000   -3,996,000 -6,591,000 -24,981,000 -17,492,000 -9,509,000 -14,252,000 -31,693,000 -22,127,000 -18,158,000 -33,883,000 -17,170,000 -12,506,000 -22,118,000 -47,813,000                                
          proceeds from maturities and sales of marketable securities
        28,819,000 35,778,000 35,093,000 27,410,000 29,699,000 25,450,000 43,000,000 25,813,000  34,650,000 24,890,000 33,473,000  26,140,000 27,480,000 17,990,000  28,580,000 28,085,000 14,610,000  14,920,000 12,401,000 23,009,000                                            78,558,000 222,583,000 30,773,000 45,094,000 42,624,000                
          net cash from investing activities
        -23,407,000 6,718,000 -78,553,000 -84,660,000 -7,328,000 -16,192,000 -6,140,000 -3,820,000 79,043,000 -1,530,000 -34,925,000 -13,539,000 -23,691,000 -10,902,000 -20,033,000 -21,078,000 -29,765,000 -35,163,000 -19,891,000 -39,922,000 -42,727,000 -35,218,000 -15,535,000 -5,442,000 -26,305,000 -27,577,000 -3,138,000 -9,332,000 -7,832,000 -6,501,000 -3,571,000 -3,391,000 -21,881,000 -15,824,000 -18,638,000 -3,330,000 -3,957,000 -6,894,000 -200,474,000 5,007,000 -1,718,000 -1,182,000 1,194,000 2,835,000 14,343,000 13,354,000 14,271,000 -4,629,000 3,710,000 -1,937,000 -23,995,000 14,472,000 -77,982,000 16,640,000 9,758,000 10,883,000 14,403,000 17,026,000 21,993,000 7,290,000 49,631,000      3,693,000 29,089,000 87,712,000        -10,059,000 -12,819,000 -18,027,000 -13,054,000 47,132,000 -19,624,000      
          cash flows from financing activities:
                                                                                               
          proceeds from issuances of common stock
        5,836,000 4,543,000 21,576,000 4,800,000 4,948,000 3,798,000 5,024,000 4,812,000 5,687,000 6,000 4,738,000 422,000 5,487,000 422,000 4,653,000 422,000 4,513,000 421,000 3,802,000 3,870,000 2,958,000 4,754,000 402,000 4,623,000 7,048,000 7,437,000 1,740,000 2,044,000 1,961,000 1,615,000 109,000 1,694,000 1,387,000 1,000 1,425,000                  1,791,000                      
          purchase of common stock through stock repurchase program
           -22,135,000 -16,091,000 -16,940,000 -2,937,000 -17,334,000     -8,850,000 -19,150,000 -44,931,000 -9,397,000 -87,000 -18,213,000 -5,738,000                                                                    
          tax withholdings related to net share settlements of equity awards
        -6,751,000 -4,990,000 -1,487,000 -2,132,000 -1,993,000 -14,421,000 -1,729,000 -1,840,000 -1,338,000 -8,893,000 -69,000 -387,000 -141,000 -11,321,000 -4,171,000 -72,000 -7,961,000 -7,382,000 -4,120,000 -1,141,000 -68,000 -11,582,000 -3,415,000 -385,000 -127,000 -5,741,000 -1,855,000 -302,000 -97,000 -3,241,000 -2,096,000 -357,000 -268,000 -2,156,000 -3,981,000 -480,000                                                    
          payments on term loan
        -281,000 -277,000 -276,000 -273,000 -272,000 -269,000 -268,000 -266,000                                                                                
          net cash from financing activities
        -1,196,000 -2,382,000 -4,214,000 -2,964,000 -18,356,000 -26,830,000 -4,934,000 -14,492,000 -21,403,000 -5,357,000   -10,968,000 -27,701,000 -51,247,000 -6,016,000 -10,330,000 -4,953,000 -28,148,000 -3,768,000 -1,965,000 -21,705,000 1,806,000 -9,071,000 12,398,000 -1,939,000 -13,105,000 -3,932,000 -7,597,000 -12,783,000 -14,596,000 -4,353,000 -16,623,000 -7,114,000 -13,082,000 -2,651,000 -7,010,000 169,000 148,494,000 1,961,000 -1,214,000 -1,873,000 -3,399,000 1,694,000 1,387,000 -139,000 1,294,000 -130,000 1,139,000 -10,000 1,000,000 -114,000 1,074,000 -3,000 1,182,000     2,099,000 -14,000 1,550,000 4,625,000 1,196,000 1,806,000 2,364,000 301,000 3,279,000   21,476,000 177,000 17,352,000 6,093,000 191,292,000 1,829,000 6,100,000 1,377,000 3,085,000  3,210,000      
          effect of exchange rate changes on cash, cash equivalents and restricted cash
        -957,000 -1,121,000 1,478,000 180,000 -3,512,000 2,829,000 -1,234,000 -1,592,000 675,000 -1,366,000 -1,682,000 -276,000 3,198,000 -2,238,000 -2,328,000 -1,142,000 -964,000 -658,000 -102,000 -1,456,000 2,500,000 679,000 271,000 312,000 -566,000 -440,000 486,000 -207,000 260,000 -458,000 -1,136,000 1,078,000                                                        
          net increase in cash, cash equivalents and restricted cash
        19,401,000 30,206,000 -62,396,000 -63,905,000 6,717,000 -13,462,000 9,570,000 13,108,000 67,565,000   2,872,000    15,919,000 -2,132,000 -6,492,000 -14,342,000 -12,790,000 2,855,000 -14,482,000 29,650,000 25,138,000 23,197,000 -1,954,000 18,981,000 7,167,000 7,393,000 -3,662,000 1,433,000 2,656,000                                                        
          cash, cash equivalents and restricted cash, beginning of year
        107,047,000 197,206,000                                                                                  
          cash, cash equivalents and restricted cash, end of period
        126,448,000 30,206,000 -62,396,000 133,301,000    194,381,000  12,318,000 -14,464,000 115,854,000  -16,594,000 -30,962,000 171,261,000  -6,492,000 -14,342,000 178,308,000  -14,482,000 29,650,000 173,075,000  -1,954,000 18,981,000 107,713,000  -3,662,000 1,433,000 95,382,000                                                        
          gain on sale of business and assets
                                                                                              
          loss from equity investment
         -1,168,000                                                                                      
          proceeds from sale of business and assets
                                                                                              
          purchase of promissory note receivable
                                                                                            
          purchase of common stock through stock repurchase program, including excise tax paid
         -1,658,000                                                                                      
          depreciation
          8,895,000 8,156,000 8,124,000 7,634,000 7,370,000 7,193,000 7,723,000 7,759,000 7,545,000 7,576,000 7,457,000 7,043,000 7,186,000 6,960,000 6,516,000 6,578,000 6,548,000 6,130,000 6,203,000 5,251,000 4,679,000 4,561,000 4,541,000 4,355,000 4,342,000 3,947,000 3,820,000 3,601,000 3,368,000 3,525,000 3,580,000 3,497,000 3,387,000 3,162,000                                                    
          amortization
          665,000 674,000 662,000 640,000 640,000 640,000 807,000 1,277,000 2,388,000 2,378,000 2,335,000 2,354,000 2,333,000 2,369,000 2,385,000 2,462,000 7,095,000 6,805,000 7,742,000 6,532,000 6,454,000 7,263,000 7,424,000 6,079,000 7,079,000 7,090,000 7,497,000 7,512,000 7,170,000 7,194,000 7,431,000 7,515,000 7,645,000 8,349,000                                                    
          gain on sale of business
            -310,000 -20,271,000                                                                                
          proceeds from sale of business
            310,000 21,275,000                                                                                
          amortization of discount on investments
                                -74,000 -111,000 -109,000 -71,000             -9,000   -1,000 9,000 31,000 51,000 117,000 156,000 162,000 131,000 14,000                                    
          acquired inventory step-up amortization
                                        85,000 5,000 289,000 190,000 2,986,000                                                   
          loss on disposal of long-lived assets
                               204,000 159,000 65,000 144,000 118,000 61,000 216,000 33,000 15,000                                                        
          foreign currency transaction losses
                                   121,000 -284,000            -84,000 -872,000   1,609,000 1,058,000 -4,000 -174,000 396,000 53,000 40,000 131,000 126,000 609,000 532,000      94,000 332,000                         
          other than temporary impairment on debt receivable
                                                                                               
          deferred grant
                18,000,000                                                                            
          acquisition of business, net of cash acquired
                            -16,881,000                                                                   
          cash, cash equivalents and restricted cash, end of year
                                                                                               
          the accompanying notes are an integral part of these consolidated financial statements.
                                                                                               
          cash, cash equivalents and restricted cash, beginning of period
               181,273,000  112,982,000  155,342,000  191,098,000  147,937,000  100,546,000  92,726,000                                                        
          deferred income tax provision
                                4,916,000    11,000 59,000  18,000 23,000 81,000 -1,271,000 112,000   -21,000   274,000 2,000   299,000 17,000 129,000  17,000          3,310,000                        
          gain on contingent consideration
                          892,000 -71,000                                                                  
          proceeds from maturities of marketable securities
                                  10,660,000 9,050,000 11,266,000 5,500,000 8,250,000 4,007,000 5,996,000    10,600,000 21,200,000 12,700,000 25,250,000 17,500,000 13,500,000 18,500,000 15,150,000 14,048,000 15,600,000 28,675,000 26,915,000 18,500,000 10,500,000 34,470,000 20,500,000 20,340,000 34,000,000 60,500,000 75,701,000 88,815,000 83,500,000 60,665,000 166,998,000 101,454,000 53,771,000 110,569,000 95,915,000 53,515,000         95,391,000 48,383,000  78,831,000 16,913,000 11,166,000  48,465,000      
          payment of contingent consideration
                                                                                             
          benefit from excess and obsolete inventories
                                                                         5,062,000                      
          acquisition of business
                     -229,000                                                                          
          principal repayments on term loans
                 -262,000 -260,000 -259,000  -2,042,000 -2,145,000 -2,234,000  -2,309,000 -2,364,000 -2,376,000  -14,776,000 -13,123,000 -13,199,000                                                                
          net decrease in cash, cash equivalents and restricted cash
                     -16,594,000                                                                          
          net cash from (used) in financing activities
                   4,378,000                                                                            
          loss on derivative instruments
                               676,000 -22,000 98,000 -25,000 59,000                                                            
          proceeds from sale of subsidiary
                                        20,000 19,000 15,000 14,000 14,000 14,000 10,000 9,000  9,000 5,000 30,000    27,000                                        
          proceeds from term loan
                                                                                               
          payment of term loan issuance costs
                                                                                               
          amortization of debt issuance costs
                               19,000 28,000 36,000 45,000 51,000 57,000 98,000 112,000 123,000 137,000 148,000 163,000 171,000 191,000                                                   
          proceeds from sale of a subsidiary
                             42,000 40,000  37,000 28,000 28,000  26,000 21,000 20,000                                                        
          payment of term loan debt issuance costs
                                                                                              
          proceeds from term loan debt
                                                                                            
          accretion of discount on investments
                               -28,000      -15,000 13,000 23,000  13,000    -3,000 -12,000 -16,000                                                
          proceeds from sale of property and property, plant and equipment
                                                                                               
          non-cash investing and financing activities:
                                                                                               
          change in accounts payable and accrued liabilities related to property, plant and equipment purchases
                             767,000 158,000 2,116,000  3,559,000 -1,244,000 -1,253,000  3,742,000 381,000 601,000                                                        
          operating lease, right-of-use assets obtained in exchange for lease obligations
                             1,121,000 -5,879,000 6,307,000  415,000 172,000 35,713,000                                                            
          supplemental disclosure of cash flow information:
                                                                                               
          cash paid for income taxes
                             3,342,000 1,714,000 2,419,000  1,175,000 618,000 1,082,000  1,331,000 411,000 771,000                                                        
          cash paid for interest
                             210,000 182,000 291,000  350,000 476,000 302,000  682,000 791,000 826,000                                                        
          foreign currency transaction gains
                               -266,000  237,000     452,000 -561,000 238,000 -514,000 -712,000 -729,000    -1,393,000    -192,000                                            
          benefit for doubtful accounts receivable
                                                                                               
          acquisition of frt gmbh, net of cash acquired
                                                                                               
          purchase and retirement of common stock
                                        -8,007,000 -831,000 -7,399,000 -2,733,000     -1,214,000 -3,488,000        -2,000 -3,000                                    
          amortization of operating lease, right-of-use assets
                                 1,301,000 1,343,000 1,277,000                                                            
          refundable income taxes
                                 45,000 738,000 -1,000 9,000 8,000 977,000 -52,000 27,000 -743,000 17,000 286,000    782,000     10,000 776,000 3,846,000 511,000 -879,000 897,000 -45,000     8,000 -109,000 26,458,000 -3,101,000 -4,238,000 18,921,000                      
          proceeds from sale of property, plant and equipment
                                                   294,000                                           
          principal repayments on term loan
                                 -11,250,000 -7,500,000  -12,500,000 -12,500,000 -8,750,000                                                        
          income tax payable
                                  896,000 943,000  33,000 548,000 -829,000  455,000 -133,000 -419,000  -1,552,000 1,000 -2,000  117,000 -102,000 21,000  20,000 -195,000 335,000                        8,220,000                
          impairment of long-lived assets
                                                  390,000 86,000 743,000 567,000 15,000 121,000 58,000 49,000 143,000 61,000 168,000 98,000 100,000 351,000                            
          provision for doubtful accounts receivable
                                                  2,000 -13,000                   109,000                        
          gain on derivative instruments
                                        8,000 6,000 41,000 -65,000                                                    
          income taxes payable
                                                          154,000 61,000 -766,000 158,000 -1,615,000 78,000              -3,387,000                  
          deferred rent and other liabilities
                                    664,000 -95,000 25,000 2,515,000 10,000 4,000 26,000 71,000 -167,000 178,000 -63,000 178,000 -27,000 -69,000 74,000 74,000 97,000 39,000 78,000 34,000 30,000 22,000 24,000 7,000 43,000 39,000 39,000 46,000                                
          acquisition of cascade microtech, net of cash acquired
                                            -12,815,000                                                  
          recovery of doubtful accounts receivable
                                              -34,000                                                
          loss on disposal off of long-lived assets
                                                                                               
          change in restricted cash
                                        -699,000 -1,000 331,000 121,000 -667,000 -109,000           -15,000 -103,000     -20,000                               
          payments on term loan debt
                                        -8,750,000 -8,750,000 -8,750,000 -6,875,000 -8,750,000                                                   
          effect of exchange rate changes on cash and cash equivalents
                                        150,000 617,000 622,000 1,207,000 -2,468,000 330,000 850,000 1,713,000 90,000 621,000 -981,000 135,000 -1,911,000 -1,272,000 173,000 214,000 -606,000 67,000 -288,000 -667,000 -1,015,000 221,000 -604,000 -618,000 -839,000 -351,000 192,000 373,000             -60,000 -66,000 63,000 22,000 126,000 28,000 -30,000 76,000 14,000 -7,000 -16,000 15,000 15,000 17,000 23,000 
          net increase in cash and cash equivalents
                                        -11,899,000 -4,734,000 -6,620,000 13,029,000 1,500,000 -317,000 -51,688,000 5,649,000 4,079,000 5,097,000 11,095,000 12,053,000 24,676,000   -9,997,000 -274,000 2,310,000 -20,221,000 5,138,000 -89,819,000 17,239,000 9,287,000 -3,513,000 -1,884,000 10,848,000         438,000 26,543,000 85,401,000    7,766,000 6,027,000 46,762,000 192,359,000    -11,835,000 72,060,000 -7,084,000      
          cash and cash equivalents, beginning of year
                                                   113,940,000    59,196,000                                       
          cash and cash equivalents, end of year
                                                                                               
          provision (recovery) of doubtful accounts receivable
                                                                                               
          loss on sale of long-lived assets
                                         48,000 31,000 22,000                                                    
          non-cash restructuring
                                              500,000 600,000 2,743,000        7,683,000   366,000                      
          cash and cash equivalents, beginning of period
                                         101,408,000  146,264,000         72,243,000  139,049,000  121,207,000 122,043,000 337,926,000                      
          cash and cash equivalents, end of period
                                         -4,734,000 -6,620,000 114,437,000  -317,000 -51,688,000 151,913,000  5,097,000 11,095,000 125,993,000  19,405,000 20,660,000 49,199,000  2,310,000 -20,221,000 77,381,000  17,239,000 9,287,000 135,536,000  10,848,000 13,943,000 116,142,000 29,478,000 -3,902,000 92,978,000 -33,186,000 -7,749,000 190,855,000                      
          payments of term loan debt issuance costs
                                                                                             
          net loss
                                                -619,000    -1,871,000 -277,000 -4,326,000 -12,711,000 -18,789,000 -10,714,000 -8,407,000 -19,773,000 603,000 -14,478,000 -4,217,000 -17,454,000 -26,975,000 -9,904,000 -7,678,000 -21,424,000 -95,827,000 -33,864,000 -38,184,000 -23,901,000                        
          adjustments to reconcile net loss to net cash from operating activities:
                                                                                               
          loss on disposal and write-off of long-lived assets
                                                    -51,000 39,000   11,000 36,000 170,000 148,000 6,000 3,000 32,000                                
          proceeds from sale of intellectual property and property, plant and equipment
                                                                                               
          payments made on capital leases
                                                    -140,000 -131,000 -130,000 -142,000 -114,000 -217,000                                    
          formfactor, inc.condensed consolidated statements of cash flows
                                                                                               
          fair value of stock issued in connection with the acquisition of cascade microtech
                                                                                               
          fair value of stock options and restricted stock-based awards assumed in connection with acquisition of cascade microtech
                                                                                               
          fair value of vested stock options and restricted stock-based awards paid in cash in connection with the acquisition of cascade microtech
                                                                                               
          changes in accounts payable and accrued liabilities related to property, plant and equipment purchases
                                               1,166,000 623,000 -304,000 -736,000 778,000 983,000       -33,000 1,502,000 496,000 273,000 -56,000                                
          income and property taxes paid (refunded)
                                               22,000     161,000                                           
          gain on sale of long-lived assets
                                                                                               
          supplemental cash flow disclosures:
                                                                                               
          provision (recovery) for doubtful accounts receivable
                                                    -4,000 5,000                                        
          loss on sale of subsidiary
                                                                                             
          proceeds (use of cash) from sale of subsidiary
                                                    30,000 31,000                                          
          proceeds from sale of marketable securities
                                                                                              
          (recovery) provision for doubtful accounts receivable
                                                                                               
          loss on disposal, write-off and sale of long-lived assets
                                                                                               
          proceeds from sale of intellectual property and plant and equipment
                                                                                               
          income and property taxes (refunded) paid
                                                 725,000                                              
          deferred income taxes
                                                   6,000                                            
          income and property taxes refunded
                                                   -945,000                                            
          gain on settlement of litigation
                                                                                               
          acquisition of microprobe, net of cash acquired
                                                                                               
          fair value of stock issued in connection with the microprobe acquisition
                                                                                               
          working capital adjustment
                                                                                               
          formfactor, inc. condensed consolidated statements of cash flows
                                                                                               
          net decrease in cash and cash equivalents
                                                                                               
          use of cash from sale of subsidiary
                                                        28,000 28,000                                      
          proceeds from sales of property, plant and equipment
                                                                18,000 15,000                            
          proceeds from sales of marketable securities
                                                                      12,293,000 16,150,000 2,755,000                      
          proceeds from issuances of common stock, net of issuance costs
                                                         1,281,000 106,000 1,220,000  1,074,000 -3,000 1,182,000                                
          changes in operating assets and liabilities:
                                                                                               
          provision for (recovery of) doubtful accounts receivable
                                                           -3,000 22,000 30,000                                
          income taxes paid
                                                           -912,000       -424,000 1,687,000                            
          amortization of investments
                                                              16,000 51,000 84,000 142,000 144,000 99,000 118,000                           
          write-down for excess and obsolete inventories
                                                                                               
          gain on release of secured borrowing
                                                                                               
          fair value of stock issued in connection with the acquisition of microprobe
                                                                                               
          income taxes paid (refunded)
                                                            801,000 2,000 -942,000 99,000 152,000      -25,820,000 585,000 815,000 -27,391,000                      
          amortization of discount (premium) on investments
                                                                                               
          excess tax benefits from equity based compensation plans
                                                                       71,000 422,000 15,000 139,000 101,000 26,000 2,016,000 341,000 5,129,000 -25,963,000 6,889,000 3,256,000 3,303,000            
          prepaids and other current assets
                                                                       -2,371,000 3,288,000 2,570,000                      
          payments made in connection with acquisition of assets
                                                                                               
          proceeds from secured borrowing
                                                                                               
          non-cash investing activities:
                                                                                               
          adjustments to reconcile net loss to net cash used in operating activities:
                                                                                               
          deferred rent
                                                                             382,000 59,000 43,000 584,000    258,000 645,000 -20,000 237,000        
          proceeds from issuances of common stock and awards, net of issuance costs
                                                                 1,936,000 42,000 1,534,000                            
          changes in accounts payable and accrued liabilities related to property and equipment purchases
                                                                 214,000 247,000 -653,000                            
          adjustments to reconcile net income to net cash used in operating activities:
                                                                                               
          benefit from doubtful accounts receivable
                                                                         5,245,000                      
          impairment of and loss on disposal of long-lived assets
                                                                                               
          acquisition of property and equipment
                                                                                    -7,043,000 -9,155,000 -9,542,000 -2,578,000 -14,320,000 -6,633,000 -15,214,000 -1,560,000 -1,560,000 -3,352,000 -3,689,000 
          proceeds from sales of property and equipment
                                                                                               
          advance payment for acquisition of assets
                                                                                               
          proceeds from issuances of common stock and awards
                                                                    2,099,000 -14,000 1,550,000 4,554,000                        
          purchases of property and equipment through accounts payable and accruals
                                                                    349,000 741,000 285,000 168,000 -2,932,000 -2,133,000                      
          income taxes refunded
                                                                    50,648,000                           
          loss on disposal and impairment of property and equipment
                                                                          143,000 839,000                   
          loss on disposal of property and equipment
                                                                      175,000 599,000 144,000       -1,000 348,000             
          release of restricted cash
                                                                                               
          net cash from (used in) investing activities
                                                                                               
          net cash from (used) in investing activities
                                                                                               
          deferred revenue
                                                                                               
          purchase of marketable securities
                                                                                    -94,793,000 -82,495,000 -25,398,000 -21,242,000  -61,797,000      
          proceeds from issuance of common stock
                                                                          2,225,000 200,000 3,253,000 12,794,000 3,765,000 16,347,000   2,837,000 187,989,000 1,829,000 6,100,000 1,377,000 3,085,000 5,883,000 3,210,000 727,000 4,013,000 4,013,000 56,644,000 199,000 
          cash and cash equivalents, beginning of the period
                                                                          315,232,000 284,131,000  31,217,000  34,836,000  116,305,000 116,305,000  
          cash and cash equivalents, end of the period
                                                                          438,000 26,543,000 400,633,000 -3,219,000 8,828,000 277,782,000  6,027,000 46,762,000 223,576,000  4,803,000 -4,114,000 23,001,000  -7,084,000 -25,922,000 99,232,000 99,232,000  -20,053,000 
          supplemental disclosure of significant non-cash investing activities:
                                                                                               
          purchases of property and equipment through accounts payable and accrued liabilities
                                                                          -2,247,000 -1,210,000 -7,943,000 6,988,000 -1,471,000 1,613,000   -344,000 2,212,000   -1,826,000 4,798,000    6,700,000 6,700,000   
          deferred revenues and customer advances
                                                                           2,134,000 132,000   1,213,000  1,058,000 936,000 974,000  1,149,000 202,000 -168,000        
          adjustments to reconcile net income to net cash from (used in) operating activities:
                                                                                               
          loss on disposal of equipment
                                                                             293,000 88,000 195,000                
          net cash provided by operating activities
                                                                                               
          net cash provided by (used in) investing activities
                                                                                               
          net cash provided by financing activities
                                                                                               
          tax benefits from employee stock option plans
                                                                                               
          provision for (reduction in) doubtful accounts receivable
                                                                                               
          restricted cash
                                                                                            -2,550,000 
          acquisition of intangible research and development asset
                                                                                               
          proceeds from issuance of common stock, net of issuance costs
                                                                                               
          repayment of notes receivable from stockholders
                                                                                        661,000 661,000 728,000  
          non-cash financing activities:
                                                                                               
          deferred stock-based compensation
                                                                                               
          adjustments to reconcile net income to net cash provided by operating activities:
                                                                                               
          increase in allowance for doubtful accounts
                                                                                     -44,000          
          tax benefit from employee stock option plans
                                                                                     2,403,000 1,293,000 683,000  642,000      
          proceeds from sales and maturities of marketable securities
                                                                                               
          change in accounts payable and accrued liabilities for purchase of property and equipment
                                                                                               
          interest income from stockholders’ notes receivable
                                                                                               
          repurchase of common stock
                                                                                             
          proceeds from issuance of bank line of credit
                                                                                             
          repayment of notes payable
                                                                                              
          repayment of bank line of credit
                                                                                              
          net increase (decrease) in cash and cash equivalents
                                                                                               
          repurchase of common stock in connection with cancellation of notes receivable from stockholders
                                                                                               
          conversion of redeemable convertible preferred stock and warrants to common stock
                                                                                               
          interest paid
                                                                                               
          deferred tax benefit
                                                                                               
          prepaid expenses and other assets
                                                                                     -3,131,000          
          acquisition of intangible asset
                                                                                     -400,000        
          purchases of property and equipment through accounts payable
                                                                                        -1,535,000 3,904,000      
          deferred tax provision
                                                                                               
          reduction in allowance for doubtful accounts
                                                                                              
          prepaid and other current assets
                                                                                         -1,318,000      
          repayment of notes payable and bank line of credit
                                                                                               
          deferred tax assets
                                                                                               
          proceeds from issuance of redeemable convertible preferred stock
                                                                                               
          proceeds from issuance of notes payable
                                                                                               
          common stock issued for notes receivable
                                                                                               
          purchase of investments
                                                                                               
          proceeds from maturities of investments
                                                                                               
          proceeds from payment of notes receivable from stockholders